Handbook Of Thin Film Deposition

Author : Krishna Seshan
Publisher : Unknown
Page : 629 pages
File Size : 41,6 Mb
Release : 2002
Category : Chemical vapor deposition
ISBN : 6612253193

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Handbook of Thin-film Deposition Processes and Techniques by Krishna Seshan Pdf

The 2nd edition contains new chapters on contamination and contamination control that describe the basics and the issues. Another new chapter on meteorology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, MBE, and ion beam methods to bring together physical vapor deposition techniques. Two entirely new areas are focused on: chemical mechanical polishing, which helps attain the flatness that is required by modern lithography methods, and new materials used for interconnect dielectric materials, specifically organic polyimide materials.

Author : Krishna Seshan,Dominic Schepis
Publisher : William Andrew
Page : 470 pages
File Size : 54,9 Mb
Release : 2018-02-23
Category : Technology & Engineering
ISBN : 9780128123126

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Handbook of Thin Film Deposition by Krishna Seshan,Dominic Schepis Pdf

Handbook of Thin Film Deposition, Fourth Edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, materials for memory applications and methods for thin film optical processes. The book is broken up into three sections: scaling, equipment and processing, and applications. In this newly revised edition, the handbook will also explore the limits of thin film applications, most notably as they relate to applications in manufacturing, materials, design and reliability. Offers a practical survey of thin film technologies aimed at engineers and managers involved in all stages of the process: design, fabrication, quality assurance, applications and the limitations faced by those processes Covers core processes and applications in the semiconductor industry and new developments within the photovoltaic and optical thin film industries Features a new chapter discussing Gates Dielectrics

Author : Hartmut Frey,Hamid R. Khan
Publisher : Springer Science & Business Media
Page : 380 pages
File Size : 46,9 Mb
Release : 2015-05-06
Category : Technology & Engineering
ISBN : 9783642054303

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Handbook of Thin Film Technology by Hartmut Frey,Hamid R. Khan Pdf

“Handbook of Thin Film Technology” covers all aspects of coatings preparation, characterization and applications. Different deposition techniques based on vacuum and plasma processes are presented. Methods of surface and thin film analysis including coating thickness, structural, optical, electrical, mechanical and magnetic properties of films are detailed described. The several applications of thin coatings and a special chapter focusing on nanoparticle-based films can be found in this handbook. A complete reference for students and professionals interested in the science and technology of thin films.

Author : Krishna Seshan
Publisher : CRC Press
Page : 72 pages
File Size : 41,7 Mb
Release : 2002-02-01
Category : Science
ISBN : 9781482269680

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Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon by Krishna Seshan Pdf

The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition tec

Author : D Glocker
Publisher : CRC Press
Page : 135 pages
File Size : 40,8 Mb
Release : 2018-01-18
Category : Science
ISBN : 9781351081245

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Handbook of Thin Film Process Technology by D Glocker Pdf

The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume presents additional recipe-type information (i.e. important deposition system details and process parameters) for optical materials.

Author : Peter M. Martin
Publisher : William Andrew
Page : 932 pages
File Size : 49,9 Mb
Release : 2009-12-01
Category : Technology & Engineering
ISBN : 9780815520320

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Handbook of Deposition Technologies for Films and Coatings by Peter M. Martin Pdf

This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thin films, polymer thin films and emerging technologies. Extensive material was added throughout the book, especially in the areas concerned with plasma-assisted vapor deposition processes and metallurgical coating applications.

Author : Krishna Seshan
Publisher : William Andrew
Page : 430 pages
File Size : 48,9 Mb
Release : 2001-02-01
Category : Technology & Engineering
ISBN : 9780815517788

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Handbook of Thin Film Deposition Processes and Techniques by Krishna Seshan Pdf

New second edition of the popular book on deposition (first edition by Klaus Schruegraf) for engineers, technicians, and plant personnel in the semiconductor and related industries. This book traces the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition techniques and the development of highly specialized equipment to enable this deposition. The book includes much cutting-edge material. Entirely new chapters on contamination and contamination control describe the basics and the issues—as feature sizes shrink to sub-micron dimensions, cleanliness and particle elimination has to keep pace. A new chapter on metrology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, MBE, and ion beam methods to bring together all the physical vapor deposition techniques. Two entirely new areas receive full treatment: chemical mechanical polishing which helps attain the flatness that is required by modern lithography methods, and new materials used for interconnect dielectric materials, specifically organic polyimide materials.

