Chemical Physics Of Thin Film Deposition Processes For Micro And Nano Technologies

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Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies

Y. Pauleau
Chemical Physics of Thin Film Deposition Processes for Micro and Nano Technologies Book PDF

Author : Y. Pauleau
Publisher : Springer Science & Business Media
Page : 372 pages
File Size : 42,9 Mb
Release : 2012-12-06
Category : Technology & Engineering
ISBN : 9789401003537

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Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies by Y. Pauleau Pdf

An up-to-date collection of tutorial papers on the latest advances in the deposition and growth of thin films for micro and nano technologies. The emphasis is on fundamental aspects, principles and applications of deposition techniques used for the fabrication of micro and nano devices. The deposition of thin films is described, emphasising the gas phase and surface chemistry and its effects on the growth rates and properties of films. Gas-phase phenomena, surface chemistry, growth mechanisms and the modelling of deposition processes are thoroughly described and discussed to provide a clear understanding of the growth of thin films and microstructures via thermally activated, laser induced, photon assisted, ion beam assisted, and plasma enhanced vapour deposition processes. A handbook for engineers and scientists and an introduction for students of microelectronics.

Simple Chemical Methods for Thin Film Deposition

Babasaheb R. Sankapal,Ahmed Ennaoui,Ram B. Gupta,Chandrakant D. Lokhande
Simple Chemical Methods for Thin Film Deposition Book PDF

Author : Babasaheb R. Sankapal,Ahmed Ennaoui,Ram B. Gupta,Chandrakant D. Lokhande
Publisher : Springer Nature
Page : 590 pages
File Size : 45,8 Mb
Release : 2023-07-02
Category : Science
ISBN : 9789819909612

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Simple Chemical Methods for Thin Film Deposition by Babasaheb R. Sankapal,Ahmed Ennaoui,Ram B. Gupta,Chandrakant D. Lokhande Pdf

This book explores chemical methods for thin film deposition with diverse nanostructured morphology and their applications. Unlike top-down techniques, chemical methods offer low cost, simplicity, and growth of nanostructured surface architecture with ease of small to large-scale area deposition. The book primarily focuses on innovative twelve chemical methods for thin-film deposition on one platform. Since each method has its own advantages and disadvantages, it is crucial to select the specific method for specific material to be deposited depending upon what type of application is targeted. Due to inclusive of diverse chemical deposition methods, researcher will have knowledge about best choice of the deposition method to be adopted. Inclusive methods discussed in the book are chemical bath deposition, successive ionic layer adsorption and reaction, ion exchange, electroless deposition, electrodeposition, hydrothermal, spray pyrolysis, spin coating, dip coating, doctor blade, screen printing, and sol-gel. The selection of the correct procedure for material to be deposited in thin film form depends on its unique process parameters based on the kind of application and its requirement. The role of preparative factors necessary for thin film alters properties related to structure and surface morphology, electrical conductivity and optical band gap which have been extensively discussed along with the underlying science of film synthesis. The book provides a comprehensive overview of the field of chemical methods for thin film synthesis to applications. In addition to synthesis, the book covers characterization, instrumentation, and industrial application of thin films. As a result, concentrated techniques will be of great interest to university/college professors, students and new engineers as well as postdocs and scientists in the area.

Thin Film Processes

Jagannathan Thirumalai
Thin Film Processes Book PDF

Author : Jagannathan Thirumalai
Publisher : BoD – Books on Demand
Page : 222 pages
File Size : 51,9 Mb
Release : 2017-04-12
Category : Science
ISBN : 9789535130673

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Thin Film Processes by Jagannathan Thirumalai Pdf

The book Thin Film Processes - Artifacts on Surface Phenomena and Technological Facets presents topics on global advancements in theoretical and experimental facts, instrumentation and practical applications of thin-film material perspectives and its applications. The aspect of this book is associated with the thin-film physics, the methods of deposition, optimization parameters and its wide technological applications. This book is divided into three main sections: Thin Film Deposition Methods: A Synthesis Perspective; Optimization Parameters in the Thin Film Science and Application of Thin Films: A Synergistic Outlook. Collected chapters provide applicable knowledge for a wide range of readers: common men, students and researchers. It was constructed by experts in diverse fields of thin-film science and technology from over 15 research institutes across the globe.

