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Infrared Characterization For Microelectronics by Wai Shing Lau Pdf
Most of the books on infrared characterization are for applications in chemistry and no book has been dedicated to infrared characterization for microelectronics. The focus of the book will be on practical applications useful to the production line and to the research and development of microelectronics. The background knowledge and significance of doing a particular type of infrared measurement will be discussed in detail. The principal purpose of the book is to serve as a useful handbook for practising engineers and scientists in the field of microelectronics.
Infrared Characterization for Microelectronics by W. S. Lau Pdf
Most of the books on infrared characterization are for applications in chemistry and no book has been dedicated to infrared characterization for microelectronics. The focus of the book will be on practical applications useful to the production line and to the research and development of microelectronics. The background knowledge and significance of doing a particular type of infrared measurement will be discussed in detail. The principal purpose of the book is to serve as a useful handbook for practising engineers and scientists in the field of microelectronics.
Optical Characterization of Semiconductors by Sidney Perkowitz Pdf
This is the first book to explain, illustrate, and compare the most widely used methods in optics: photoluminescence, infrared spectroscopy, and Raman scattering. Written with non-experts in mind, the book develops the background needed to understand the why and how of each technique, but does not require special knowledge of semiconductors or optics. Each method is illustrated with numerous case studies. Practical information drawn from the authors experience is given to help establish optical facilities, including commercial sources for equipment, and experimental details. For industrial scientists with specific problems in semiconducting materials; for academic scientists who wish to apply their spectroscopic methods to characterization problems; and for students in solid state physics, materials science and engineering, and semiconductor electronics and photonics, this book provides a unique overview, bringing together these valuable techniques in a coherent wayfor the first time. Discusses and compares infrared, Raman, and photoluminescence methods Enables readers to choose the best method for a given problem Illustrates applications to help non-experts and industrial users, with answers to selected common problems Presents fundamentals with examples from the semiconductor literature without excessive abstract discussion Features equipment lists and discussion of techniques to help establish characterization laboratories
Handbook of Infrared Spectroscopy of Ultrathin Films by Valeri P. Tolstoy,Irina Chernyshova,Valeri A. Skryshevsky Pdf
Because of the rapid increase in commercially available Fourier transform infrared spectrometers and computers over the past ten years, it has now become feasible to use IR spectrometry to characterize very thin films at extended interfaces. At the same time, interest in thin films has grown tremendously because of applications in microelectronics, sensors, catalysis, and nanotechnology. The Handbook of Infrared Spectroscopy of Ultrathin Films provides a practical guide to experimental methods, up-to-date theory, and considerable reference data, critical for scientists who want to measure and interpret IR spectra of ultrathin films. This authoritative volume also: Offers information needed to effectively apply IR spectroscopy to the analysis and evaluation of thin and ultrathin films on flat and rough surfaces and on powders at solid-gaseous, solid-liquid, liquid-gaseous, liquid-liquid, and solid-solid interfaces. * Provides full discussion of theory underlying techniques * Describes experimental methods in detail, including optimum conditions for recording spectra and the interpretation of spectra * Gives detailed information on equipment, accessories, and techniques * Provides IR spectroscopic data tables as appendixes, including the first compilation of published data on longitudinal frequencies of different substances * Covers new approaches, such as Surface Enhanced IR spectroscopy (SEIR), time-resolved FTIR spectroscopy, high-resolution microspectroscopy and using synchotron radiation
Infrared Spectroscopy by Theophanides Theophile Pdf
The present book is a definitive review in the field of Infrared (IR) and Near Infrared (NIR) Spectroscopies, which are powerful, non invasive imaging techniques. This book brings together multidisciplinary chapters written by leading authorities in the area. The book provides a thorough overview of progress in the field of applications of IR and NIR spectroscopy in Materials Science, Engineering and Technology. Through a presentation of diverse applications, this book aims at bridging various disciplines and provides a platform for collaborations among scientists.
Handbook of Infrared Spectroscopy of Ultrathin Films by Valeri P. Tolstoy,Irina Chernyshova,Valeri A. Skryshevsky Pdf
Because of the rapid increase in commercially available Fouriertransform infrared spectrometers and computers over the past tenyears, it has now become feasible to use IR spectrometry tocharacterize very thin films at extended interfaces. At the sametime, interest in thin films has grown tremendously because ofapplications in microelectronics, sensors, catalysis, andnanotechnology. The Handbook of Infrared Spectroscopy of UltrathinFilms provides a practical guide to experimental methods,up-to-date theory, and considerable reference data, critical forscientists who want to measure and interpret IR spectra ofultrathin films. This authoritative volume also: Offers informationneeded to effectively apply IR spectroscopy to the analysis andevaluation of thin and ultrathin films on flat and rough surfacesand on powders at solid-gaseous, solid-liquid, liquid-gaseous,liquid-liquid, and solid-solid interfaces. Provides full discussion of theory underlying techniques Describes experimental methods in detail, including optimumconditions for recording spectra and the interpretation ofspectra Gives detailed information on equipment, accessories, andtechniques Provides IR spectroscopic data tables as appendixes, includingthe first compilation of published data on longitudinal frequenciesof different substances Covers new approaches, such as Surface Enhanced IR spectroscopy(SEIR), time-resolved FTIR spectroscopy, high-resolutionmicrospectroscopy and using synchotron radiation
Advances in Chemical Mechanical Planarization (CMP) by Babu Suryadevara Pdf
Advances in Chemical Mechanical Planarization (CMP), Second Edition provides the latest information on a mainstream process that is critical for high-volume, high-yield semiconductor manufacturing, and even more so as device dimensions continue to shrink. The second edition includes the recent advances of CMP and its emerging materials, methods, and applications, including coverage of post-CMP cleaning challenges and tribology of CMP. This important book offers a systematic review of fundamentals and advances in the area. Part one covers CMP of dielectric and metal films, with chapters focusing on the use of current and emerging techniques and processes and on CMP of various materials, including ultra low-k materials and high-mobility channel materials, and ending with a chapter reviewing the environmental impacts of CMP processes. New content addressed includes CMP challenges with tungsten, cobalt, and ruthenium as interconnect and barrier films, consumables for ultralow topography and CMP for memory devices. Part two addresses consumables and process control for improved CMP and includes chapters on CMP pads, diamond disc pad conditioning, the use of FTIR spectroscopy for characterization of surface processes and approaches for defection characterization, mitigation, and reduction. Advances in Chemical Mechanical Planarization (CMP), Second Edition is an invaluable resource and key reference for materials scientists and engineers in academia and R&D. Reviews the most relevant techniques and processes for CMP of dielectric and metal films Includes chapters devoted to CMP for current and emerging materials Addresses consumables and process control for improved CMP, including post-CMP
New Generation of Europium- and Terbium-Activated Phosphors by Mihail Nazarov,Do Young Noh Pdf
This book concentrates on the luminescence and structural properties of the new generation of europium and terbium activated phosphors, associated phenomena, and related topics, from basic principles to the most recent discoveries. It summarizes the present state of the art in this rapidly growing field. The authors describe recent developments in
Journal of Research of the National Institute of Standards and Technology by Anonim Pdf
Reports NIST research and development in the physical and engineering sciences in which the Institute is active. These include physics, chemistry, engineering, mathematics, and computer sciences. Emphasis on measurement methodology and the basic technology underlying standardization.
