Thin Films Stresses And Mechanical Properties Xi

Author : Thomas E. Buchheit,Andrew M. Minor,Ralph Spolenak,Kazuki Takashima
Publisher : Cambridge University Press
Page : 480 pages
File Size : 40,9 Mb
Release : 2005
Category : Technology & Engineering
ISBN : 1558998292

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Thin Films: Volume 875 by Thomas E. Buchheit,Andrew M. Minor,Ralph Spolenak,Kazuki Takashima Pdf

This book has a long tradition of representing current topics in thin-film properties and how they are related to the performance and reliability of thin-film structures. Several emerging and well-developed technologies rely on understanding the behavior of these structures. This book provides a forum for an exchange of ideas among researchers who are interested in the mechanical behavior of thin films, broadly applied to their materials choice or methodology. The book focuses on stress-related phenomena in thin films for a wide range of materials. Of particular interest are studies that explore the frontiers of thin-film materials science with regard to materials selection or size scale. Topics include: elasticity in thin films; characterizing thin films by nanoindentation; mechanical behavior of nanostructured films; mechanical properties of thin; thin-film plasticity; thin-film plasticity; thin-film plasticity; novel testing techniques; in situ characterization techniques; adhesion and fracture of thin films; fatigue and stress in interconnect and metallization; deformation, growth and microstructure in thin films and thin-film processing.

Author : Anonim
Publisher : Unknown
Page : 576 pages
File Size : 55,9 Mb
Release : 1997
Category : Thin films
ISBN : UOM:39015036270141

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Thin Films, Stresses and Mechanical Properties by Anonim Pdf

Author : Materials Research Society. Meeting
Publisher : Unknown
Page : 480 pages
File Size : 54,6 Mb
Release : 2005
Category : Thin films
ISBN : UCSD:31822034990523

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Thin Films--stresses and Mechanical Properties XI by Materials Research Society. Meeting Pdf

Author : Materials Research Society. Meeting
Publisher : Unknown
Page : 544 pages
File Size : 47,8 Mb
Release : 2002-04
Category : Technology & Engineering
ISBN : UCSD:31822031649262

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Thin Films: Stresses and Mechanical Properties IX: Volume 695 by Materials Research Society. Meeting Pdf

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Author : Christopher L. Muhlstein,Stuart B. Brown
Publisher : ASTM International
Page : 333 pages
File Size : 47,8 Mb
Release : 2001
Category : Gold films
ISBN : 9780803128897

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Mechanical Properties of Structural Films by Christopher L. Muhlstein,Stuart B. Brown Pdf

Recent advances in the mechanical properties of structural films are described in these papers from a November 2000 symposium held in Orlando, Florida. Papers are organized in sections on fracture and fatigue of structural films, elastic behavior and residual stress in thin films, tensile testing of

Author : Sean G. Corcoran,Young-Chang Joo,Neville R. Moody,Zhigang Suo
Publisher : Cambridge University Press
Page : 606 pages
File Size : 43,9 Mb
Release : 2014-06-05
Category : Technology & Engineering
ISBN : 1107409314

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Thin Films - Stresses and Mechanical Properties X: by Sean G. Corcoran,Young-Chang Joo,Neville R. Moody,Zhigang Suo Pdf

Understanding the mechanical behavior of thin films is crucial for a wide variety of technologies. This behavior can critically influence the design, performance and reliability of thin-film structures used in every area of thin-film technology. However, the performance of these devices is often limited by the mechanical properties of both the films and the structures to which they are attached. The concepts, models and techniques developed for bulk materials often do not apply to small dimensions, and the mechanisms controlling behavior are not well defined. This book, first published in 2004, brings together an international group of researchers and students from industry, academia and national laboratories to address the mechanical behavior of thin films. Of particular interest are those studies that cut across length scales such as atomistic-to-nanometer or nanometer-to-submicron scale. Topics include: stress evolution; modeling stresses and film instability; deformation and adhesion; film fracture and fatigue; processing and structure; indentation testing; mechanical properties; properties and performance; and multilayers and nanolaminates.

Author : Cengiz S. Ozkan,L. Ben Freund,Robert C. Cammarata,Huajian Gao
Publisher : Cambridge University Press
Page : 532 pages
File Size : 46,5 Mb
Release : 2014-06-05
Category : Technology & Engineering
ISBN : 1107412064

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Thin Films: Stresses and Mechanical Properties IX: by Cengiz S. Ozkan,L. Ben Freund,Robert C. Cammarata,Huajian Gao Pdf

This book, the ninth in a popular series from the Materials Research Society, is strengthened by invited and contributed papers covering a wide range of subjects, from processing-microstructure-mechanical property relationships, strain effects and self-organization in thin films, nanoscale defects and thermomechanical behavior of materials, to novel nanscale materials testing. While the collection continues the series theme of materials science related modeling and characterization of mechanical properties of materials, special focus is given to: strain relaxation and strengthening mechanisms; defects formation; mechanical properties and nanoscale testing; adhesion and fracture; thin-film applications in MEMS; computational modeling and experiments; and film deposition, microstructure, evolution and intrinsic stress.

Author : Yoshio Nishi,Robert Doering
Publisher : CRC Press
Page : 1720 pages
File Size : 42,5 Mb
Release : 2017-12-19
Category : Technology & Engineering
ISBN : 9781420017663

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Handbook of Semiconductor Manufacturing Technology by Yoshio Nishi,Robert Doering Pdf

Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on... Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.

