Mems Vibratory Gyroscopes

Author : Cenk Acar,Andrei Shkel
Publisher : Springer Science & Business Media
Page : 262 pages
File Size : 55,5 Mb
Release : 2008-12-16
Category : Technology & Engineering
ISBN : 9780387095363

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MEMS Vibratory Gyroscopes by Cenk Acar,Andrei Shkel Pdf

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.

Author : Cenk Acar
Publisher : Unknown
Page : 256 pages
File Size : 42,7 Mb
Release : 2008
Category : Gyroscopes
ISBN : OCLC:457236317

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MEMS Vibratory Gyroscopes by Cenk Acar Pdf

Author : Doruk Senkal,Andrei M. Shkel
Publisher : John Wiley & Sons
Page : 176 pages
File Size : 48,5 Mb
Release : 2020-05-11
Category : Technology & Engineering
ISBN : 9781119441861

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Whole Angle MEMS Gyroscopes by Doruk Senkal,Andrei M. Shkel Pdf

Presents the mathematical framework, technical language, and control systems know-how needed to design, develop, and instrument micro-scale whole-angle gyroscopes This comprehensive reference covers the technical fundamentals, mathematical framework, and common control strategies for degenerate mode gyroscopes, which are used in high-precision navigation applications. It explores various energy loss mechanisms and the effect of structural imperfections, along with requirements for continuous rate integrating gyroscope operation. It also provides information on the fabrication of MEMS whole-angle gyroscopes and the best methods of sustaining oscillations. Whole-Angle Gyroscopes: Challenges and Opportunities begins with a brief overview of the two main types of Coriolis Vibratory Gyroscopes (CVGs): non-degenerate mode gyroscopes and degenerate mode gyroscopes. It then introduces readers to the Foucault Pendulum analogy and a review of MEMS whole angle mode gyroscope development. Chapters cover: dynamics of whole-angle coriolis vibratory gyroscopes; fabrication of whole-angle coriolis vibratory gyroscopes; energy loss mechanisms of coriolis vibratory gyroscopes; and control strategies for whole-angle coriolis vibratory gyro- scopes. The book finishes with a chapter on conventionally machined micro-machined gyroscopes, followed by one on micro-wineglass gyroscopes. In addition, the book: Lowers barrier to entry for aspiring scientists and engineers by providing a solid understanding of the fundamentals and control strategies of degenerate mode gyroscopes Organizes mode-matched mechanical gyroscopes based on three classifications: wine-glass, ring/disk, and mass spring mechanical elements Includes case studies on conventionally micro-machined and 3-D micro-machined gyroscopes Whole-Angle Gyroscopes is an ideal book for researchers, scientists, engineers, and college/graduate students involved in the technology. It will also be of great benefit to engineers in control systems, MEMS production, electronics, and semi-conductors who work with inertial sensors.

Author : Juntao Fei
Publisher : Unknown
Page : 0 pages
File Size : 53,8 Mb
Release : 2011-10
Category : Accelerometers
ISBN : 1614704872

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Advanced Control Design of MEMS Vibratory Gyroscopes by Juntao Fei Pdf

MEMS (Micro Electro Mechanical Systems) technologies were developed by applying semiconductor microfabrication technologies to make three-dimensional microstructures and mechanical systems. MEMS technologies offer the advantages of batch fabrication of numbers of devices as well as an ability to integrate multiple functional units in a small area, which is important for developing smart and sophisticated devices. Gyroscopes are commonly used sensors for measuring angular velocity in many areas of applications such as navigation, homing, and control stabilisation. Fabrication imperfections and thermal, mechanical noise may hinder the measurement of angular velocity of MEMS gyroscope. This book presents a comprehensive treatment of the analysis and advanced control design of MEMS gyroscope for the problem of angular velocity measurement and minimisation of the cross coupling between two axes.

Author : Vladislav Apostolyuk
Publisher : Springer
Page : 117 pages
File Size : 46,8 Mb
Release : 2015-08-12
Category : Technology & Engineering
ISBN : 9783319221984

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Coriolis Vibratory Gyroscopes by Vladislav Apostolyuk Pdf

This book provides the latest theoretical analysis and design methodologies of different types of Coriolis vibratory gyroscopes (CVG). Together, the chapters analyze different types of sensitive element designs and their kinematics, derivation of motion equations, analysis of sensitive elements dynamics in modulated and demodulated signals, calculation and optimization of main performance characteristics, and signal processing and control. Essential aspects of numerical simulation of CVG using Simulink® are also covered. This is an ideal book for graduate students, researchers, and engineers working in fields that require gyroscope application, including but not limited to: inertial sensors and systems, automotive and consumer electronics, small unmanned aircraft control systems, personal mobile navigation systems and related software development, and augmented and virtual reality systems.

