Optical Inspection Of Microsystems

Author : Wolfgang Osten
Publisher : CRC Press
Page : 524 pages
File Size : 43,7 Mb
Release : 2018-10-03
Category : Science
ISBN : 9781420019162

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Optical Inspection of Microsystems by Wolfgang Osten Pdf

Where conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems is the first comprehensive, up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moiré techniques, interference microscopy, laser Doppler vibrometry, holography, speckle metrology, and spectroscopy. They also examine modern approaches to data acquisition and processing. The book emphasizes the evaluation of various properties to increase reliability and promote a consistent approach to optical testing. Numerous practical examples and illustrations reinforce the concepts. Supplying advanced tools for microsystem manufacturing and characterization, Optical Inspection of Microsystems enables you to reach toward a higher level of quality and reliability in modern micro-scale applications.

Author : Wolfgang Osten
Publisher : CRC Press
Page : 570 pages
File Size : 49,6 Mb
Release : 2019-06-21
Category : Technology & Engineering
ISBN : 9781498779500

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Optical Inspection of Microsystems, Second Edition by Wolfgang Osten Pdf

Where conventional testing and inspection techniques fail at the microscale, optical techniques provide a fast, robust, noninvasive, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems, Second Edition, extends and updates the first comprehensive survey of the most important optical measurement techniques to be successfully used for the inspection of microsystems. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image processing, image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moire techniques, interference microscopy, laser-Doppler vibrometry, digital holography, speckle metrology, spectroscopy, and sensor fusion technologies. They also examine modern approaches to data acquisition and processing, such as the determination of surface features and the estimation of uncertainty of measurement results. The book emphasizes the evaluation of various system properties and considers encapsulated components to increase quality and reliability. Numerous practical examples and illustrations of optical testing reinforce the concepts. Supplying effective tools for increased quality and reliability, this book Provides a comprehensive, up-to-date overview of optical techniques for the measurement and inspection of microsystems Discusses image correlation, displacement and strain measurement, electro-optic holography, and speckle metrology techniques Offers numerous practical examples and illustrations Includes calibration of optical measurement systems for the inspection of MEMS Presents the characterization of dynamics of MEMS

Author : Wolfgang Osten
Publisher : CRC Press
Page : 656 pages
File Size : 47,5 Mb
Release : 2019-06-21
Category : Technology & Engineering
ISBN : 9780429532658

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Optical Inspection of Microsystems, Second Edition by Wolfgang Osten Pdf

Where conventional testing and inspection techniques fail at the microscale, optical techniques provide a fast, robust, noninvasive, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems, Second Edition, extends and updates the first comprehensive survey of the most important optical measurement techniques to be successfully used for the inspection of microsystems. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image processing, image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moire techniques, interference microscopy, laser-Doppler vibrometry, digital holography, speckle metrology, spectroscopy, and sensor fusion technologies. They also examine modern approaches to data acquisition and processing, such as the determination of surface features and the estimation of uncertainty of measurement results. The book emphasizes the evaluation of various system properties and considers encapsulated components to increase quality and reliability. Numerous practical examples and illustrations of optical testing reinforce the concepts. Supplying effective tools for increased quality and reliability, this book Provides a comprehensive, up-to-date overview of optical techniques for the measurement and inspection of microsystems Discusses image correlation, displacement and strain measurement, electro-optic holography, and speckle metrology techniques Offers numerous practical examples and illustrations Includes calibration of optical measurement systems for the inspection of MEMS Presents the characterization of dynamics of MEMS

Author : William N. Sharpe, Jr.,William N. Sharpe
Publisher : Springer Science & Business Media
Page : 1100 pages
File Size : 45,5 Mb
Release : 2008-12-04
Category : Mathematics
ISBN : 9780387268835

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Springer Handbook of Experimental Solid Mechanics by William N. Sharpe, Jr.,William N. Sharpe Pdf

The Springer Handbook of Experimental Solid Mechanics documents both the traditional techniques as well as the new methods for experimental studies of materials, components, and structures. The emergence of new materials and new disciplines, together with the escalating use of on- and off-line computers for rapid data processing and the combined use of experimental and numerical techniques have greatly expanded the capabilities of experimental mechanics. New exciting topics are included on biological materials, MEMS and NEMS, nanoindentation, digital photomechanics, photoacoustic characterization, and atomic force microscopy in experimental solid mechanics. Presenting complete instructions to various areas of experimental solid mechanics, guidance to detailed expositions in important references, and a description of state-of-the-art applications in important technical areas, this thoroughly revised and updated edition is an excellent reference to a widespread academic, industrial, and professional engineering audience.

