Author : H. Schlüter,A. Shivarova
Publisher : Springer Science & Business Media
Page : 580 pages
File Size : 42,9 Mb
Release : 2013-06-29
Category : Science
ISBN : 9789401706339
Advanced Technologies Based on Wave and Beam Generated Plasmas by H. Schlüter,A. Shivarova Pdf
This book draws together three areas of work on plasma technologies: advanced efforts based on wave generated, high frequency plasmas, plasma assisted ion implantation, and electron beam generated plasma. It lays a foundation for the application of sources in industry and various research areas