Author : Valeri V. Chikovani
Publisher : Cambridge Scholars Publishing
Page : 363 pages
File Size : 47,6 Mb
Release : 2023-12-15
Category : Technology & Engineering
ISBN : 9781527551091

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Vibratory Gyroscopes Based on Micro-Electro-Mechanical and non-Micro-Electro-Mechanical Systems by Valeri V. Chikovani Pdf

This book provides a unified approach for the two versions of Coriolis vibratory gyroscopes: Micro-Electro-Mechanical System (MEMS) and non-MEMS. It describes a new, differential mode of operation, analyzing the new triple mode gyro—rate, rate-integrating, and differential. The latter provides the gyro with an increased versatility by providing the maximum possible accuracy under changeable motion parameters and environmental conditions. The book also presents computer simulation, experiments, and test results on the rejection of external disturbances, and considers the fabrication processes of MEMS, metallic and quartz resonators. It will interest researchers, scientists, engineers, and students specializing in the field of inertial sensors, as well as engineers of digital control systems, and inertial sensors test-engineers. It can also be used as a reference book when designing vibratory gyros.

Author : Doruk Senkal,Andrei M. Shkel
Publisher : John Wiley & Sons
Page : 176 pages
File Size : 45,5 Mb
Release : 2020-06-16
Category : Technology & Engineering
ISBN : 9781119441885

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Whole-Angle MEMS Gyroscopes by Doruk Senkal,Andrei M. Shkel Pdf

Presents the mathematical framework, technical language, and control systems know-how needed to design, develop, and instrument micro-scale whole-angle gyroscopes This comprehensive reference covers the technical fundamentals, mathematical framework, and common control strategies for degenerate mode gyroscopes, which are used in high-precision navigation applications. It explores various energy loss mechanisms and the effect of structural imperfections, along with requirements for continuous rate integrating gyroscope operation. It also provides information on the fabrication of MEMS whole-angle gyroscopes and the best methods of sustaining oscillations. Whole-Angle Gyroscopes: Challenges and Opportunities begins with a brief overview of the two main types of Coriolis Vibratory Gyroscopes (CVGs): non-degenerate mode gyroscopes and degenerate mode gyroscopes. It then introduces readers to the Foucault Pendulum analogy and a review of MEMS whole angle mode gyroscope development. Chapters cover: dynamics of whole-angle coriolis vibratory gyroscopes; fabrication of whole-angle coriolis vibratory gyroscopes; energy loss mechanisms of coriolis vibratory gyroscopes; and control strategies for whole-angle coriolis vibratory gyro- scopes. The book finishes with a chapter on conventionally machined micro-machined gyroscopes, followed by one on micro-wineglass gyroscopes. In addition, the book: Lowers barrier to entry for aspiring scientists and engineers by providing a solid understanding of the fundamentals and control strategies of degenerate mode gyroscopes Organizes mode-matched mechanical gyroscopes based on three classifications: wine-glass, ring/disk, and mass spring mechanical elements Includes case studies on conventionally micro-machined and 3-D micro-machined gyroscopes Whole-Angle Gyroscopes is an ideal book for researchers, scientists, engineers, and college/graduate students involved in the technology. It will also be of great benefit to engineers in control systems, MEMS production, electronics, and semi-conductors who work with inertial sensors.

Author : Xuezhong Wu,Xiang Xi,Yulie Wu,Dingbang Xiao
Publisher : Springer Nature
Page : 208 pages
File Size : 40,5 Mb
Release : 2021-06-19
Category : Technology & Engineering
ISBN : 9789811627262

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Cylindrical Vibratory Gyroscope by Xuezhong Wu,Xiang Xi,Yulie Wu,Dingbang Xiao Pdf

This book introduces readers to the shell structure, operating principle, manufacturing process, and control theory for cylindrical vibratory gyroscopes. The cylindrical vibratory gyroscope is an important type of Coriolis vibratory gyroscope that holds considerable potential for development and application. The main aspects addressed include: operating principle and structure, theoretical analysis and modeling, dynamic analysis and modeling, manufacturing process, parameter testing methods, closed-loop control, and the error compensation mechanism in cylindrical vibratory gyroscopes.