Author : Toru Yoshizawa
Publisher : CRC Press
Page : 744 pages
File Size : 44,9 Mb
Release : 2017-07-28
Category : Technology & Engineering
ISBN : 9781351831840

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Handbook of Optical Metrology by Toru Yoshizawa Pdf

Handbook of Optical Metrology: Principles and Applications begins by discussing key principles and techniques before exploring practical applications of optical metrology. Designed to provide beginners with an introduction to optical metrology without sacrificing academic rigor, this comprehensive text: Covers fundamentals of light sources, lenses, prisms, and mirrors, as well as optoelectronic sensors, optical devices, and optomechanical elements Addresses interferometry, holography, and speckle methods and applications Explains Moiré metrology and the optical heterodyne measurement method Delves into the specifics of diffraction, scattering, polarization, and near-field optics Considers applications for measuring length and size, displacement, straightness and parallelism, flatness, and three-dimensional shapes This new Second Edition is fully revised to reflect the latest developments. It also includes four new chapters—nearly 100 pages—on optical coherence tomography for industrial applications, interference microscopy for surface structure analysis, noncontact dimensional and profile metrology by video measurement, and optical metrology in manufacturing technology.

Author : Wolfgang Osten,Nadya Reingand
Publisher : John Wiley & Sons
Page : 471 pages
File Size : 49,5 Mb
Release : 2012-09-10
Category : Science
ISBN : 9783527648467

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Optical Imaging and Metrology by Wolfgang Osten,Nadya Reingand Pdf

A comprehensive review of the state of the art and advances in the field, while also outlining the future potential and development trends of optical imaging and optical metrology, an area of fast growth with numerous applications in nanotechnology and nanophysics. Written by the world's leading experts in the field, it fills the gap in the current literature by bridging the fields of optical imaging and metrology, and is the only up-to-date resource in terms of fundamental knowledge, basic concepts, methodologies, applications, and development trends.

Author : Oliver Geschke,Henning Klank,Pieter Telleman
Publisher : John Wiley & Sons
Page : 270 pages
File Size : 43,8 Mb
Release : 2006-08-21
Category : Science
ISBN : 9783527606368

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Microsystem Engineering of Lab-on-a-chip Devices by Oliver Geschke,Henning Klank,Pieter Telleman Pdf

Written by an interdisciplinary team of chemists, biologists and engineers from one of the leading European centers for microsystem research, MIC in Lyngby, Denmark, this book introduces and discusses the different aspects of (bio)chemical microsystem development. Unlike other, far more voluminous and theoretical books on this topic, this is a concise, practical handbook, dealing with analytical applications, particularly in the life sciences. Topics include: * microfluidics * silicon micromachining * glass and polymer micromachining * packaging * analytical chemistry illustrated with examples taken mainly from ongoing research projects at MIC.

Author : S. Martellucci,Arthur N. Chester
Publisher : Springer Science & Business Media
Page : 406 pages
File Size : 50,6 Mb
Release : 2013-06-29
Category : Science
ISBN : 9781489914743

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Diffractive Optics and Optical Microsystems by S. Martellucci,Arthur N. Chester Pdf

Proceedings of the 20th Course of the International School of Quantum Electronics held in Erice, Italy, November 14-24, 1996

Author : Attilio Frangi,Carlo Cercignani,Subrata Mukherjee,Narayan Aluru
Publisher : World Scientific
Page : 504 pages
File Size : 44,6 Mb
Release : 2008-07-29
Category : Technology & Engineering
ISBN : 9781908979124

