Introduction To Microfabrication

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Introduction to Microfabrication

Sami Franssila
Introduction to Microfabrication Book PDF

Author : Sami Franssila
Publisher : John Wiley & Sons
Page : 424 pages
File Size : 47,8 Mb
Release : 2005-01-28
Category : Technology & Engineering
ISBN : 9780470020562

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Introduction to Microfabrication by Sami Franssila Pdf

Microfabrication is the key technology behind integrated circuits,microsensors, photonic crystals, ink jet printers, solar cells andflat panel displays. Microsystems can be complex, but the basicmicrostructures and processes of microfabrication are fairlysimple. Introduction to Microfabrication shows how the commonmicrofabrication concepts can be applied over and over again tocreate devices with a wide variety of structures andfunctions. Featuring: * A comprehensive presentation of basic fabrication processes * An emphasis on materials and microstructures, rather than devicephysics * In-depth discussion on process integration showing how processes,materials and devices interact * A wealth of examples of both conceptual and real devices Introduction to Microfabrication includes 250 homework problems forstudents to familiarise themselves with micro-scale materials,dimensions, measurements, costs and scaling trends. Both researchand manufacturing topics are covered, with an emphasis on silicon,which is the workhorse of microfabrication. This book will serve as an excellent first text for electricalengineers, chemists, physicists and materials scientists who wishto learn about microstructures and microfabrication techniques,whether in MEMS, microelectronics or emerging applications.

Introduction to Microelectronic Fabrication

Richard C. Jaeger
Introduction to Microelectronic Fabrication Book PDF

Author : Richard C. Jaeger
Publisher : Pearson
Page : 0 pages
File Size : 42,7 Mb
Release : 2002
Category : Integrated circuit
ISBN : 0201444941

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Introduction to Microelectronic Fabrication by Richard C. Jaeger Pdf

For courses in Theory and Fabrication of Integrated Circuits. The author's goal in writing this text was to present a concise survey of the most up-to-date techniques in the field. It is devoted exclusively to processing, and is highlighted by careful explanations, clear, simple language, and numerous fully-solved example problems. This work assumes a minimal knowledge of integrated circuits and of terminal behavior of electronic components such as resistors, diodes, and MOS and bipolar transistors.

3D Laser Microfabrication

Hiroaki Misawa,Saulius Juodkazis
3D Laser Microfabrication Book PDF

Author : Hiroaki Misawa,Saulius Juodkazis
Publisher : John Wiley & Sons
Page : 403 pages
File Size : 48,7 Mb
Release : 2006-08-21
Category : Technology & Engineering
ISBN : 9783527608409

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3D Laser Microfabrication by Hiroaki Misawa,Saulius Juodkazis Pdf

A thorough introduction to 3D laser microfabrication technology, leading readers from the fundamentals and theory to its various potent applications, such as the generation of tiny objects or three-dimensional structures within the bulk of transparent materials. The book also presents new theoretical material on dielectric breakdown, allowing a better understanding of the differences between optical damage on surfaces and inside the bulk, as well as a look into the future. Chemists, physicists, materials scientists and engineers will find this a valuable source of interdisciplinary knowledge in the field of laser optics and nanotechnology.

Microfabrication for Industrial Applications

Regina Luttge
Microfabrication for Industrial Applications Book PDF

Author : Regina Luttge
Publisher : William Andrew
Page : 314 pages
File Size : 43,8 Mb
Release : 2011-09-14
Category : Science
ISBN : 9780815515821

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Microfabrication for Industrial Applications by Regina Luttge Pdf

Microfabrication for Industrial Applications focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects. Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc. Shows engineers & students how to evaluate the potential value of current and nearfuture manufacturing processes for miniaturized systems in industrial environments Explains the top-down and bottom up approaches to nanotechnology, nanostructures fabricated with beams, nano imprinting methods, nanoparticle manufacturing (and their health aspects), nanofeature analysis, and connecting nano to micro to macro Discusses issues for practical application cases; possibilities of dimension precision; large volume manufacturing of micro- & nanostructures (machines, materials, costs) Explains applications of Microsystems for information technology, e.g.: data recording (camera, microphone), storage (memories, CDs), communication; computing; and displays (beamers, LCD, TFT) Case studies are given for sensors, resonators, probes, transdermal medical systems, micro- pumps & valves, inkjets, DNA-analysis, lab-on-a-chip, & micro-cooling

Fundamental Principles of Optical Lithography

Chris Mack
Fundamental Principles of Optical Lithography Book PDF

Author : Chris Mack
Publisher : John Wiley & Sons
Page : 503 pages
File Size : 44,8 Mb
Release : 2011-08-10
Category : Technology & Engineering
ISBN : 9781119965077

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Fundamental Principles of Optical Lithography by Chris Mack Pdf

The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate. This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter. Additional Information: Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You can also contact the author and find help for instructors.

