Silicon Chemical Etching

Author : J. Grabmaier
Publisher : Springer Science & Business Media
Page : 234 pages
File Size : 53,8 Mb
Release : 2012-12-06
Category : Science
ISBN : 9783642687655

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Silicon Chemical Etching by J. Grabmaier Pdf

In the first contribution to this volume we read that the world-wide production of single crystal silicon amounts to some 2000 metric tons per year. Given the size of present-day silicon-crystals, this number is equivalent to 100000 silicon-crystals grown every year by either the Czochralski (80%) or the floating-zone (20%) technique. But, to the best of my knowledge, no coherent and comprehensive article has been written that deals with "the art and science", as well as the practical and technical aspects of growing silicon crystals by the Czochralski technique. The same could be said about the floating-zone technique were it not for the review article by W. Dietze, W. Keller and A. Miihlbauer which was published in the preceding Volume 5 ("Silicon") of this series (and for a monograph by two of the above authors published about the same time). As editor of this volume I am very glad to have succeeded in persuading two scien tists, W. Zulehner and D. Huber, of Wacker-Chemitronic GmbH - the world's largest producer of silicon-crystals - to write a comprehensive article about the practical and scientific aspects of growing silicon-crystals by the Czochralski method and about silicon wafer manufacture. I am sure that many scientists or engineers who work with silicon crystals -be it in the laboratory or in a production environment - will profit from the first article in this volume.

Author : J. Grabmaier
Publisher : Unknown
Page : 240 pages
File Size : 49,9 Mb
Release : 1982-11-01
Category : Electronic
ISBN : 3642687660

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Silicon Chemical Etching by J. Grabmaier Pdf

Author : Zhe Chuan Feng,Raphael Tsu
Publisher : World Scientific
Page : 496 pages
File Size : 51,9 Mb
Release : 1994
Category : Science
ISBN : 9810216343

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Porous Silicon by Zhe Chuan Feng,Raphael Tsu Pdf

Due to the recent discovery of the room-temperature visible light emission from porous silicon (P-Si), a great interest in P-Si and related materials has arisen in the last decade of the 20th century. Crystalline (c-) Si, at the heart of integrated circuits, has an indirect band gap of 1.1 eV, which limits its application in optoelectronics. The visible light emitting P-Si may open a new field combining Si integrated technology and optoelectronics. This book is a comprehensive review of the recent research and development of porous silicon. Strong visible photoluminescence (PL) and electroluminescence (EL) from P-Si and other forms of silicon nanocrystallites (nc-Si) are reviewed. Several proposed mechanisms for the PL from porous silicon such as quantum confinement, amorphicity and molecular PL are studied. The following issues are covered: mechanisms for the visible light emission, physical structures, studies of the PL and EL, correlation of structure and optical studies, surface physics and chemistry, relationships among various forms (P-Si, a-Si, µc-Si), device applications, future developments.

Author : Sabu Thomas,El Hadji Mamour Sakho,Nandakumar Kalarikkal,Oluwatobi Samuel Oluwafemi,Jihuai Wu
Publisher : Elsevier
Page : 760 pages
File Size : 48,9 Mb
Release : 2019-06-12
Category : Technology & Engineering
ISBN : 9780128133385

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Nanomaterials for Solar Cell Applications by Sabu Thomas,El Hadji Mamour Sakho,Nandakumar Kalarikkal,Oluwatobi Samuel Oluwafemi,Jihuai Wu Pdf

Nanomaterials for Solar Cell Applications provides a review of recent developments in the field of nanomaterials based solar cells. It begins with a discussion of the fundamentals of nanomaterials for solar calls, including a discussion of lifecycle assessments and characterization techniques. Next, it reviews various types of solar cells, i.e., Thin film, Metal-oxide, Nanowire, Nanorod and Nanoporous materials, and more. Other topics covered include a review of quantum dot sensitized and perovskite and polymer nanocomposites-based solar cells. This book is an ideal resource for those working in this evolving field of nanomaterials and renewable energy. Provides a well-organized approach to the use of nanomaterials for solar cell applications Discusses the synthesis, characterization and applications of traditional and new material Includes coverage of emerging nanomaterials, such as graphene, graphene-derivatives and perovskites

