Nano And Micro Metrology

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Fundamental Principles of Engineering Nanometrology

Richard Leach
Fundamental Principles of Engineering Nanometrology Book PDF

Author : Richard Leach
Publisher : William Andrew
Page : 352 pages
File Size : 48,5 Mb
Release : 2009-09-03
Category : Technology & Engineering
ISBN : 1437778321

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Fundamental Principles of Engineering Nanometrology by Richard Leach Pdf

Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study. Provides a basic introduction to measurement and instruments Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal , variable focus, and scattering instruments) Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties) Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge

Nano- and Micro-metrology

Heidi Ottevaere,Peter DeWolf,Diederik S. Wiersma
Nano and Micro metrology Book PDF

Author : Heidi Ottevaere,Peter DeWolf,Diederik S. Wiersma
Publisher : SPIE-International Society for Optical Engineering
Page : 370 pages
File Size : 52,9 Mb
Release : 2005
Category : Technology & Engineering
ISBN : UOM:39015061007632

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Nano- and Micro-metrology by Heidi Ottevaere,Peter DeWolf,Diederik S. Wiersma Pdf

Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.

Surface Metrology for Micro- and Nanofabrication

Wei Gao
Surface Metrology for Micro and Nanofabrication Book PDF

Author : Wei Gao
Publisher : Elsevier
Page : 452 pages
File Size : 42,6 Mb
Release : 2020-10-30
Category : Technology & Engineering
ISBN : 9780128178515

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Surface Metrology for Micro- and Nanofabrication by Wei Gao Pdf

Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication. Provides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology Helps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and components Assesses the best techniques for repairing micro-defects

Fundamental Principles of Engineering Nanometrology

Richard Leach
Fundamental Principles of Engineering Nanometrology Book PDF

Author : Richard Leach
Publisher : Elsevier
Page : 384 pages
File Size : 46,9 Mb
Release : 2014-05-17
Category : Science
ISBN : 9781455777501

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Fundamental Principles of Engineering Nanometrology by Richard Leach Pdf

Working at the nano-scale demands an understanding of the high-precision measurement techniques that make nanotechnology and advanced manufacturing possible. Richard Leach introduces these techniques to a broad audience of engineers and scientists involved in nanotechnology and manufacturing applications and research. He also provides a routemap and toolkit for metrologists engaging with the rigor of measurement and data analysis at the nano-scale. Starting from the fundamentals of precision measurement, the author progresses into different measurement and characterization techniques. The focus on nanometrology in engineering contexts makes this book an essential guide for the emerging nanomanufacturing / nanofabrication sector, where measurement and standardization requirements are paramount both in product specification and quality assurance. This book provides engineers and scientists with the methods and understanding needed to design and produce high-performance, long-lived products while ensuring that compliance and public health requirements are met. Updated to cover new and emerging technologies, and recent developments in standards and regulatory frameworks, this second edition includes many new sections, e.g. new technologies in scanning probe and e-beam microscopy, recent developments in interferometry and advances in co-ordinate metrology. Demystifies nanometrology for a wide audience of engineers, scientists, and students involved in nanotech and advanced manufacturing applications and research Introduces metrologists to the specific techniques and equipment involved in measuring at the nano-scale or to nano-scale uncertainty Fully updated to cover the latest technological developments, standards, and regulations

Micro/Nano Manufacturing

Hans Nørgaard Hansen,Guido Tosello
Micro Nano Manufacturing Book PDF

Author : Hans Nørgaard Hansen,Guido Tosello
Publisher : MDPI
Page : 191 pages
File Size : 49,5 Mb
Release : 2018-07-03
Category : Electronic books
ISBN : 9783038426042

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Micro/Nano Manufacturing by Hans Nørgaard Hansen,Guido Tosello Pdf

This book is a printed edition of the Special Issue "Micro/Nano Manufacturing" that was published in Micromachines

Nanoscale Calibration Standards and Methods

Günter Wilkening,Ludger Koenders
Nanoscale Calibration Standards and Methods Book PDF

Author : Günter Wilkening,Ludger Koenders
Publisher : John Wiley & Sons
Page : 541 pages
File Size : 51,6 Mb
Release : 2006-05-12
Category : Technology & Engineering
ISBN : 9783527606870

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Nanoscale Calibration Standards and Methods by Günter Wilkening,Ludger Koenders Pdf

The quantitative determination of the properties of micro- and nanostructures is essential in research and development. It is also a prerequisite in process control and quality assurance in industry. The knowledge of the geometrical dimensions of structures in most cases is the base, to which other physical and chemical properties are linked. Quantitative measurements require reliable and stable instruments, suitable measurement procedures as well as appropriate calibration artefacts and methods. The seminar "NanoScale 2004" (6th Seminar on Quantitative Microscopy and 2nd Seminar on Nanoscale Calibration Standards and Methods) at the National Metrology Institute (Physikalisch-Technische Bundesanstalt PTB), Braunschweig, Germany, continues the series of seminars on Quantitative Microscopy. The series stimulates the exchange of information between manufacturers of relevant hard- and software and the users in science and industry. Topics addressed in these proceedings are a) the application of quantitative measurements and measurement problems in: microelectronics, microsystems technology, nano/quantum/molecular electronics, chemistry, biology, medicine, environmental technology, materials science, surface processing b) calibration & correction methods: calibration methods, calibration standards, calibration procedures, traceable measurements, standardization, uncertainty of measurements c) instrumentation and methods: novel/improved instruments and methods, reproducible probe/sample positioning, position-measuring systems, novel/improved probe/detector systems, linearization methods, image processing

Micro-Nano Mechatronics

Chikara Nagai
Micro Nano Mechatronics Book PDF

Author : Chikara Nagai
Publisher : BoD – Books on Demand
Page : 380 pages
File Size : 43,8 Mb
Release : 2013-06-05
Category : Technology & Engineering
ISBN : 9789535111047

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Micro-Nano Mechatronics by Chikara Nagai Pdf

Micro/Nano mechatronics is currently used in broader spectra, ranging from basic applications in robotics, actuators, sensors, semiconductors, automobiles, and machine tools. As a strategic technology highlighting the 21st century, this technology is extended to new applications in bio-medical systems and life science, construction machines, and aerospace equipment, welfare/human life engineering, and other brand new scopes. Basically, the miniaturizing technology is important to realize high performance, low energy consumption, low cost performance, small space instrumentation, light-weight, and so on. This book presents the summary of our project Center of Excellence for Education and Research of Micro-Nano Mechatronics. The project implements a strategy to realize applications of micro-nano mechatronics, which are based on mechanical engineering or materials science, control systems engineering, and advanced medical engineering. The chapters describe the research advances in micro/nano measurement and control, micro/nano design and manufacturing, nano materials science, and their applications in biomedical engineering. The publication of this book was supported by Nagoya University, the 21st COE program "Micro- and NanoMechatronics for Information-Based Society," and the global COE program “COE for Education and Research of Micro-Nano Mechatronics.”

The Nano-Micro Interface, 2 Volumes

Marcel Van de Voorde,Matthias Werner,Hans-Jörg Fecht
The Nano Micro Interface 2 Volumes Book PDF

Author : Marcel Van de Voorde,Matthias Werner,Hans-Jörg Fecht
Publisher : John Wiley & Sons
Page : 756 pages
File Size : 45,8 Mb
Release : 2015-01-12
Category : Technology & Engineering
ISBN : 9783527679218

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The Nano-Micro Interface, 2 Volumes by Marcel Van de Voorde,Matthias Werner,Hans-Jörg Fecht Pdf

Controlling the properties of materials by modifying their composition and by manipulating the arrangement of atoms and molecules is a dream that can be achieved by nanotechnology. As one of the fastest developing and innovative -- as well as well-funded -- fields in science, nanotechnology has already significantly changed the research landscape in chemistry, materials science, and physics, with numerous applications in consumer products, such as sunscreens and water-repellent clothes. It is also thanks to this multidisciplinary field that flat panel displays, highly efficient solar cells, and new biological imaging techniques have become reality. This second, enlarged edition has been fully updated to address the rapid progress made within this field in recent years. Internationally recognized experts provide comprehensive, first-hand information, resulting in an overview of the entire nano-micro world. In so doing, they cover aspects of funding and commercialization, the manufacture and future applications of nanomaterials, the fundamentals of nanostructures leading to macroscale objects as well as the ongoing miniaturization toward the nanoscale domain. Along the way, the authors explain the effects occurring at the nanoscale and the nanotechnological characterization techniques. An additional topic on the role of nanotechnology in energy and mobility covers the challenge of developing materials and devices, such as electrodes and membrane materials for fuel cells and catalysts for sustainable transportation. Also new to this edition are the latest figures for funding, investments, and commercialization prospects, as well as recent research programs and organizations.

