Erosion And Growth Of Solids Stimulated By Atom And Ion Beams

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Erosion and Growth of Solids Stimulated by Atom and Ion Beams

Author : G. Kiriakidis,G. Carter,J.L. Whitton
Publisher : Springer Science & Business Media
Page : 476 pages
File Size : 42,5 Mb
Release : 2012-12-06
Category : Technology & Engineering
ISBN : 9789400944220

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Erosion and Growth of Solids Stimulated by Atom and Ion Beams by G. Kiriakidis,G. Carter,J.L. Whitton Pdf

The members of the organising Committee and their colleagues have, for many years been investigating the evol ution of the fas'cinating surface features which develop during sputtering erosion of solids. Such experimental, theoretical and computational studies have also been carried out in many international laboratories and, as well as much cow~onality and agreement, substantial disagreements were unresolved. In view of the increasing importance of such processes in technological applications such as microlitho graphic etching for the patterning of solid state devices and in fusion technology it was felt opportune to hold a meeting in this area. Furthermore the use of energetic atomic and ion fluxes is also becoming of increasing importance in assisting or modifying the growth of thin films in a number of important industrial processes and it was therefore rational to combine the, study of both erosional and growth processes in a single meeting. These proceedings include 16 invited review and 15 oral or poster presented contributions to the NATO Advanced Study Institute on the "Erosion and Growth of Solids Stimulated by Atom and Ion Beams". The review contributions span the range from the fundamental concepts of ballistic sputtering, and how this influences surface morphology evolution, through processes involving entrapment of incident species to mechanisms involved in'the use of chemically reactive ion species. Further reviews outline the influence of energetic irradiation upon surface growth by atomic deposition whilst others discuss technologkal applications of both areas of growth and erosion.

Materials Modification by High-fluence Ion Beams

Author : Roger Kelly,M. Fernanda da Silva
Publisher : Springer Science & Business Media
Page : 586 pages
File Size : 43,8 Mb
Release : 2012-12-06
Category : Technology & Engineering
ISBN : 9789400912670

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Materials Modification by High-fluence Ion Beams by Roger Kelly,M. Fernanda da Silva Pdf

Proceedings of the NATO Advanced Study Institute on Materials Modification by High-Fluence Ion Beams, Viana do Castelo, Portugal, August 24-September 4, 1987

Low-Energy Ion Irradiation of Materials

Author : Bernd Rauschenbach
Publisher : Springer Nature
Page : 763 pages
File Size : 43,6 Mb
Release : 2022-08-19
Category : Technology & Engineering
ISBN : 9783030972776

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Low-Energy Ion Irradiation of Materials by Bernd Rauschenbach Pdf

This book provides a comprehensive introduction to all aspects of low-energy ion–solid interaction from basic principles to advanced applications in materials science. It features a balanced and insightful approach to the fundamentals of the low-energy ion–solid surface interaction, focusing on relevant topics such as interaction potentials, kinetics of binary collisions, ion range, radiation damages, and sputtering. Additionally, the book incorporates key updates reflecting the latest relevant results of modern research on topics such as topography evolution and thin-film deposition under ion bombardment, ion beam figuring and smoothing, generation of nanostructures, and ion beam-controlled glancing angle deposition. Filling a gap of almost 20 years of relevant research activity, this book offers a wealth of information and up-to-date results for graduate students, academic researchers, and industrial scientists working in these areas.

INIS Atomindex

Author : Anonim
Publisher : Unknown
Page : 1308 pages
File Size : 53,8 Mb
Release : 1988
Category : Nuclear energy
ISBN : MINN:31951D00767520H

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INIS Atomindex by Anonim Pdf

Advances in Electronics and Electron Physics

Author : Anonim
Publisher : Academic Press
Page : 382 pages
File Size : 53,6 Mb
Release : 1990-11-16
Category : Computers
ISBN : 0080577458

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Advances in Electronics and Electron Physics by Anonim Pdf

Advances in Electronics and Electron Physics

Beam Processing Technologies

Author : Norman G. Einspruch,S. S. Cohen,Raj N. Singh
Publisher : Academic Press
Page : 559 pages
File Size : 46,7 Mb
Release : 2014-12-01
Category : Technology & Engineering
ISBN : 9781483217857

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Beam Processing Technologies by Norman G. Einspruch,S. S. Cohen,Raj N. Singh Pdf