Transport in Laser Microfabrication

Costas P. Grigoropoulos
Transport in Laser Microfabrication Book PDF

Author : Costas P. Grigoropoulos
Publisher : Cambridge University Press
Page : 413 pages
File Size : 46,9 Mb
Release : 2009-07-30
Category : Science
ISBN : 9780521821728

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Transport in Laser Microfabrication by Costas P. Grigoropoulos Pdf

Provides researchers and practitioners with the technical background to understand transport phenomena in laser microfabrication applications.

Nano- and Microfabrication for Industrial and Biomedical Applications

Regina Luttge
Nano and Microfabrication for Industrial and Biomedical Applications Book PDF

Author : Regina Luttge
Publisher : William Andrew
Page : 278 pages
File Size : 46,5 Mb
Release : 2016-06-12
Category : Technology & Engineering
ISBN : 9780323389280

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Nano- and Microfabrication for Industrial and Biomedical Applications by Regina Luttge Pdf

Nano- and Microfabrication for Industrial and Biomedical Applications, Second Edition, focuses on the industrial perspective on micro- and nanofabrication methods, including large-scale manufacturing, the transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. The book gives a history of miniaturization and micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices. In this second edition, a new focus area is nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems. In addition, new material covers lithographic mould fabrication for soft-lithography, nanolithography techniques, corner lithography, advances in nanosensing, and the developing field of advanced functional materials. Luttge also explores the view that micro- and nanofabrication will be the key driver for a "tech-revolution" in biology and medical research that includes a new case study that covers the developing organ-on-chip concept. Presents an interdisciplinary approach that makes micro/nanofabrication accessible equally to engineers and those with a life science background, both in academic settings and commercial R&D Provides readers with guidelines for assessing the commercial potential of any new technology based on micro/nanofabrication, thus reducing the investment risk Updated edition presents nanoengineering as an important driver for the rise of novel applications by integrating bio-nanofabrication into microsystems

Introduction to BioMEMS

Albert Folch
Introduction to BioMEMS Book PDF

Author : Albert Folch
Publisher : CRC Press
Page : 528 pages
File Size : 47,9 Mb
Release : 2016-04-19
Category : Medical
ISBN : 9781466509382

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Introduction to BioMEMS by Albert Folch Pdf

The entire scope of the BioMEMS field-at your fingertipsHelping to educate the new generation of engineers and biologists, Introduction to BioMEMS explains how certain problems in biology and medicine benefit from and often require the miniaturization of devices. The book covers the whole breadth of this dynamic field, including classical microfabr

The Science and Engineering of Microelectronic Fabrication

Stephen A. Campbell
The Science and Engineering of Microelectronic Fabrication Book PDF

Author : Stephen A. Campbell
Publisher : Oxford University Press, USA
Page : 572 pages
File Size : 44,8 Mb
Release : 1996
Category : Technology & Engineering
ISBN : UOM:39015037450577

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The Science and Engineering of Microelectronic Fabrication by Stephen A. Campbell Pdf

The Science and Engineering of Microelectronic Fabrication provides an introduction to microelectronic processing. Geared towards a wide audience, it may be used as a textbook for both first year graduate and upper level undergraduate courses and as a handy reference for professionals. The text covers all the basic unit processes used to fabricate integrated circuits including photolithography, plasma and reactive ion etching, ion implantation, diffusion, oxidation, evaporation, vapor phase epitaxial growth, sputtering and chemical vapor deposition. Advanced processing topics such as rapid thermal processing, nonoptical lithography, molecular beam epitaxy, and metal organic chemical vapor deposition are also presented. The physics and chemistry of each process is introduced along with descriptions of the equipment used for the manufacturing of integrated circuits. The text also discusses the integration of these processes into common technologies such as CMOS, double poly bipolar, and GaAs MESFETs. Complexity/performance tradeoffs are evaluated along with a description of the current state-of-the-art devices. Each chapter includes sample problems with solutions. The book also makes use of the process simulation package SUPREM to demonstrate impurity profiles of practical interest.

Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication

P. Rai-Choudhury
Handbook of Microlithography Micromachining and Microfabrication Micromachining and microfabrication Book PDF

Author : P. Rai-Choudhury
Publisher : SPIE Press
Page : 706 pages
File Size : 44,8 Mb
Release : 1997
Category : Technology & Engineering
ISBN : 0819423793

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Handbook of Microlithography, Micromachining, and Microfabrication: Micromachining and microfabrication by P. Rai-Choudhury Pdf

Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.

Three-Dimensional Microfabrication Using Two-Photon Polymerization

Tommaso Baldacchini
Three Dimensional Microfabrication Using Two Photon Polymerization Book PDF

Author : Tommaso Baldacchini
Publisher : William Andrew
Page : 766 pages
File Size : 44,8 Mb
Release : 2019-10-31
Category : Technology & Engineering
ISBN : 9780128178287

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Three-Dimensional Microfabrication Using Two-Photon Polymerization by Tommaso Baldacchini Pdf

Three-Dimensional Microfabrication Using Two-Photon Polymerization, Second Edition offers a comprehensive guide to TPP microfabrication and a unified description of TPP microfabrication across disciplines. It offers in-depth discussion and analysis of all aspects of TPP, including the necessary background, pros and cons of TPP microfabrication, material selection, equipment, processes and characterization. Current and future applications are covered, along with case studies that illustrate the book's concepts. This new edition includes updated chapters on metrology, synthesis and the characterization of photoinitiators used in TPP, negative- and positive-tone photoresists, and nonlinear optical characterization of polymers. This is an important resource that will be useful for scientists involved in microfabrication, generation of micro- and nano-patterns and micromachining. Discusses the major types of nanomaterials used in the agriculture and forestry sectors, exploring how their properties make them effective for specific applications Explores the design, fabrication, characterization and applications of nanomaterials for new Agri-products Offers an overview of regulatory aspects regarding the use of nanomaterials for agriculture and forestry

Microfluidic Techniques

Shelley D. Minteer
Microfluidic Techniques Book PDF

Author : Shelley D. Minteer
Publisher : Springer Science & Business Media
Page : 245 pages
File Size : 40,9 Mb
Release : 2008-02-04
Category : Science
ISBN : 9781592599974

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Microfluidic Techniques by Shelley D. Minteer Pdf

Hands-on researchers review the principles behind successful miniaturization and describe the key techniques for miniaturizing large-scale biochemical and bioanalytical methods for microchip analysis. The authors cover not only the most popular methods for the fabrication of microchips (photolithography, laser ablation, and soft lithography), but also microfluidic techniques for such bioanalytical assays and bioprocesses as DNA analysis, PCR, immunoassays, and cell reactors. Highlights include PCR on a microchip, microscale cell culturing, and the study of cellular processes on a microchip. The protocols offer step-by-step laboratory instructions, an introduction outlining the principles behind the technique, lists of the necessary equipment and reagents, and tips on troubleshooting and avoiding known pitfalls.

Manufacturing Techniques for Microfabrication and Nanotechnology

Marc J. Madou
Manufacturing Techniques for Microfabrication and Nanotechnology Book PDF

Author : Marc J. Madou
Publisher : CRC Press
Page : 672 pages
File Size : 41,6 Mb
Release : 2011-06-13
Category : Technology & Engineering
ISBN : 9781420055191

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Manufacturing Techniques for Microfabrication and Nanotechnology by Marc J. Madou Pdf

Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.

Fabrication Engineering at the Micro and Nanoscale

Stephen A. Campbell
Fabrication Engineering at the Micro and Nanoscale Book PDF

Author : Stephen A. Campbell
Publisher : OUP USA
Page : 0 pages
File Size : 51,6 Mb
Release : 2008-01-10
Category : Technology & Engineering
ISBN : 0195320174

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Fabrication Engineering at the Micro and Nanoscale by Stephen A. Campbell Pdf

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering at the Micro and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication.

Fabrication & Design of Resonant Microdevices

Behraad Bahreyni
Fabrication Design of Resonant Microdevices Book PDF

Author : Behraad Bahreyni
Publisher : William Andrew
Page : 250 pages
File Size : 45,8 Mb
Release : 2008-10-20
Category : Technology & Engineering
ISBN : 9780815519713

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Fabrication & Design of Resonant Microdevices by Behraad Bahreyni Pdf

This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry. Offers numerous academic and industrial examples of resonant MEMS Provides an analytic model of device behaviour Explains two-port systems in detail Devotes ample space to excitation and signal detection methods Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices