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Author : Anonim
Publisher : Unknown
Page : 318 pages
File Size : 47,6 Mb
Release : 2002
Category : Microelectromechanical systems
ISBN : LCCN:2002071761
Author : Maarten P. de Boer,Arthur H. Heuer,S. Joshua Jacobs,Eric Peeters
Publisher : Cambridge University Press
Page : 334 pages
File Size : 55,7 Mb
Release : 2014-06-05
Category : Technology & Engineering
ISBN : 1107413214
Microelectromechanical systems (MEMS) hold great promise for sensing and actuating on the micron scale. There is a hierarchy of increasing difficulty for placing MEMS devices in the field. Devices that do not allow contact between structural members rely mainly on mechanical properties of freestanding films. High-resolution techniques must be developed within the framework of MEMS to measure properties such as modulus and residual stress. When contact and rubbing contact are allowed, the complexities of adhesion and friction at the microscale must be understood and well controlled. Fluid interactions are similarly important for microfluidic devices. Packaging of MEMS for use in the field also requires special consideration, because it is often application specific. This book investigates various materials, characterization methods and processing techniques. These approaches represent different but useful strategies to solve MEMS challenges, and must be integrated for product realization. Topics include: deposition and characterization of Si; materials and processes for MEMS; tribology; dynamic optical characterization; packaging; LIGA; materials aspects; and characterization of MEMS processing.
Author : Arthur H. Heuer,S. Joshua Jacobs
Publisher : Unknown
Page : 274 pages
File Size : 51,7 Mb
Release : 1999
Category : Microelectromechanical systems
ISBN : UCSD:31822028562171
Author : Arturo A. Ayón,Thomas E. Buchheit,Harold Kahn,S. Mark Spearing
Publisher : Cambridge University Press
Page : 334 pages
File Size : 41,5 Mb
Release : 2014-06-05
Category : Technology & Engineering
ISBN : 1107412129
Microelectromechanical systems (MEMS) has been able to successfully acceded to several markets, including pressure sensors, gyroscopes, accelerometers, fluidics and data storage, representing a total revenue of some $2 billion in 2000. However, MEMS has the potential to offer reliable and cost-effective solutions to many other fields. The current expectation is that we will witness the appearance of diverse MEMS structures for power generation, propulsion, biomedical applications, optical switching, infrared sensing, microphones and displays, to name just a few. This plethora of activity is possible due to the increased understanding of the properties of the micromanufacturing materials involved, the availability of processing equipment with enhanced capabilities, and the effort of a large number of researchers and scientists. This book, first published in 2002, focuses on the materials science of MEMS structures and the films involved to create those structures. Topics include: applications metrology; mechanical properties; microstructure and processing; applications; processing techniques; alternative materials; and surface engineering issues in MEMS structures and devices.
Author : Harold Kahn,Maarten de deBoer,Michael Judy,S. Mark Spearing
Publisher : Cambridge University Press
Page : 366 pages
File Size : 47,9 Mb
Release : 2014-06-05
Category : Technology & Engineering
ISBN : 1107412293
Microelectromechanical systems (MEMS) is a growing field with numerous potential commercial applications, including pressure and inertial sensing, optical and electrical switching, power conversion, fluidic flow control, and chemical analysis. MEMS combine mechanical and electrical (and sometimes optical, chemical, or biological) function at small scales using many of the batch fabrication techniques developed for the micro-electronics industry. Materials have been developed or adapted for MEMS applications for use as structures, actuators, and sensors. Processing techniques also have been established for integrating these materials with existing MEMS. In addition, MEMS technology has proven ideal for allowing the mechanical and tribological characterization of materials at small scales. This book, first published in 2001, addresses these issues and a variety of materials are discussed, including Si, porous Si, SiC, SiGe, diamond, electroplated Ni and Cu, as well as piezoelectric, ferroelectric, and shape memory materials, and self-assembled organic monolayers. Fabrication processes include plasma and chemical etching, Si bonding, high-aspect-ratio lithography and micromolding. In addition, the stress, fracture strength, fatigue, and friction of MEMS materials and structures are also discussed.
Author : Cornelius T. Leondes
Publisher : Springer Science & Business Media
Page : 2142 pages
File Size : 44,7 Mb
Release : 2007-10-08
Category : Technology & Engineering
ISBN : 9780387257860
This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
Author : National Research Council,Division on Engineering and Physical Sciences,National Materials Advisory Board,Commission on Engineering and Technical Systems,Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems
Publisher : National Academies Press
Page : 76 pages
File Size : 53,7 Mb
Release : 1998-01-01
Category : Technology & Engineering
ISBN : 9780309059800
Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter. The MEMS revolution harnesses the integrated circuitry know-how to build working microsystems from micromechanical and microelectronic elements. MEMS is a multidisciplinary field involving challenges and opportunites for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry. As MEMS begin to permeate more and more industrial procedures, society as a whole will be strongly affected because MEMS provide a new design technology that could rivalâ€"perhaps surpassâ€"the societal impact of integrated circuits.
