Advances In Low Temperature Rf Plasmas

Author : Toshiaki Makabe
Publisher : Elsevier Publishing Company
Page : 0 pages
File Size : 44,8 Mb
Release : 2002
Category : Low temperature plasmas
ISBN : 0444510958

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Advances in Low Temperature Rf Plasmas by Toshiaki Makabe Pdf

Low temperature plasmas have had a very broad range of applications ever since their discovery. However, recent developments in the dextrous handling of dry etching non-equilibrium plasma have attracted a great common interest that has driving force behind the major developments in diagnostic, theoretical and numerical techniques since the 1980s. A greater fundamental understanding of the kinetics of radio-frequency (rf) plasmas and their interaction with surfaces in regard to the process of large scale integrated circuits has been achieved through the cooperation between academia and industry. At the same time, new applications have become possible, and the basic understanding of low temperature rf plasmas has diffused to other areas of plasma physics. in the special issue of Applied Surface Science, which is published in memory of the International Workshop on Basis for Low Temperature Plasma Applications at Hakone in Japan on July 24 - 25 of 2001. The basic goal in the selection of topics was to cover the range of issues that represent the building blocks of the complex, vertically integrated plasma simulation schemes including surface processes. The text also shows examples of integrated codes and how they are implemented in the development of new strategies of plasma processing. Such codes may be used both in modern experiments and in the computer aided design and control of the plasma devices of the next generation. These are based on the transport theory of electrons, ions and neutrals, as well as on numerical modellings and on the available collision and transport data describing gas and surface phases. density plasmas. All the chapters present a relatively complete review of the developments in these fields since the 1980s as well as a review of their status of development in 2002, and there is a blend of research reviews from both academia and industry.

Author : Paul K. Chu,XinPei Lu
Publisher : CRC Press
Page : 488 pages
File Size : 41,8 Mb
Release : 2013-07-15
Category : Science
ISBN : 9781466509917

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Low Temperature Plasma Technology by Paul K. Chu,XinPei Lu Pdf

Written by a team of pioneering scientists from around the world, Low Temperature Plasma Technology: Methods and Applications brings together recent technological advances and research in the rapidly growing field of low temperature plasmas. The book provides a comprehensive overview of related phenomena such as plasma bullets, plasma penetration i

Author : Riccardo d'Agostino,Pietro Favia,Yoshinobu Kawai,Hideo Ikegami,Noriyoshi Sato,Farzaneh Arefi-Khonsari
Publisher : John Wiley & Sons
Page : 479 pages
File Size : 50,8 Mb
Release : 2008-09-08
Category : Science
ISBN : 9783527622191

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Advanced Plasma Technology by Riccardo d'Agostino,Pietro Favia,Yoshinobu Kawai,Hideo Ikegami,Noriyoshi Sato,Farzaneh Arefi-Khonsari Pdf

A panel of internationally renowned scientists discuss the latest results in plasma technology. This volume has been compiled with both a didactic approach and an overview of the newest achievements for industrial applications. It is divided into two main sections. One is focused on fundamental technology, including plasma production and control, high-pressure discharges, modeling and simulation, diagnostics, dust control, and etching. The section on application technology covers polymer treatments, silicon solar cell, coating and spray, biomaterials, sterilization and waste treatment, plasma propulsion, plasma display panels, and anti-corrosion coatings. The result is an indispensable work for physicists, chemists and engineers involved in the field of plasma technology.

Author : Aamir Shahzad,Maogang He
Publisher : Engineering Science Reference
Page : 264 pages
File Size : 40,7 Mb
Release : 2021-10-30
Category : Science
ISBN : 1799883981

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Emerging Developments and Applications of Low Temperature Plasma by Aamir Shahzad,Maogang He Pdf

"This book offers the foundation for the education and research of medical physicists starting their university studies in the field of physics of nuclear medicine, low temperature plasma applications in industries and daily life"--

Author : Herman V. Boenig
Publisher : CRC Press
Page : 288 pages
File Size : 49,7 Mb
Release : 1991
Category : Technology & Engineering
ISBN : UCAL:B3945800

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Advances in Low-Temperature Plasma Chemistry by Herman V. Boenig Pdf

Author : Shi Nguyen-Kuok
Publisher : Springer
Page : 495 pages
File Size : 47,8 Mb
Release : 2016-11-11
Category : Science
ISBN : 9783319437217

