Chemistry In Microelectronics

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Chemistry in Microelectronics

Yannick Le Tiec

Author : Yannick Le Tiec
Publisher : John Wiley & Sons
Page : 261 pages
File Size : 45,7 Mb
Release : 2013-02-28
Category : Technology & Engineering
ISBN : 9781118578124

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Chemistry in Microelectronics by Yannick Le Tiec Pdf

Microelectronics is a complex world where many sciences need to collaborate to create nano-objects: we need expertise in electronics, microelectronics, physics, optics and mechanics also crossing into chemistry, electrochemistry, as well as biology, biochemistry and medicine. Chemistry is involved in many fields from materials, chemicals, gases, liquids or salts, the basics of reactions and equilibrium, to the optimized cleaning of surfaces and selective etching of specific layers. In addition, over recent decades, the size of the transistors has been drastically reduced while the functionality of circuits has increased. This book consists of five chapters covering the chemicals and sequences used in processing, from cleaning to etching, the role and impact of their purity, along with the materials used in “Front End Of the Line” which corresponds to the heart and performance of individual transistors, then moving on to the “Back End Of the Line” which is related to the interconnection of all the transistors. Finally, the need for specific functionalization also requires key knowledge on surface treatments and chemical management to allow new applications. Contents 1. Chemistry in the “Front End of the Line” (FEOL): Deposits, Gate Stacks, Epitaxy and Contacts, François Martin, Jean-Michel Hartmann, Véronique Carron and Yannick Le Tiec. 2. Chemistry in Interconnects, Vincent Jousseaume, Paul-Henri Haumesser, Carole Pernel, Jeffery Butterbaugh, Sylvain Maîtrejean and Didier Louis. 3. The Chemistry of Wet Surface Preparation: Cleaning, Etching and Drying, Yannick Le Tiec and Martin Knotter. 4. The Use and Management of Chemical Fluids in Microelectronics, Christiane Gottschalk, Kevin Mclaughlin, Julie Cren, Catherine Peyne and Patrick Valenti. 5. Surface Functionalization for Micro- and Nanosystems: Application to Biosensors, Antoine Hoang, Gilles Marchand, Guillaume Nonglaton, Isabelle Texier-Nogues and Francoise Vinet. About the Authors Yannick Le Tiec is a technical expert at CEA-Leti, Minatec since 2002. He is a CEA-Leti assignee at IBM, Albany (NY) to develop the advanced 14 nm CMOS node and the FDSOI technology. He held different technical positions from the advanced 300 mm SOI CMOS pilot line to different assignments within SOITEC for advanced wafer development and later within INES to optimize solar cell ramp-up and yield. He has been part of the ITRS Front End technical working group at ITRS since 2008.

Microelectronics Processing

Dennis W. Hess,Klavs F. Jensen

Author : Dennis W. Hess,Klavs F. Jensen
Publisher : Unknown
Page : 572 pages
File Size : 51,7 Mb
Release : 1989
Category : Language Arts & Disciplines
ISBN : UOM:39015046004340

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Microelectronics Processing by Dennis W. Hess,Klavs F. Jensen Pdf

Although chemical engineering principles are at the heart of solid state process technology, until now no reference volume addressing this relationship was available. This is the first book of its kind to tie fundamental engineering concepts to solid state process technology. Discussing the basic concepts involved--liquid-phase epitaxy, physical and chemical vapor deposition, diffusion and oxidation in silicon, resists in microlithography, etc.--this volume will be particularly useful in chemical engineering courses. It offers a framework within which specialized courses in microelectronics processing can be organized. In addition, it serves as a valuable reference source for all industrial engineers working with the individual process steps covered.

The Materials Science of Microelectronics

Klaus J. Bachmann

Author : Klaus J. Bachmann
Publisher : Wiley-VCH
Page : 541 pages
File Size : 51,6 Mb
Release : 1995-02-09
Category : Technology & Engineering
ISBN : 0471185442

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The Materials Science of Microelectronics by Klaus J. Bachmann Pdf

This book offers a concise account of the fundamental principle of solid state chemistry as they pertain the understanding of applications to modern solid state electronics. Coverage addresses a broad range of critical topis, including the relationship among symmetry, chemical bonding and bulk properties, VLSI and VHSIC technologies and solid state chemistry aspects of microelectronics, optical communications, integrated optics and photonics, and many others.