Author : Lucia Romano
Publisher : MDPI
Page : 106 pages
File Size : 50,6 Mb
Release : 2021-01-13
Category : Technology & Engineering
ISBN : 9783039438457

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Micro- and Nano-Fabrication by Metal Assisted Chemical Etching by Lucia Romano Pdf

Metal-assisted chemical etching (MacEtch) has recently emerged as a new etching technique capable of fabricating high aspect ratio nano- and microstructures in a few semiconductors substrates—Si, Ge, poly-Si, GaAs, and SiC—and using different catalysts—Ag, Au, Pt, Pd, Cu, Ni, and Rh. Several shapes have been demonstrated with a high anisotropy and feature size in the nanoscale—nanoporous films, nanowires, 3D objects, and trenches, which are useful components of photonic devices, microfluidic devices, bio-medical devices, batteries, Vias, MEMS, X-ray optics, etc. With no limitations of large-areas and low-cost processing, MacEtch can open up new opportunities for several applications where high precision nano- and microfabrication is required. This can make semiconductor manufacturing more accessible to researchers in various fields, and accelerate innovation in electronics, bio-medical engineering, energy, and photonics. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on novel methodological developments in MacEtch, and its use for various applications.

Author : Monika Freunek Muller
Publisher : John Wiley & Sons
Page : 154 pages
File Size : 42,6 Mb
Release : 2021-08-16
Category : Science
ISBN : 9781119242017

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Photovoltaic Manufacturing by Monika Freunek Muller Pdf

PHOTOVOLTAIC MANUFACTURING This book covers the state-of-the-art and the fundamentals of silicon wafer solar cells manufacturing, written by world-class researchers and experts in the field. High quality and economic photovoltaic manufacturing is central to realizing reliable photovoltaic power supplies at reasonable cost. While photovoltaic silicon wafer manufacturing is at a mature, industrial and mass production stage, knowing and applying the fundamentals in solar manufacturing is essential to anyone working in this field. This is the first book on photovoltaic wet processing for silicon wafers, both mono- and multi-crystalline. The comprehensive book provides information for process, equipment, and device engineers and researchers in the solar manufacturing field. The authors of the chapters are world-class researchers and experts in their field of endeavor. The fundamentals of wet processing chemistry are introduced, covering etching, texturing, cleaning and metrology. New developments, innovative approaches, as well as current challenges are presented. Benefits of reading the book include: The book includes a detailed discussion of the important new development of black silicon, which is considered to have started a new wave in photovoltaics and become the new standard while substantially lowering the cost. Photovoltaics are central to any country’s “New Green Deal” and this book shows how to manufacture competitively. The book’s central goal is to show photovoltaic manufacturing can be done with enhanced quality and lowering costs. Audience Engineers, chemists, physicists, process technologists, in both academia and industry, that work with photovoltaics and their manufacture.

Author : G. S. Mathad
Publisher : The Electrochemical Society
Page : 396 pages
File Size : 53,5 Mb
Release : 2000
Category : Integrated circuits
ISBN : 1566772532

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Plasma Etching Processes for Sub-quarter Micron Devices by G. S. Mathad Pdf

Author : Perrin Walker,William H. Tarn
Publisher : CRC Press
Page : 1434 pages
File Size : 47,9 Mb
Release : 1990-12-11
Category : Science
ISBN : 1439822530

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CRC Handbook of Metal Etchants by Perrin Walker,William H. Tarn Pdf

This publication presents cleaning and etching solutions, their applications, and results on inorganic materials. It is a comprehensive collection of etching and cleaning solutions in a single source. Chemical formulas are presented in one of three standard formats - general, electrolytic or ionized gas formats - to insure inclusion of all necessary operational data as shown in references that accompany each numbered formula. The book describes other applications of specific solutions, including their use on other metals or metallic compounds. Physical properties, association of natural and man-made minerals, and materials are shown in relationship to crystal structure, special processing techniques and solid state devices and assemblies fabricated. This publication also presents a number of organic materials which are widely used in handling and general processing...waxes, plastics, and lacquers for example. It is useful to individuals involved in study, development, and processing of metals and metallic compounds. It is invaluable for readers from the college level to industrial R & D and full-scale device fabrication, testing and sales. Scientific disciplines, work areas and individuals with great interest include: chemistry, physics, metallurgy, geology, solid state, ceramic and glass, research libraries, individuals dealing with chemical processing of inorganic materials, societies and schools.

