Author : Ana Londergan
Publisher : The Electrochemical Society
Page : 300 pages
File Size : 55,5 Mb
Release : 2007
Category : Atomic layer deposition
ISBN : 9781566775427
Atomic Layer Deposition Applications 2 by Ana Londergan Pdf
This issue gives an overview of the cutting edge research in the various areas where Atomic Layer Deposition (ALD) can be used, enabling the identification of issues, challenges, and areas where further research is needed. Contributions include: Memory applications, Interconnects and contacts, ALD Productivity enhancement and precursor development, ALD for optical and photonic applications, and Applications in other areas, such as MEMs, nanotechnology, fabrication of sensors and catalysts, etc.