Materials Science Of Microelectromechanical Systems Mems Devices Ii Volume 605

Author : Maarten P. de Boer,Arthur H. Heuer,S. Joshua Jacobs,Eric Peeters
Publisher : Cambridge University Press
Page : 334 pages
File Size : 51,8 Mb
Release : 2014-06-05
Category : Technology & Engineering
ISBN : 1107413214

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Materials Science of Microelectromechanical Systems (MEMS) Devices II: by Maarten P. de Boer,Arthur H. Heuer,S. Joshua Jacobs,Eric Peeters Pdf

Microelectromechanical systems (MEMS) hold great promise for sensing and actuating on the micron scale. There is a hierarchy of increasing difficulty for placing MEMS devices in the field. Devices that do not allow contact between structural members rely mainly on mechanical properties of freestanding films. High-resolution techniques must be developed within the framework of MEMS to measure properties such as modulus and residual stress. When contact and rubbing contact are allowed, the complexities of adhesion and friction at the microscale must be understood and well controlled. Fluid interactions are similarly important for microfluidic devices. Packaging of MEMS for use in the field also requires special consideration, because it is often application specific. This book investigates various materials, characterization methods and processing techniques. These approaches represent different but useful strategies to solve MEMS challenges, and must be integrated for product realization. Topics include: deposition and characterization of Si; materials and processes for MEMS; tribology; dynamic optical characterization; packaging; LIGA; materials aspects; and characterization of MEMS processing.

Author : Maarten De Boer
Publisher : Mrs Proceedings
Page : 344 pages
File Size : 40,8 Mb
Release : 2000-10-02
Category : Science
ISBN : UCSD:31822028476448

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Materials Science of Microelectromechanical Systems (MEMS) Devices II: Volume 605 by Maarten De Boer Pdf

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Author : National Research Council,Division on Engineering and Physical Sciences,Air Force Science and Technology Board,Committee on Implications of Emerging Micro- and Nanotechnologies
Publisher : National Academies Press
Page : 267 pages
File Size : 41,8 Mb
Release : 2003-02-06
Category : Technology & Engineering
ISBN : 9780309086233

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Implications of Emerging Micro- and Nanotechnologies by National Research Council,Division on Engineering and Physical Sciences,Air Force Science and Technology Board,Committee on Implications of Emerging Micro- and Nanotechnologies Pdf

Expansion of micro-technology applications and rapid advances in nano-science have generated considerable interest by the Air Force in how these developments will affect the nature of warfare and how it could exploit these trends. The report notes four principal themes emerging from the current technological trends: increased information capability, miniaturization, new materials, and increased functionality. Recommendations about Air Force roles in micro- and nanotechnology research are presented including those areas in which the Air Force should take the lead. The report also provides a number of technical and policy findings and recommendations that are critical for effective development of the Air Force's micro- and nano-science and technology program

Author : Christopher L. Muhlstein,Stuart B. Brown
Publisher : ASTM International
Page : 333 pages
File Size : 54,8 Mb
Release : 2001
Category : Gold films
ISBN : 9780803128897

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Mechanical Properties of Structural Films by Christopher L. Muhlstein,Stuart B. Brown Pdf

Recent advances in the mechanical properties of structural films are described in these papers from a November 2000 symposium held in Orlando, Florida. Papers are organized in sections on fracture and fatigue of structural films, elastic behavior and residual stress in thin films, tensile testing of

Author : Harold Kahn,Maarten de deBoer,Michael Judy,S. Mark Spearing
Publisher : Cambridge University Press
Page : 366 pages
File Size : 40,5 Mb
Release : 2014-06-05
Category : Technology & Engineering
ISBN : 1107412293

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Materials Science of Microelectromechanical Systems (MEMS) Devices III: by Harold Kahn,Maarten de deBoer,Michael Judy,S. Mark Spearing Pdf

