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Author : Michael Nastasi,James W. Mayer,James K. Hirvonen
Publisher : Cambridge University Press
Page : 572 pages
File Size : 40,8 Mb
Release : 1996-03-29
Category : Science
ISBN : 9780521373760
Comprehensive guide to an important materials science technique for students and researchers.
Author : Wolfgang Eckstein
Publisher : Springer Science & Business Media
Page : 303 pages
File Size : 48,9 Mb
Release : 2013-03-12
Category : Science
ISBN : 9783642735134
In this book the author discusses the investigation of ion bombardment of solids by computer simulation, with the aim of demonstrating the usefulness of this approach to the problem of interactions of ions with solids. The various chapters present the basic physics behind the simulation programs, their structure and many applications to different topics. The two main streams, the binary collision model and the classical dynamics model, are discussed, as are interaction potentials and electronic energy losses. The main topics investigated are backscattering, sputtering and implantation for incident atomic particles with energies from the eV to the MeV range. An extensive overview of the literature is given, making this book of interest to the active reseacher as well to students entering the field.
Author : Walter Maxwell Gibson,Henry H. Teitelbaum
Publisher : Unknown
Page : 128 pages
File Size : 41,6 Mb
Release : 1980
Category : Energy-band theory of solids
ISBN : 0852964587
Author : Werner Wesch,Elke Wendler
Publisher : Springer
Page : 534 pages
File Size : 40,9 Mb
Release : 2016-07-14
Category : Science
ISBN : 9783319335612
This book presents the method of ion beam modification of solids in realization, theory and applications in a comprehensive way. It provides a review of the physical basics of ion-solid interaction and on ion-beam induced structural modifications of solids. Ion beams are widely used to modify the physical properties of materials. A complete theory of ion stopping in matter and the calculation of the energy loss due to nuclear and electronic interactions are presented including the effect of ion channeling. To explain structural modifications due to high electronic excitations, different concepts are presented with special emphasis on the thermal spike model. Furthermore, general concepts of damage evolution as a function of ion mass, ion fluence, ion flux and temperature are described in detail and their limits and applicability are discussed. The effect of nuclear and electronic energy loss on structural modifications of solids such as damage formation, phase transitions and amorphization is reviewed for insulators and semiconductors. Finally some selected applications of ion beams are given.
Author : Walter Maxwell Gibson
Publisher : Institution of Electrical Engineers
Page : 1652 pages
File Size : 54,8 Mb
Release : 1980-01-01
Category : Energy-band theory of solids
ISBN : 0852964579
Author : Michael Nastasi,James W. Mayer
Publisher : Springer Science & Business Media
Page : 271 pages
File Size : 51,6 Mb
Release : 2007-05-16
Category : Science
ISBN : 9783540452980
Ion implantation is one of the key processing steps in silicon integrated circuit technology. Some integrated circuits require up to 17 implantation steps and circuits are seldom processed with less than 10 implantation steps. Controlled doping at controlled depths is an essential feature of implantation. Ion beam processing can also be used to improve corrosion resistance, to harden surfaces, to reduce wear and, in general, to improve materials properties. This book presents the physics and materials science of ion implantation and ion beam modification of materials. It covers ion-solid interactions used to predict ion ranges, ion straggling and lattice disorder. Also treated are shallow-junction formation and slicing silicon with hydrogen ion beams. Topics important for materials modification, such as ion-beam mixing, stresses, and sputtering, are also described.
Author : Walter M. Gibson
Publisher : Unknown
Page : 632 pages
File Size : 51,6 Mb
Release : 1980
Category : Collisions (Physics)
ISBN : CORNELL:31924004839324
Author : Zinetula Insepov
Publisher : CRC Press
Page : 254 pages
File Size : 42,9 Mb
Release : 2016-04-21
Category : Science
ISBN : 9781439875438
Cluster Ion-Solid Interactions: Theory, Simulation, and Experiment provides an overview of various concepts in cluster physics and related topics in physics, including the fundamentals and tools underlying novel cluster ion beam technology. The material is based on the author’s highly regarded courses at Kyoto University, Purdue University, the Moscow Institute of Physics and Technology, and the Moscow Engineering Physics Institute as well as his research results on cluster ion beam applications at Kyoto University. The author introduces the basic principles of statistical physics and thermodynamics before covering applications, experimental justifications, and practical implementations. He describes classical nucleation theory and explains the drawbacks of this theory, showing how accurate modeling and simulations are necessary to justify theoretical approaches and simplifications.
