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Author : Thomas David Kudrle
Publisher : Unknown
Page : 230 pages
File Size : 50,7 Mb
Release : 2000
Category : Microelectromechanical systems
ISBN : CORNELL:31924089143964
Author : Vijay K. Varadan,K. J. Vinoy,K. A. Jose
Publisher : John Wiley & Sons
Page : 406 pages
File Size : 40,5 Mb
Release : 2003-07-25
Category : Technology & Engineering
ISBN : 9780470846193
Microelectromechanical systems (MEMS) refer to a collection of micro-sensors and actuators, which can react to environmental change under micro- circuit control. The integration of MEMS into traditional Radio Frequency (RF) circuits has resulted in systems with superior performance levels and lower manufacturing costs. The incorporation of MEMS based fabrication technologies into micro and millimeter wave systems offers viable routes to ICs with MEMS actuators, antennas, switches and transmission lines. The resultant systems operate with an increased bandwidth and increased radiation efficiency and have considerable scope for implementation within the expanding area of wireless personal communication devices. This text provides leading edge coverage of this increasingly important area and highlights the overlapping information requirements of the RF and MEMS research and development communities. * Provides an introduction to micromachining techniques and their use in the fabrication of micro switches, capacitors and inductors * Includes coverage of MEMS devices for wireless and Bluetooth enabled systems Essential reading for RF Circuit design practitioners and researchers requiring an introduction to MEMS technologies, as well as practitioners and researchers in MEMS and silicon technology requiring an introduction to RF circuit design.
Author : Héctor J. de los Santos
Publisher : Artech House
Page : 298 pages
File Size : 55,6 Mb
Release : 2002
Category : Computers
ISBN : 1580535577
This is the first comprehensive book to address the design of RF MEMS-based circuits for use in high performance wireless systems. A groundbreaking research and reference tool, the book enables you to understand the realm of applications of RF MEMS technology; become knowledgeable of the wide variety and performance levels of RF MEMS devices; and partition the architecture of wireless systems to achieve greater levels of performance. This innovative resource also guides you through the design process of RF MEMS-based circuits, and establishes a practical knowledge base for the design of high-yield RF MEMS-based circuits. The book features exercises and detailed case studies on working RF MEMS circuits that help you decide what approaches best fit your design constraints. This unified treatment of RF MEMS-based circuit technology opens up a new world of solutions for meeting the unique challenges of low power/portable wireless products.
Author : Jianqun Wang
Publisher : ProQuest
Page : 128 pages
File Size : 50,5 Mb
Release : 2007
Category : Electrical engineering and electronics
ISBN : 0549144722
The radio frequency micro-electro-mechanical system (RF MEMS) technology is rapidly transitioning from the research stage to commercial applications. Reducing material and fabrication costs, realizing IC compatibility, and improving the RF performance have been main focal points of many recent works. In this dissertation, we target at developing a RF MEMS methodology which realizes CMOS compatibility, cost effectiveness and high performance at the same time. The current RF MEMS devices are mostly constructed on quartz and III-V compound materials to achieve low RF losses. These approaches proved to have excellent RF performance. However these materials are expensive and unable to be integrated into CMOS circuitry. In this work, we developed a CMOS-compatible approach to construct RF MEMS components where low-resistivity silicon and plastic were used as the substrate material and dielectric layer, respectively. This method is cost-effective and presents very high RF performance. Coplanar waveguide (CPW) transmission lines were first realized using this approach. Devices were characterized from DC to 26 GHz, a low insertion loss of 3 dB/cm was achieved. Soft substrate of Kapton film was also used to build CPW lines to answer the increasing trend of flexible devices such as RFIDs, cell phone antennas and soft displays. A very low transmission loss of 1 dB/cm was obtained. Additionally, multiple devices with various dimensional emphases were fabricated to suit different dimensional situations. A novel method of building CMOS-compatible distributed MEMS transmission line (DMTL) phase shifters was developed. A thick layer of Kapton film was bonded on a low-resistivity silicon substrate to prevent RF signal leakage. Design considerations, fabrication processes and measurement results were discussed in detail. For comparison purposes, DMTL phase shifters were constructed on glass substrates as well. In order to verify the design roles and fit for different space situations, various phase shifters were fabricated using this method. Our devices showed comparable results to those built on quartz and III-V compound substrates. Tunable filters are essential elements for modern communication systems. Using the same polymer-silicon method, we built two types of tunable filters--partialloaded short-ended filter and even-loaded open-ended filter. Design methodology, fabrication and measurements were discussed. Our tunable filter demonstrated a 2-GHz tunability and a 10-dB transmission loss. Failure mechanisms and possible improving methods were examined for possible improvements. The fabrication process of the polymer-silicon approach developed for RF MEMS devices is simple, cost-effective and CMOS compatible. It virtually applies to any situation where quartz, III-V compound materials or other CMOS-incompatible materials have to be used for RF performance purposes. Thus, at the end of this dissertation, impedance tuners, digital controlled RF MEMS devices and a RF MEMS packaging technique using this polymer-silicon method were proposed for future works.
