Handbook Of Vlsi Microlithography 2nd Edition

Author : John N. Helbert
Publisher : Cambridge University Press
Page : 1026 pages
File Size : 42,7 Mb
Release : 2001-04
Category : Technology & Engineering
ISBN : 9780080946801

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Handbook of VLSI Microlithography, 2nd Edition by John N. Helbert Pdf

This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatingsùincluding optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry. The book leads off with a comparison of various lithography methods, covering the three major patterning parameters of line/space, resolution, line edge and pattern feature dimension control. The book's explanation of resist and resist process equipment technology may well be the first practical description of the relationship between the resist process and equipment parameters. The basics of resist technology are completely coveredùincluding an entire chapter on resist process defectivity and the potential yield limiting effect on device production. Each alternative lithographic technique and testing method is considered and evaluated: basic metrology including optical, scanning-electron-microscope (SEM) techniques and electrical test devices, along with explanations of actual printing tools and their design, construction and performance. The editor devotes an entire chapter to today's sophisticated, complex electron-beam printers, and to the emerging x-ray printing technology now used in high-density CMOS devices. Energetic ion particle printing is a controllable, steerable technology that does not rely on resist, and occupies a final section of the handbook.

Author : William B. Glendinning,John N. Helbert
Publisher : William Andrew
Page : 671 pages
File Size : 43,8 Mb
Release : 2012-12-02
Category : Technology & Engineering
ISBN : 9781437728224

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Handbook of VLSI Microlithography by William B. Glendinning,John N. Helbert Pdf

This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings-- including optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry. The book leads off with a comparison of various lithography methods, covering the three major patterning parameters of line/space, resolution, line edge and pattern feature dimension control. The book's explanation of resist and resist process equipment technology may well be the first practical description of the relationship between the resist process and equipment parameters. The basics of resist technology are completely covered -- including an entire chapter on resist process defectivity and the potential yield limiting effect on device production. Each alternative lithographic technique and testing method is considered and evaluated: basic metrology including optical, scanning-electron-microscope (SEM) techniques and electrical test devices, along with explanations of actual printing tools and their design, construction and performance. The editor devotes an entire chapter to today's sophisticated, complex electron-beam printers, and to the emerging x-ray printing technology now used in high-density CMOS devices. Energetic ion particle printing is a controllable, steerable technology that does not rely on resist, and occupies a final section of the handbook.

Author : Editor - John N. Helbert
Publisher : Unknown
Page : 1022 pages
File Size : 54,6 Mb
Release : 2008
Category : Electronic
ISBN : 8179928993

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Handbook Of Vlsi Microlithography by Editor - John N. Helbert Pdf

Author : Olga A. Shenderova,Dieter M. Gruen
Publisher : William Andrew
Page : 620 pages
File Size : 42,9 Mb
Release : 2006-08-10
Category : Technology & Engineering
ISBN : 9780815519423

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Ultrananocrystalline Diamond by Olga A. Shenderova,Dieter M. Gruen Pdf

Ultrananocrystalline Diamond: Syntheses, Properties, and Applications is a unique practical reference handbook that brings together the basic science of nanoscale carbon structures, particularly its diamond phase, with detailed information on nanodiamond synthesis, properties, and applications. Here you will learn about UNCD in its two forms, as a dispersed powder made by detonation techniques and as a chemical vapor deposited film. You will also learn about the superior mechanical, tribological, transport, electrochemical, and electron emission properties of UNCD for a wide range of applications including MEMS, NEMS, surface acoustic wave (SAW) devices, electrochemical sensors, coatings for field emission arrays, photonic and RF switching, biosensors, and neural prostheses, and more. This ôEverything about Ultra-nanocrystalline Diamondö book with 16 chapters is written by leading experts worldwide. It is for everyone who researches carbon nanostructures, everyone who produces them, everyone who characterizes them, and everyone who builds devices using them.

Author : Carl C. Koch
Publisher : William Andrew
Page : 784 pages
File Size : 46,9 Mb
Release : 2006-12-01
Category : Technology & Engineering
ISBN : 9780815518426

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Nanostructured Materials, 2nd Edition by Carl C. Koch Pdf

Nanostructured materials are one of the highest profile classes of materials in science and engineering today, and will continue to be well into the future. Potential applications are widely varied, including washing machine sensors, drug delivery devices to combat avian flu, and more efficient solar panels. Broad and multidisciplinary, the field includes multilayer films, atomic clusters, nanocrystalline materials, and nanocomposites having remarkable variations in fundamental electrical, optic, and magnetic properties. Nanostructured Materials: Processing, Properties and Applications, 2nd Edition is an extensive update to the exceptional first edition snapshot of this rapidly advancing field. Retaining the organization of the first edition, Part 1 covers the important synthesis and processing methods for the production of nanocrystalline materials. Part 2 focuses on selected properties of nanostructured materials. Potential or existing applications are described as appropriate throughout the book. The second edition has been updated throughout for the latest advances and includes two additional chapters.

