Handbook Of Quality Integrated Circuit Manufacturing

Author : Robert Zorich
Publisher : Academic Press
Page : 604 pages
File Size : 51,9 Mb
Release : 2012-12-02
Category : Technology & Engineering
ISBN : 9780323140553

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Handbook of Quality Integrated Circuit Manufacturing by Robert Zorich Pdf

Here is a comprehensive practical guide to entire wafer fabrication process from A to Z. Written by a practicing process engineer with years of experience, this book provides a thorough introduction to the complex field of IC manufacturing, including wafer area layout and design, yield optimization, just-in-time management systems, statistical quality control, fabrication equipment and its setup, and cleanroom techniques. In addition, it contains a wealth of information on common process problems: How to detect them, how to confirm them, and how to solve them. Whether you are a new enginner or technician just entering the field, a fabrication manager looking for ways to improve quality and production, or someone who would just like to know more about IC manufacturing, this is the book you're looking for. Provides a readable, practical overview of the entire wafer fabrication process for new engineers and those just entering this complex field Enables engineers and managers to improve production, raise quality levels, and solve problems that commonly occur in the fabrication process Presents the latest techniques and gives special attention to Japanese IC manufacturing techniques, showing how they obtain outstanding quality

Author : Yoshio Nishi,Robert Doering
Publisher : CRC Press
Page : 3276 pages
File Size : 49,9 Mb
Release : 2017-12-19
Category : Technology & Engineering
ISBN : 9781351829823

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Handbook of Semiconductor Manufacturing Technology by Yoshio Nishi,Robert Doering Pdf

Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on... Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.

Author : Hwaiyu Geng
Publisher : McGraw Hill Professional
Page : 915 pages
File Size : 47,9 Mb
Release : 2005-05-18
Category : Technology & Engineering
ISBN : 9780071445597

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Semiconductor Manufacturing Handbook by Hwaiyu Geng Pdf

WORLD-CLASS SEMICONDUCTOR MANUFACTURING EXPERTISE AT YOUR FINGERTIPS This is a comprehensive reference to the semiconductor manufacturing process and ancillary facilities -- from raw material preparation to packaging and testing, applying basics to emerging technologies. Readers charged with optimizing the design and performance of manufacturing processes will find all the information necessary to produce the highest quality chips at the lowest price in the shortest time possible. The Semiconductor Manufacturing Handbook provides leading-edge information on semiconductor wafer processes, MEMS, nanotechnology, and FPD, plus the latest manufacturing and automation technologies, including: Yield Management Automated Material Handling System Fab and Cleanroom Design and Operation Gas Abatement and Waste Treatment Management And much more Written by 60 international experts, and peer reviewed by a seasoned advisory board, this handbook covers the fundamentals of relevant technology and its real-life application and operational considerations for planning, implementing, and controlling manufacturing processes. It includes hundreds of detailed illustrations and a list of relevant books, technical papers, and websites for further research. This inclusive, wide-ranging coverage makes the Semiconductor Manufacturing Handbook the most comprehensive single-volume reference ever published in the field. STATE-OF-THE-ART SEMICONDUCTOR TECHNOLOGIES AND MANUFACTURING PROCESSES: SEMICONDUCTOR FUNDAMENTALS How Chips Are Designed and Made * Substrates * Copper and Low-k Dielectrics * Silicide Formation * Plasma * Vacuum * Photomask WAFER PROCESSING TECHNOLOGIES Microlithography * Ion Implantation * Etch * PVD/ALD * CVD * ECD * Epitaxy * CMP * Wet Cleaning FINAL MANUFACTURING Packaging * Grinding, Stress Relief, Dicing * Inspection, Measurement, and Testing NANOTECHNOLOGY, MEMS, AND FPD GAS AND CHEMICALS Specialty Gas System and DCA * Gas Abatement Systems * Chemical and Slurries Delivery System * Ultra Pure Water FAB YIELD, OPERATIONS, AND FACILITIES Yield Management * Automated Materials Handling System * Metrology * Six Sigma * Advanced Process Control * EHS * Fab Design and Construction * Cleanroom * Vibration and Acoustic Control * ESD * Airborne Molecular Control * Particle Monitoring * Wastewater Neutralization Systems

Author : Gary S. May,Costas J. Spanos
Publisher : John Wiley & Sons
Page : 428 pages
File Size : 53,6 Mb
Release : 2006-05-26
Category : Technology & Engineering
ISBN : 9780471790273

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Fundamentals of Semiconductor Manufacturing and Process Control by Gary S. May,Costas J. Spanos Pdf

A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.

Author : Yangyuan Wang,Min-Hwa Chi,Jesse Jen-Chung Lou,Chun-Zhang Chen
Publisher : Springer Nature
Page : 2006 pages
File Size : 52,8 Mb
Release : 2023-12-29
Category : Technology & Engineering
ISBN : 9789819928361

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Handbook of Integrated Circuit Industry by Yangyuan Wang,Min-Hwa Chi,Jesse Jen-Chung Lou,Chun-Zhang Chen Pdf

Written by hundreds experts who have made contributions to both enterprise and academics research, these excellent reference books provide all necessary knowledge of the whole industrial chain of integrated circuits, and cover topics related to the technology evolution trends, fabrication, applications, new materials, equipment, economy, investment, and industrial developments of integrated circuits. Especially, the coverage is broad in scope and deep enough for all kind of readers being interested in integrated circuit industry. Remarkable data collection, update marketing evaluation, enough working knowledge of integrated circuit fabrication, clear and accessible category of integrated circuit products, and good equipment insight explanation, etc. can make general readers build up a clear overview about the whole integrated circuit industry. This encyclopedia is designed as a reference book for scientists and engineers actively involved in integrated circuit research and development field. In addition, this book provides enough guide lines and knowledges to benefit enterprisers being interested in integrated circuit industry.

Author : Raymond H. Clark
Publisher : Unknown
Page : 620 pages
File Size : 41,6 Mb
Release : 2000
Category : Printed circuits
ISBN : OCLC:959798326

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Handbook of Printed Circuit Manufacturing by Raymond H. Clark Pdf

Author : Abraham Landzberg
Publisher : Springer Science & Business Media
Page : 663 pages
File Size : 40,5 Mb
Release : 2012-12-06
Category : Technology & Engineering
ISBN : 9781461520290

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Microelectronics Manufacturing Diagnostics Handbook by Abraham Landzberg Pdf

The world of microelectronics is filled with cusses measurement systems, manufacturing many success stories. From the use of semi control techniques, test, diagnostics, and fail ure analysis. It discusses methods for modeling conductors for powerful desktop computers to their use in maintaining optimum engine per and reducing defects, and for preventing de formance in modem automobiles, they have fects in the first place. The approach described, clearly improved our daily lives. The broad while geared to the microelectronics world, has useability of the technology is enabled, how applicability to any manufacturing process of similar complexity. The authors comprise some ever, only by the progress made in reducing their cost and improving their reliability. De of the best scientific minds in the world, and fect reduction receives a significant focus in our are practitioners of the art. The information modem manufacturing world, and high-quality captured here is world class. I know you will diagnostics is the key step in that process. find the material to be an excellent reference in of product failures enables step func Analysis your application. tion improvements in yield and reliability. which works to reduce cost and open up new Dr. Paul R. Low applications and technologies. IBM Vice President and This book describes the process ofdefect re of Technology Products General Manager duction in the microelectronics world.

Author : V.D. Hunt
Publisher : Springer Science & Business Media
Page : 328 pages
File Size : 44,5 Mb
Release : 2012-12-06
Category : Technology & Engineering
ISBN : 9781461315773

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Computer-Integrated Manufacturing Handbook by V.D. Hunt Pdf

Manufacturing has entered the early stages of a revolutionary period caused by the convergence of three powerful trends: • The rapid advancement and spread of manufacturing capabilities worldwide has created intense competition on a global scale. • The emergence of advanced manufacturing technologies is dramati cally changing both the products and processes of modern manufac turing. • Changes in traditional management and labor practices, organiza tional structures, and decision-making criteria represent new sources of competitiveness and introduce new strategic opportunities. These trends are interrelated and their effects are already being felt by the u.s. manufacturing community. Future competitiveness for manu facturers worldwide will depend on their response to these trends. Based on the recent performance of u.s. manufacturers, efforts to respond to the challenges posed by new competition, technology, and managerial opportunities have been slow and inadequate. Domestic markets that were once secure have been assailed by a growing number of foreign competitors producing high quality goods at low prices. In a number of areas, such as employment, capacity utilization, research and development expenditures, and capital investment, trends in u.s. manufacturing over the last decade have been unfavorable or have not kept pace with major foreign competitors, such as Japan. There is substantial evidence that many u.s. manufacturers have neglected the manufacturing function, have overemphasized product development at the expense of process improvements, and have not begun to make the adjustments that will be necessary to be competitive.

Author : Eugene R. Hnatek
Publisher : CRC Press
Page : 808 pages
File Size : 42,5 Mb
Release : 1994-12-01
Category : Technology & Engineering
ISBN : 0824792831

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Integrated Circuit Quality and Reliability, Second Edition, by Eugene R. Hnatek Pdf

Examines all important aspects of integrated circuit design, fabrication, assembly and test processes as they relate to quality and reliability. This second edition discusses in detail: the latest circuit design technology trends; the sources of error in wafer fabrication and assembly; avenues of contamination; new IC packaging methods; new in-line process monitors and test structures; and more.;This work should be useful to electrical and electronics, quality and reliability, and industrial engineers; computer scientists; integrated circuit manufacturers; and upper-level undergraduate, graduate and continuing-education students in these disciplines.

Author : Paul D. Franzon,Erik Jan Marinissen,Muhannad S. Bakir
Publisher : John Wiley & Sons
Page : 488 pages
File Size : 41,5 Mb
Release : 2019-05-06
Category : Technology & Engineering
ISBN : 9783527338559

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Handbook of 3D Integration, Volume 4 by Paul D. Franzon,Erik Jan Marinissen,Muhannad S. Bakir Pdf

This fourth volume of the landmark handbook focuses on the design, testing, and thermal management of 3D-integrated circuits, both from a technological and materials science perspective. Edited and authored by key contributors from top research institutions and high-tech companies, the first part of the book provides an overview of the latest developments in 3D chip design, including challenges and opportunities. The second part focuses on the test methods used to assess the quality and reliability of the 3D-integrated circuits, while the third and final part deals with thermal management and advanced cooling technologies and their integration.

Author : Robert Zorich,Lita Shon-Roy,Allan Wiesnoski
Publisher : Unknown
Page : 128 pages
File Size : 45,8 Mb
Release : 2000
Category : Integrated circuits
ISBN : 1877750891

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The Handbook of Integrated Circuit Fabrication by Robert Zorich,Lita Shon-Roy,Allan Wiesnoski Pdf

Author : Arthur Bernard Williams
Publisher : McGraw-Hill Companies
Page : 974 pages
File Size : 45,9 Mb
Release : 1984
Category : Technology & Engineering
ISBN : UOM:39015004498963

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Designer's Handbook of Integrated Circuits by Arthur Bernard Williams Pdf

Author : Bernard S. Matisoff
Publisher : Springer
Page : 706 pages
File Size : 43,5 Mb
Release : 1997
Category : Computers
ISBN : STANFORD:36105019223192

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Handbook of Electronics Manufacturing Engineering by Bernard S. Matisoff Pdf

Newly revised and updated material featured in this text includes current soldering environmental requirements, the new standards of Total Quality Management (TQM), electrical considerations in the design of static control in the manufacturing environment, requirements for an Occupational Safety and Health Program Automating production.

Author : Hong Liang,David Craven
Publisher : CRC Press
Page : 199 pages
File Size : 49,9 Mb
Release : 2005-03-01
Category : Technology & Engineering
ISBN : 9781420028393

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Tribology In Chemical-Mechanical Planarization by Hong Liang,David Craven Pdf

Illustrating their intersecting role in manufacturing and technological development, this book examines tribological principles and their applications in CMP, including integrated circuits, basic concepts in surfaces of contacts, and common defects as well as friction, lubrication fundamentals, and the basics of wear. The book concludes its focus with mechanical aspects of CMP, pad materials, elastic modulus, and cell buckling. As the first source to integrate CMP and tribology, Tribology in Chemical-Mechanical Planarization provides applied scientists and engineers in the fields of semiconductors and microelectronics with clear foresight to the future of this technology.

Author : Gerhard Lakemeyer,Bernhard Nebel
Publisher : Morgan Kaufmann
Page : 424 pages
File Size : 49,6 Mb
Release : 2003
Category : Computers
ISBN : 1558608117

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Exploring Artificial Intelligence in the New Millennium by Gerhard Lakemeyer,Bernhard Nebel Pdf

This guide is a unique presentation of the spectrum of ongoing research in Artificial Intelligence. An ideal collection for personal reference or for use in introductory courses in AI and its subfields, "Exploring Artificial Intelligence in the New Millennium" is essential reading for anyone interested in the intellectual and technological challenges of AI.