Mems Nems Sensors

Author : Goutam Koley
Publisher : MDPI
Page : 242 pages
File Size : 52,6 Mb
Release : 2019-11-20
Category : Technology & Engineering
ISBN : 9783039216345

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MEMS/NEMS Sensors by Goutam Koley Pdf

Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as temperature, mass or stress, caused by changes in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors.

Author : Zhuoqing Yang
Publisher : Springer Nature
Page : 312 pages
File Size : 43,5 Mb
Release : 2021-10-12
Category : Technology & Engineering
ISBN : 9783030797492

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Advanced MEMS/NEMS Fabrication and Sensors by Zhuoqing Yang Pdf

This book begins by introducing new and unique fabrication, micromachining, and integration manufacturing methods for MEMS (Micro-Electro-Mechanical Systems) and NEMS (Nano-Electro-Mechanical Systems) devices, as well as novel nanomaterials for sensor fabrications. The second section focuses on novel sensors based on these emerging MEMS/NEMS fabrication methods, and their related applications in industrial, biomedical, and environmental monitoring fields, which makes up the sensing layer (or perception layer) in IoT architecture. This authoritative guide offers graduate students, postgraduates, researchers, and practicing engineers with state-of-the-art processes and cutting-edge technologies on MEMS /NEMS, micro- and nanomachining, and microsensors, addressing progress in the field and prospects for future development. Presents latest international research on MEMS/NEMS fabrication technologies and novel micro/nano sensors; Covers a broad spectrum of sensor applications; Written by leading experts in the field.

Author : Cornelius T. Leondes
Publisher : Springer Science & Business Media
Page : 2094 pages
File Size : 45,9 Mb
Release : 2007-10-08
Category : Technology & Engineering
ISBN : 9780387257860

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Mems/Nems by Cornelius T. Leondes Pdf

This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.

Author : Goutam Koley,Ifat Jahangir
Publisher : Unknown
Page : 242 pages
File Size : 44,6 Mb
Release : 2019
Category : Engineering (General). Civil engineering (General)
ISBN : 303921635X

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MEMS/NEMS Sensors: Fabrication and Application by Goutam Koley,Ifat Jahangir Pdf

Due to the ever-expanding applications of micro/nano-electromechanical systems (NEMS/MEMS) as sensors and actuators, interest in their development has rapidly expanded over the past decade. Encompassing various excitation and readout schemes, the MEMS/NEMS devices transduce physical parameter changes, such as temperature, mass or stress, caused by changes in desired measurands, to electrical signals that can be further processed. Some common examples of NEMS/MEMS sensors include pressure sensors, accelerometers, magnetic field sensors, microphones, radiation sensors, and particulate matter sensors. Despite a long history of development, fabrication of novel MEMS/NEMS devices still poses unique challenges due to their requirement for a suspended geometry; and many new fabrication techniques have been proposed to overcome these challenges. However, further development of these techniques is still necessary, as newer materials such as compound semiconductors, and 2-dimensional materials are finding their way in various MEMS/NEMS applications, with more complex structures and potentially smaller dimensions.

Author : Sergey Edward Lyshevski
Publisher : CRC Press
Page : 263 pages
File Size : 42,6 Mb
Release : 2018-10-03
Category : Technology & Engineering
ISBN : 9781351836135

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MEMS and NEMS by Sergey Edward Lyshevski Pdf

The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every aspect of human life. The future of the field is bright with opportunities, but also riddled with challenges, ranging from further theoretical development through advances in fabrication technologies, to developing high-performance nano- and microscale systems, devices, and structures, including transducers, switches, logic gates, actuators and sensors. MEMS and NEMS: Systems, Devices, and Structures is designed to help you meet those challenges and solve fundamental, experimental, and applied problems. Written from a multi-disciplinary perspective, this book forms the basis for the synthesis, modeling, analysis, simulation, control, prototyping, and fabrication of MEMS and NEMS. The author brings together the various paradigms, methods, and technologies associated with MEMS and NEMS to show how to synthesize, analyze, design, and fabricate them. Focusing on the basics, he illustrates the development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization. The applications of MEMS and NEMS in areas such as biotechnology, medicine, avionics, transportation, and defense are virtually limitless. This book helps prepare you to take advantage of their inherent opportunities and effectively solve problems related to their configurations, systems integration, and control.