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Advances in Multiphysics Simulation and Experimental Testing of Mems by Attilio Frangi,Carlo Cercignani,Subrata Mukherjee,Narayan Aluru Pdf

This volume takes a much needed multiphysical approach to the numerical and experimental evaluation of the mechanical properties of MEMS and NEMS. The contributed chapters present many of the most recent developments in fields ranging from microfluids and damping to structural analysis, topology optimization and nanoscale simulations. The book responds to a growing need emerging in academia and industry to merge different areas of expertise towards a unified design and analysis of MEMS and NEMS. Contents:Challenges in Modeling Liquid and Gas Flows in Micro/Nano Devices (M Gad-el-Hak)Using the Kinetic Equations for MEMS and NEMS (C Cercignani et al.)Applying the Direct Simulation Monte Carlo (DSMC) Method to Gas-Filled MEMS Devices (M A Gallis)New Approaches for the Simulation of Microfluidics in MEMS (T Y Ng et al.)Evaluating Gas Damping in MEMS Using Fast Integral Equation Solvers (A Frangi et al.)Experimental Techniques for Damping Characterization of Micro and Nanostructures (A Bosseboeuf & H Mathias)Nonlinear Dynamics of Electrostatically Actuated MEMS (S K De & N Aluru)Coupled Deformation Analysis of Thin MEMS Plates (S Mukherjee & S Telukunta)Pull-In Instability in Electrostatically Actuated MEMS Due to Coulomb and Casimir Forces (R C Batra et al.)Numerical Simulation of BioMEMS with Dielectrophoresis (G R Liu & C X Song)Continuous Modeling of Multi-Physics Problems of Microsystems for Topology Optimization (G K Ananthasuresh)Mechanical Characterization of Polysilicon at the Micro-Scale Through On-Chip Tests (A Corigliano et al.)Nano-Scale Testing of Nanowires and Carbon Nanotubes Using a Micro-Electro-Mechanical System (H D Espinosa et al.) Readership: Postgraduate students, researchers and scientists in academia and the MEMS/NEMS industry. Keywords:MEMS;NEMS;Microfluidics;Electrostatics;Pull-In Instability;BIOMEMS;Optimization;Coupled AnalysesKey Features:Reinforces links between the most advanced applications from academia and industry by presenting several applications to real MEMSIncludes several chapters on the experimental testing of MEMS and NEMS to evaluate their dynamical behavior and material properties and validate the numerical procedures describedDraws together contributions from leading experts worldwideTakes a new approach to the subject by focusing on the multiphysical nature of the problemsReviews:“This book would be of interest to those in academic or industrial research that model MEMS devices. The book will provide some of the latest methods used to model these devices along with some experimental methods used to characterize MEMS.”IEEE Electrical Insulation Magazine

Author : Wolfgang Osten,Malgorzata Kujawinska
Publisher : Springer Science & Business Media
Page : 792 pages
File Size : 43,6 Mb
Release : 2010-04-28
Category : Technology & Engineering
ISBN : 9783642030512

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Fringe 2009 by Wolfgang Osten,Malgorzata Kujawinska Pdf

21 years ago it was a joint idea with Hans Rottenkolber to organize a workshop dedicated to the discussion of the latest results in the automatic processing of fringe patterns. This idea was promoted by the insight that automatic and high precision phase measurement techniques will play a key role in all future industrial and scientific applications of optical metrology. A couple of months later more than 50 specialists from East and West met in East Berlin, the capital of the former GDR, to spend 3 days with the discussion of new principles of fringe processing. In the stimulating atmoshere the idea was born to repeat the workshop and to organize the meeting in an olympic schedule. And thus meanwhile 20 years have been passed and we have today Fringe number six. However, such a workshop takes place in a dynamic environment. Therefore the main topics of the previous events were always adapted to the most interesting subjects of the new period. In 1993 the workshop took place in Bremen and was dedicated to new principles of optical shape measurement, setup calibration, phase unwrapping and nondestructive testing, while in 1997 new approaches in multi-sensor metrology, active measurement strategies and hybrid processing technologies played a central role. 2001, the first meeting in the 21st century, was focused to optical methods for micromeasurements, hybrid measurement technologies and new sensor solutions for industrial inspection.

