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This book presents inductive and hybrid levitation micro-systems and their applications in micro-sensors and –actuators. It proposes and discusses analytical and quasi-finite element techniques for modeling levitation micro-systems based on the Lagrangian formalism. In particular, micro-bearings, -actuators, -accelerators and –accelerometers based on inductive levitation are comprehensively described with accompanying experimental measurements.
Springer Handbook of Semiconductor Devices by Massimo Rudan,Rossella Brunetti,Susanna Reggiani Pdf
This Springer Handbook comprehensively covers the topic of semiconductor devices, embracing all aspects from theoretical background to fabrication, modeling, and applications. Nearly 100 leading scientists from industry and academia were selected to write the handbook's chapters, which were conceived for professionals and practitioners, material scientists, physicists and electrical engineers working at universities, industrial R&D, and manufacturers. Starting from the description of the relevant technological aspects and fabrication steps, the handbook proceeds with a section fully devoted to the main conventional semiconductor devices like, e.g., bipolar transistors and MOS capacitors and transistors, used in the production of the standard integrated circuits, and the corresponding physical models. In the subsequent chapters, the scaling issues of the semiconductor-device technology are addressed, followed by the description of novel concept-based semiconductor devices. The last section illustrates the numerical simulation methods ranging from the fabrication processes to the device performances. Each chapter is self-contained, and refers to related topics treated in other chapters when necessary, so that the reader interested in a specific subject can easily identify a personal reading path through the vast contents of the handbook.
Magnetic Sensors and Devices by Laurent A. Francis,Kirill Poletkin Pdf
This book presents in-depth coverage of magnetic sensors in industrial applications. It is divided into three sections: devices and technology for magnetic sensing, industrial applications (automotive, navigation), and emerging applications. Topics include transmission speed sensor ICs, dynamic differential Hall ICs, chopped Hall switches, programmable linear output Hall sensors, low power Hall ICs, self-calibrating differential Hall ICs for wheel speed sensing, dynamic differential Hall ICs, uni- and bipolar Hall IC switches, chopped mono cell Hall ICs, and electromagnetic levitation.
Design and Manufacturing of Active Microsystems by Stephanus Büttgenbach,Arne Burisch,Jürgen Hesselbach Pdf
This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.
Micro and Nano Fabrication by Hans H. Gatzen,Volker Saile,Jürg Leuthold Pdf
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
Micro System Technologies 90 by Herbert Reichl Pdf
On September 10-13, 1990, the first international meeting on Microsystem Technologies takes place at the Berlin International Congress Center. Most of the traditional congresses deal with themes that become more and more specific, and only a small part of the scientific world is reflected. The Micro System Technologies is attempting to take the opposite direction: During the last two decades the development of microelectronics was characterized by a tremendous increase of complexity of integrated circuits. At the same time the fields of microoptics and micromechanics have been developed to an advanced state of the art by the application of thin film and semiconductor technologies. The trend of the future development is to increase the integration density by combining the microelectronic, microoptic, and micro mechanic aspects to new complex multifunctional systems, which are able to comprise sensors, actuators, analogue and digital circuits on the same chip or on multichip-modules. Microsystems will lead to extensions of the field of microelectronic applications with important technical alterations and can open new considerable markets. For the realization of economical solutions for microsystems a lot of interdisciplinary cooperation and know-how has to be developed. New materials for sensitive layers, substrates, conducting, semiconducting, or isolating thin films are the basis for the development of new technologies. The increasing complexity leads to increasing interaction among electrical and non-electrical quantities.
Nano- and Micro-Electromechanical Systems by Sergey Edward Lyshevski Pdf
Society is approaching and advancing nano- and microtechnology from various angles of science and engineering. The need for further fundamental, applied, and experimental research is matched by the demand for quality references that capture the multidisciplinary and multifaceted nature of the science. Presenting cutting-edge information that is applicable to many fields, Nano- and Micro-Electromechanical Systems: Fundamentals of Nano and Microengineering, Second Edition builds the theoretical foundation for understanding, modeling, controlling, simulating, and designing nano- and microsystems. The book focuses on the fundamentals of nano- and microengineering and nano- and microtechnology. It emphasizes the multidisciplinary principles of NEMS and MEMS and practical applications of the basic theory in engineering practice and technology development. Significantly revised to reflect both fundamental and technological aspects, this second edition introduces the concepts, methods, techniques, and technologies needed to solve a wide variety of problems related to high-performance nano- and microsystems. The book is written in a textbook style and now includes homework problems, examples, and reference lists in every chapter, as well as a separate solutions manual. It is designed to satisfy the growing demands of undergraduate and graduate students, researchers, and professionals in the fields of nano- and microengineering, and to enable them to contribute to the nanotechnology revolution.
