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Author : Jean-Michel Karam,John Yasaitis
Publisher : SPIE-International Society for Optical Engineering
Page : 0 pages
File Size : 53,5 Mb
Release : 2000
Category : Technology & Engineering
ISBN : 0819438308
Author : Anonim
Publisher : Unknown
Page : 220 pages
File Size : 53,9 Mb
Release : 2005
Category : Micromechanics
ISBN : UOM:39015058298848
Author : Norman C. Tien,Society of Photo-Optical Instrumentation Engineers
Publisher : Unknown
Page : 440 pages
File Size : 45,7 Mb
Release : 2001
Category : Electromechanical devices
ISBN : OCLC:759718482
Author : Norman C. Tien,Qing-An Huang
Publisher : SPIE-International Society for Optical Engineering
Page : 460 pages
File Size : 44,6 Mb
Release : 2001
Category : Technology & Engineering
ISBN : UOM:39015051620402
Author : Francis E. H. Tay
Publisher : Springer Science & Business Media
Page : 302 pages
File Size : 49,9 Mb
Release : 2013-06-29
Category : Technology & Engineering
ISBN : 9781475757910
The field of materials and process integration for MEMS research has an extensive past as well as a long and promising future. Researchers, academicians and engineers from around the world are increasingly devoting their efforts on the materials and process integration issues and opportunities in MEMS devices. These efforts are crucial to sustain the long-term growth of the MEMS field. The commercial MEMS community is heavily driven by the push for profitable and sustainable products. In the course of establishing high volume and low-cost production processes, the critical importance of materials properties, behaviors, reliability, reproducibility, and predictability, as well as process integration of compatible materials systems become apparent. Although standard IC fabrication steps, particularly lithographic techniques, are leveraged heavily in the creation of MEMS devices, additional customized and novel micromachining techniques are needed to develop sophisticated MEMS structures. One of the most common techniques is bulk micromachining, by which micromechanical structures are created by etching into the bulk of the substrates with either anisotropic etching with strong alk:ali solution or deep reactive-ion etching (DRIB). The second common technique is surface micromachining, by which planar microstructures are created by sequential deposition and etching of thin films on the surface of the substrate, followed by a fmal removal of sacrificial layers to release suspended structures. Other techniques include deep lithography and plating to create metal structures with high aspect ratios (LIGA), micro electrodischarge machining (J.
Author : Karen W. Markus,Semiconductor Equipment and Materials International,Society of Photo-optical Instrumentation Engineers,National Institute of Standards and Technology (U.S.)
Publisher : SPIE-International Society for Optical Engineering
Page : 352 pages
File Size : 55,7 Mb
Release : 1995
Category : Technology & Engineering
ISBN : UCSD:31822021096540
Author : Mark J. Jackson
Publisher : CRC Press
Page : 416 pages
File Size : 49,5 Mb
Release : 2005-11-10
Category : Technology & Engineering
ISBN : 9781420028270
Nanotechnology, seen as the next leap forward in the industrial revolution, requires that manufacturers develop processes that revolutionize the way small products are made. Microfabrication and Nanomanufacturing focuses on the technology of fabrication and manufacturing of engineering materials at these levels. The book provides an overview of techniques used in the semiconductor industry. It also discusses scaling and manufacturing processes operating at the nanoscale for non-semiconductor applications; the construction of nanoscale components using established lithographic techniques; bulk and surface micromachining techniques used for etching, machining, and molding procedures; and manufacturing techniques such as injection molding and hot embossing. This authoritative compilation describes non-traditional micro and nanoscale processing that uses a newly developed technique called pulsed water jet machining as well as the efficient removal of materials using optical energy. Additional chapters focus on the development of nanoscale processes for producing products other than semiconductors; the use of abrasive particles embedded in porous tools; and the deposition and application of nanocrystalline diamond. Economic factors are also presented and concern the promotion and commercialization of micro and nanoscale products and how demand will eventually drive the market.
Author : Sumit Bhowmik,Divya Zindani
Publisher : Springer
Page : 70 pages
File Size : 42,7 Mb
Release : 2019-02-09
Category : Technology & Engineering
ISBN : 9783030130398
This book presents some of the recent hybrid micro-machining processes used to manufacture miniaturized products with micro level precision. The current developed technologies to manufacture the micro dimensioned products while meeting the desired precision level are described within the text. The authors especially highlight research that focuses on the development of new micro machining platforms while integrating the different technologies to manufacture the micro components in a high throughput and cost effective manner.
Author : Society of Photo-optical Instrumentation Engineers (United States),SPIE (Society)
Publisher : Unknown
Page : 128 pages
File Size : 53,9 Mb
Release : 2014
Category : Electromechanical devices
ISBN : 0819498866
Author : P. Rai-Choudhury
Publisher : IET
Page : 716 pages
File Size : 55,5 Mb
Release : 1997
Category : Technology & Engineering
ISBN : 0852969112
Contains useful process details, recipes, tables, charts and includes numerous device applications.
Author : Ichiro Inasaki
Publisher : Springer Science & Business Media
Page : 977 pages
File Size : 44,8 Mb
Release : 2007-05-08
Category : Science
ISBN : 9780306470004
Faced with ever-increasing market demands, manufacturing industry is forced to seek innovation and technological breakthrough. This state-of-the-art text aims to integrate broad aspects of precision and production engineering to cope with rapid changes in market needs and technological developments as we enter the 21st century. It addresses basic theory, extensive research in advanced topics, industrial applications, and relevant surveys in related fields. Major subjects covered by this book include: Advanced manufacturing systems; Ultra-precision machining and micro machining; Nanotechnology for fabrication and measurement; Chemo-mechanical processes; Rapid prototyping technology; New materials and advanced processes; Computer-aided production engineering; Manufacturing process control; Planning. This volume contains the proceedings of the 10th International Conference on Precision Engineering (ICPE), which was held in July 2001, in Yokohama, Japan. ICPE is a well-established conference in the field of production and precision engineering, covering a wide range of topics for future-oriented manufacturing systems and processes; it is organized by the Japan Society for Precision Engineering (JSPE). This book can be used as a reference for graduate and undergraduate courses in precision and production engineering, and also for researchers and industrial engineers to capture current trends in this field.
Author : M. Henini,M Razeghi
Publisher : Elsevier
Page : 532 pages
File Size : 51,5 Mb
Release : 2002-12-11
Category : Science
ISBN : 0080507913
The use of lasers which emit infra-red radiation and sophisticated detectors of IR radiation is increasing dramatically: they are being used for long-distance fibre-optic communications and remote environmental monitoring and sensing. Thus they are of interest to the telecommunications industry and the military in particular. This book has been designed to bring together what is known on these devices, using an international group of contributors.
Author : Behraad Bahreyni
Publisher : William Andrew
Page : 250 pages
File Size : 40,5 Mb
Release : 2008-10-20
Category : Technology & Engineering
ISBN : 9780815519713
This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry. Offers numerous academic and industrial examples of resonant MEMS Provides an analytic model of device behaviour Explains two-port systems in detail Devotes ample space to excitation and signal detection methods Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices
Author : Prem Pal,Kazuo Sato
Publisher : CRC Press
Page : 395 pages
File Size : 47,7 Mb
Release : 2017-04-07
Category : Science
ISBN : 9781315341279
Microelectromechanical systems (MEMS)-based sensors and actuators have become remarkably popular in the past few decades. Rapid advances have taken place in terms of both technologies and techniques of fabrication of MEMS structures. Wet chemical–based silicon bulk micromachining continues to be a widely used technique for the fabrication of microstructures used in MEMS devices. Researchers all over the world have contributed significantly to the advancement of wet chemical–based micromachining, from understanding the etching mechanism to exploring its application to the fabrication of simple to complex MEMS structures. In addition to its various benefits, one of the unique features of wet chemical–based bulk micromachining is the ability to fabricate slanted sidewalls, such as 45° walls as micromirrors, as well as freestanding structures, such as cantilevers and diaphragms. This makes wet bulk micromachining necessary for the fabrication of structures for myriad applications. This book provides a comprehensive understating of wet bulk micromachining for the fabrication of simple to advanced microstructures for various applications in MEMS. It includes introductory to advanced concepts and covers research on basic and advanced topics on wet chemical–based silicon bulk micromachining. The book thus serves as an introductory textbook for undergraduate- and graduate-level students of physics, chemistry, electrical and electronic engineering, materials science, and engineering, as well as a comprehensive reference for researchers working or aspiring to work in the area of MEMS and for engineers working in microfabrication technology.
Author : Yi Qin
Publisher : William Andrew
Page : 858 pages
File Size : 46,9 Mb
Release : 2015-05-08
Category : Technology & Engineering
ISBN : 9780323312677
Micromanufacturing Engineering and Technology, Second Edition, covers the major topics of micro-manufacturing. The book not only covers theory and manufacturing processes, but it uniquely focuses on a broader range of practical aspects of micro-manufacturing engineering and utilization by also covering materials, tools and equipment, manufacturing system issues, control aspects and case studies. By explaining material selection, design considerations and economic aspects, the book empowers engineers in choosing among competing technologies. With a focus on low-cost and high-volume micro-manufacturing processes, the updated title covers technologies such as micro-mechanical-cutting, laser-machining, micro-forming, micro-EDM, micro-ECM, hot-embossing, micro-injection molding, laser micro-sintering, thin film fabrication, inkjet technology, micro-joining, multiple processes machines, and more. Edited by one of the few world-experts in this relatively new, but rapidly-expanding area and presenting chapters written by a 40-strong team of leading industry specialists, this book is an invaluable source of information for engineers, R&D researchers and academics. Covers key micro-manufacturing technologies, processes and equipment with high-volume production capabilities, enabling large companies as well as SMEs to introduce those technologies in production and business and reduce production costs Outlines micro-manufacturing system engineering and practical issues pertaining to material, design, handling, metrology, inspection, testing, sensors, control, system integration and software, and micro-factories Enables manufacturing practitioners to choose the right technology suitable for a particular product-manufacture