Author : Christophe Gorecki,Werner P. O. Jüptner,Małgorzata Kujawińska
Publisher : SPIE-International Society for Optical Engineering
Page : 190 pages
File Size : 47,8 Mb
Release : 2001
Category : Business & Economics
ISBN : 0819440957

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Microsystems Engineering by Christophe Gorecki,Werner P. O. Jüptner,Małgorzata Kujawińska Pdf

Author : Franco Davoli,Norbert Meyer,Roberto Pugliese,Sandro Zappatore
Publisher : Springer Science & Business Media
Page : 325 pages
File Size : 48,6 Mb
Release : 2010-11-19
Category : Technology & Engineering
ISBN : 9781441955746

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Remote Instrumentation Services on the e-Infrastructure by Franco Davoli,Norbert Meyer,Roberto Pugliese,Sandro Zappatore Pdf

The book focuses on all aspects related to the effective exploitation of remote instrumentation and to the building of complex virtual laboratories on top of real devices and infrastructures. These include service oriented architecture (SOA) and related middleware, high-speed networking in support of Grid applications, wireless Grids for acquisition devices and sensor networks, Quality Service (QoS) provisioning for real-time control, measurement instrumentation and methodology, as well as metrology issues in distributed systems.

Author : Sabina Jeschke,Ingrid Isenhardt,Klaus Henning
Publisher : Springer Science & Business Media
Page : 682 pages
File Size : 49,9 Mb
Release : 2011-01-21
Category : Computers
ISBN : 9783642162084

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Automation, Communication and Cybernetics in Science and Engineering 2009/2010 by Sabina Jeschke,Ingrid Isenhardt,Klaus Henning Pdf

The book presents a representative selection of all publications published between 01/2009 and 06/2010 in various books, journals and conference proceedings by the researchers of the institute cluster: IMA - Institute of Information Management in Mechanical Engineering ZLW - Center for Learning and Knowledge Management IfU - Institute for Management Cybernetics, Faculty of Mechanical Engineering, RWTH Aachen University The contributions address the cluster's five core research fields: suitable processes for knowledge- and technology-intensive organizations, next-generation teaching and learning concepts for universities and the economy, cognitive IT-supported processes for heterogeneous and cooperative systems, target group-adapted user models for innovation and technology development processes, semantic networks and ontologies for complex value chains and virtual environments Innovative fields of application such as cognitive systems, autonomous truck convoys, telemedicine, ontology engineering, knowledge and information management, learning models and technologies, organizational development and management cybernetics are presented. The contributions show the unique potential of the broad and interdisciplinary research approach of the ZLW/IMA and the IfU.

Author : Michael Huff
Publisher : Springer Nature
Page : 521 pages
File Size : 46,8 Mb
Release : 2020-04-09
Category : Technology & Engineering
ISBN : 9783030405601

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Process Variations in Microsystems Manufacturing by Michael Huff Pdf

This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these commonly used processing steps. This will be followed by coverage of commonly used metrology methods, process integration and variations in material properties, device parameter variations, quality assurance and control methods, and design methods for handling process variations. A detailed analysis of future methods for improved microsystems manufacturing is also included. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level.

Author : Thomas Kuttner,Armin Rohnen
Publisher : Springer Nature
Page : 547 pages
File Size : 43,5 Mb
Release : 2023-07-29
Category : Technology & Engineering
ISBN : 9783658384630

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Practice of Vibration Measurement by Thomas Kuttner,Armin Rohnen Pdf

This technical book deals with the design and function of vibration measurement systems, how they are put into operation and how measurements are interpreted. It describes the functioning of the entire measurement chain from the transducer to the evaluation, and explains the interaction of the elements as well as the practically used procedures of signal processing and evaluation and clarifies them with numerous practical examples.