Thin Film Materials Technology

Kiyotaka Wasa,Makoto Kitabatake,Hideaki Adachi
Thin Film Materials Technology Book PDF

Author : Kiyotaka Wasa,Makoto Kitabatake,Hideaki Adachi
Publisher : William Andrew
Page : 533 pages
File Size : 51,7 Mb
Release : 2004-05-10
Category : Technology & Engineering
ISBN : 9780815519317

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Thin Film Materials Technology by Kiyotaka Wasa,Makoto Kitabatake,Hideaki Adachi Pdf

An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering.

Proceedings of the International Workshop on Physics and Technology of Thin Films

Alireza Zaker Moshfegh
Proceedings of the International Workshop on Physics and Technology of Thin Films Book PDF

Author : Alireza Zaker Moshfegh
Publisher : World Scientific
Page : 549 pages
File Size : 42,5 Mb
Release : 2004
Category : Science
ISBN : 9789812702876

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Proceedings of the International Workshop on Physics and Technology of Thin Films by Alireza Zaker Moshfegh Pdf

Thin films science and technology plays an important role in the high-tech industries. Thin film technology has been developed primarily for the need of the integrated circuit industry. The demand for development of smaller and smaller devices with higher speed especially in new generation of integrated circuits requires advanced materials and new processing techniques suitable for future giga scale integration (GSI) technology. In this regard, physics and technology of thin films can play an important role to acheive this goal. The production of thin films for device purposes has been developed over the past 40 years. Thin films as a two dimensional system are of great importance to many real-world problems. Their material costs are very small as compared to the corresponding bulk material and they perform the same function when it comes to surface processes. Thus, knowledge and determination of the nature, functions and new properties of thin films can be used for the development of new technologies for future applications. Thin film technology is based on three foundations: fabrication, characterization and applications. Some of the important applications of thin films are microelectronics, communication, optical electronics, catalysis, coating of all kinds, and energy generation and conservation strategies. This book emphasizes the importance of thin films and their properties for the new technologies. It presents basic principles, processes techniques and applications of thin films. As thin films physics and technology is a multidisciplinary field, the book will be useful to a wide varity of readers (especially young researcher) in physics, electronic engineering, material science and metallurgy. Contents: Deposition Processes; Characterization Techniques; Surface Processes; Nanomaterials; Optical Materials; Superconductivity; Magnetic Thin Films. Readership: Graduate students and researchers involved with the physics and technology of thin films.

Thin Film Processes II

Werner Kern
Thin Film Processes II Book PDF

Author : Werner Kern
Publisher : Elsevier
Page : 881 pages
File Size : 53,9 Mb
Release : 2012-12-02
Category : Technology & Engineering
ISBN : 9780080524214

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Thin Film Processes II by Werner Kern Pdf

This sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discusses selected processes in tutorial overviews with implementation guide lines and an introduction to the literature. Though edited to stand alone, when taken together, Thin Film Processes II and its predecessor present a thorough grounding in modern thin film techniques. Provides an all-new sequel to the 1978 classic, Thin Film Processes Introduces new topics, and several key topics presented in the original volume are updated Emphasizes practical applications of major thin film deposition and etching processes Helps readers find the appropriate technology for a particular application

Thin Films by Chemical Vapour Deposition

C.E. Morosanu
Thin Films by Chemical Vapour Deposition Book PDF

Author : C.E. Morosanu
Publisher : Elsevier
Page : 720 pages
File Size : 44,7 Mb
Release : 2016-06-22
Category : Technology & Engineering
ISBN : 9781483291734

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Thin Films by Chemical Vapour Deposition by C.E. Morosanu Pdf

The explosive growth in the semiconductor industry has caused a rapid evolution of thin film materials that lend themselves to the fabrication of state-of-the-art semiconductor devices. Early in the 1960s an old research technique named chemical vapour phase deposition (CVD), which has several unique advantages, developed into the most widely used technique for thin film preparation in electronics technology. In the last 25 years, tremendous advances have been made in the science and technology of thin films prepared by means of CVD. This book presents in a single volume, an up-to-date overview of the important field of CVD processes which has never been completely reviewed previously.

Green Sustainable Process for Chemical and Environmental Engineering and Science

Inamuddin,Rajender Boddula,Mohammed Muzibur Rahman,Abdullah M. Asiri
Green Sustainable Process for Chemical and Environmental Engineering and Science Book PDF

Author : Inamuddin,Rajender Boddula,Mohammed Muzibur Rahman,Abdullah M. Asiri
Publisher : Elsevier
Page : 432 pages
File Size : 49,5 Mb
Release : 2021-03-18
Category : Technology & Engineering
ISBN : 9780128225561

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Green Sustainable Process for Chemical and Environmental Engineering and Science by Inamuddin,Rajender Boddula,Mohammed Muzibur Rahman,Abdullah M. Asiri Pdf

Green Sustainable Process for Chemical and Environmental Engineering and Science: Solid State Synthetic Methods cover recent advances made in the field of solid-state materials synthesis and its various applications. The book provides a brief introduction to the topic and the fundamental principles governing the various methods. Sustainable techniques and green processes development in solid-state chemistry are also highlighted. This book also provides a comprehensive literature on the industrial application using solid-state materials and solid-state devices. Overall, this book is intended to explore green solid-state techniques, eco-friendly materials involved in organic synthesis and real-time applications. Provides a broad overview of solid-state chemistry Outlines an eco-friendly solid-state synthesis of modern nanomaterials, organometallic, coordination compounds and pure organic Gives a detailed account of solid-state chemistry, fundamentals, concepts, techniques and applications Deliberates cutting-edge recent advances in industrial technologies involved in energy, environmental, medicinal and organic chemistry fields

CVD Polymers

Karen K. Gleason
CVD Polymers Book PDF

Author : Karen K. Gleason
Publisher : John Wiley & Sons
Page : 484 pages
File Size : 53,5 Mb
Release : 2015-06-08
Category : Technology & Engineering
ISBN : 9783527337996

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CVD Polymers by Karen K. Gleason Pdf

The method of CVD (chemical vapor deposition) is a versatile technique to fabricate high-quality thin films and structured surfaces in the nanometer regime from the vapor phase. Already widely used for the deposition of inorganic materials in the semiconductor industry, CVD has become the method of choice in many applications to process polymers as well. This highly scalable technique allows for synthesizing high-purity, defect-free films and for systematically tuning their chemical, mechanical and physical properties. In addition, vapor phase processing is critical for the deposition of insoluble materials including fluoropolymers, electrically conductive polymers, and highly crosslinked organic networks. Furthermore, CVD enables the coating of substrates which would otherwise dissolve or swell upon exposure to solvents. The scope of the book encompasses CVD polymerization processes which directly translate the chemical mechanisms of traditional polymer synthesis and organic synthesis in homogeneous liquids into heterogeneous processes for the modification of solid surfaces. The book is structured into four parts, complemented by an introductory overview of the diverse process strategies for CVD of polymeric materials. The first part on the fundamentals of CVD polymers is followed by a detailed coverage of the materials chemistry of CVD polymers, including the main synthesis mechanisms and the resultant classes of materials. The third part focuses on the applications of these materials such as membrane modification and device fabrication. The final part discusses the potential for scale-up and commercialization of CVD polymers.

Thin Films

Dongfang Yang,Katherine Gibson
Thin Films Book PDF

Author : Dongfang Yang,Katherine Gibson
Publisher : BoD – Books on Demand
Page : 224 pages
File Size : 50,9 Mb
Release : 2023-03-29
Category : Technology & Engineering
ISBN : 9781803564555

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Thin Films by Dongfang Yang,Katherine Gibson Pdf

A thin film is a layer of material ranging from fractions of a nanometer to several micrometers in thickness. Thin films have been employed in many applications to provide surfaces that possess specific optical, electronic, chemical, mechanical and thermal properties. Through ten chapters consisting of original research studies and literature reviews written by experts from the international scientific community, this book covers the deposition and application of thin films.

Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon

Krishna Seshan
Handbook of Thin Film Deposition Techniques Principles Methods Equipment and Applications Second Editon Book PDF

Author : Krishna Seshan
Publisher : CRC Press
Page : 72 pages
File Size : 41,5 Mb
Release : 2002-02-01
Category : Science
ISBN : 9781482269680

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Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon by Krishna Seshan Pdf

The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition tec

Handbook of Thin Film Deposition Processes and Techniques

Krishna Seshan
Handbook of Thin Film Deposition Processes and Techniques Book PDF

Author : Krishna Seshan
Publisher : William Andrew
Page : 430 pages
File Size : 44,8 Mb
Release : 2001-02-01
Category : Technology & Engineering
ISBN : 9780815517788

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Handbook of Thin Film Deposition Processes and Techniques by Krishna Seshan Pdf

New second edition of the popular book on deposition (first edition by Klaus Schruegraf) for engineers, technicians, and plant personnel in the semiconductor and related industries. This book traces the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition techniques and the development of highly specialized equipment to enable this deposition. The book includes much cutting-edge material. Entirely new chapters on contamination and contamination control describe the basics and the issues—as feature sizes shrink to sub-micron dimensions, cleanliness and particle elimination has to keep pace. A new chapter on metrology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, MBE, and ion beam methods to bring together all the physical vapor deposition techniques. Two entirely new areas receive full treatment: chemical mechanical polishing which helps attain the flatness that is required by modern lithography methods, and new materials used for interconnect dielectric materials, specifically organic polyimide materials.

