Micromachining And Microfabrication Process Technology Iii
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Society of Photo-optical Instrumentation Engineers,Semiconductor Equipment and Materials International,National Institute of Standards and Technology (U.S.)
Author : Society of Photo-optical Instrumentation Engineers,Semiconductor Equipment and Materials International,National Institute of Standards and Technology (U.S.) Publisher : SPIE-International Society for Optical Engineering Page : 0 pages File Size : 46,6 Mb Release : 1997 Category : Science ISBN : 0819426555
Micromachining and Microfabrication Process Technology III by Society of Photo-optical Instrumentation Engineers,Semiconductor Equipment and Materials International,National Institute of Standards and Technology (U.S.) Pdf
Microfabrication and Nanomanufacturing by Mark J. Jackson Pdf
Nanotechnology, seen as the next leap forward in the industrial revolution, requires that manufacturers develop processes that revolutionize the way small products are made. Microfabrication and Nanomanufacturing focuses on the technology of fabrication and manufacturing of engineering materials at these levels. The book provides an overview of techniques used in the semiconductor industry. It also discusses scaling and manufacturing processes operating at the nanoscale for non-semiconductor applications; the construction of nanoscale components using established lithographic techniques; bulk and surface micromachining techniques used for etching, machining, and molding procedures; and manufacturing techniques such as injection molding and hot embossing. This authoritative compilation describes non-traditional micro and nanoscale processing that uses a newly developed technique called pulsed water jet machining as well as the efficient removal of materials using optical energy. Additional chapters focus on the development of nanoscale processes for producing products other than semiconductors; the use of abrasive particles embedded in porous tools; and the deposition and application of nanocrystalline diamond. Economic factors are also presented and concern the promotion and commercialization of micro and nanoscale products and how demand will eventually drive the market.
Electrodissolution Processes: Fundamentals and Applications discusses the basic principles involved in high-rate anodic dissolution processes and their application in advanced machining, micromachining, and finishing operations. The fundamentals section of the book discusses the anodic dissolution behavior of different classes of metals and the influence of mass transport, current distribution, and surface film properties on the metal removal rate and surface finishing. The applications section of the book presents essential elements of electrochemical and assisted techniques for precision machining, micromachining, and polishing of advanced materials, including hard-to-machine conducting ceramic materials. Features A first-of-its-kind book that provides updated scientific and engineering information related to high-rate anodic dissolution processes Highlights the importance of the understanding of basic principles required for designing and optimizing ECM/EMM/EP processes Gives equal emphasis to the fundamentals and applications of electrodissolution processes Discusses the high-rate anodic dissolution of two broad classes of materials, namely, engineering and refractory materials Presents case studies to demonstrate the capabilities of different electrochemical and assisted machining, micromachining, and finishing operations Presents a dedicated chapter on electrochemical planarization of copper interconnects Madhav Datta is the Chairman of Amrita Center for Industrial Research and Innovation and a Distinguished Professor in the Department of Chemical Engineering and Materials Science, Amrita University, Coimbatore, India.
Micromanufacturing Engineering and Technology by Yi Qin Pdf
Micromanufacturing Engineering and Technology, Second Edition, covers the major topics of micro-manufacturing. The book not only covers theory and manufacturing processes, but it uniquely focuses on a broader range of practical aspects of micro-manufacturing engineering and utilization by also covering materials, tools and equipment, manufacturing system issues, control aspects and case studies. By explaining material selection, design considerations and economic aspects, the book empowers engineers in choosing among competing technologies. With a focus on low-cost and high-volume micro-manufacturing processes, the updated title covers technologies such as micro-mechanical-cutting, laser-machining, micro-forming, micro-EDM, micro-ECM, hot-embossing, micro-injection molding, laser micro-sintering, thin film fabrication, inkjet technology, micro-joining, multiple processes machines, and more. Edited by one of the few world-experts in this relatively new, but rapidly-expanding area and presenting chapters written by a 40-strong team of leading industry specialists, this book is an invaluable source of information for engineers, R&D researchers and academics. Covers key micro-manufacturing technologies, processes and equipment with high-volume production capabilities, enabling large companies as well as SMEs to introduce those technologies in production and business and reduce production costs Outlines micro-manufacturing system engineering and practical issues pertaining to material, design, handling, metrology, inspection, testing, sensors, control, system integration and software, and micro-factories Enables manufacturing practitioners to choose the right technology suitable for a particular product-manufacture
Fundamentals of Microfabrication and Nanotechnology, Three-Volume Set by Marc J. Madou Pdf
Now in its third edition, Fundamentals of Microfabrication and Nanotechnology continues to provide the most complete MEMS coverage available. Thoroughly revised and updated the new edition of this perennial bestseller has been expanded to three volumes, reflecting the substantial growth of this field. It includes a wealth of theoretical and practical information on nanotechnology and NEMS and offers background and comprehensive information on materials, processes, and manufacturing options. The first volume offers a rigorous theoretical treatment of micro- and nanosciences, and includes sections on solid-state physics, quantum mechanics, crystallography, and fluidics. The second volume presents a very large set of manufacturing techniques for micro- and nanofabrication and covers different forms of lithography, material removal processes, and additive technologies. The third volume focuses on manufacturing techniques and applications of Bio-MEMS and Bio-NEMS. Illustrated in color throughout, this seminal work is a cogent instructional text, providing classroom and self-learners with worked-out examples and end-of-chapter problems. The author characterizes and defines major research areas and illustrates them with examples pulled from the most recent literature and from his own work.
Karen W. Markus,Semiconductor Equipment and Materials International,Society of Photo-optical Instrumentation Engineers,National Institute of Standards and Technology (U.S.)
Author : Karen W. Markus,Semiconductor Equipment and Materials International,Society of Photo-optical Instrumentation Engineers,National Institute of Standards and Technology (U.S.) Publisher : SPIE-International Society for Optical Engineering Page : 352 pages File Size : 50,9 Mb Release : 1995 Category : Technology & Engineering ISBN : UCSD:31822021096540
Micromachining and Microfabrication Process Technology by Karen W. Markus,Semiconductor Equipment and Materials International,Society of Photo-optical Instrumentation Engineers,National Institute of Standards and Technology (U.S.) Pdf
Sensor Technology in the Netherlands: State of the Art by Albert van den Berg,Piet Bergveld Pdf
In the rapidly developing information society there is an ever-growing demand for information-supplying elements or sensors. The technology to fabricate such sensors has grown in the past few decades from a skilful activity to a mature area of scientific research and technological development. In this process, the use of silicon-based techniques has appeared to be of crucial importance, as it introduced standardized (mass) fabrication techniques, created the possibility of integrated electronics, allowed for new transduction principles, and enabled the realization of micromechanical structures for sensing or actuation. Such micromechanical structures are particularly well-suited to realize complex microsystems that improve the performance of individual sensors. Currently, a variety of sensor areas ranging from optical to magnetic and from micromechanical to (bio)chemical sensors has reached a high level of sophistication. In this MESA Monograph the proceedings of the Dutch Sensor Conference, an initiative of the Technology Foundation (STW), held at the University of Twente on March 2-3, 1998, are compiled. It comprises all the oral and poster contributions of the conference, and gives an excellent overview of the state of the art of Dutch sensor research and development. Apart from Dutch work, the contributions of two external invited experts from Switzerland are included.