Nanofinishing Science and Technology

Vijay Kumar Jain
Nanofinishing Science and Technology Book PDF

Author : Vijay Kumar Jain
Publisher : CRC Press
Page : 676 pages
File Size : 49,9 Mb
Release : 2016-12-12
Category : Technology & Engineering
ISBN : 9781315404097

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Nanofinishing Science and Technology by Vijay Kumar Jain Pdf

Finishing is the final operation after a part is sized and shaped. Currently in high tech industries, there is a demand for nano level surface finishing of components. This process is done to improve the surface finish, to remove the recast layer, or to remove surface and sub-surface defects. The result is low friction, longer product life, and low power requirements. Equally important is the aesthetic aspect of the product. This subject is growing very fast from the technology as well as a science point of view. Books on this subject are very limited, particularly those ones that deal with both the science as well as the technology aspects.

The Nano-Micro Interface, 2 Volumes

Marcel Van de Voorde,Matthias Werner,Hans-Jörg Fecht
The Nano Micro Interface 2 Volumes Book PDF

Author : Marcel Van de Voorde,Matthias Werner,Hans-Jörg Fecht
Publisher : John Wiley & Sons
Page : 771 pages
File Size : 49,8 Mb
Release : 2015-03-09
Category : Technology & Engineering
ISBN : 9783527336333

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The Nano-Micro Interface, 2 Volumes by Marcel Van de Voorde,Matthias Werner,Hans-Jörg Fecht Pdf

Controlling the properties of materials by modifying their composition and by manipulating the arrangement of atoms and molecules is a dream that can be achieved by nanotechnology. As one of the fastest developing and innovative -- as well as well-funded -- fields in science, nanotechnology has already significantly changed the research landscape in chemistry, materials science, and physics, with numerous applications in consumer products, such as sunscreens and water-repellent clothes. It is also thanks to this multidisciplinary field that flat panel displays, highly efficient solar cells, and new biological imaging techniques have become reality. This second, enlarged edition has been fully updated to address the rapid progress made within this field in recent years. Internationally recognized experts provide comprehensive, first-hand information, resulting in an overview of the entire nano-micro world. In so doing, they cover aspects of funding and commercialization, the manufacture and future applications of nanomaterials, the fundamentals of nanostructures leading to macroscale objects as well as the ongoing miniaturization toward the nanoscale domain. Along the way, the authors explain the effects occurring at the nanoscale and the nanotechnological characterization techniques. An additional topic on the role of nanotechnology in energy and mobility covers the challenge of developing materials and devices, such as electrodes and membrane materials for fuel cells and catalysts for sustainable transportation. Also new to this edition are the latest figures for funding, investments, and commercialization prospects, as well as recent research programs and organizations.

Measurement Technology and Intelligent Instruments VIII

Wei Gao,Yasuhiro Takaya,Yongsheng Gao,Michael Krystek
Measurement Technology and Intelligent Instruments VIII Book PDF

Author : Wei Gao,Yasuhiro Takaya,Yongsheng Gao,Michael Krystek
Publisher : Trans Tech Publications Ltd
Page : 674 pages
File Size : 51,9 Mb
Release : 2008-06-12
Category : Technology & Engineering
ISBN : 9783038131830

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Measurement Technology and Intelligent Instruments VIII by Wei Gao,Yasuhiro Takaya,Yongsheng Gao,Michael Krystek Pdf

Volume is indexed by Thomson Reuters BCI (WoS). Measurement, rigorously defined as ‘ascertaining the size, amount or degree of a measurand by instrumental comparison with a standard unit or by indirect calculation based upon theory’, is what makes science and technology different to imagination. Measurement is essential in industry, commerce and daily life. In the manufacturing industry in particular, measurement and instrumentation technology play increasingly important roles not only in the traditional field of manufacturing but also in the new fields of micro/nano technology and bioengineering. This book presents recent advances in the use of measurement and instrumentation in the manufacturing industry. A wide range of topics are covered including: micro/nano-metrology,precision measurements,online and in-process measurements,surface metrology,optical metrology and image processing,bio-measurement, sensor technology,intelligent measurement and instrumentation,uncertainty, traceability and calibration and signal-processing algorithms.