Microsystem Technology in Chemistry and Life Sciences

Andreas Manz,Holger Becker

Author : Andreas Manz,Holger Becker
Publisher : Springer Science & Business Media
Page : 253 pages
File Size : 54,5 Mb
Release : 2003-09-05
Category : Science
ISBN : 9783540695448

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Microsystem Technology in Chemistry and Life Sciences by Andreas Manz,Holger Becker Pdf

"WHAT DOES NOT NEED TO BE BIG, WILL BE SMALL", a word by an engineer at a recent conference on chips technology. This sentence is particularly true for chemistry. Microfabrication technology emerged from microelectronics into areas like mechanics and now chemistry and biology. The engineering of micron and submicron sized features on the surface of silicon, glass and polymers opens a whole new world. Micromotors smaller than human hair have been fabricated and they work fine. It is the declared goal of the authors to bring these different worlds together in this volume. Authors have been carefully chosen to guarantee for the quality of the contents. An engineer, a chemist or a biologist will find new impulses from the various chapters in this book.

Molecular-Scale Electronics

Xuefeng Guo

Author : Xuefeng Guo
Publisher : Springer
Page : 262 pages
File Size : 50,7 Mb
Release : 2018-12-06
Category : Technology & Engineering
ISBN : 9783030033057

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Molecular-Scale Electronics by Xuefeng Guo Pdf

The series Topics in Current Chemistry Collections presents critical reviews from the journal Topics in Current Chemistry organized in topical volumes. The scope of coverage is all areas of chemical science including the interfaces with related disciplines such as biology, medicine and materials science. The goal of each thematic volume is to give the non-specialist reader, whether in academia or industry, a comprehensive insight into an area where new research is emerging which is of interest to a larger scientific audience. Each review within the volume critically surveys one aspect of that topic and places it within the context of the volume as a whole. The most significant developments of the last 5 to 10 years are presented using selected examples to illustrate the principles discussed. The coverage is not intended to be an exhaustive summary of the field or include large quantities of data, but should rather be conceptual, concentrating on the methodological thinking that will allow the non-specialist reader to understand the information presented. Contributions also offer an outlook on potential future developments in the field.

Molecular and Nano Electronics: Analysis, Design and Simulation

Jorge M. Seminario

Author : Jorge M. Seminario
Publisher : Elsevier
Page : 292 pages
File Size : 40,7 Mb
Release : 2006-10-24
Category : Science
ISBN : 0080465838

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Molecular and Nano Electronics: Analysis, Design and Simulation by Jorge M. Seminario Pdf

The aim of Molecular and Nano Electronics: Analysis, Design and Simulation is to draw together contributions from some of the most active researchers in this new field in order to illustrate a theory guided-approach to the design of molecular and nano-electronics. The field of molecular and nano-electronics has driven solutions for a post microelectronics era, where microelectronics dominate through the use of silicon as the preferred material and photo-lithography as the fabrication technique to build binary devices (transistors). The construction of such devices yields gates that are able to perform Boolean operations and can be combined with computational systems, capable of storing, processing, and transmitting digital signals encoded as electron currents and charges. Since the invention of the integrated circuits, microelectronics has reached increasing performances by decreasing strategically the size of its devices and systems, an approach known as scaling-down, which simultaneously allow the devices to operate at higher speeds. * Provides a theory-guided approach to the design of molecular and nano-electronics * Includes solutions for researchers working in this area * Contributions from some of the most active researchers in the field of nano-electronics

Microelectronic Materials

C.R.M. Grovenor

Author : C.R.M. Grovenor
Publisher : Routledge
Page : 557 pages
File Size : 50,7 Mb
Release : 2017-10-05
Category : Science
ISBN : 9781351431545

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Microelectronic Materials by C.R.M. Grovenor Pdf

This practical book shows how an understanding of structure, thermodynamics, and electrical properties can explain some of the choices of materials used in microelectronics, and can assist in the design of new materials for specific applications. It emphasizes the importance of the phase chemistry of semiconductor and metal systems for ensuring the long-term stability of new devices. The book discusses single-crystal and polycrystalline silicon, aluminium- and gold-based metallisation schemes, packaging semiconductor devices, failure analysis, and the suitability of various materials for optoelectronic devices and solar cells. It has been designed for senior undergraduates, graduates, and researchers in physics, electronic engineering, and materials science.

Nano and Molecular Electronics Handbook

Sergey Edward Lyshevski

Author : Sergey Edward Lyshevski
Publisher : CRC Press
Page : 912 pages
File Size : 45,7 Mb
Release : 2018-10-03
Category : Technology & Engineering
ISBN : 9781420008142

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Nano and Molecular Electronics Handbook by Sergey Edward Lyshevski Pdf

There are fundamental and technological limits of conventional microfabrication and microelectronics. Scaling down conventional devices and attempts to develop novel topologies and architectures will soon be ineffective or unachievable at the device and system levels to ensure desired performance. Forward-looking experts continue to search for new paradigms to carry the field beyond the age of microelectronics, and molecular electronics is one of the most promising candidates. The Nano and Molecular Electronics Handbook surveys the current state of this exciting, emerging field and looks toward future developments and opportunities. Molecular and Nano Electronics Explained Explore the fundamentals of device physics, synthesis, and design of molecular processing platforms and molecular integrated circuits within three-dimensional topologies, organizations, and architectures as well as bottom-up fabrication utilizing quantum effects and unique phenomena. Technology in Progress Stay current with the latest results and practical solutions realized for nanoscale and molecular electronics as well as biomolecular electronics and memories. Learn design concepts, device-level modeling, simulation methods, and fabrication technologies used for today's applications and beyond. Reports from the Front Lines of Research Expert innovators discuss the results of cutting-edge research and provide informed and insightful commentary on where this new paradigm will lead. The Nano and Molecular Electronics Handbook ranks among the most complete and authoritative guides to the past, present, and future of this revolutionary area of theory and technology.

Methods and Materials in Microelectronic Technology

Joachim Bargon

Author : Joachim Bargon
Publisher : Springer
Page : 384 pages
File Size : 40,9 Mb
Release : 1984-11-30
Category : Science
ISBN : UOM:39015009846950

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Methods and Materials in Microelectronic Technology by Joachim Bargon Pdf

The papers collected in this volume were presented at the International Symposium on Methods and Materials in Microelectronic Technology. This symposium was sponsored by IBM Germany, and it was held September 29 - October 1, 1982, in Bad Neuenahr, West Germany. The progress of semiconductor and microelectronic technology has become so rapid and the field so sophisticated that it is imperative to exchange the latest insight gained as frequently as it can be accomplished. In addition, it is peculiar for this field that the bulk of the investigations are carried out at industrial research and development laboratories, which makes some of the results less readily accessible. Because of these circumstances, the academic community, which among other things, is supposed to communicate the prog ress in this field to students of different disciplines, finds it rather difficult to stay properly informed. It was the intent of this IBM sponsored symposium to bring together key scientists from academic institutions, primarily from Europe, with principal investigators of the industrial scene. Accordingly, this symposium exposed technologists to scientists and vice versa. Scientific advances often lead directly to technological innovations. In turn, new technologies are often arrived at empirically and, because of that, are initially poorly understood. Scientific inquiry then attempts to probe these processes and phenomena in order to achieve a better understanding. Thus science and technology are intricately interconnected, and it is important that technical exchange between technolo gists and scientists is facilitated, since the problems are typically interdiscipli nary in nature.

Microelectronics Processing

L. A. Casper

Author : L. A. Casper
Publisher : Unknown
Page : 464 pages
File Size : 46,8 Mb
Release : 1986
Category : Language Arts & Disciplines
ISBN : UOM:39015009821961

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Microelectronics Processing by L. A. Casper Pdf

Examines leading-edge developments in the field of materials development. Covers all major aspects of materials science, with applications to many high technology areas. Explores the role of chemistry in high-tech materials and their applications.

Chemical Mechanical Planarization of Microelectronic Materials

Joseph M. Steigerwald,Shyam P. Murarka,Ronald J. Gutmann

Author : Joseph M. Steigerwald,Shyam P. Murarka,Ronald J. Gutmann
Publisher : John Wiley & Sons
Page : 337 pages
File Size : 51,5 Mb
Release : 2008-09-26
Category : Science
ISBN : 9783527617753

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Chemical Mechanical Planarization of Microelectronic Materials by Joseph M. Steigerwald,Shyam P. Murarka,Ronald J. Gutmann Pdf

Chemical Mechanical Planarization (CMP) plays an important role in today's microelectronics industry. With its ability to achieve global planarization, its universality (material insensitivity), its applicability to multimaterial surfaces, and its relative cost-effectiveness, CMP is the ideal planarizing medium for the interlayered dielectrics and metal films used in silicon integrated circuit fabrication. But although the past decade has seen unprecedented research and development into CMP, there has been no single-source reference to this rapidly emerging technology-until now. Chemical Mechanical Planarization of Microelectronic Materials provides engineers and scientists working in the microelectronics industry with unified coverage of both the fundamental mechanisms and engineering applications of CMP. Authors Steigerwald, Murarka, and Gutmann-all leading CMP pioneers-provide a historical overview of CMP, explain the various chemical and mechanical concepts involved, describe CMP materials and processes, review the latest scientific data on CMP worldwide, and offer examples of its uses in the microelectronics industry. They provide detailed coverage of the CMP of various materials used in the making of microcircuitry: tungsten, aluminum, copper, polysilicon, and various dielectric materials, including polymers. The concluding chapter describes post-CMP cleaning techniques, and most chapters feature problem sets to assist readers in developing a more practical understanding of CMP. The only comprehensive reference to one of the fastest growing integrated circuit manufacturing technologies, Chemical Mechanical Planarization of Microelectronic Materials is an important resource for research scientists and engineers working in the microelectronics industry. An indispensable resource for scientists and engineers working in the microelectronics industry Chemical Mechanical Planarization of Microelectronic Materials is the only comprehensive single-source reference to one of the fastest growing integrated circuit manufacturing technologies. It provides engineers and scientists who work in the microelectronics industry with unified coverage of both the fundamental mechanisms and engineering applications of CMP, including: * The history of CMP * Chemical and mechanical underpinnings of CMP * CMP materials and processes * Applications of CMP in the microelectronics industry * The CMP of tungsten, aluminum, copper, polysilicon, and various dielectrics, including polymers used in integrated circuit fabrication * Post-CMP cleaning techniques * Chapter-end problem sets are also included to assist readers in developing a practical understanding of CMP.

Molecular Electronics

James M Tour

Author : James M Tour
Publisher : World Scientific
Page : 384 pages
File Size : 54,5 Mb
Release : 2003-03-12
Category : Science
ISBN : 9789814486705

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Molecular Electronics by James M Tour Pdf

This book presents an in-depth discussion on molecular electronics in an easy-to-understand manner, aiming at chemists, computer scientists, surface scientists, physicists, and applied mathematicians. Lighter overviews are provided for the science-minded layperson and the high tech entrepreneur in this nanoscale science. The author has included a detailed synthetic chemistry treasure chest, protocols of self-assembling routes for bottom-up fabrication atop silicon platforms, representative current-voltage and memory readouts from molecular devices, and overviews of present architectural and mathematical approaches to programming molecular computing machines. The investment and commercial insertion landscape is painted along with a “Who's Who” in the molecular electronics business space. Advice and forewarnings are provided in a practical yet witty manner for the aspiring academic corporate founder and the business CEO wannabe seeking to establish a high tech company while wading through the idiosyncratic morass of university personalities and university-owned intellectual property. Contents:Commercialization of Molecular ElectronicsMolecular ElectronicsChemical SynthesisMolecular Self-Assembly, Device Construction, and TestingArchitectures in Molecular ElectronicsProgramming the Nanocell Readership: Advanced undergraduates, graduate students and researchers interested in molecular electronics and new computing schemes; laypeople and high tech business investors interested in the nanosciences. Keywords:Molecular Electronics;Chemistry;Programming;Business;Investing;High Tech Startup

Microelectronic Materials

C. R. M. Grovenor

Author : C. R. M. Grovenor
Publisher : Unknown
Page : 128 pages
File Size : 52,5 Mb
Release : 1998
Category : TECHNOLOGY & ENGINEERING
ISBN : 0203747232

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Microelectronic Materials by C. R. M. Grovenor Pdf

"This practical book shows how an understanding of structure, thermodynamics, and electrical properties can explain some of the choices of materials used in microelectronics, and can assist in the design of new materials for specific applications. It emphasizes the importance of the phase chemistry of semiconductor and metal systems for ensuring the long-term stability of new devices. The book discusses single-crystal and polycrystalline silicon, aluminium- and gold-based metallisation schemes, packaging semiconductor devices, failure analysis, and the suitability of various materials for optoelectronic devices and solar cells. It has been designed for senior undergraduates, graduates, and researchers in physics, electronic engineering, and materials science."--Provided by publisher.

Lab-on-a-Chip

R. Edwin Oosterbroek,A. van den Berg

Author : R. Edwin Oosterbroek,A. van den Berg
Publisher : Elsevier
Page : 404 pages
File Size : 50,7 Mb
Release : 2003-10-02
Category : Science
ISBN : 9780444511003

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Lab-on-a-Chip by R. Edwin Oosterbroek,A. van den Berg Pdf

I TECHNOLOGIES -- Hydrogels and polymers as components of a lab on a chip -- Microreplication technologies for polymer-based æTAS applications -- Silicon and glass micromachining for æTAS -- Surface chemistry in polymer microfluidic systems -- Plastic microfluidic devices: electrokinetic manipulations, life science applications, and production technologies -- II METHODS -- Transverse diffusion in microfluidic systems -- Nanoliter & picoliter liquid handling -- Micro sequential injection system for monitoring of metabolites extruded by cultured cells -- III CELL- & BEAD-BASED SYSTEMS -- Handling of beads in microfluidic devices for biotech applications -- Particles and molecules handling in micro channels -- Cell counting and cell sizing in microstructures -- IV APPLICATIONS -- Microfabricated capillary array electrophoresis: -- implementation and applications -- Microfluidic systems for analysis of the proteome with mass spectrometry -- Interfacing æTAS to matrix assisted laser desorpt ...

Microelectronic Applications of Chemical Mechanical Planarization

Yuzhuo Li

Author : Yuzhuo Li
Publisher : John Wiley & Sons
Page : 760 pages
File Size : 53,5 Mb
Release : 2007-12-04
Category : Technology & Engineering
ISBN : 0470180897

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Microelectronic Applications of Chemical Mechanical Planarization by Yuzhuo Li Pdf

An authoritative, systematic, and comprehensive description of current CMP technology Chemical Mechanical Planarization (CMP) provides the greatest degree of planarization of any known technique. The current standard for integrated circuit (IC) planarization, CMP is playing an increasingly important role in other related applications such as microelectromechanical systems (MEMS) and computer hard drive manufacturing. This reference focuses on the chemical aspects of the technology and includes contributions from the foremost experts on specific applications. After a detailed overview of the fundamentals and basic science of CMP, Microelectronic Applications of Chemical Mechanical Planarization: * Provides in-depth coverage of a wide range of state-of-the-art technologies and applications * Presents information on new designs, capabilities, and emerging technologies, including topics like CMP with nanomaterials and 3D chips * Discusses different types of CMP tools, pads for IC CMP, modeling, and the applicability of tribometrology to various aspects of CMP * Covers nanotopography, CMP performance and defect profiles, CMP waste treatment, and the chemistry and colloidal properties of the slurries used in CMP * Provides a perspective on the opportunities and challenges of the next fifteen years Complete with case studies, this is a valuable, hands-on resource for professionals, including process engineers, equipment engineers, formulation chemists, IC manufacturers, and others. With systematic organization and questions at the end of each chapter to facilitate learning, it is an ideal introduction to CMP and an excellent text for students in advanced graduate courses that cover CMP or related semiconductor manufacturing processes.

Chemistry In Microelectronics

Chemistry in Microelectronics by Yannick Le Tiec Pdf

Microelectronics Processing by Dennis W. Hess,Klavs F. Jensen Pdf

The Materials Science of Microelectronics by Klaus J. Bachmann Pdf

Microsystem Technology in Chemistry and Life Sciences by Andreas Manz,Holger Becker Pdf

Molecular-Scale Electronics by Xuefeng Guo Pdf

Molecular and Nano Electronics: Analysis, Design and Simulation by Jorge M. Seminario Pdf

Microelectronic Materials by C.R.M. Grovenor Pdf

Nano and Molecular Electronics Handbook by Sergey Edward Lyshevski Pdf

Methods and Materials in Microelectronic Technology by Joachim Bargon Pdf

Microelectronics Processing by L. A. Casper Pdf

Chemical Mechanical Planarization of Microelectronic Materials by Joseph M. Steigerwald,Shyam P. Murarka,Ronald J. Gutmann Pdf

Molecular Electronics by James M Tour Pdf

Microelectronic Materials by C. R. M. Grovenor Pdf

Lab-on-a-Chip by R. Edwin Oosterbroek,A. van den Berg Pdf

Microelectronic Applications of Chemical Mechanical Planarization by Yuzhuo Li Pdf

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