Microelectromechanical systems (MEMS) is a growing field with numerous potential commercial applications, including pressure and inertial sensing, optical and electrical switching, power conversion, fluidic flow control, and chemical analysis. MEMS combine mechanical and electrical (and sometimes optical, chemical, or biological) function at small scales using many of the batch fabrication techniques developed for the micro-electronics industry. Materials have been developed or adapted for MEMS applications for use as structures, actuators, and sensors. Processing techniques also have been established for integrating these materials with existing MEMS. In addition, MEMS technology has proven ideal for allowing the mechanical and tribological characterization of materials at small scales. This book, first published in 2001, addresses these issues and a variety of materials are discussed, including Si, porous Si, SiC, SiGe, diamond, electroplated Ni and Cu, as well as piezoelectric, ferroelectric, and shape memory materials, and self-assembled organic monolayers. Fabrication processes include plasma and chemical etching, Si bonding, high-aspect-ratio lithography and micromolding. In addition, the stress, fracture strength, fatigue, and friction of MEMS materials and structures are also discussed.

Author : Winston O. Soboyejo,T.S. Srivatsan
Publisher : CRC Press
Page : 526 pages
File Size : 49,7 Mb
Release : 2006-12-21
Category : Technology & Engineering
ISBN : 9781420017465

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Advanced Structural Materials by Winston O. Soboyejo,T.S. Srivatsan Pdf

A snapshot of the central ideas used to control fracture properties of engineered structural metallic materials, Advanced Structural Materials: Properties, Design Optimization, and Applications illustrates the critical role that advanced structural metallic materials play in aerospace, biomedical, automotive, sporting goods, and other indust

Author : Anonim
Publisher : Unknown
Page : 318 pages
File Size : 53,5 Mb
Release : 2002
Category : Microelectromechanical systems
ISBN : LCCN:2002071761

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Materials Science of Microelectromechanical Systems (MEMS) Devices IV by Anonim Pdf

Author : Anonim
Publisher : Unknown
Page : 344 pages
File Size : 43,5 Mb
Release : 2001
Category : Microactuators
ISBN : UOM:39015048301520

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Materials Science of Microelectromechanical Systems (MEMS) Devices by Anonim Pdf

Author : Arturo A. Ayón,Thomas E. Buchheit,Harold Kahn,S. Mark Spearing
Publisher : Cambridge University Press
Page : 334 pages
File Size : 52,7 Mb
Release : 2014-06-05
Category : Technology & Engineering
ISBN : 1107412129

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Materials Science of Microelectromechanical Systems (MEMS) Devices IV: by Arturo A. Ayón,Thomas E. Buchheit,Harold Kahn,S. Mark Spearing Pdf

Microelectromechanical systems (MEMS) has been able to successfully acceded to several markets, including pressure sensors, gyroscopes, accelerometers, fluidics and data storage, representing a total revenue of some $2 billion in 2000. However, MEMS has the potential to offer reliable and cost-effective solutions to many other fields. The current expectation is that we will witness the appearance of diverse MEMS structures for power generation, propulsion, biomedical applications, optical switching, infrared sensing, microphones and displays, to name just a few. This plethora of activity is possible due to the increased understanding of the properties of the micromanufacturing materials involved, the availability of processing equipment with enhanced capabilities, and the effort of a large number of researchers and scientists. This book, first published in 2002, focuses on the materials science of MEMS structures and the films involved to create those structures. Topics include: applications metrology; mechanical properties; microstructure and processing; applications; processing techniques; alternative materials; and surface engineering issues in MEMS structures and devices.