Author : Cornelius T. Leondes
Publisher : Springer Science & Business Media
Page : 2094 pages
File Size : 48,8 Mb
Release : 2007-10-08
Category : Technology & Engineering
ISBN : 9780387257860

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Mems/Nems by Cornelius T. Leondes Pdf

This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.

Author : Huiliang Cao
Publisher : Springer
Page : 0 pages
File Size : 43,7 Mb
Release : 2024-04-19
Category : Technology & Engineering
ISBN : 9811992495

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Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope by Huiliang Cao Pdf

This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding. It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.

Author : Huiliang Cao
Publisher : Springer Nature
Page : 231 pages
File Size : 54,8 Mb
Release : 2023-04-17
Category : Technology & Engineering
ISBN : 9789811992476

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Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope by Huiliang Cao Pdf

This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding. It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.

Author : Cenk Acar,Andrei Shkel
Publisher : Springer
Page : 260 pages
File Size : 50,5 Mb
Release : 2008-12-16
Category : Technology & Engineering
ISBN : 0387095365

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MEMS Vibratory Gyroscopes by Cenk Acar,Andrei Shkel Pdf

MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.

Author : Oliver Brand,Isabelle Dufour,Stephen Heinrich,Fabien Josse
Publisher : John Wiley & Sons
Page : 512 pages
File Size : 42,6 Mb
Release : 2015-04-22
Category : Technology & Engineering
ISBN : 9783527676354

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Resonant MEMS by Oliver Brand,Isabelle Dufour,Stephen Heinrich,Fabien Josse Pdf

Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

Author : Haoran Wen
Publisher : Springer Nature
Page : 127 pages
File Size : 42,8 Mb
Release : 2019-09-14
Category : Technology & Engineering
ISBN : 9783030254704

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Toward Inertial-Navigation-on-Chip by Haoran Wen Pdf

This thesis develops next-generation multi-degree-of-freedom gyroscopes and inertial measurement units (IMU) using micro-electromechanical-systems (MEMS) technology. It covers both a comprehensive study of the physics of resonator gyroscopes and novel micro/nano-fabrication solutions to key performance limits in MEMS resonator gyroscopes. Firstly, theoretical and experimental studies of physical phenomena including mode localization, nonlinear behavior, and energy dissipation provide new insights into challenges like quadrature errors and flicker noise in resonator gyroscope systems. Secondly, advanced designs and micro/nano-fabrication methods developed in this work demonstrate valuable applications to a wide range of MEMS/NEMS devices. In particular, the HARPSS+ process platform established in this thesis features a novel slanted nano-gap transducer, which enabled the first wafer-level-packaged single-chip IMU prototype with co-fabricated high-frequency resonant triaxial gyroscopes and high-bandwidth triaxial micro-gravity accelerometers. This prototype demonstrates performance amongst the highest to date, with unmatched robustness and potential for flexible substrate integration and ultra-low-power operation. This thesis shows a path toward future low-power IMU-based applications including wearable inertial sensors, health informatics, and personal inertial navigation.

Author : Alberto Corigliano,Raffaele Ardito,Claudia Comi,Attilio Frangi,Aldo Ghisi,Stefano Mariani
Publisher : John Wiley & Sons
Page : 332 pages
File Size : 45,7 Mb
Release : 2018-04-02
Category : Technology & Engineering
ISBN : 9781119053835

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Mechanics of Microsystems by Alberto Corigliano,Raffaele Ardito,Claudia Comi,Attilio Frangi,Aldo Ghisi,Stefano Mariani Pdf

Mechanics of Microsystems Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi and Stefano Mariani, Politecnico di Milano, Italy A mechanical approach to microsystems, covering fundamental concepts including MEMS design, modelling and reliability Mechanics of Microsystems takes a mechanical approach to microsystems and covers fundamental concepts including MEMS design, modelling and reliability. The book examines the mechanical behaviour of microsystems from a ‘design for reliability’ point of view and includes examples of applications in industry. Mechanics of Microsystems is divided into two main parts. The first part recalls basic knowledge related to the microsystems behaviour and offers an overview on microsystems and fundamental design and modelling tools from a mechanical point of view, together with many practical examples of real microsystems. The second part covers the mechanical characterization of materials at the micro-scale and considers the most important reliability issues (fracture, fatigue, stiction, damping phenomena, etc) which are fundamental to fabricate a real working device. Key features: Provides an overview of MEMS, with special focus on mechanical-based Microsystems and reliability issues. Includes examples of applications in industry. Accompanied by a website hosting supplementary material. The book provides essential reading for researchers and practitioners working with MEMS, as well as graduate students in mechanical, materials and electrical engineering.