Author : Charles Bishop
Publisher : William Andrew
Page : 495 pages
File Size : 49,7 Mb
Release : 2006-12-20
Category : Technology & Engineering
ISBN : 9780815519478

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Vacuum Deposition onto Webs, Films, and Foils by Charles Bishop Pdf

This new book from William Andrew Publishing is the only practical reference available for anyone employing the roll-to-roll deposition process. Vacuum Deposition onto Webs, Films and Foils is an expansive journey of the process; benefiting manufacturing efficiency, unit cost reduction, and financial results. It is a sweeping approach to the total design of the vacuum deposition process written by a successful and world renowned consultant with three decades of experience. Roll-to-roll deposition processing is a high growth industry and this reference covers a wide variety of important industrial products that use vacuum deposited coatings, including: optical storage devices, metallized packaging films, energy conservation windows, electronic information displays, and magnetic electronic article surveillance (EAS) tags among many others. This book is a must-have for roll-to-roll machine operators, process engineers, and research and development engineers throughout industry. The book provides a broad appreciation of roll-to-roll vacuum deposition systems and processes. It will encourage a more comprehensive look from material supply through to the downstream processes that the product will encounter. It is a truly unique reference written to guide operators and engineers as an onsite consultant would.

Author : Wolfram Schnabel
Publisher : John Wiley & Sons
Page : 396 pages
File Size : 55,7 Mb
Release : 2007-06-27
Category : Technology & Engineering
ISBN : 9783527611034

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Polymers and Light by Wolfram Schnabel Pdf

This first book to focus on the important and topical effect of light on polymeric materials reflects the multidisciplinary nature of the topic, building a bridge between polymer chemistry and physics, photochemistry and photophysics, and materials science. Written by one experienced author, a consistent approach is maintained throughout, covering such applications as nonlinear optical materials, core materials for optical waveguides, photoresists in the production of computer chips, photoswitches and optical memories. Advanced reading for polymer, physical and organic chemists, manufacturers of optoelectronic devices, chemical engineers, and materials scientists.

Author : Alberto Pique,Douglas B. Chrisey
Publisher : Elsevier
Page : 754 pages
File Size : 55,7 Mb
Release : 2001-11-20
Category : Technology & Engineering
ISBN : 9780080504643

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Direct-Write Technologies for Rapid Prototyping Applications by Alberto Pique,Douglas B. Chrisey Pdf

Direct-Write Technologies covers applications, materials, and the techniques in using direct-write technologies. This book provides an overview of the different direct write techniques currently available, as well as a comparison between the strengths and special attributes for each of the techniques. The techniques described open the door for building prototypes and testing materials. The book also provides an overview of the state-of-the-art technology involved in this field. Basic academic researchers and industrial development engineers who pattern thin film materials will want to have this text on their shelves as a resource for specific applications. Others in this or related fields will want the book to read the introductory material summarizing isuses common to all approaches, in order to compare and contrast different techniques. Everyday applications include electronic components and sensors, especially chemical and biosensors. There is a wide range of research and development problems requiring state-of-the-art direct write tools. This book will appeal to basic researchers and development engineers in university engineering departments and at industrial and national research laboratories. This text should appeal equally well in the United States, Asia, and Europe. Both basic academic researchers and industrial development engineers who pattern thin film materials will want to have this text on their shelves as a resource for specific applications. An overview of the different direct write techniques currently available A comparison between the strengths and special attributes for each of the techniques An overview of the state-of-the-art technology involved in this field

Author : Kiyotaka Wasa,Makoto Kitabatake,Hideaki Adachi
Publisher : William Andrew
Page : 533 pages
File Size : 55,6 Mb
Release : 2004-05-10
Category : Technology & Engineering
ISBN : 9780815519317

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Thin Film Materials Technology by Kiyotaka Wasa,Makoto Kitabatake,Hideaki Adachi Pdf

An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering.

Author : Whitson G. Waldo
Publisher : First Books
Page : 314 pages
File Size : 52,6 Mb
Release : 2010-09
Category : Business & Economics
ISBN : 9781592994830

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Program Management for System on Chip Platforms by Whitson G. Waldo Pdf

A Fully Integrated Presentation of New Hardware and Software Product Introductions Using Program Management Methodologies for System on Chip Platforms If you're an executive, manager, or engineer in the semiconductor, software, or systems industries, this book provides conceptual views ranging from the design of integrated circuits or systems on a chip, through fabrication, to integration of chips onto boards, and through development of enablement and runtime software for system and platform deliveries. Special features included this book are: - Program management methodologies - General management fundamentals - An overview of leadership principles - Basic discrete device technology - Internal structure and operation of some common logic gates - Basic integrated circuit design concepts, building blocks, and flow - Chip packaging technologies - Details of the fabrication process for integrated circuits - Printed circuit board design, manufacture, and test - Software design, development, and test - Integrated circuit test, silicon validation, and device qualification - Program management applications bringing it all together The book explores interactions and dependencies of technologies that impact systems and platforms. This is a valuable resource to learn these technologies or to use as a reference.

