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Author : Peter J. Hesketh
Publisher : The Electrochemical Society
Page : 268 pages
File Size : 43,7 Mb
Release : 2002
Category : Microelectromechanical systems
ISBN : 1566773725
Author : Anonim
Publisher : The Electrochemical Society
Page : 352 pages
File Size : 42,9 Mb
Release : 2004
Category : Microelectromechanical systems
ISBN : 1566774225
Author : Anonim
Publisher : The Electrochemical Society
Page : 278 pages
File Size : 51,8 Mb
Release : 2000
Category : Technology & Engineering
ISBN : 1566772869
Author : Peter J. Hesketh
Publisher : The Electrochemical Society
Page : 268 pages
File Size : 43,6 Mb
Release : 2002
Category : Microelectromechanical systems
ISBN : 1566773725
Author : Mohamed Gad-el-Hak
Publisher : CRC Press
Page : 678 pages
File Size : 41,5 Mb
Release : 2005-11-29
Category : Technology & Engineering
ISBN : 9781420036565
Thoroughly revised and updated, the new edition of the best-selling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage of microelectromechanical systems. Through chapters contributed by top experts and pioneers in the field, MEMS: Design and Fabrication presents a comprehensive look at the materials, procedures, tools, and techniques of MEMS fabrication. New chapters in this edition examine the materials and fabrication of polymer microsystems and optical diagnostics for investigating the entrance length in microchannels. Rigorous yet accessible, this volume provides the practical knowledge needed for work in cutting-edge MEMS applications.
Author : Marc J. Madou
Publisher : CRC Press
Page : 672 pages
File Size : 41,5 Mb
Release : 2011-06-13
Category : Technology & Engineering
ISBN : 9781420055191
Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.
Author : Marc J. Madou
Publisher : CRC Press
Page : 826 pages
File Size : 53,9 Mb
Release : 2002-03-13
Category : Technology & Engineering
ISBN : 0849308267
MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world. A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field. Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem. New in the Second Edition Revised chapters that reflect the many recent advances in the field Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs. Many more links to the Web Problem sets in each chapter
Author : Vijay K. Varadan,Xiaoning Jiang,V. V. Varadan
Publisher : John Wiley & Sons
Page : 290 pages
File Size : 47,7 Mb
Release : 2001-03-30
Category : Technology & Engineering
ISBN : UOM:39015050553083
This timely and accessible book focusses on microstereolithography and other microfabrication for 3D MEMS. The application of MEMS (micro-electro-mechanical systems) in such diverse fields as intelligent microsensors, data storage, biomedical engineering and wireless communications is booming, but although many MEMS books are available, this book is unique in that most others deal with 2D MEMS. This volume discusses the fundamental principles of microstereolithography for fabrication of 3D MEMS devices, providing an account of recent developments in related microfabrication and combined architecture techniques, and illustrating their application in the engineering and medical fields. It provides: * A unique and accessible overview of micro-system manufacture using the latest semiconductor processing techniques * Coverage of the developmental history of MEMS, micro-sensors, actuators and signal processing units * Insight to a range of microfabrication techniques from laser ablation to x-ray lithography, silicon micro-machining and micro-moulding * Describes the latest fabrication prototypes and applications, including thin-film transistors, antennas, wireless telemetry systems and transducers This book will appeal to microelectronics engineers, as well as material technologists, and physicists working in industrial and academic research and development.
Author : Cornelius T. Leondes
Publisher : Springer Science & Business Media
Page : 2142 pages
File Size : 53,8 Mb
Release : 2007-10-08
Category : Technology & Engineering
ISBN : 9780387257860
This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
Author : Sami Franssila
Publisher : John Wiley & Sons
Page : 428 pages
File Size : 54,5 Mb
Release : 2004-06-14
Category : Technology & Engineering
ISBN : 0470851066
Nanotechnology and microengineering are among the top priority research areas for the US and Europe. This text provides coverage of all aspects of the attempt to build functional devices at a molecular size.
Author : Thomas M. Adams,Richard A. Layton
Publisher : Springer Science & Business Media
Page : 447 pages
File Size : 42,8 Mb
Release : 2009-12-08
Category : Technology & Engineering
ISBN : 9780387095110
Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter. Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines.
Author : Yury G. Gogotsi,Irina V. Uvarova
Publisher : Springer Science & Business Media
Page : 394 pages
File Size : 41,7 Mb
Release : 2012-12-06
Category : Technology & Engineering
ISBN : 9789401001571
This volume contains papers that were presented at the NATO Advanced Research Workshop on Nanostructured Materials and Coatings for Biomedical and Sensor Applications held in Kyiv, Ukraine, 4-8 August, 2002. A total of 104 scientists from 14 countries participated in our ARW, making it a really international event. Participants ranged from graduate students to senior researchers. They presented 16 tutorial lectures, 20 short talks and more than 70 posters. Invited speakers, from NATO and Partner countries, presented some of the most recent developments in physics, chemistry and technology of nanosized materials. A broad range of speakers having international standing and representing NATO and partner countries, as well as university, industrial and govemment research laboratories participated in this meeting and wrote papers for this volume. Foregoing ARW gathered together the scientists working in the area of nanosized materials and coatings and their applications in biomedicine and sensors. The first objective of this AR W was to discuss the current research covering a wide range of physical and chemical properties of biomaterials and their use. Active discussion of oral presentations and posters, and the round table discussion gave a good opportunity to researchers from academia and industry to discuss the achievements in this field and outline future directions in terms of technological developments and product commercialisation in the fields of biomedicine and sensors. Particularly, advanced ceramics and nanostructured carbons were covered in many presentations.
Author : Zhaoying Zhou,Zhonglin Wang,Liwei Lin
Publisher : Springer Science & Business Media
Page : 1011 pages
File Size : 40,5 Mb
Release : 2012-08-30
Category : Technology & Engineering
ISBN : 9783642182938
“Microsystems and Nanotechnology” presents the latest science and engineering research and achievements in the fields of microsystems and nanotechnology, bringing together contributions by authoritative experts from the United States, Germany, Great Britain, Japan and China to discuss the latest advances in microelectromechanical systems (MEMS) technology and micro/nanotechnology. The book is divided into five parts – the fundamentals of microsystems and nanotechnology, microsystems technology, nanotechnology, application issues, and the developments and prospects – and is a valuable reference for students, teachers and engineers working with the involved technologies. Professor Zhaoying Zhou is a professor at the Department of Precision Instruments & Mechanology , Tsinghua University , and the Chairman of the MEMS & NEMS Society of China. Dr. Zhonglin Wang is the Director of the Center for Nanostructure Characterization, Georgia Tech, USA. Dr. Liwei Lin is a Professor at the Department of Mechanical Engineering, University of California at Berkeley, USA.
Author : Mohamed Gad-el-Hak
Publisher : Unknown
Page : 128 pages
File Size : 43,5 Mb
Release : 2005
Category : Microelectromechanical systems
ISBN : OCLC:874388433
Author : Dirk M. Guldi,Karl M. Kadish
Publisher : The Electrochemical Society
Page : 862 pages
File Size : 44,8 Mb
Release : 2002
Category : Science
ISBN : 1566773334