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Theory of Low-Temperature Plasma Physics by Shi Nguyen-Kuok Pdf

This book offers the reader an overview of the basic approaches to the theoretical description of low-temperature plasmas, covering numerical methods, mathematical models and modeling techniques. The main methods of calculating the cross sections of plasma particle interaction and the solution of the kinetic Boltzmann equation for determining the transport coefficients of the plasma are also presented. The results of calculations of thermodynamic properties, transport coefficients, the equilibrium particle-interaction cross sections and two-temperature plasmas are also discussed. Later chapters consider applications, and the results of simulation and calculation of plasma parameters in induction and arc plasma torches are presented. The complex physical processes in high-frequency plasmas and arc plasmas, the internal and external parameters of plasma torches, near-electrode processes, heat transfer, the flow of solid particles in plasmas and other phenomena are considered. The book is intended for professionals involved in the theoretical study of low-temperature plasmas and the design of plasma torches, and will be useful for advanced students in related areas.

Author : Toshiaki Makabe,Zoran Lj. Petrovic
Publisher : CRC Press
Page : 406 pages
File Size : 49,7 Mb
Release : 2014-08-27
Category : Science
ISBN : 9781482222104

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Plasma Electronics by Toshiaki Makabe,Zoran Lj. Petrovic Pdf

Beyond enabling new capabilities, plasma-based techniques, characterized by quantum radicals of feed gases, hold the potential to enhance and improve many processes and applications. Following in the tradition of its popular predecessor, Plasma Electronics, Second Edition: Applications in Microelectronic Device Fabrication explains the fundamental

Author : Anonim
Publisher : ScholarlyEditions
Page : 974 pages
File Size : 42,9 Mb
Release : 2013-06-21
Category : Science
ISBN : 9781481683579

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Advances in Oxygen Research and Application: 2013 Edition by Anonim Pdf

Advances in Oxygen Research and Application: 2013 Edition is a ScholarlyBrief™ that delivers timely, authoritative, comprehensive, and specialized information about ZZZAdditional Research in a concise format. The editors have built Advances in Oxygen Research and Application: 2013 Edition on the vast information databases of ScholarlyNews.™ You can expect the information about ZZZAdditional Research in this book to be deeper than what you can access anywhere else, as well as consistently reliable, authoritative, informed, and relevant. The content of Advances in Oxygen Research and Application: 2013 Edition has been produced by the world’s leading scientists, engineers, analysts, research institutions, and companies. All of the content is from peer-reviewed sources, and all of it is written, assembled, and edited by the editors at ScholarlyEditions™ and available exclusively from us. You now have a source you can cite with authority, confidence, and credibility. More information is available at http://www.ScholarlyEditions.com/.

Author : Anonim
Publisher : Unknown
Page : 128 pages
File Size : 44,5 Mb
Release : 2024-06-30
Category : Electronic
ISBN : 9789814469012

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Spectroscopy, Dynamics and Molecular Theory of Carbon Plasmas and Vapors by Anonim Pdf

Author : Loucas G. Christophorou,James K. Olthoff
Publisher : Springer Science & Business Media
Page : 791 pages
File Size : 43,7 Mb
Release : 2012-12-06
Category : Science
ISBN : 9781441989710

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Fundamental Electron Interactions with Plasma Processing Gases by Loucas G. Christophorou,James K. Olthoff Pdf

This volume deals with the basic knowledge and understanding of fundamental interactions of low energy electrons with molecules. It pro vides an up-to-date and comprehensive account of the fundamental in teractions of low-energy electrons with molecules of current interest in modern technology, especially the semiconductor industry. The primary electron-molecule interaction processes of elastic and in elastic electron scattering, electron-impact ionization, electron-impact dissociation, and electron attachment are discussed, and state-of-the art authoritative data on the cross sections of these processes as well as on rate and transport coefficients are provided. This fundamental knowledge has been obtained by us over the last eight years through a critical review and comprehensive assessment of "all" available data on low-energy electron collisions with plasma processing gases which we conducted at the National Institute of Standards and Technology (NIST). Data from this work were originally published in the Journal of Physical and Chemical Reference Data, and have been updated and expanded here. The fundamental electron-molecule interaction processes are discussed in Chapter 1. The cross sections and rate coefficients most often used to describe these interactions are defined in Chapter 2, where some recent advances in the methods employed for their measurement or calculation are outlined. The methodology we adopted for the critical evaluation, synthesis, and assessment of the existing data is described in Chapter 3. The critically assessed data and recommended or suggested cross sections and rate and transport coefficients for ten plasma etching gases are presented and discussed in Chapters 4, 5, and 6.

Author : Ramnarayan Chattopadhyay
Publisher : Springer Science & Business Media
Page : 375 pages
File Size : 43,9 Mb
Release : 2007-05-08
Category : Technology & Engineering
ISBN : 9781402077647

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Advanced Thermally Assisted Surface Engineering Processes by Ramnarayan Chattopadhyay Pdf

Surfaces are the bounding faces of solids. The interaction of component surface with the working environment results in wear and corrosion. Estimated loss due to wear and corrosion in the USA is around $500 billion. Engineered surfaces are the key to the reduction of losses due to wear and corrosion. There are surface engineering books on specific processes such as thermal spraying and vapor phase deposition or about specific heat sources such as plasma or laser. However, there are few, if any, covering the whole range of advanced surface engineering processes. Advanced Thermally Assisted Surface Engineering Processes has been structured to provide assistance and guidance to the engineers, researchers and students in choosing the right process from the galaxy of newer surface engineering techniques using advanced heat sources.

Author : Herman V. Boenig
Publisher : Unknown
Page : 300 pages
File Size : 47,7 Mb
Release : 1988
Category : Low temperature plasmas
ISBN : UOM:39015032546759

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Advances in Low-temperature Plasma Chemistry, Technology, Applications by Herman V. Boenig Pdf

Author : Anonim
Publisher : Elsevier
Page : 315 pages
File Size : 52,9 Mb
Release : 2000-10-11
Category : Science
ISBN : 0080526055

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Advances in Atomic, Molecular, and Optical Physics by Anonim Pdf

This series, established in 1965, is concerned with recent developments in the general area of atomic, molecular, and optical physics. The field is in a state of rapid growth, as new experimental and theoretical techniques are used on many old and new problems. Topics covered also include related applied areas, such as atmospheric science, astrophysics, surface physics, and laser physics. Articles are written by distinguished experts who are active in their research fields. The articles contain both relevant review material as well as detailed descriptions of important recent developments.

Author : Pascal Chabert,Nicholas Braithwaite
Publisher : Cambridge University Press
Page : 395 pages
File Size : 42,8 Mb
Release : 2011-02-24
Category : Science
ISBN : 9781139494687

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Physics of Radio-Frequency Plasmas by Pascal Chabert,Nicholas Braithwaite Pdf

Low-temperature radio frequency plasmas are essential in various sectors of advanced technology, from micro-engineering to spacecraft propulsion systems and efficient sources of light. The subject lies at the complex interfaces between physics, chemistry and engineering. Focusing mostly on physics, this book will interest graduate students and researchers in applied physics and electrical engineering. The book incorporates a cutting-edge perspective on RF plasmas. It also covers basic plasma physics including transport in bounded plasmas and electrical diagnostics. Its pedagogic style engages readers, helping them to develop physical arguments and mathematical analyses. Worked examples apply the theories covered to realistic scenarios, and over 100 in-text questions let readers put their newly acquired knowledge to use and gain confidence in applying physics to real laboratory situations.

Author : Oleg O. Baranov,Igor Levchenko,Shuyan Xu,Kateryna Bazaka
Publisher : Morgan & Claypool Publishers
Page : 92 pages
File Size : 52,6 Mb
Release : 2020-09-30
Category : Technology & Engineering
ISBN : 9781681739113

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Advanced Concepts and Architectures for Plasma-Enabled Material Processing by Oleg O. Baranov,Igor Levchenko,Shuyan Xu,Kateryna Bazaka Pdf

Plasma-based techniques are widely and successfully used across the field of materials processing, advanced nanosynthesis, and nanofabrication. The diversity of currently available processing architectures based on or enhanced by the use of plasmas is vast, and one can easily get lost in the opportunities presented by each of these configurations. This mini-book provides a concise outline of the most important concepts and architectures in plasma-assisted processing of materials, helping the reader navigate through the fundamentals of plasma system selection and optimization. Architectures discussed in this book range from the relatively simple, user-friendly types of plasmas produced using direct current, radio-frequency, microwave, and arc systems, to more sophisticated advanced systems based on incorporating and external substrate architectures, and complex control mechanisms of configured magnetic fields and distributed plasma sources.