Author : Ajay Giri Prakash Kottapalli,Kai Tao,Debarun Sengupta,Michael S. Triantafyllou
Publisher : Springer
Page : 85 pages
File Size : 53,6 Mb
Release : 2019-02-28
Category : Technology & Engineering
ISBN : 9783030055547

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Self-Powered and Soft Polymer MEMS/NEMS Devices by Ajay Giri Prakash Kottapalli,Kai Tao,Debarun Sengupta,Michael S. Triantafyllou Pdf

This book explores the fabrication of soft material and biomimetic MEMS sensors, presents a review of MEMS/NEMS energy harvesters and self-powered sensors, and focuses on the recent efforts in developing flexible and wearable piezoelectric nanogenerators. It also includes a critical analysis of various energy harvesting principles, such as electromagnetic, piezoelectric, electrostatic, triboelectric, and magnetostrictive. This multidisciplinary book is appropriate for students and professionals in the fields of material science, mechanical engineering, electrical engineering, and bioengineering.

Author : Sergey Edward Lyshevski
Publisher : CRC Press
Page : 461 pages
File Size : 43,5 Mb
Release : 2018-10-03
Category : Technology & Engineering
ISBN : 9781420040517

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MEMS and NEMS by Sergey Edward Lyshevski Pdf

The development of micro- and nano-mechanical systems (MEMS and NEMS) foreshadows momentous changes not only in the technological world, but in virtually every aspect of human life. The future of the field is bright with opportunities, but also riddled with challenges, ranging from further theoretical development through advances in fabrication technologies, to developing high-performance nano- and microscale systems, devices, and structures, including transducers, switches, logic gates, actuators and sensors. MEMS and NEMS: Systems, Devices, and Structures is designed to help you meet those challenges and solve fundamental, experimental, and applied problems. Written from a multi-disciplinary perspective, this book forms the basis for the synthesis, modeling, analysis, simulation, control, prototyping, and fabrication of MEMS and NEMS. The author brings together the various paradigms, methods, and technologies associated with MEMS and NEMS to show how to synthesize, analyze, design, and fabricate them. Focusing on the basics, he illustrates the development of NEMS and MEMS architectures, physical representations, structural synthesis, and optimization. The applications of MEMS and NEMS in areas such as biotechnology, medicine, avionics, transportation, and defense are virtually limitless. This book helps prepare you to take advantage of their inherent opportunities and effectively solve problems related to their configurations, systems integration, and control.

Author : Jaume Verd,Jaume Segura
Publisher : MDPI
Page : 166 pages
File Size : 54,9 Mb
Release : 2019-06-25
Category : Technology & Engineering
ISBN : 9783039210688

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Development of CMOS-MEMS/NEMS Devices by Jaume Verd,Jaume Segura Pdf

Micro and nano-electro-mechanical system (M/NEMS) devices constitute key technological building blocks to enable increased additional functionalities within Integrated Circuits (ICs) in the More-Than-Moore era, as described in the International Technology Roadmap for Semiconductors. The CMOS ICs and M/NEMS dies can be combined in the same package (SiP), or integrated within a single chip (SoC). In the SoC approach the M/NEMS devices are monolithically integrated together with CMOS circuitry allowing the development of compact and low-cost CMOS-M/NEMS devices for multiple applications (physical sensors, chemical sensors, biosensors, actuators, energy actuators, filters, mechanical relays, and others). On-chip CMOS electronics integration can overcome limitations related to the extremely low-level signals in sub-micrometer and nanometer scale electromechanical transducers enabling novel breakthrough applications. This Special Issue aims to gather high quality research contributions dealing with MEMS and NEMS devices monolithically integrated with CMOS, independently of the final application and fabrication approach adopted (MEMS-first, interleaved MEMS, MEMS-last or others).]

Author : Cornelius T. Leondes
Publisher : Springer
Page : 416 pages
File Size : 53,7 Mb
Release : 2006-09-06
Category : Technology & Engineering
ISBN : 0387245200

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Mems/Nems by Cornelius T. Leondes Pdf

This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.