Author : David A. LaVan,Mark G. da Silva,S. Mark Spearing,Srikar Vengallatore
Publisher : Cambridge University Press
Page : 342 pages
File Size : 49,8 Mb
Release : 2014-06-05
Category : Technology & Engineering
ISBN : 110740858X

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Microelectromechanical Systems - Materials and Devices: by David A. LaVan,Mark G. da Silva,S. Mark Spearing,Srikar Vengallatore Pdf

This book is part of a popular series on the materials science of MEMS devices, first published in 1999. In the years since, many sophisticated devices have emerged and many aspects of MEMS materials behaviors have been characterized. However, there remain many basic questions about the relationship between process, properties and function for MEMS materials. Experimental methods have been developed, but there REMAINS a lack of standardization that would allow comparison between laboratories and commercial vendors or the creation of materials specifications that would enable greater commercialization of MEMS. The book addresses many of these issues including: RF-MEMS; optical MEMS; MEMS metrology, tribology, materials characterization and mechanical behavior; MEMS surfaces, MEMS reliability, packaging and life assessment; MEMS modeling and software tools for materials integration; biocompatibility of MEMS materials and devices; new materials and fabrication methodologies for MEMS; microfluidics and nanofluidics; in vivo drug/gene/protein delivery; novel actuators; MEMS cell-based systems; MEMS neural interfaces; MEMS sensors; and MEMS microengines and microfuel cells.

Author : David S. Ginley
Publisher : Unknown
Page : 464 pages
File Size : 49,9 Mb
Release : 2000-12-07
Category : Science
ISBN : UOM:39015049621629

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Materials Science of Novel Oxide-Based Electronics: Volume 623 by David S. Ginley Pdf

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Author : Aditya Agarwal
Publisher : Unknown
Page : 448 pages
File Size : 46,6 Mb
Release : 2001-04-09
Category : Technology & Engineering
ISBN : UCSD:31822030019731

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Si Front End Processing - Physics and Technology II of Dopant-Defect Interactions II: Volume 610 by Aditya Agarwal Pdf

This proceedings of the April 2000 symposium deals with formation of electrical junctions in the front-end processing of devices for the approaching end-of-the-roadmap. The 60 papers address 2D dopant characterization, ion implantation and shallow junction technology, group III diffusion and activation, carbon diffusion and activation, group V diffusion and activation, vacancy-type defects, regrown amorphous layers, and structure and properties of point and extended defects. Topics include ultra-shallow junction formation and gate activation in deep-submicron CMOS, low energy implantation of boron with decaborane ions, modeling ramp rate effects on shallow junction formation, clustering equilibrium and deactivation kinetics in As doped silicon, and atomistic modeling of complex silicon processing scenarios. c. Book News Inc.

Author : R. J. Shul
Publisher : Unknown
Page : 578 pages
File Size : 41,7 Mb
Release : 2001-04-09
Category : Technology & Engineering
ISBN : UOM:39015050745432

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Wide-Bandgap Electronic Devices: Volume 622 by R. J. Shul Pdf

Interest in wide-bandgap semiconductors for high-power/high-temperature electronics remains prominent. For such applications, SiC is by far the most mature semiconductor material. GaN and diamond, however, have also become prime candidates. While diamond has several advantages over the other two materials, producing large single crystals, as well as the inability to achieve n-type doping, have limited device fabrication. For GaN, recent advances in crystal growth and processing capabilities, as well as excellent transport properties, have yielded a great deal of device development, yet thermal conduction remains an issue. SiC has excellent thermal conductivity, high-breakdown voltages, and well-developed substrates and processing techniques. This book deals with a wide range of technical activity in the area of wide-bandgap high-power/high-temperature electronic devices and covers topics including the fabrication and performance of GaN-based and SiC-based devices, as well as issues related to growth, characterization, and processing of wide-bandgap materials. Several summaries of the current status of the field are provided.

Author : Jim De Yoreo
Publisher : Unknown
Page : 224 pages
File Size : 51,8 Mb
Release : 2001-04-16
Category : Science
ISBN : UOM:39015050747834

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Morphology and Dynamics of Crystal Surfaces in Complex Molecular Systems: Volume 620 by Jim De Yoreo Pdf

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Author : Arthur H. Heuer,S. Joshua Jacobs
Publisher : Unknown
Page : 274 pages
File Size : 40,5 Mb
Release : 1999
Category : Microelectromechanical systems
ISBN : UCSD:31822028562171

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Materials Science of Microelectromechanical Systems (MEMS) Devices by Arthur H. Heuer,S. Joshua Jacobs Pdf