Author : Tamara Bechtold,Evgenii B. Rudnyi,Jan G. Korvink
Publisher : Springer Science & Business Media
Page : 185 pages
File Size : 47,9 Mb
Release : 2006-11-01
Category : Technology & Engineering
ISBN : 9783540346135
Fast Simulation of Electro-Thermal MEMS by Tamara Bechtold,Evgenii B. Rudnyi,Jan G. Korvink Pdf
This book provides the reader with a complete methodology and software environment for creating efficient dynamic compact models for electro-thermal MEMS devices. It supplies the basic knowledge and understanding for using model order reduction at the engineering level. This tutorial is written for MEMS engineers and is enriched with many case studies which equip readers with the know-how to facilitate the simulation of a specific problem.