Magnetic Materials and Magnetic Levitation by Dipti Ranjan Sahu,Vasilios N. Stavrou Pdf
Magnetic materials are important materials for high-tech areas and technological development, which are being classified not only based on their origin but also by the nature of processing, properties, functions, and applications. This book presents an overview of the different types of new magnetic materials and hybrid structures that exhibit different magnetic phenomena and interesting properties. The reported materials are studied theoretically and experimentally, which are the building blocks of all technological innovations. Topics such as magnetic levitation are given for industrial applications. The chapters of the book provide a key description of magnetic materials. This book is suitable for undergraduate and graduate students and professionals including engineers, scientists, researchers, technicians, and technology managers. This book gives an idea to readers for scientific innovation in this field.
Advances in Information Technology Research and Application: 2012 Edition by Anonim Pdf
Advances in Information Technology Research and Application / 2012 Edition is a ScholarlyEditions™ eBook that delivers timely, authoritative, and comprehensive information about Information Technology. The editors have built Advances in Information Technology Research and Application / 2012 Edition on the vast information databases of ScholarlyNews.™ You can expect the information about Information Technology in this eBook to be deeper than what you can access anywhere else, as well as consistently reliable, authoritative, informed, and relevant. The content of Advances in Information Technology Research and Application / 2012 Edition has been produced by the world’s leading scientists, engineers, analysts, research institutions, and companies. All of the content is from peer-reviewed sources, and all of it is written, assembled, and edited by the editors at ScholarlyEditions™ and available exclusively from us. You now have a source you can cite with authority, confidence, and credibility. More information is available at http://www.ScholarlyEditions.com/.
Identification of Physical Systems by Rajamani Doraiswami,Maryhelen Stevenson,Chris Diduch Pdf
Identification of a physical system deals with the problem of identifying its mathematical model using the measured input and output data. As the physical system is generally complex, nonlinear, and its input–output data is corrupted noise, there are fundamental theoretical and practical issues that need to be considered. Identification of Physical Systems addresses this need, presenting a systematic, unified approach to the problem of physical system identification and its practical applications. Starting with a least-squares method, the authors develop various schemes to address the issues of accuracy, variation in the operating regimes, closed loop, and interconnected subsystems. Also presented is a non-parametric signal or data-based scheme to identify a means to provide a quick macroscopic picture of the system to complement the precise microscopic picture given by the parametric model-based scheme. Finally, a sequential integration of totally different schemes, such as non-parametric, Kalman filter, and parametric model, is developed to meet the speed and accuracy requirement of mission-critical systems. Key features: Provides a clear understanding of theoretical and practical issues in identification and its applications, enabling the reader to grasp a clear understanding of the theory and apply it to practical problems Offers a self-contained guide by including the background necessary to understand this interdisciplinary subject Includes case studies for the application of identification on physical laboratory scale systems, as well as number of illustrative examples throughout the book Identification of Physical Systems is a comprehensive reference for researchers and practitioners working in this field and is also a useful source of information for graduate students in electrical, computer, biomedical, chemical, and mechanical engineering.
Advanced Mechatronics and MEMS Devices II by Dan Zhang,Bin Wei Pdf
This book introduces the state-of-the-art technologies in mechatronics, robotics, and MEMS devices in order to improve their methodologies. It provides a follow-up to "Advanced Mechatronics and MEMS Devices" (2013) with an exploration of the most up-to-date technologies and their applications, shown through examples that give readers insights and lessons learned from actual projects. Researchers on mechatronics, robotics, and MEMS as well as graduate students in mechanical engineering will find chapters on: Fundamental design and working principles on MEMS accelerometers Innovative mobile technologies Force/tactile sensors development Control schemes for reconfigurable robotic systems Inertial microfluidics Piezoelectric force sensors and dynamic calibration techniques ...And more. Authors explore applications in the areas of agriculture, biomedicine, advanced manufacturing, and space. Micro-assembly for current and future industries is also considered, as well as the design and development of micro and intelligent manufacturing.
Microfabrication and Nanofabrication by Kanak Kalita,Ranjan Kumar Ghadai,J. Paulo Davim Pdf
This book unravels the intriguing interplay between macroscopic manufacturing processes and microscopic fabrication techniques. It dives into the sophisticated world of precision manufacturing, where high accuracy, controlled processes enable the production of complex components and products. It covers micro and nano fabrication, which revolutionizes conventional manufacturing by creating minuscule yet highly functional parts, some even smaller than the width of a human hair. This book explores various topics, from precise machining techniques to nanoimprint technology, reflecting the vast breadth and depth of this field. The aim is to provide readers with a comprehensive understanding of how these micro and macro scales intertwine, opening new frontiers in manufacturing. By showcasing the latest research findings and their practical applications, this book elucidates the enormous potential and implications of this burgeoning field. The contents are laid out in a user-friendly manner to communicate complex ideas in an accessible, engaging way, making it a valuable resource for anyone curious about the next big leap in manufacturing technology.