Author : Konstantinos Zekentes
Publisher : Materials Research Forum LLC
Page : 250 pages
File Size : 49,5 Mb
Release : 2018-09-25
Category : Technology & Engineering
ISBN : 9781945291845

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Advancing Silicon Carbide Electronics Technology I by Konstantinos Zekentes Pdf

The rapidly advancing Silicon Carbide technology has a great potential in high temperature and high frequency electronics. High thermal stability and outstanding chemical inertness make SiC an excellent material for high-power, low-loss semiconductor devices. The present volume presents the state of the art of SiC device fabrication and characterization. Topics covered include: SiC surface cleaning and etching techniques; electrical characterization methods and processing of ohmic contacts to silicon carbide; analysis of contact resistivity dependence on material properties; limitations and accuracy of contact resistivity measurements; ohmic contact fabrication and test structure design; overview of different metallization schemes and processing technologies; thermal stability of ohmic contacts to SiC, their protection and compatibility with device processing; Schottky contacts to SiC; Schottky barrier formation; Schottky barrier inhomogeneity in SiC materials; technology and design of 4H-SiC Schottky and Junction Barrier Schottky diodes; Si/SiC heterojunction diodes; applications of SiC Schottky diodes in power electronics and temperature/light sensors; high power SiC unipolar and bipolar switching devices; different types of SiC devices including material and technology constraints on device performance; applications in the area of metal contacts to silicon carbide; status and prospects of SiC power devices.

Author : Volker Lehmann
Publisher : Wiley-VCH
Page : 300 pages
File Size : 53,5 Mb
Release : 2002-04-22
Category : Science
ISBN : UOM:39015055088119

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Electrochemistry of Silicon by Volker Lehmann Pdf

Silicon has been and will most probably continue to be the dominant material in semiconductor technology. Although the defect-free silicon single crystal is one of the best understood systems in materails science, its electrochemistry to many people is still a kind of "alchemy". This view is partly due to the interdisciplinary aspects of the topic: Physics meets chemistry at the silicon-electrolyte interface. This book gives a comprehensive overview of this important aspect of silicon technology as well as examples of applications ranging from photonic crystals to biochips. It will serve materials scientists as well as engineers involved in silicon technology as a quick reference with its more than 150 technical tables and diagrams and ca. 1000 references cited for easy access of the original literature.

Author : Prem Pal,Kazuo Sato
Publisher : CRC Press
Page : 425 pages
File Size : 52,6 Mb
Release : 2017-04-07
Category : Science
ISBN : 9789814613736

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Silicon Wet Bulk Micromachining for MEMS by Prem Pal,Kazuo Sato Pdf

Microelectromechanical systems (MEMS)-based sensors and actuators have become remarkably popular in the past few decades. Rapid advances have taken place in terms of both technologies and techniques of fabrication of MEMS structures. Wet chemical–based silicon bulk micromachining continues to be a widely used technique for the fabrication of microstructures used in MEMS devices. Researchers all over the world have contributed significantly to the advancement of wet chemical–based micromachining, from understanding the etching mechanism to exploring its application to the fabrication of simple to complex MEMS structures. In addition to its various benefits, one of the unique features of wet chemical–based bulk micromachining is the ability to fabricate slanted sidewalls, such as 45° walls as micromirrors, as well as freestanding structures, such as cantilevers and diaphragms. This makes wet bulk micromachining necessary for the fabrication of structures for myriad applications. This book provides a comprehensive understating of wet bulk micromachining for the fabrication of simple to advanced microstructures for various applications in MEMS. It includes introductory to advanced concepts and covers research on basic and advanced topics on wet chemical–based silicon bulk micromachining. The book thus serves as an introductory textbook for undergraduate- and graduate-level students of physics, chemistry, electrical and electronic engineering, materials science, and engineering, as well as a comprehensive reference for researchers working or aspiring to work in the area of MEMS and for engineers working in microfabrication technology.

