Structure And Electronic Properties Of Ultrathin Dielectric Films On Silicon And Related Structures

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Structure and Electronic Properties of Ultrathin Dielectric Films on Silicon and Related Structures: Volume 592

Author : D. A. Buchanan
Publisher : Mrs Proceedings
Page : 408 pages
File Size : 47,6 Mb
Release : 2000-10-17
Category : Technology & Engineering
ISBN : UOM:39015050054850

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Structure and Electronic Properties of Ultrathin Dielectric Films on Silicon and Related Structures: Volume 592 by D. A. Buchanan Pdf

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. The book, first published in 2000, includes detailed theoretical studies of the nature of SiO2 and its interface with silicon, electron paramagnetic resonance for the study of defects, electron tunneling, and band alignment among others.

Rapid Thermal and Other Short-time Processing Technologies

Author : Fred Roozeboom
Publisher : The Electrochemical Society
Page : 482 pages
File Size : 43,5 Mb
Release : 2000
Category : Technology & Engineering
ISBN : 1566772745

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Rapid Thermal and Other Short-time Processing Technologies by Fred Roozeboom Pdf

The proceedings from this May 2000 symposium illustrate the range of applications in Rapid Thermal Processing (RTP). The refereed papers cover a variety of issues, such as ultra-shallow junctions; contacts for nanoscale CMOS; gate stacks; new applications of RTP, such as for the enhanced crystalization of amorphous silicon thin films; and advances on RTP systems and process monitoring, including optimizing and controlling gas flows in an RTCVD reactor. Most presentations are supported by charts and other graphical data. c. Book News Inc.

Structure and Electronic Properties of Ultrathin In Films on Si(111)

Author : Shigemi Terakawa
Publisher : Springer Nature
Page : 83 pages
File Size : 40,7 Mb
Release : 2022-11-07
Category : Technology & Engineering
ISBN : 9789811968723

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Structure and Electronic Properties of Ultrathin In Films on Si(111) by Shigemi Terakawa Pdf

This book reports the establishment of a single-atomic layer metal of In and a novel (In, Mg) ultrathin film on Si(111) surfaces. A double-layer phase of In called “rect” has been extensively investigated as a two-dimensional metal. Another crystalline phase called “hex” was also suggested, but it had not been established due to difficulty in preparing the sample. The author succeeded in growing the large and high-quality sample of the hex phase and revealed that it is a single-layer metal. The author also established a new triple-atomic layer (In, Mg) film with a nearly freestanding character by Mg deposition onto the In double layer. This work proposes a novel method to decouple ultrathin metal films from Si dangling bonds. The present study demonstrates interesting properties of indium itself, which is a p-block metal both with metallicity and covalency. In this book, readers also see principles of various surface analysis techniques and learn how to use them and analyze the results in the real systems. This book is useful to researchers and students interested in surface science, particularly ultrathin metal films on semiconductor surfaces.

Oxide Reliability: A Summary Of Silicon Oxide Wearout, Breakdown, And Reliability

Author : David J Dumin
Publisher : World Scientific
Page : 281 pages
File Size : 52,9 Mb
Release : 2002-01-18
Category : Technology & Engineering
ISBN : 9789814489454

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Oxide Reliability: A Summary Of Silicon Oxide Wearout, Breakdown, And Reliability by David J Dumin Pdf

This book presents in summary the state of our knowledge of oxide reliability. The articles have been written by experts who are among the most knowledgeable in the field. The book will be an invaluable aid to reliability engineers and manufacturing engineers, helping them to produce and characterize reliable oxides. It can be used as an introduction for new engineers interested in oxide reliability, besides being a reference for engineers already engaged in the field.

Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices

Author : Eric Garfunkel,Evgeni Gusev,Alexander Vul'
Publisher : Springer Science & Business Media
Page : 503 pages
File Size : 45,9 Mb
Release : 2012-12-06
Category : Technology & Engineering
ISBN : 9789401150088

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Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices by Eric Garfunkel,Evgeni Gusev,Alexander Vul' Pdf

An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of Audience: Both expert scientists and engineers who wish to keep up with cutting edge research, and new students who wish to learn more about the exciting basic research issues relevant to next-generation device technology.