Author : Kiyotaka Wasa
Publisher : William Andrew
Page : 660 pages
File Size : 54,9 Mb
Release : 2012-12-31
Category : Technology & Engineering
ISBN : 9781437734843

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Handbook of Sputter Deposition Technology by Kiyotaka Wasa Pdf

This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems. Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS. Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions. A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique 40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere

Author : James D. Rancourt
Publisher : SPIE Press
Page : 308 pages
File Size : 42,6 Mb
Release : 1996
Category : Science
ISBN : 0819422851

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Optical Thin Films by James D. Rancourt Pdf

Practical, user-oriented reference for engineers who must incorporate and specify coatings for filters, antiglare effects, polarization, or other purposes in optical or electro-optical systems design. It focuses on preparation techniques and characteristics of commercially available products and provides information needed to determine what type of filter is needed to solve a particular problem, what its limitations are, and how to care for it.

Author : David A Glocker
Publisher : CRC Press
Page : 184 pages
File Size : 55,7 Mb
Release : 2018-01-18
Category : Science
ISBN : 9781351089685

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Handbook of Thin Film Process Technology by David A Glocker Pdf

The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume is a special issue on reactive sputtering which will be of interest to a wide range of industrial and academic researchers in addition to owners of the main Handbook. Some recent developments in the reactive sputtering field are covered, including unbalanced magnetron sputtering and pulsed reactive sputtering. The articles contain a wealth of practical information relating to applications, practice and manufacturing techniques.

Author : Klaus K. Schuegraf
Publisher : William Andrew
Page : 440 pages
File Size : 43,7 Mb
Release : 1988
Category : Technology & Engineering
ISBN : UOM:39015012052265

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Handbook of Thin-film Deposition Processes and Techniques by Klaus K. Schuegraf Pdf

The most recent developments and techniques in thin film deposition for high technology applications are described by 23 authorities in the field.

Author : Hugh O. Pierson
Publisher : William Andrew
Page : 506 pages
File Size : 47,9 Mb
Release : 1999-09-01
Category : Technology & Engineering
ISBN : 9780815517436

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Handbook of Chemical Vapor Deposition by Hugh O. Pierson Pdf

Turn to this new second edition for an understanding of the latest advances in the chemical vapor deposition (CVD) process. CVD technology has recently grown at a rapid rate, and the number and scope of its applications and their impact on the market have increased considerably. The market is now estimated to be at least double that of a mere seven years ago when the first edition of this book was published. The second edition is an update with a considerably expanded and revised scope. Plasma CVD and metallo-organic CVD are two major factors in this rapid growth. Readers will find the latest data on both processes in this volume. Likewise, the book explains the growing importance of CVD in production of semiconductor and related applications.

Author : D. M. Mattox
Publisher : Cambridge University Press
Page : 947 pages
File Size : 51,6 Mb
Release : 2014-09-19
Category : Technology & Engineering
ISBN : 9780080946580

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Handbook of Physical Vapor Deposition (PVD) Processing by D. M. Mattox Pdf

This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications. The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. However, the author uniquely relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, which are also rarely discussed in the literature. In bringing these subjects together in one book, the reader can understand the interrelationship between various aspects of the film deposition processing and the resulting film properties. The author draws upon his long experience with developing PVD processes and troubleshooting the processes in the manufacturing environment, to provide useful hints for not only avoiding problems, but also for solving problems when they arise. He uses actual experiences, called ""war stories"", to emphasize certain points. Special formatting of the text allows a reader who is already knowledgeable in the subject to scan through a section and find discussions that are of particular interest. The author has tried to make the subject index as useful as possible so that the reader can rapidly go to sections of particular interest. Extensive references allow the reader to pursue subjects in greater detail if desired. The book is intended to be both an introduction for those who are new to the field and a valuable resource to those already in the field. The discussion of transferring technology between R&D and manufacturing provided in Appendix 1, will be of special interest to the manager or engineer responsible for moving a PVD product and process from R&D into production. Appendix 2 has an extensive listing of periodical publications and professional societies that relate to PVD processing. The extensive Glossary of Terms and Acronyms provided in Appendix 3 will be of particular use to students and to those not fully conversant with the terminology of PVD processing or with the English language.

Author : Leon I. Maissel,Reinhard Glang
Publisher : McGraw-Hill Companies
Page : 1238 pages
File Size : 53,9 Mb
Release : 1970
Category : Technology & Engineering
ISBN : UOM:39015040323738

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Handbook of Thin Film Technology by Leon I. Maissel,Reinhard Glang Pdf

Author : Aicha Elshabini,Aicha Elshabini-Riad,Fred D. Barlow
Publisher : McGraw Hill Professional
Page : 680 pages
File Size : 47,9 Mb
Release : 1998
Category : Electronic packaging
ISBN : 0070190259

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Thin Film Technology Handbook by Aicha Elshabini,Aicha Elshabini-Riad,Fred D. Barlow Pdf

The most comprehensive source available on the preparation, characterization, and emerging applications of thin film. This book features extensive new advances applied in multichip modules (MCMs), and covers the basic principles and applications of thin film deposition techniques for practical use. It provides and develops design guidelines to realize multilayer structures in microcircuits, thus addressing a critical and rapidly growing area.