Author : Joachim Frühauf
Publisher : Springer Science & Business Media
Page : 229 pages
File Size : 44,9 Mb
Release : 2005-12-05
Category : Technology & Engineering
ISBN : 9783540268765

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Shape and Functional Elements of the Bulk Silicon Microtechnique by Joachim Frühauf Pdf

This methodic manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. It gives a systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications. This manual includes practical instructions for the use of the relevant techniques and an extensive collection of examples for the support of the search for applications via photographs, drawings and references. It serves as a valuable guide to the design of etch masks and processes while summarizing the important properties of silicon, especially aiming at producers of sensors and microtechnical components, as well as producers of components of precision engineering and optical applications.

Author : National Research Council,Division on Engineering and Physical Sciences,National Materials Advisory Board,Commission on Engineering and Technical Systems,Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems
Publisher : National Academies Press
Page : 75 pages
File Size : 52,7 Mb
Release : 1997-12-01
Category : Technology & Engineering
ISBN : 9780309174343

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Microelectromechanical Systems by National Research Council,Division on Engineering and Physical Sciences,National Materials Advisory Board,Commission on Engineering and Technical Systems,Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems Pdf

Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter. The MEMS revolution harnesses the integrated circuitry know-how to build working microsystems from micromechanical and microelectronic elements. MEMS is a multidisciplinary field involving challenges and opportunites for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry. As MEMS begin to permeate more and more industrial procedures, society as a whole will be strongly affected because MEMS provide a new design technology that could rivalâ€"perhaps surpassâ€"the societal impact of integrated circuits.

Author : Alexander Fridman
Publisher : John Wiley & Sons
Page : 805 pages
File Size : 53,9 Mb
Release : 2023-12-22
Category : Technology & Engineering
ISBN : 9783527834112

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Plasma Science and Technology by Alexander Fridman Pdf

Plasma Science and Technology An accessible introduction to the fundamentals of plasma science and its applications In Plasma Science and Technology: Lectures in Physics, Chemistry, Biology, and Engineering, distinguished researcher Dr. Alexander Fridman delivers a comprehensive introduction to plasma technology, including fulsome descriptions of the fundamentals of plasmas and discharges. The author discusses a wide variety of practical applications of the technology to medicine, energy, catalysis, coatings, and more, emphasizing engineering and science fundamentals. Offering readers illuminating problems and concept questions to support understanding and self-study, the book also details organic and inorganic applications of plasma technologies, demonstrating its use in nature, in the lab, and in both novel and well-known applications. Readers will also find: A thorough introduction to the kinetics of excited atoms and molecules Comprehensive explorations of non-equilibrium atmospheric pressure cold discharges Practical discussions of plasma processing in microelectronics and other micro-technologies Expert treatments of plasma in environmental control technologies, including the cleaning of air, exhaust gases, water, and soil Perfect for students of chemical engineering, physics, and chemistry, Plasma Science and Technology will also benefit professionals working in these fields who seek a contemporary refresher in the fundamentals of plasma science and its applications.

Author : Leigh Canham
Publisher : Springer
Page : 1000 pages
File Size : 53,7 Mb
Release : 2021-01-14
Category : Technology & Engineering
ISBN : 3319045083

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Handbook of Porous Silicon by Leigh Canham Pdf

The Handbook of Porous Silicon brings together the expertise of a large, international team of almost 100 academic researchers, engineers, and product developers from industry across electronics, medicine, nutrition and consumer care to summarize the field in its entirity with 150 chapters and 5000 references. The volume presents 5 parts which cover fabrication techniques, material properties, characterization techniques, processing and applications. Much attention was given in the the past to its luminescent properties, but increasingly it is the biodegradability, mechanical, thermal and sensing capabilities that are attracting attention. The volume is divided into focussed data reviews with, wherever possible, quantitative rather than qualitative descriptions of both properties and performance. The book is targeted at undergraduates, postgraduates, and experienced researchers.