Low Noise Readout Circuit For Automotive Mems Accelerometers

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MEMS Silicon Oscillating Accelerometers and Readout Circuits

Author : Yong Ping Xu
Publisher : CRC Press
Page : 312 pages
File Size : 50,9 Mb
Release : 2022-09-01
Category : Technology & Engineering
ISBN : 9781000793734

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MEMS Silicon Oscillating Accelerometers and Readout Circuits by Yong Ping Xu Pdf

Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output. MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic.

Mems Silicon Oscillating Accelerometers and Readout Circuits

Author : Yong Ping Xu
Publisher : River Publishers
Page : 0 pages
File Size : 49,8 Mb
Release : 2023-05-31
Category : Electronic
ISBN : 877022966X

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Mems Silicon Oscillating Accelerometers and Readout Circuits by Yong Ping Xu Pdf

Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output. MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic.

MEMS Accelerometers

Author : Mahmoud Rasras,Ibrahim (Abe) M. Elfadel,Ha Duong Ngo
Publisher : MDPI
Page : 252 pages
File Size : 55,5 Mb
Release : 2019-05-27
Category : Technology & Engineering
ISBN : 9783038974147

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MEMS Accelerometers by Mahmoud Rasras,Ibrahim (Abe) M. Elfadel,Ha Duong Ngo Pdf

Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc. This Special Issue on "MEMS Accelerometers" seeks to highlight research papers, short communications, and review articles that focus on: Novel designs, fabrication platforms, characterization, optimization, and modeling of MEMS accelerometers. Alternative transduction techniques with special emphasis on opto-mechanical sensing. Novel applications employing MEMS accelerometers for consumer electronics, industries, medicine, entertainment, navigation, etc. Multi-physics design tools and methodologies, including MEMS-electronics co-design. Novel accelerometer technologies and 9DoF IMU integration. Multi-accelerometer platforms and their data fusion.

Wideband Continuous-time ΣΔ ADCs, Automotive Electronics, and Power Management

Author : Andrea Baschirotto,Pieter Harpe,Kofi A. A. Makinwa
Publisher : Springer
Page : 352 pages
File Size : 44,6 Mb
Release : 2016-08-12
Category : Technology & Engineering
ISBN : 9783319416700

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Wideband Continuous-time ΣΔ ADCs, Automotive Electronics, and Power Management by Andrea Baschirotto,Pieter Harpe,Kofi A. A. Makinwa Pdf

This book is based on the 18 tutorials presented during the 25th workshop on Advances in Analog Circuit Design. Expert designers present readers with information about a variety of topics at the frontier of analog circuit design, including low-power and energy-efficient analog electronics, with specific contributions focusing on the design of continuous-time sigma-delta modulators, automotive electronics, and power management. This book serves as a valuable reference to the state-of-the-art, for anyone involved in analog circuit research and development.

MEMS Accelerometers

Author : Ibrahim (Abe) M. Elfadel,Ha Duong Ngo,Mahmoud Rasras
Publisher : Unknown
Page : 1 pages
File Size : 40,9 Mb
Release : 2019
Category : Electronic books
ISBN : 3038974153

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MEMS Accelerometers by Ibrahim (Abe) M. Elfadel,Ha Duong Ngo,Mahmoud Rasras Pdf

Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc. This Special Issue on "MEMS Accelerometers" seeks to highlight research papers, short communications, and review articles that focus on: Novel designs, fabrication platforms, characterization, optimization, and modeling of MEMS accelerometers. Alternative transduction techniques with special emphasis on opto-mechanical sensing. Novel applications employing MEMS accelerometers for consumer electronics, industries, medicine, entertainment, navigation, etc. Multi-physics design tools and methodologies, including MEMS-electronics co-design. Novel accelerometer technologies and 9DoF IMU integration. Multi-accelerometer platforms and their data fusion.

Circuits at the Nanoscale

Author : Krzysztof Iniewski
Publisher : CRC Press
Page : 602 pages
File Size : 50,5 Mb
Release : 2018-10-08
Category : Technology & Engineering
ISBN : 9781420070637

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Circuits at the Nanoscale by Krzysztof Iniewski Pdf

Circuits for Emerging Technologies Beyond CMOS New exciting opportunities are abounding in the field of body area networks, wireless communications, data networking, and optical imaging. In response to these developments, top-notch international experts in industry and academia present Circuits at the Nanoscale: Communications, Imaging, and Sensing. This volume, unique in both its scope and its focus, addresses the state-of-the-art in integrated circuit design in the context of emerging systems. A must for anyone serious about circuit design for future technologies, this book discusses emerging materials that can take system performance beyond standard CMOS. These include Silicon on Insulator (SOI), Silicon Germanium (SiGe), and Indium Phosphide (InP). Three-dimensional CMOS integration and co-integration with Microelectromechanical (MEMS) technology and radiation sensors are described as well. Topics in the book are divided into comprehensive sections on emerging design techniques, mixed-signal CMOS circuits, circuits for communications, and circuits for imaging and sensing. Dr. Krzysztof Iniewski is a director at CMOS Emerging Technologies, Inc., a consulting company in Vancouver, British Columbia. His current research interests are in VLSI ciruits for medical applications. He has published over 100 research papers in international journals and conferences, and he holds 18 international patents granted in the United States, Canada, France, Germany, and Japan. In this volume, he has assembled the contributions of over 60 world-reknown experts who are at the top of their field in the world of circuit design, advancing the bank of knowledge for all who work in this exciting and burgeoning area.