Author : Anonim
Publisher : Unknown
Page : 344 pages
File Size : 51,8 Mb
Release : 2001
Category : Microactuators
ISBN : UOM:39015048301520
Author : David A. LaVan,Mark G. da Silva,S. Mark Spearing,Srikar Vengallatore
Publisher : Cambridge University Press
Page : 342 pages
File Size : 44,8 Mb
Release : 2014-06-05
Category : Technology & Engineering
ISBN : 110740858X
This book is part of a popular series on the materials science of MEMS devices, first published in 1999. In the years since, many sophisticated devices have emerged and many aspects of MEMS materials behaviors have been characterized. However, there remain many basic questions about the relationship between process, properties and function for MEMS materials. Experimental methods have been developed, but there REMAINS a lack of standardization that would allow comparison between laboratories and commercial vendors or the creation of materials specifications that would enable greater commercialization of MEMS. The book addresses many of these issues including: RF-MEMS; optical MEMS; MEMS metrology, tribology, materials characterization and mechanical behavior; MEMS surfaces, MEMS reliability, packaging and life assessment; MEMS modeling and software tools for materials integration; biocompatibility of MEMS materials and devices; new materials and fabrication methodologies for MEMS; microfluidics and nanofluidics; in vivo drug/gene/protein delivery; novel actuators; MEMS cell-based systems; MEMS neural interfaces; MEMS sensors; and MEMS microengines and microfuel cells.
Author : Maarten De Boer
Publisher : Mrs Proceedings
Page : 344 pages
File Size : 48,8 Mb
Release : 2000-10-02
Category : Science
ISBN : UCSD:31822028476448
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Author : Markku Tilli,Mervi Paulasto-Kröckel,Matthias Petzold,Horst Theuss,Teruaki Motooka,Veikko Lindroos
Publisher : Elsevier
Page : 1028 pages
File Size : 51,8 Mb
Release : 2020-04-17
Category : Technology & Engineering
ISBN : 9780128177877
Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors
Author : National Research Council,Division on Engineering and Physical Sciences,Air Force Science and Technology Board,Committee on Implications of Emerging Micro- and Nanotechnologies
Publisher : National Academies Press
Page : 267 pages
File Size : 43,6 Mb
Release : 2003-02-06
Category : Technology & Engineering
ISBN : 9780309086233
Expansion of micro-technology applications and rapid advances in nano-science have generated considerable interest by the Air Force in how these developments will affect the nature of warfare and how it could exploit these trends. The report notes four principal themes emerging from the current technological trends: increased information capability, miniaturization, new materials, and increased functionality. Recommendations about Air Force roles in micro- and nanotechnology research are presented including those areas in which the Air Force should take the lead. The report also provides a number of technical and policy findings and recommendations that are critical for effective development of the Air Force's micro- and nano-science and technology program
Author : Jörg Bagdahn,Norman F. Sheppard, Jr,Keviin T. Turner,Srikar Vengallatore
Publisher : Cambridge University Press
Page : 0 pages
File Size : 54,7 Mb
Release : 2010-06-18
Category : Technology & Engineering
ISBN : 1605111953
Developing advanced materials and processes can enable the creation of microsystems (MEMS) with enhanced functionality, and improved performance and reliability. These considerations are of growing importance as MEMS make the difficult transition from research laboratories to full-fledged commercialization. Equally, MEMS designers continue to introduce new device concepts and system architectures which motivate fundamental studies of materials behavior at micrometer- and nanometer length scales. Together, this collection of papers serves as a useful resource for the growing community of scientists and engineers working at the intersection of materials science and microdevices. Firstly it focuses on developing advanced materials specific to sensing and actuation. Section Two presents fundamental studies of the mechanical behavior of microscale and nanoscale structures. Section Three presents new materials and processes that can potentially influence the development of many new and different types of MEMS.
Author : Arturo A. Ayón
Publisher : Unknown
Page : 344 pages
File Size : 40,9 Mb
Release : 2002-05-23
Category : Technology & Engineering
ISBN : UCSD:31822031649445
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book, first published in 2002, focuses on the materials science of MEMS structures and the films involved to create those structures.
Author : Reza Ghodssi,Pinyen Lin
Publisher : Springer Science & Business Media
Page : 1211 pages
File Size : 45,8 Mb
Release : 2011-03-18
Category : Technology & Engineering
ISBN : 9780387473185
MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.