Author : Peter J. Hesketh
Publisher : The Electrochemical Society
Page : 517 pages
File Size : 46,7 Mb
Release : 2006
Category : Chemical detectors
ISBN : 9781566775106

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Chemical Sensors 7 -and- MEMS/NEMS 7 by Peter J. Hesketh Pdf

The latest developments in chemical and biological sensor research and development. Topics include: 1. new selective species recognition surfaces and materials; 2. molecular recognition materials and approaches to minimize non-specific binding; 3. semi-selective species recognition materials; 4. novel methods for signal processing, signal amplification, and detection; 5. detection systems for multiple analytes in complex samples; 6. sensor arrays; and 7. analytical systems and approaches.

Author : John A. Pelesko,David H. Bernstein
Publisher : CRC Press
Page : 382 pages
File Size : 55,8 Mb
Release : 2002-11-25
Category : Mathematics
ISBN : 9781420035292

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Modeling MEMS and NEMS by John A. Pelesko,David H. Bernstein Pdf

Designing small structures necessitates an a priori understanding of various device behaviors. The way to gain such understanding is to construct, analyze, and interpret the proper mathematical model. Through such models, Modeling MEMS and NEMS illuminates microscale and nanoscale phenomena, thereby facilitating the design and optimization o

Author : Shekhar Bhansali,Abhay Vasudev
Publisher : Elsevier
Page : 512 pages
File Size : 52,5 Mb
Release : 2012-07-18
Category : Technology & Engineering
ISBN : 9780857096272

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Mems for Biomedical Applications by Shekhar Bhansali,Abhay Vasudev Pdf

The application of Micro Electro Mechanical Systems (MEMS) in the biomedical field is leading to a new generation of medical devices. MEMS for biomedical applications reviews the wealth of recent research on fabrication technologies and applications of this exciting technology. The book is divided into four parts: Part one introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms. Part two describes applications of MEMS for biomedical sensing and diagnostic applications. MEMS for in vivo sensing and electrical impedance spectroscopy are investigated, along with ultrasonic transducers, and lab-on-chip devices. MEMS for tissue engineering and clinical applications are the focus of part three, which considers cell culture and tissue scaffolding devices, BioMEMS for drug delivery and minimally invasive medical procedures. Finally, part four reviews emerging biomedical applications of MEMS, from implantable neuroprobes and ocular implants to cellular microinjection and hybrid MEMS. With its distinguished editors and international team of expert contributors, MEMS for biomedical applications provides an authoritative review for scientists and manufacturers involved in the design and development of medical devices as well as clinicians using this important technology. Reviews the wealth of recent research on fabrication technologies and applications of Micro Electro Mechanical Systems (MEMS) in the biomedical field Introduces the fundamentals of MEMS for biomedical applications, exploring the microfabrication of polymers and reviewing sensor and actuator mechanisms Considers MEMS for biomedical sensing and diagnostic applications, along with MEMS for in vivo sensing and electrical impedance spectroscopy

Author : Cornelius T. Leondes
Publisher : Springer
Page : 2094 pages
File Size : 49,9 Mb
Release : 2006-09-06
Category : Technology & Engineering
ISBN : 0387245200

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Mems/Nems by Cornelius T. Leondes Pdf

This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.

Author : Humberto Campanella
Publisher : Artech House
Page : 364 pages
File Size : 53,5 Mb
Release : 2010
Category : Technology & Engineering
ISBN : 9781607839781

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Acoustic Wave and Electromechanical Resonators by Humberto Campanella Pdf

This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensing and RF systems. Moreover, this one-stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping you to choose the right approaches for your projects. Over 280 illustrations and more than 130 equations support key topics throughout the book.

Author : A. Kholsa,S. A. Akbar,J. Koehne,P. J. Hesketh,M. Navaei,P. K. Sekhar,D. J. Kim,J.-W. Choi,S. D. Minteer,P. Vanysek,P. C. Trulove,R. Pratap
Publisher : The Electrochemical Society
Page : 109 pages
File Size : 50,6 Mb
Release : 2018-09-21
Category : Science
ISBN : 9781607688631

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Wearable Sensors and Systems 1 -and- Microfabricated and Nanofabricated Systems for MEMS/NEMS 14 by A. Kholsa,S. A. Akbar,J. Koehne,P. J. Hesketh,M. Navaei,P. K. Sekhar,D. J. Kim,J.-W. Choi,S. D. Minteer,P. Vanysek,P. C. Trulove,R. Pratap Pdf