Dielectric Films for Advanced Microelectronics

Author : Mikhail Baklanov,Karen Maex,Martin Green
Publisher : John Wiley & Sons
Page : 508 pages
File Size : 52,9 Mb
Release : 2007-04-04
Category : Technology & Engineering
ISBN : 9780470065419

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Dielectric Films for Advanced Microelectronics by Mikhail Baklanov,Karen Maex,Martin Green Pdf

The topic of thin films is an area of increasing importance in materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are a few examples of the miniaturized device technologies that depend on the utilization of thin film materials. This book presents an in-depth overview of the novel developments made by the scientific leaders in the area of modern dielectric films for advanced microelectronic applications. It contains clear, concise explanations of material science of dielectric films and their problem for device operation, including high-k, low-k, medium-k dielectric films and also specific features and requirements for dielectric films used in the packaging technology. A broad range of related topics are covered, from physical principles to design, fabrication, characterization, and applications of novel dielectric films.

Chemical Processing of Dielectrics, Insulators and Electronic Ceramics: Volume 606

Author : Anthony C. Jones
Publisher : Unknown
Page : 336 pages
File Size : 54,9 Mb
Release : 2000-08-04
Category : Crafts & Hobbies
ISBN : UOM:39015043254906

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Chemical Processing of Dielectrics, Insulators and Electronic Ceramics: Volume 606 by Anthony C. Jones Pdf

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Characterization and Metrology for ULSI Technology: 2003

Author : David G. Seiler
Publisher : American Institute of Physics
Page : 868 pages
File Size : 40,9 Mb
Release : 2003-10-08
Category : Computers
ISBN : UOM:39015052982736

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Characterization and Metrology for ULSI Technology: 2003 by David G. Seiler Pdf

The worldwide semiconductor community faces increasingly difficult challenges as it moves into the manufacturing of chips with feature sizes approaching 100 nm and beyond. The magnitude of these challenges demands special attention from the metrology and analytical measurements community. New paradigms must be found. Adequate research and development for new metrology concepts are urgently needed. Topics include: integrated circuit history, challenges and overviews, front end, lithography, interconnect and back end, and critical analytical techniques. Characterization and metrology are key enablers for developing new semiconductor technology and in improving manufacturing. This book summarizes major issues and gives critical reviews of important measurement techniques that are crucial to continue the advances in semiconductor technology. It covers major aspects of process technology and most characterization techniques for silicon research, including development, manufacturing, and diagnostics. The editors believe that this book of collected papers provides a concise and effective portrayal of industry characterization needs and the way they are being addressed by industry, academia, and government to continue the dramatic progress in semiconductor technology. Hopefully, it will also provide a basis for stimulating advances in metrology and new ideas for research and development.

Amorphous and Heterogeneous Silicon Thin Films - 2000: Volume 609

Author : Robert W. Collins
Publisher : Unknown
Page : 1118 pages
File Size : 47,6 Mb
Release : 2001-04-10
Category : Science
ISBN : UOM:39015053754142

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Amorphous and Heterogeneous Silicon Thin Films - 2000: Volume 609 by Robert W. Collins Pdf

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Magnetic Materials, Structures and Processing for Information Storage: Volume 614

Author : Materials Research Society. Fall Meeting
Publisher : Unknown
Page : 200 pages
File Size : 40,7 Mb
Release : 2001-03-29
Category : Computers
ISBN : UOM:39015050475063

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Magnetic Materials, Structures and Processing for Information Storage: Volume 614 by Materials Research Society. Fall Meeting Pdf

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Thin Films - Stresses and Mechanical Properties VIII: Volume 594

Author : Richard Vinci,Richard Paul Vinci
Publisher : Mrs Proceedings
Page : 576 pages
File Size : 54,8 Mb
Release : 2000-09-25
Category : Science
ISBN : UCSD:31822028476570

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Thin Films - Stresses and Mechanical Properties VIII: Volume 594 by Richard Vinci,Richard Paul Vinci Pdf

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

The Physics and Chemistry of SiO2 and the Si-SiO2 Interface-3, 1996

Author : Hisham Z. Massoud,Edward H. Poindexter,C. Robert Helms
Publisher : Unknown
Page : 804 pages
File Size : 46,6 Mb
Release : 1996
Category : Science
ISBN : UOM:39015047064400

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The Physics and Chemistry of SiO2 and the Si-SiO2 Interface-3, 1996 by Hisham Z. Massoud,Edward H. Poindexter,C. Robert Helms Pdf