Author : Chingho Richard Lee
Publisher : Unknown
Page : 172 pages
File Size : 53,7 Mb
Release : 1994
Category : Electronic
ISBN : CORNELL:31924088878032

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Modeling the Mechanical Properties of Thin Films Copper Under Induced Stresses by Chingho Richard Lee Pdf

Author : Richard Vinci,Oliver Kraft,Neville Moody,Paul Besser,Edward Shaffer, II
Publisher : Cambridge University Press
Page : 566 pages
File Size : 44,6 Mb
Release : 2014-06-05
Category : Technology & Engineering
ISBN : 1107413303

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Thin Films - Stresses and Mechanical Properties VIII: by Richard Vinci,Oliver Kraft,Neville Moody,Paul Besser,Edward Shaffer, II Pdf

An understanding of mechanical behavior is crucial for a wide variety of thin-film technologies such as semiconductor devices and packaging (including advanced interconnects, dielectrics and silicides), information storage media, hard coatings, microelectromechanical systems (MEMS), and biomedical devices. The influence of mechanical behavior is seen in thin-film performance and reliability, as well as morphology development during processing and service. The increased need for understanding of these properties has challenged modern materials science because concepts, models and techniques developed for bulk materials often do not apply in small dimensions. This book addresses key issues in the still growing field of thin-film mechanical behavior. Topics include: multilayer thin films; metallic thin films; epitaxy, deposition parameters, microstructure and stresses; thin films for applications in MEMS; polymer thin films; mechanical properties of amorphous and crystalline carbon; adhesion and fracture; reliability in microelectronics; and nanoindentation and advanced testing techniques.

Author : James E. Steinwall
Publisher : Unknown
Page : 376 pages
File Size : 44,5 Mb
Release : 1992
Category : Microfabrication
ISBN : CORNELL:31924062704667

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Microfabrication and Mechanical Properties of Free Standing Thin Films by James E. Steinwall Pdf

Author : K. N. Tu,R. Rosenberg
Publisher : Elsevier
Page : 351 pages
File Size : 42,9 Mb
Release : 2013-10-22
Category : Technology & Engineering
ISBN : 9781483218298

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Preparation and Properties of Thin Films by K. N. Tu,R. Rosenberg Pdf

Treatise on Materials Science and Technology, Volume 24: Preparation and Properties of Thin Films covers the progress made in the preparation of thin films and the corresponding study of their properties. The book discusses the preparation and property correlations in thin film; the variation of microstructure of thin films; and the molecular beam epitaxy of superlattices in thin film. The text also describes the epitaxial growth of silicon structures (thermal-, laser-, and electron-beam-induced); the characterization of grain boundaries in bicrystalline thin films; and the mechanical properties of thin films on substrates. The ion beam modification of thin film; the use of thin alloy films for metallization in microelectronic devices; and the fabrication and physical properties of ultrasmall structures are also encompassed. Materials scientists and materials engineers will find the book invaluable.

Author : Karen A. Reinhardt,Richard F. Reidy
Publisher : John Wiley & Sons
Page : 596 pages
File Size : 46,5 Mb
Release : 2011-04-12
Category : Technology & Engineering
ISBN : 9781118099513

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Handbook for Cleaning for Semiconductor Manufacturing by Karen A. Reinhardt,Richard F. Reidy Pdf

Provides an In-depth discussion of surface conditioning for semiconductor applications The Handbook of Cleaning for Semiconductor Manufacturing: Fundamentals and Applications provides an in-depth discussion of surface conditioning for semiconductor applications. The fundamental physics and chemistry associated with wet processing is reviewed as well as surface and colloidal aspects of cleaning and etching. Topics covered in this new reference include: Front end line (FEOL) and back end of line (BEOL) cleaning applications such as high-k/metal gate post-etch cleaning and pore sealing, high-dose implant stripping and cleaning, and germanium, and silicon passivation Formulation development practices, methodology and a new directions are presented including chemicals used for preventing corrosion of copper lines, cleaning aluminium lines, reclaiming wafers, and water bonding, as well as the filtering and recirculating of chemicals including reuse and recycling Wetting, cleaning, and drying of features, such as high aspect ratio features and hydrophilic surface states, especially how to dry without watermarks, the abilities to wet hydrophobic surfaces and to remove liquid from deep features The chemical reactions and mechanisms of silicon dioxide etching with hydrofluoric acid, particle removal with ammonium hydroxide/hydrogen peroxide mixture, and metal removal with hydrochloric acid The Handbook of Cleaning for Semiconductor Manufacturing: Fundamentals and Applications is a valuable resource for any engineer or manager associated with using or supplying cleaning and contamination free technologies for semiconductor manufacturing. Engineers working for semiconductor manufacturing, capital equipment, chemicals, or other industries that assures cleanliness of chemicals, material, and equipment in the manufacturing area will also find this handbook an indispensible reference.

Author : Sam Zhang
Publisher : CRC Press
Page : 415 pages
File Size : 40,6 Mb
Release : 2010-06-18
Category : Technology & Engineering
ISBN : 9781420093971

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Nanostructured Thin Films and Coatings by Sam Zhang Pdf

Authored by leading experts from around the world, the three-volume Handbook of Nanostructured Thin Films and Coatings gives scientific researchers and product engineers a resource as dynamic and flexible as the field itself. The first two volumes cover the latest research and application of the mechanical and functional properties of thin films an

Author : John C. Bravman,William D. Nix,David M. Barnett,David A. Smith
Publisher : Cambridge University Press
Page : 428 pages
File Size : 41,6 Mb
Release : 2014-06-05
Category : Technology & Engineering
ISBN : 1107410851

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Thin Films:: Volume 130 by John C. Bravman,William D. Nix,David M. Barnett,David A. Smith Pdf

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.