Author : Deepak Uttamchandani
Publisher : Elsevier
Page : 640 pages
File Size : 43,5 Mb
Release : 2013-08-31
Category : Technology & Engineering
ISBN : 9780857098610
The increasing demand for mobile and wireless sensing necessitates the use of highly integrated technology featuring small size, low weight, high performance and low cost: micro-electro-mechanical systems (MEMS) can meet this need. The Handbook of MEMS for wireless and mobile applications provides a comprehensive overview of radio frequency (RF) MEMS technologies and explores the use of these technologies over a wide range of application areas.Part one provides an introduction to the use of RF MEMS as an enabling technology for wireless applications. Chapters review RF MEMS technology and applications as a whole before moving on to describe specific technologies for wireless applications including passive components, phase shifters and antennas. Packaging and reliability of RF MEMS is also discussed. Chapters in part two focus on wireless techniques and applications of wireless MEMS including biomedical applications, such as implantable MEMS, intraocular pressure sensors and wireless drug delivery. Further chapters highlight the use of RF MEMS for automotive radar, the monitoring of telecommunications reliability using wireless MEMS and the use of optical MEMS displays in portable electronics.With its distinguished editor and international team of expert authors, the Handbook of MEMS for wireless and mobile applications is a technical resource for MEMS manufacturers, the electronics industry, and scientists, engineers and academics working on MEMS and wireless systems. Reviews the use of radio frequency (RF) MEMS as an enabling technology for wireless applications Discusses wireless techniques and applications of wireless MEMS, including biomedical applications Describes monitoring structures and the environment with wireless MEMS
Author : Gabriel M. Rebeiz
Publisher : John Wiley & Sons
Page : 512 pages
File Size : 43,8 Mb
Release : 2004-02-06
Category : Technology & Engineering
ISBN : 9780471462880
Ultrasmall Radio Frequency and Micro-wave Microelectromechanical systems (RF MEMs), such as switches, varactors, and phase shifters, exhibit nearly zero power consumption or loss. For this reason, they are being developed intensively by corporations worldwide for use in telecommunications equipment. This book acquaints readers with the basics of RF MEMs and describes how to design practical circuits and devices with them. The author, an acknowledged expert in the field, presents a range of real-world applications and shares many valuable tricks of the trade.
Author : Stepan Lucyszyn
Publisher : Cambridge University Press
Page : 441 pages
File Size : 46,9 Mb
Release : 2010-08-19
Category : Technology & Engineering
ISBN : 9781139491662
An up-to-date guide to the theory and applications of RF MEMS. With detailed information about RF MEMS technology as well as its reliability and applications, this is a comprehensive resource for professionals, researchers, and students alike. • Reviews RF MEMS technologies • Illustrates new techniques that solve long-standing problems associated with reliability and packaging • Provides the information needed to incorporate RF MEMS into commercial products • Describes current and future trends in RF MEMS, providing perspective on industry growth • Ideal for those studying or working in RF and microwave circuits, systems, microfabrication and manufacturing, production management and metrology, and performance evaluation
Author : Simon Deleonibus
Publisher : CRC Press
Page : 267 pages
File Size : 43,5 Mb
Release : 2018-12-13
Category : Science
ISBN : 9780429858611
The history of information and communications technologies (ICT) has been paved by both evolutive paths and challenging alternatives, so-called emerging devices and architectures. Their introduction poses the issues of state variable definition, information processing, and process integration in 2D, above IC, and in 3D. This book reviews the capabilities of integrated nanosystems to match low power and high performance either by hybrid and heterogeneous CMOS in 2D/3D or by emerging devices for alternative sensing, actuating, data storage, and processing. The choice of future ICTs will need to take into account not only their energy efficiency but also their sustainability in the global ecosystem.