Analysis and Design Principles of MEMS Devices

Author : Minhang Bao
Publisher : Elsevier
Page : 328 pages
File Size : 44,9 Mb
Release : 2005-04-12
Category : Technology & Engineering
ISBN : 008045562X

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Analysis and Design Principles of MEMS Devices by Minhang Bao Pdf

Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book.

CMOS - MEMS

Author : Henry Baltes,Oliver Brand,Gary K. Fedder,Christofer Hierold,Jan G. Korvink,Osamu Tabata
Publisher : John Wiley & Sons
Page : 612 pages
File Size : 49,9 Mb
Release : 2008-07-11
Category : Technology & Engineering
ISBN : 9783527616930

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CMOS - MEMS by Henry Baltes,Oliver Brand,Gary K. Fedder,Christofer Hierold,Jan G. Korvink,Osamu Tabata Pdf

Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind controls shape and function from the atomic level right up to the visible world without any gaps. Sensor systems, microreactors, nanostructures, nanomachines, functional surfaces, integrated optics, displays, communications technology, biochips, human/machine interfaces, prosthetics, miniaturized medical and surgery equipment and many more opportunities are being explored. This new series, Advanced Micro and Nano Systems, provides cutting-edge reviews from top authors on technologies, devices and advanced systems from the micro and nano worlds.

Capacitive Sensors

Author : Larry K. Baxter
Publisher : John Wiley & Sons
Page : 324 pages
File Size : 51,9 Mb
Release : 1996-09-03
Category : Technology & Engineering
ISBN : 078035351X

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Capacitive Sensors by Larry K. Baxter Pdf

Capacitive sensors produce spectacular resolution of movement to one part in 10-10 meters and maintain exceptional long-term stability in hostile environments. They are increasingly used for a variety of jobs in consumer and industrial equipment, including wall stud sensors, keypads, lamp dimmers, micrometers, calipers, rotation encoders, and more. The most focused, authoritative book available in the field, Capacitive Sensors brings you complete information on the research, design, and production of capacitive sensors. This all-in-one source provides detailed, comprehensive coverage of key topics, including underlying theory, electrode configuration, and practical circuits. In addition, you'll find reviews of a number of tested systems never before published. Capacitive Sensors is a must-have for product designers and mechanical and electrical engineers interested in using this fast-developing technology to get top price and performance advantages.

Vehicle Sensors, Actuators, and Diagnostics

Author : Anonim
Publisher : SAE International
Page : 146 pages
File Size : 41,6 Mb
Release : 2004
Category : Technology & Engineering
ISBN : UVA:X004773227

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Vehicle Sensors, Actuators, and Diagnostics by Anonim Pdf

Electronics for Sensors

Author : Giuseppe Ferri,Gianluca Barile,Alfiero Leoni
Publisher : MDPI
Page : 272 pages
File Size : 43,6 Mb
Release : 2021-08-16
Category : Technology & Engineering
ISBN : 9783036512402

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Electronics for Sensors by Giuseppe Ferri,Gianluca Barile,Alfiero Leoni Pdf

The aim of this Special Issue is to explore new advanced solutions in electronic systems and interfaces to be employed in sensors, describing best practices, implementations, and applications. The selected papers in particular concern photomultiplier tubes (PMTs) and silicon photomultipliers (SiPMs) interfaces and applications, techniques for monitoring radiation levels, electronics for biomedical applications, design and applications of time-to-digital converters, interfaces for image sensors, and general-purpose theory and topologies for electronic interfaces.

3D and Circuit Integration of MEMS

Author : Masayoshi Esashi
Publisher : John Wiley & Sons
Page : 44 pages
File Size : 55,7 Mb
Release : 2021-07-19
Category : Technology & Engineering
ISBN : 9783527346479

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3D and Circuit Integration of MEMS by Masayoshi Esashi Pdf

3D and Circuit Integration of MEMS Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building blocks for the “More-Than-Moore” paradigm described in the International Technology Roadmap for Semiconductors. And, in 3D and Circuit Integration of MEMS, distinguished editor Dr. Masayoshi Esashi delivers a comprehensive and systematic exploration of the technologies for microsystem packaging and heterogeneous integration. The book focuses on the silicon MEMS that have been used extensively and the technologies surrounding system integration. You’ll learn about topics as varied as bulk micromachining, surface micromachining, CMOS-MEMS, wafer interconnection, wafer bonding, and sealing. Highly relevant for researchers involved in microsystem technologies, the book is also ideal for anyone working in the microsystems industry. It demonstrates the key technologies that will assist researchers and professionals deal with current and future application bottlenecks. Readers will also benefit from the inclusion of: A thorough introduction to enhanced bulk micromachining on MIS process, including pressure sensor fabrication and the extension of MIS process for various advanced MEMS devices An exploration of epitaxial poly Si surface micromachining, including process condition of epi-poly Si, and MEMS devices using epi-poly Si Practical discussions of Poly SiGe surface micromachining, including SiGe deposition and LP CVD polycrystalline SiGe A concise treatment of heterogeneously integrated aluminum nitride MEMS resonators and filters Perfect for materials scientists, electronics engineers, and electrical and mechanical engineers, 3D and Circuit Integration of MEMS will also earn a place in the libraries of semiconductor physicists seeking a one-stop reference for circuit integration and the practical application of microsystems.

ICMIT 2005

Author : Yunlong Wei
Publisher : SPIE-International Society for Optical Engineering
Page : 574 pages
File Size : 55,9 Mb
Release : 2005
Category : Technology & Engineering
ISBN : UOM:39015064780953

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ICMIT 2005 by Yunlong Wei Pdf

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.