Signal Measurement and Estimation Techniques for Micro and Nanotechnology

Cédric Clévy,Micky Rakotondrabe,Nicolas Chaillet
Signal Measurement and Estimation Techniques for Micro and Nanotechnology Book PDF

Author : Cédric Clévy,Micky Rakotondrabe,Nicolas Chaillet
Publisher : Springer Science & Business Media
Page : 245 pages
File Size : 51,9 Mb
Release : 2011-07-25
Category : Technology & Engineering
ISBN : 9781441999467

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Signal Measurement and Estimation Techniques for Micro and Nanotechnology by Cédric Clévy,Micky Rakotondrabe,Nicolas Chaillet Pdf

Signal Measurement and Estimation Techniques for Micro and Nanotechnology discusses micro, nano and robotic cells and gives a state-of-the-art presentation of the different techniques and solutions to measure and estimate signals at the micro and nano scale. New technologies and applications such as micromanipulation (artificial components, biological objects), micro-assembly (MEMS, MOEMS, NEMS) and material and surface force characterization are covered. The importance of sensing at the micro and nano scale is presented as a key issue in control systems, as well as for understanding the physical phenomena of these systems. The book also: Explains issues that make signal measurement and estimation techniques difficult at the micro-nano-scale and offers solutions Discusses automated micro-assembly, and control of micro-nano robotic devices Presents and links signal measurement and estimation techniques for micro-nano scale systems with microfabrication methods, sensors integration and control schemes Signal Measurement and Estimation Techniques for Micro and Nanotechnology is a must-read for researchers and engineers working in MEMS and control systems.

Handbook of Surface and Nanometrology

David J. Whitehouse
Handbook of Surface and Nanometrology Book PDF

Author : David J. Whitehouse
Publisher : CRC Press
Page : 982 pages
File Size : 47,7 Mb
Release : 2002-12-01
Category : Science
ISBN : 9781420034196

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Handbook of Surface and Nanometrology by David J. Whitehouse Pdf

The Handbook of Surface and Nanometrology explains and challenges current concepts in nanotechnology. It covers in great detail surface metrology and nanometrology and more importantly the areas where they overlap, thereby providing a quantitative means of controlling and predicting processes and performance. Trends and mechanisms are explained wit

Towards Synthesis of Micro-/Nano-systems

Fumihiko Kimura,Kenichiro Horio
Towards Synthesis of Micro Nano systems Book PDF

Author : Fumihiko Kimura,Kenichiro Horio
Publisher : Springer Science & Business Media
Page : 345 pages
File Size : 40,5 Mb
Release : 2006-10-19
Category : Technology & Engineering
ISBN : 9781846285592

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Towards Synthesis of Micro-/Nano-systems by Fumihiko Kimura,Kenichiro Horio Pdf

This collection of papers, presented at the 11th International Conference on Precision Engineering, offers a broader global perspective on the challenges and opportunities ahead. The discussion encompasses leading-edge technologies and forecasts future trends. Coverage includes advanced manufacturing systems; ultra-precision- and micro-machining; nanotechnology for fabrication and measurement; rapid prototyping and production technology; new materials and advanced processes; computer-aided production engineering; manufacturing process control; production planning and scheduling, and much more.

Measurement Technology for Micro-Nanometer Devices

Wendong Zhang,Xiujian Chou,Tielin Shi,Zongmin Ma,Haifei Bao,Jingdong Chen,Liguo Chen,Dachao Li,Chenyang Xue
Measurement Technology for Micro Nanometer Devices Book PDF

Author : Wendong Zhang,Xiujian Chou,Tielin Shi,Zongmin Ma,Haifei Bao,Jingdong Chen,Liguo Chen,Dachao Li,Chenyang Xue
Publisher : John Wiley & Sons
Page : 341 pages
File Size : 43,6 Mb
Release : 2017-01-17
Category : Technology & Engineering
ISBN : 9781118717967

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Measurement Technology for Micro-Nanometer Devices by Wendong Zhang,Xiujian Chou,Tielin Shi,Zongmin Ma,Haifei Bao,Jingdong Chen,Liguo Chen,Dachao Li,Chenyang Xue Pdf

A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale • Highlights the advanced research work from industry and academia in micro-nano devices test technology • Written at both introductory and advanced levels, provides the fundamentals and theories • Focuses on the measurement techniques for characterizing MEMS/NEMS devices