Beam Processing Technologies is a collection of papers that deals with the miniaturization of devices that will be faster, consume less power, and cost less per operation or fabrication. One paper discusses metal oxide semiconductor (MOS) integrated circuit technology including the operation of devices whose lateral and vertical dimensions are scaled down. If the devices' silicon doping profiles are increased by the same scale factor, they can operate on lower voltages and currents, with the same performance. Another paper describes laser beam processing and wafer-scale integration as techniques to increase the number of devices on a silicon chip. Electron beam technologies can be used in many fabrication processes such as in microlithography, selective oxidation, doping, metrology. Ion beam applications depend on the presence of the ion introduced into the device (e.g. implantation doping), on pseudoelastic collisions (e.g. physical sputtering or crystal damage), and on inelastic scattering (e.g. polymer resist exposure). Silicon molecular beam epitaxy (SiMBE) can also grow high-quality layers at low temperature, particularly concerning germanium, especially as reagrds the growth system design and utilization of n- and p-type doping. Chemical beam epitaxy (CBE) is another epitaxial growth technique that can surpass MBE and metal organic chemical vapor deposition (MO-CVD). The collection is suitable chemical engineers, industrial physicists, and researchers whose work involve micro-fabrication and development of integrated circuits.

Surface Modeling Engineering

Author : Ram Kossowsky
Publisher : CRC Press
Page : 348 pages
File Size : 43,6 Mb
Release : 1989-07-31
Category : Technology & Engineering
ISBN : 0849347696

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Surface Modeling Engineering by Ram Kossowsky Pdf

These volumes present the general parctitioners in engineering with a comprehensive discussion of technological surfaces, their interactions with environments, and the various modification techniques available to improve their performance. In each subject, applications to metals, ceramics, and polymers are emphasized. The interactions with the environment are described: corrosion (chemical), friction and waer (mechanical), and bioreactivity (physiological). Reviews of major modification schemes such as chemical vapor deposition, physical vapor deposition, laser beam interactions, chemical infusion, and ion implantation are presented. In summary, reviews of applications of the modification techniques to optimize the performances of structural components, tools, electronic devices, and implantable medical devices, manufactured out of metals, ceramic, and polymers, are described.

Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies

Author : Y. Pauleau
Publisher : Springer Science & Business Media
Page : 372 pages
File Size : 53,7 Mb
Release : 2012-12-06
Category : Technology & Engineering
ISBN : 9789401003537

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Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies by Y. Pauleau Pdf

An up-to-date collection of tutorial papers on the latest advances in the deposition and growth of thin films for micro and nano technologies. The emphasis is on fundamental aspects, principles and applications of deposition techniques used for the fabrication of micro and nano devices. The deposition of thin films is described, emphasising the gas phase and surface chemistry and its effects on the growth rates and properties of films. Gas-phase phenomena, surface chemistry, growth mechanisms and the modelling of deposition processes are thoroughly described and discussed to provide a clear understanding of the growth of thin films and microstructures via thermally activated, laser induced, photon assisted, ion beam assisted, and plasma enhanced vapour deposition processes. A handbook for engineers and scientists and an introduction for students of microelectronics.

Fundamental Aspects of Inert Gases in Solids

Author : S.E. Donnelly,J.H. Evans
Publisher : Springer
Page : 458 pages
File Size : 53,7 Mb
Release : 2013-12-20
Category : Science
ISBN : 9781489936806

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Fundamental Aspects of Inert Gases in Solids by S.E. Donnelly,J.H. Evans Pdf

The NATO Advanced Research Workshop on Fundamental Aspects of Inert Gases in Solids, held at Bonas, France from 16-22 September 1990, was the fifth in a series of meetings that have been held in this topic area since 1979. The Consultants' Meeting in that year at Harwell on Rare Gas Behaviour in Metals and Ionic Solids was followed in 1982 by the Jiilich Inter national Symposium on Fundamental Aspects of Helium in Metals. Two smaller meetings have followed-a CECAM organised workshop on Helium Bubbles in Metals was held at Orsay, France in 1986 while in February 1989, a Topical Symposium on Noble Gases in Metals was held in Las Vegas as part of the large TMS/AIME Spring Meeting. As is well known, the dominating feature of inert gas atoms in most solids is their high heat of solution, leading in most situations to an essentially zero solubility and gas-atom precipita tion. In organising the workshop, one particular aim was to target the researchers in the field of inert-gas/solid interactions from three different areas--namely metals, tritides and nuclear fuels-in order to encourage and foster the cross-fertilisation of approaches and ideas. In these three material classes, the behaviour of inert gases in metals has probably been most studied, partly from technological considerations-the effects of helium production via (n, a) reac tions during neutron irradiation are of importance, particularly in a fusion reactor environ ment-and partly from a more fundamental viewpoint.

Energy Research Abstracts

Author : Anonim
Publisher : Unknown
Page : 410 pages
File Size : 50,8 Mb
Release : 1988
Category : Power resources
ISBN : MINN:30000006336311

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Energy Research Abstracts by Anonim Pdf

Structure-Property Relationships in Surface-Modified Ceramics

Author : C.J. McHargue,R. Kossowsky,Wolfgang O. Hofer
Publisher : Springer Science & Business Media
Page : 517 pages
File Size : 49,5 Mb
Release : 2012-12-06
Category : Technology & Engineering
ISBN : 9789400909830

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Structure-Property Relationships in Surface-Modified Ceramics by C.J. McHargue,R. Kossowsky,Wolfgang O. Hofer Pdf

The use of ion beams for the modification of the structure and properties of the near-surface region of ceramics began in earnest in the early 19805. Since the mechanical properties of such materials are dominated by surface flaws and the surface stress state, the use of surface modification tech niques would appear to be an obvious application. As is often the case in research and development, most of the initial studies can be characterized as cataloging the response of various ceramic materials to a range of ion beam treatments. The systematic study of material and ion beam parameters is well underway and we are now designing experiments to provide specific information about the processing parameter - structure-property rela tionships. This NATO-Advanced Study Institute was convened in order to assess our current state of knowledge in this field, to identify opportunities and needs for further research, and to identify the potential of such processes for technological application. It became apparent that this class of inorganic compounds, loosely termed ceramics, presents many challenges to the understanding of ion-solid inter actions, the relationships among ion-beam parameters, materials parameters, and the resulting structures, as well as relationships between structure and properties. In many instances, this understanding will represent a major extension of that learned from the study of metals and semiconductors.

Diamond and Diamond-like Films and Coatings

Author : Robert E. Clausing,Linda L. Horton,John C. Angus,Peter Koidl
Publisher : Springer Science & Business Media
Page : 894 pages
File Size : 55,6 Mb
Release : 2012-12-06
Category : Science
ISBN : 9781468459678

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Diamond and Diamond-like Films and Coatings by Robert E. Clausing,Linda L. Horton,John C. Angus,Peter Koidl Pdf

Diamond films grown by activated chemical vapor deposition have superlative thermal, mechanical, optical, and electronic properties combined with a very high degree of chemical inertness to most environments. These properties, together with the ability to fabricate films and shapes of considerable size, promise an exciting new material with many applications. Some applications are on the verge of commercialization but many await a few more technological developments. Diamond-like films are already employed in both commercial and military applications. The popular press, as well as the scientific and technological and industrial communities, are increasingly interested in the potential for future development of these materials. Although there are many technical papers and review articles published, there is no Single comprehensive introduction to these technologies. The Scientific Affairs Division of NATO recognized the need and the future importance of these technologies and authorized an Advanced Study Institute on diamond and diamond-like films. NATO Advanced Study Institutes are high level teaching activities at which a carefully defined subject is presented in a systematic and coherently structured program. The subject is treated in considerable depth by lecturers eminent in their fields and of international standing. The presentations are made to students who are scientists in the field or who possess an advanced general scientific background.

Surface Segregationphenomena

Author : Peter A. Dowben,Allen Miller
Publisher : CRC Press
Page : 444 pages
File Size : 44,5 Mb
Release : 1990-08-29
Category : Technology & Engineering
ISBN : 0849368936

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Surface Segregationphenomena by Peter A. Dowben,Allen Miller Pdf

The purpose of this book is to discuss the phenomena associated with the segregation of one element in a multicomponent material. It describes the kinetics of segregation and contains a tabular summary of the pros and cons of the various models. The easy-to-read chapters outline in detail the macroscopic approach and provide an in-depth review of broken-bond models. This comprehensive informative resource also addresses important multicomponent systems. These systems include metals with non-metallic constituents, semiconductor-metal interfaces, steels and steel-related alloys, and real catalysts. Readers of this text will gain a good fundamental understanding and overview of surface, interfacial, and selvedge segregation. Those who have an interest in physics, vacuum science, material science, and chemical, mechanical, and electrical engineering will benefit from this imperative work.

Scanning Microscopy

Author : Anonim
Publisher : Unknown
Page : 2308 pages
File Size : 50,5 Mb
Release : 1988
Category : Electronic
ISBN : UCLA:L0054963186

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Scanning Microscopy by Anonim Pdf

Materials and Processes for Surface and Interface Engineering

Author : Y. Pauleau
Publisher : Springer Science & Business Media
Page : 652 pages
File Size : 54,9 Mb
Release : 2012-12-06
Category : Technology & Engineering
ISBN : 9789401100779

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Materials and Processes for Surface and Interface Engineering by Y. Pauleau Pdf

Materials and Processes for Surface and Interface Engineering, which has been written by experts in the fields of deposition technology and surface modification techniques, offers up to date tutorial papers on the latest advances in surface and interface engineering. The emphasis is on fundamental aspects, principles and applications of plasma and ion beam processing technology. A handbook for the engineer and scientist as well as an introduction for students in several branches of materials science and surface engineering.