Diamond-Like Carbon Coatings

Peerawatt Nunthavarawong,Sanjay Mavinkere Rangappa,Suchart Siengchin,Kuniaki Dohda
Diamond Like Carbon Coatings Book PDF

Author : Peerawatt Nunthavarawong,Sanjay Mavinkere Rangappa,Suchart Siengchin,Kuniaki Dohda
Publisher : CRC Press
Page : 329 pages
File Size : 54,9 Mb
Release : 2022-08-08
Category : Technology & Engineering
ISBN : 9781000630138

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Diamond-Like Carbon Coatings by Peerawatt Nunthavarawong,Sanjay Mavinkere Rangappa,Suchart Siengchin,Kuniaki Dohda Pdf

Diamond-like carbons (DLCs) display a number of attractive properties that make them versatile coating materials for a variety of applications, including extremely high hardness values, very low friction properties, very low gas permeability, good biocompatibility, and very high electrical resistivity, among others. Further research into this material is required to produce hydrogen-free DLC films and to synthesize it together with other materials, thereby obtaining better film properties. Diamond-Like Carbon Coatings: Technologies and Applications examines emerging manufacturing technologies for DLCs with the aim of improving their properties for use in practical applications. Discusses DLC coatings used in mechanical, manufacturing, and medical applications Details recent developments in the novel synthesis of DLC films Covers advances in understanding of chemical, structural, physical, mechanical, and tribological properties for modern material processing Highlights methods to yield longer service life Considers prospects for future applications of emerging DLC technologies This work is aimed at materials science and engineering researchers, advanced students, and industry professionals.

Atomic Layer Deposition

Tommi Kääriäinen,David Cameron,Marja-Leena Kääriäinen,Arthur Sherman
Atomic Layer Deposition Book PDF

Author : Tommi Kääriäinen,David Cameron,Marja-Leena Kääriäinen,Arthur Sherman
Publisher : John Wiley & Sons
Page : 274 pages
File Size : 41,6 Mb
Release : 2013-05-28
Category : Technology & Engineering
ISBN : 9781118062777

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Atomic Layer Deposition by Tommi Kääriäinen,David Cameron,Marja-Leena Kääriäinen,Arthur Sherman Pdf

Since the first edition was published in 2008, Atomic Layer Deposition (ALD) has emerged as a powerful, and sometimes preferred, deposition technology. The new edition of this groundbreaking monograph is the first text to review the subject of ALD comprehensively from a practical perspective. It covers ALD's application to microelectronics (MEMS) and nanotechnology; many important new and emerging applications; thermal processes for ALD growth of nanometer thick films of semiconductors, oxides, metals and nitrides; and the formation of organic and hybrid materials.

Recent Advances in Thin Films

Sushil Kumar,D. K. Aswal
Recent Advances in Thin Films Book PDF

Author : Sushil Kumar,D. K. Aswal
Publisher : Springer Nature
Page : 721 pages
File Size : 50,6 Mb
Release : 2020-08-27
Category : Technology & Engineering
ISBN : 9789811561160

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Recent Advances in Thin Films by Sushil Kumar,D. K. Aswal Pdf

This volume comprises the expert contributions from the invited speakers at the 17th International Conference on Thin Films (ICTF 2017), held at CSIR-NPL, New Delhi, India. Thin film research has become increasingly important over the last few decades owing to the applications in latest technologies and devices. The book focuses on current advances in thin film deposition processes and characterization including thin film measurements. The chapters cover different types of thin films like metal, dielectric, organic and inorganic, and their diverse applications across transistors, resistors, capacitors, memory elements for computers, optical filters and mirrors, sensors, solar cells, LED's, transparent conducting coatings for liquid crystal display, printed circuit board, and automobile headlamp covers. This book can be a useful reference for students, researchers as well as industry professionals by providing an up-to-date knowledge on thin films and coatings.