Author : IANNACCI
Publisher : IOP Publishing Limited
Page : 0 pages
File Size : 42,5 Mb
Release : 2022-07-15
Category : Technology & Engineering
ISBN : 0750341971
The focus of this book develops around HW, and in particular on low-complexity components for Radio Frequency (RF) applications. To this end, Microsystem (MEMS) technology for RF passive components, known as RF-MEMS, is employed, discussing its potentialities in the application frame of 5G. The approach adopted is practical, and a significant part of the content can be directly used by scientists involved in the field, to put their hand on actual design, optimization and development of innovative RF passive components in MEMS technology for 5G and beyond applications. This update (which includes a review of the main approaches to the modelling and simulations of MEMS and RF-MEMS devices) is timely and will find a wider readership as it crosses into the translational aspects of applied research in the subject. Key Features: With over 50 pages of new content, the book will be 1/3 larger than the 1st edition. New chapter on simulation and modelling techniques. Practical approach to the design and development of RF-MEMS design concepts for 5G and upcoming 6G. Includes case studies. Video figures. Includes a review of the business landscape.
Author : Siva Yellampalli
Publisher : BoD – Books on Demand
Page : 220 pages
File Size : 46,5 Mb
Release : 2018-07-18
Category : Technology & Engineering
ISBN : 9781789233940
MEMS by becoming a part of various applications ranging from smartphones to automobiles has become an integral part of our everyday life. MEMS is building synergy between previously unrelated fields such as biology, microelectronics and communications, to improve the quality of human life. The sensors in MEMS gather information from the surrounding, which is then processed by the electronics for decision-making to control the environment. MEMS offers opportunities to miniaturize devices, integrate them with electronics and realize cost savings through batch fabrication. MEMS technology has enhanced many important applications in domains such as consumer electronics, biotechnology and communication and it holds great promise for continued contributions in the future. This book focuses on understanding the design, development and various applications of MEMS sensors.
Author : Ian Robertson,Nutapong Somjit,Mitchai Chongcheawchamnan
Publisher : John Wiley & Sons
Page : 608 pages
File Size : 46,7 Mb
Release : 2016-06-20
Category : Technology & Engineering
ISBN : 9781118917299
This book describes a full range of contemporary techniques for the design of transmitters and receivers for communications systems operating in the range from 1 through to 300 GHz. In this frequency range there is a wide range of technologies that need to be employed, with silicon ICs at the core but, compared with other electronics systems, a much greater use of more specialist devices and components for high performance – for example, high Q-factor/low loss and good power efficiency. Many text books do, of course, cover these topics but what makes this book timely is the rapid adoption of millimetre-waves (frequencies from 30 to 300 GHz) for a wide range of consumer applications such as wireless high definition TV, “5G” Gigabit mobile internet systems and automotive radars. It has taken many years to develop low-cost technologies for suitable transmitters and receivers, so previously these frequencies have been employed only in expensive military and space applications. The book will cover these modern technologies, with the follow topics covered; transmitters and receivers, lumped element filters, tranmission lines and S-parameters, RF MEMS, RFICs and MMICs, and many others. In addition, the book includes extensive line diagrams to illustrate circuit diagrams and block diagrams of systems, including diagrams and photographs showing how circuits are implemented practically. Furthermore, case studies are also included to explain the salient features of a range of important wireless communications systems. The book is accompanied with suitable design examples and exercises based on the Advanced Design System – the industry leading CAD tool for wireless design. More importantly, the authors have been working with Keysight Technologies on a learning & teaching initiative which is designed to promote access to industry-standard EDA tools such as ADS. Through its University Educational Support Program, Keysight offers students the opportunity to request a student license, backed up with extensive classroom materials and support resources. This culminates with students having the chance to demonstrate their RF/MW design and measurement expertise through the Keysight RF & Microwave Industry-Ready Student Certification Program. www.keysight.com/find/eesof-university www.keysight.com/find/eesof-student-certification
Author : Christian C Enz,Andreas Kaiser
Publisher : Springer Science & Business Media
Page : 334 pages
File Size : 55,7 Mb
Release : 2012-08-21
Category : Technology & Engineering
ISBN : 9781441987983
MEMS-based Circuits and Systems for Wireless Communications provides comprehensive coverage of RF-MEMS technology from device to system level. This edited volume places emphasis on how system performance for radio frequency applications can be leveraged by Micro-Electro-Mechanical Systems (MEMS). Coverage also extends to innovative MEMS-aware radio architectures that push the potential of MEMS technology further ahead. This work presents a broad overview of the technology from MEMS devices (mainly BAW and Si MEMS resonators) to basic circuits, such as oscillators and filters, and finally complete systems such as ultra-low-power MEMS-based radios. Contributions from leading experts around the world are organized in three parts. Part I introduces RF-MEMS technology, devices and modeling and includes a prospective outlook on ongoing developments towards Nano-Electro-Mechanical Systems (NEMS) and phononic crystals. Device properties and models are presented in a circuit oriented perspective. Part II focusses on design of electronic circuits incorporating MEMS. Circuit design techniques specific to MEMS resonators are applied to oscillators and active filters. In Part III contributors discuss how MEMS can advantageously be used in radios to increase their miniaturization and reduce their power consumption. RF systems built around MEMS components such as MEMS-based frequency synthesis including all-digital PLLs, ultra-low power MEMS-based communication systems and a MEMS-based automotive wireless sensor node are described.
Author : Jacopo Iannacci
Publisher : Unknown
Page : 172 pages
File Size : 45,5 Mb
Release : 2018-01-17
Category : Technology & Engineering
ISBN : 0750315431
This book outlines the intrinsic potential of RF‑MEMS technology with specific focus on 5G mobile communications and services. Commencing with a review of the characteristics of RF‑MEMS in relation to the specifications of interest for 5G, the book proceeds to develop practical insight concerning the design and development of RF‑MEMS including case studies of design concepts. Including multiphysics simulation and animations, the book will be essential reading for both academic and industrial researchers and engineers.
Author : Jacopo Iannacci
Publisher : Wiley-VCH
Page : 0 pages
File Size : 51,8 Mb
Release : 2013-10-28
Category : Technology & Engineering
ISBN : 3527335641
Closes the gap between hardcore-theoretical and purely experimental RF-MEMS books. The book covers, from a practical viewpoint, the most critical steps that have to be taken in order to develop novel RF-MEMS device concepts. Prototypical RF-MEMS devices, both including lumped components and complex networks, are presented at the beginning of the book as reference examples, and these are then discussed from different perspectives with regard to design, simulation, packaging, testing, and post-fabrication modeling. Theoretical concepts are introduced when necessary to complement the practical hints given for all RF-MEMS development stages. Provides researchers and engineers with invaluable practical hints on how to develop novel RF-MEMS device concepts Covers all critical steps, dealing with design, simulation, optimization, characterization and fabrication of MEMS for radio-frequency applications Addresses frequently disregarded issues, explicitly treating the hard to predict interplay between the three-dimensional device structure and its electromagnetic functionality Bridges theory and experiment, fundamental concepts are introduced with the application in mind, and simulation results are validated against experimental results Appeals to the practice-oriented R&D reader: design and simulation examples are based on widely known software packages such as ANSYS and the hardware description language Verilog.
Author : Trupti Ranjan Lenka,Durgamadhab Misra,Arindam Biswas
Publisher : Springer Nature
Page : 496 pages
File Size : 40,7 Mb
Release : 2021-09-09
Category : Technology & Engineering
ISBN : 9789811637674
The book presents select proceedings of the International Conference on Micro and Nanoelectronics Devices, Circuits and Systems (MNDCS-2021). The volume includes cutting-edge research papers in the emerging fields of micro and nanoelectronics devices, circuits, and systems from experts working in these fields over the last decade. The book is a unique collection of chapters from different areas with a common theme and will be immensely useful to academic researchers and practitioners in the industry who work in this field.