Author : Bernd Schmidt,Klaus Wetzig
Publisher : Springer Science & Business Media
Page : 425 pages
File Size : 50,7 Mb
Release : 2012-12-13
Category : Technology & Engineering
ISBN : 9783211993569
A comprehensive review of ion beam application in modern materials research is provided, including the basics of ion beam physics and technology. The physics of ion-solid interactions for ion implantation, ion beam synthesis, sputtering and nano-patterning is treated in detail. Its applications in materials research, development and analysis, developments of special techniques and interaction mechanisms of ion beams with solid state matter result in the optimization of new material properties, which are discussed thoroughly. Solid-state properties optimization for functional materials such as doped semiconductors and metal layers for nano-electronics, metal alloys, and nano-patterned surfaces is demonstrated. The ion beam is an important tool for both materials processing and analysis. Researchers engaged in solid-state physics and materials research, engineers and technologists in the field of modern functional materials will welcome this text.
Author : Sarah Fearn
Publisher : Morgan & Claypool Publishers
Page : 67 pages
File Size : 55,7 Mb
Release : 2015-10-16
Category : Technology & Engineering
ISBN : 9781681740881
This book highlights the application of Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS) for high-resolution surface analysis and characterization of materials. While providing a brief overview of the principles of SIMS, it also provides examples of how dual-beam ToF-SIMS is used to investigate a range of materials systems and properties. Over the years, SIMS instrumentation has dramatically changed since the earliest secondary ion mass spectrometers were first developed. Instruments were once dedicated to either the depth profiling of materials using high-ion-beam currents to analyse near surface to bulk regions of materials (dynamic SIMS), or time-of-flight instruments that produced complex mass spectra of the very outer-most surface of samples, using very low-beam currents (static SIMS). Now, with the development of dual-beam instruments these two very distinct fields now overlap.
Author : E.S. Mashkova,V.A. Molchanov
Publisher : Elsevier
Page : 463 pages
File Size : 43,9 Mb
Release : 2012-12-02
Category : Science
ISBN : 9780444601001
Medium-Energy Ion Reflection from Solids
Author : Lucille A. Giannuzzi,North Carolina State University
Publisher : Springer Science & Business Media
Page : 362 pages
File Size : 45,8 Mb
Release : 2006-05-18
Category : Science
ISBN : 9780387233130
Introduction to Focused Ion Beams is geared towards techniques and applications. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and dual platform instruments.
Author : D. B. Poker
Publisher : Unknown
Page : 940 pages
File Size : 51,6 Mb
Release : 1996-05-23
Category : Technology & Engineering
ISBN : UOM:39015037435461
Several beam-solid interaction techniques have been developed that can either stand alone or be used in connection with others for materials processing, for fabrication of devices with enhanced electro-optical and mechanical properties, and with enhanced resistance to corrosion and erosion. For example, advances in focused ion beams (FIB) have brought out-of-reach ideas and applications to fruition. This book from MRS focuses on the developments in ion-beam-assisted processing of materials and reviews successful applications of the techniques. Topics include: fundamentals of ion-solid interactions; ion-beam mixing; radiation damage; insulators and wide bandgap materials; polymers; optical materials; plasma and ion-assisted techniques; metals and tribology; focused ion beams; fundamental semiconductor processing and compound semiconductors.
Author : Inga Tolstikhina,Makoto Imai,Nicolas Winckler,Viacheslav Shevelko
Publisher : Springer
Page : 220 pages
File Size : 49,7 Mb
Release : 2018-02-28
Category : Science
ISBN : 9783319749921
This book provides an overview of the recent experimental and theoretical results on interactions of heavy ions with gaseous, solid and plasma targets from the perspective of atomic physics. The topics discussed comprise stopping power, multiple-electron loss and capture processes, equilibrium and non-equilibrium charge-state fractions in penetration of fast ion beams through matter including relativistic domain. It also addresses mean charge-states and equilibrium target thickness in ion-beam penetrations, isotope effects in low-energy electron capture, lifetimes of heavy ion beams, semi-empirical formulae for effective cross sections. The book is intended for researchers and graduate students working in atomic, plasma and accelerator physics.
Author : Walter M. Gibson
Publisher : Unknown
Page : 330 pages
File Size : 55,5 Mb
Release : 1980
Category : Collisions (Physics)
ISBN : CORNELL:31924004839340