Silicon Sensors And Actuators

Author : Benedetto Vigna,Paolo Ferrari,Flavio Francesco Villa,Ernesto Lasalandra,Sarah Zerbini
Publisher : Springer Nature
Page : 988 pages
File Size : 53,6 Mb
Release : 2022-04-12
Category : Technology & Engineering
ISBN : 9783030801359

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Silicon Sensors and Actuators by Benedetto Vigna,Paolo Ferrari,Flavio Francesco Villa,Ernesto Lasalandra,Sarah Zerbini Pdf

This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judge a fabrication process, and then conceive and design new ones for future applications. Envisioning a future complex versatile microsystem, the authors take inspiration from Richard Feynman’s visionary talk “There is Plenty of Room at the Bottom” to propose that the time has come to see silicon sensors as part of a “Feynman Roadmap” instead of the “More-than-Moore” technology roadmap. The sharing of the author’s industrially proven track record of development, design, and manufacturing, along with their visionary approach to the technology, will allow readers to jump ahead in their understanding of the core of the topic in a very effective way. Students, researchers, engineers, and technologists involved in silicon-based sensor and actuator research and development will find a wealth of useful and groundbreaking information in this book.

Author : R.F. Wolffenbuttel
Publisher : Springer Science & Business Media
Page : 344 pages
File Size : 45,8 Mb
Release : 2024-06-29
Category : Electronic
ISBN : 0412709708

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Silicon Sensors and Circuits by R.F. Wolffenbuttel Pdf

Author : Francisco Andre Correa Alegria
Publisher : World Scientific
Page : 403 pages
File Size : 50,6 Mb
Release : 2021-07-14
Category : Technology & Engineering
ISBN : 9789811242519

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Sensors And Actuators by Francisco Andre Correa Alegria Pdf

This introductory compendium teaches engineering students how the most common electronic sensors and actuators work. It distinguishes from other books by including the physical and chemical phenomena used as well as the features and specifications of many sensors and actuators.The useful reference text also contains an introductory chapter that deals with their specifications and classification, a chapter about sensor and actuator networks, and a special topic dealing with the fabrication of sensors and actuators using microelectromechanical systems techniques (sensors and actuators on a chip). A set of exercises and six laboratory projects are highlighted.

Author : S. Middelhoek,S. A. Audet
Publisher : Unknown
Page : 400 pages
File Size : 46,6 Mb
Release : 1989
Category : Silicon diodes
ISBN : UOM:39015012055466

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Silicon Sensors by S. Middelhoek,S. A. Audet Pdf

Author : H.S. Tzou,Toshio Fukuda
Publisher : Springer Science & Business Media
Page : 478 pages
File Size : 47,7 Mb
Release : 2012-12-06
Category : Technology & Engineering
ISBN : 9789401118187

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Precision Sensors, Actuators and Systems by H.S. Tzou,Toshio Fukuda Pdf

Research into and development of high-precision systems, microelectromechanical systems, distributed sensors/actuators, smart structural systems, high-precision controls, etc. have drawn much attention in recent years. These new devices and systems will bring about a new technical revolution in modern industries and impact future human life. This book presents a unique overview of these technologies such as silicon based sensors/actuators and control piezoelectric micro sensors/actuators, micro actuation and control, micro sensor applications in robot control, optical fiber sensors/systems, etc. These are four essential subjects emphasized in the book: 1. Survey of the (current) research and development; 2. Fundamental theories and tools; 3. Practical applications. 4. Outlining future research and development.

Author : M. Elwenspoek,R. Wiegerink
Publisher : Springer Science & Business Media
Page : 306 pages
File Size : 47,9 Mb
Release : 2012-12-06
Category : Technology & Engineering
ISBN : 9783662043219

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Mechanical Microsensors by M. Elwenspoek,R. Wiegerink Pdf

This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me chanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micromachining). Second, it serves as a textbook for engineers to give them a comprehensive introduction on the basic design issues of these sensors. Engineers active in sensor design are usually educated either in electrical engineering or mechanical engineering. These classical educa tional pro grams do not prepare the engineer for the challenging task of sensor design since sensors are instruments typically bridging the disciplines: one needs a rather deep understanding of both mechanics and electronics. Accordingly, the book contains discussion of the basic engineering sciences relevant to mechanical sensors, hopefully in a way that it is accessible for all colours of engineers. Engi rd th neering students in their 3 or 4 year should have enough knowledge to be able to follow the arguments presented in this book. In this sense, this book should be useful as textbook for students in courses on mechanical microsensors (as is CUf rently being done at the University ofTwente).

Author : Jan A. Dziuban
Publisher : Springer Science & Business Media
Page : 345 pages
File Size : 53,8 Mb
Release : 2007-01-30
Category : Science
ISBN : 9781402045899

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Bonding in Microsystem Technology by Jan A. Dziuban Pdf

This is the first compendium on silicon/glass microsystems made by deep wet etching and the first book with a detailed description of bonding techniques used in microsystem technology. Technological results presented in the book have been tested experimentally by the author and his team, and can be utilized in day-to-day laboratory practice. Special attention has been paid to the highest level of accessibility of the book by students.