Author : James J. Licari,Dale W. Swanson
Publisher : Elsevier
Page : 477 pages
File Size : 49,8 Mb
Release : 2005-08-30
Category : Technology & Engineering
ISBN : 9780815516002

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Adhesives Technology for Electronic Applications by James J. Licari,Dale W. Swanson Pdf

This book is unique in its comprehensive coverage of all aspects of adhesive technology for microelectronic devices and packaging, from theory to bonding to test procedures. In addition to general applications, such as dies, substrate, and lid and chip stack attachments, the book includes new developments in anisotropic, electrically conductive, and underfill adhesives. Rapid curing methods such as UV, microwave, and moisture (which comply with current environmental and energy requirements) are covered. Over 80 tables and 120 figures provide a wealth of data on properties, performance, and reliability. Also included are examples of commercially available adhesives, suppliers, and equipment. Each chapter provides comprehensive references.

Author : Alan G. King
Publisher : William Andrew
Page : 533 pages
File Size : 48,7 Mb
Release : 2001-12-01
Category : Technology & Engineering
ISBN : 9780815516330

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Ceramic Technology and Processing by Alan G. King Pdf

Perfect for the new technician or engineer entering the ceramics industry as well as for the ""old hand"" who needs an update on some aspect of ceramics processing, this resource provides practical laboratory-oriented answers to such typical processing problems as particle segregation, agglomeration, contamination, pressure gradients, adherence to tooling, and temperature gradients during drying and firing. The author examines the difficulties of practical testing and processing in the ceramic laboratory, such as vast differences in scale and equipment, and shows how to evaluate results taking such variables into account. Once the laboratory work is satisfactorily completed, the rest of the book explores serious issues involved in transferring technology from the lab bench to the plant floor and then to the customer. The author gives advice on dealing with real-life problems such as allocating human and capital resources and overcoming customer wariness of being first to try new procedures and processes. Each section contains practical, hands-on suggestions on performing and sometimes avoiding certain tasks, bringing to the reader key information that is at best sparsely available in the industry. As the author states, ""Laboratory skills are gained by hands-on experience. The intent of this book is to accelerate the process.""

Author : Krishna Seshan
Publisher : CRC Press
Page : 72 pages
File Size : 42,5 Mb
Release : 2002-02-01
Category : Science
ISBN : 9781482269680

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Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon by Krishna Seshan Pdf

The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition tec

Author : Ellis Meng
Publisher : CRC Press
Page : 410 pages
File Size : 43,7 Mb
Release : 2011-06-22
Category : Medical
ISBN : 9781420051230

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Biomedical Microsystems by Ellis Meng Pdf

Poised to dramatically impact human health, biomedical microsystems (bioMEMS) technologies incorporate various aspects from materials science, biology, chemistry, physics, medicine, and engineering. Reflecting the highly interdisciplinary nature of this area, Biomedical Microsystems covers the fundamentals of miniaturization, biomaterials, microfabrication, and nanotechnology, along with relevant applications. Written by an active researcher who was recently named one of Technology Review’s Young Innovators Under 35, the book begins with an introduction to the benefits of miniaturization. It then introduces materials, fabrication technology, and the necessary components of all bioMEMS. The author also covers fundamental principles and building blocks, including microfluidic concepts, lab-on-a-chip systems, and sensing and detection methods. The final chapters explore several important applications of bioMEMS, such as microdialysis, catheter-based sensors, MEMS implants, neural probes, and tissue engineering. For readers with a limited background in MEMS and bioMEMS, this book provides a practical introduction to the technology used to make these devices, the principles that govern their operation, and examples of their application. It offers a starting point for understanding advanced topics and encourages readers to begin to formulate their own ideas about the design of novel bioMEMS. A solutions manual is available for instructors who want to convert this reference to classroom use.

Author : Raymond L. Boxman,David M. Sanders,Philip J. Martin
Publisher : William Andrew
Page : 773 pages
File Size : 40,8 Mb
Release : 1996-12-31
Category : Technology & Engineering
ISBN : 9780815517795

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Handbook of Vacuum Arc Science & Technology by Raymond L. Boxman,David M. Sanders,Philip J. Martin Pdf

This is a comprehensive text describing the basic physics and technological applications of vacuum arcs. Part I describes basic physics of the vacuum arc, beginning with a brief tutorial review of plasma and electrical discharge physics, then describes the arc ignition process, cathode and anode spots which serve as the locus for plasma generation, and resultant interelectrode plasma. Part II describes the applications of the vacuum arc for depositing thin films and coatings, refining metals, switching high power, and as sources of intense electron, ion, plasma, and x-ray beams.