Author : https://www.chinesestandard.net
Publisher : https://www.chinesestandard.net
Page : 10 pages
File Size : 46,6 Mb
Release : 2019-08-17
Category : Technology & Engineering
ISBN : 8210379456XXX
GB/T 16595-2019 Translated English of Chinese Standard. (GBT 16595-2019, GB/T16595-2019, GBT16595-2019) by https://www.chinesestandard.net Pdf
This Standard specifies grid patterns that can be used to quantitatively describe surface defects on a circular semiconductor wafer. This Standard applies to silicon wafers of which the nominal diameter is 100 mm ~ 200 mm; it also applies to other semiconductor material wafers.