Author : S. Middelhoek,J. van der Spiegel
Publisher : Unknown
Page : 444 pages
File Size : 53,7 Mb
Release : 1987
Category : Actuators
ISBN : UOM:39076000422688

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Sensors and Actuators by S. Middelhoek,J. van der Spiegel Pdf

Author : Lars Tenerz
Publisher : Unknown
Page : 34 pages
File Size : 54,6 Mb
Release : 1989
Category : Anisotropy
ISBN : 915542418X

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Silicon Micromachining with Applications in Sensors and Actuators by Lars Tenerz Pdf

Author : Electrochemical Society. Electronics Division
Publisher : The Electrochemical Society
Page : 506 pages
File Size : 53,8 Mb
Release : 2002
Category : Technology & Engineering
ISBN : 1566773288

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Microelectronics Technology and Devices, SBMICRO 2002 by Electrochemical Society. Electronics Division Pdf

Author : Ashok K. Vaseashta,D. Dimova-Malinovska,J.M. Marshall
Publisher : Springer Science & Business Media
Page : 426 pages
File Size : 53,8 Mb
Release : 2007-04-29
Category : Technology & Engineering
ISBN : 9781402035623

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Nanostructured and Advanced Materials for Applications in Sensor, Optoelectronic and Photovoltaic Technology by Ashok K. Vaseashta,D. Dimova-Malinovska,J.M. Marshall Pdf

The principal aim of this NATO Advanced Study Institute (ASI) "Nanostructured and Advanced Materials for Applications in Sensor, Optoelectronic and Photovoltaic Technology" was to present a contemporary overview of the field of nanostructured and advanced electronic materials. Nanotechnology is an emerging scientific field receiving significant worldwide attention. On a nanometer scale, materials or structures may possess new and unique physical properties. Some of these are now known to the scientific community, but there may well be many properties not yet known to us, rendering it as a fascinating area of research and a suitable subject for a NATO ASI. Yet another aspect of the field is the possibility for creating meta-stable phases with unconventional properties and the ultra-miniaturization of current devices, sensors, and machines. Such nanotechnological and related advanced materials have an extremely wide range of potential applications, viz. nanoscale electronics, sensors, optoelectronics, photonics, nano-biological systems, na- medicine, energy storage systems, etc. This is a wide-ranging subject area and therefore requires the formation of multi-disciplinary teams of physicists, chemists, materials scientists, engineers, molecular biologists, pharmacologists, and others to work together on the synthesis and processing of materials and structures, the understanding of their physical properties, the design and fabrication of devices, etc. Hence, in formulating our ASI, we adopted an int- disciplinary approach, bringing together recognised experts in the various fields while retaining a level of treatment accessible to those active in specific individual areas of research and development.

Author : Marc J. Madou
Publisher : CRC Press
Page : 670 pages
File Size : 40,6 Mb
Release : 2011-06-13
Category : Technology & Engineering
ISBN : 9781439895306

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Manufacturing Techniques for Microfabrication and Nanotechnology by Marc J. Madou Pdf

Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the d

Author : Eden Slaver
Publisher : Unknown
Page : 308 pages
File Size : 43,5 Mb
Release : 2016-09-15
Category : Electronic
ISBN : 1681176041

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Smart Actuation and Sensing Systems by Eden Slaver Pdf

The advent of integrated circuits, which became possible because of the tremendous progress in semiconductor technology, resulted in the low cost microprocessor. Thus if it is possible to design a low cost sensor which is silicon based then the overall cost of the control system can be reduced. We can have integrated sensors which has electronics and the transduction element together on one silicon chip. This complete system can be called as system-on-chip .The main aim of integrating the electronics and the sensor is to make an intelligent sensor, which can be called as smart sensor. Smart sensors then have the ability to make some decision. Physically a smart sensor consists of transduction element, signal conditioning electronic and controller/processor that support some intelligence in a single package. A smart sensor is a device that takes input from the physical environment and uses built-in compute resources to perform predefined functions upon detection of specific input and then process data before passing it on. Smart sensors enable more accurate and automated collection of environmental data with less erroneous noise amongst the accurately recorded information. These devices are used for monitoring and control mechanisms in a wide variety of environments including smart grids, battlefield reconnaissance, exploration and a great number of science applications. A smart actuator is the integrated actuator of all components such as motor, controller, sensors, and communication unit. The robot which is linked to a smart actuator can be assembled or disassembled and reconfigured. Therefore, there are increasing demands from industries for a smart sensor and actuator. Smart Actuation and Sensing Systems - Recent Advances and Future Challenges emphasizes on accomplishments in the area of Smart Actuators and Smart Sensors, to combine researchers and scientists from different fields into a single virtual room. The book hence reflects the multicultural nature of the field and will allow the reader to taste and appreciate different points of view, different engineering methods and different tools that must be jointly considered when designing and realizing smart actuation and sensing systems.

Author : R.F Taylor,Jerome S. Schultz
Publisher : CRC Press
Page : 1248 pages
File Size : 48,9 Mb
Release : 1996-01-01
Category : Science
ISBN : 1420050486

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Handbook of Chemical and Biological Sensors by R.F Taylor,Jerome S. Schultz Pdf

The Handbook of Chemical and Biological Sensors focuses on the development of sensors to recognize substances rather than physical quantities. This fully inclusive book examines devices that use a biological sensing element to detect and measure chemical and biological species as well as those that use a synthetic element to achieve a similar result. A first port of call for anyone with a specific interest, question, or problem relating to this area, this comprehensive source of reference serves as a guide for practicing scientists and as a text for many graduate courses. It presents relevant physics to chemists, chemistry to materials scientists, materials science to electronic engineers, and fabrication technology to all of the above. In addition, the handbook is useful both to newcomers and to experienced researchers who wish to broaden their knowledge of the constituent disciplines of this wide-ranging field.

Author : Marc J. Madou
Publisher : CRC Press
Page : 764 pages
File Size : 40,9 Mb
Release : 2018-10-08
Category : Technology & Engineering
ISBN : 9781482274004

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Fundamentals of Microfabrication by Marc J. Madou Pdf

MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field. Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem. New in the Second Edition Revised chapters that reflect the many recent advances in the field Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. Many more links to the Web Problem sets in each chapter