Optical Micro And Nanometrology In Manufacturing Technology
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Optical Micro- and Nanometrology in Manufacturing Technology by Christophe Gorecki,Anand Asundi Pdf
Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
Optical Inspection of Microsystems by Wolfgang Osten Pdf
Where conventional testing and inspection techniques fail at the micro-scale, optical techniques provide a fast, robust, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems is the first comprehensive, up-to-date survey of the most important and widely used full-field optical metrology and inspection technologies. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moiré techniques, interference microscopy, laser Doppler vibrometry, holography, speckle metrology, and spectroscopy. They also examine modern approaches to data acquisition and processing. The book emphasizes the evaluation of various properties to increase reliability and promote a consistent approach to optical testing. Numerous practical examples and illustrations reinforce the concepts. Supplying advanced tools for microsystem manufacturing and characterization, Optical Inspection of Microsystems enables you to reach toward a higher level of quality and reliability in modern micro-scale applications.
Optical Inspection of Microsystems, Second Edition by Wolfgang Osten Pdf
Where conventional testing and inspection techniques fail at the microscale, optical techniques provide a fast, robust, noninvasive, and relatively inexpensive alternative for investigating the properties and quality of microsystems. Speed, reliability, and cost are critical factors in the continued scale-up of microsystems technology across many industries, and optical techniques are in a unique position to satisfy modern commercial and industrial demands. Optical Inspection of Microsystems, Second Edition, extends and updates the first comprehensive survey of the most important optical measurement techniques to be successfully used for the inspection of microsystems. Under the guidance of accomplished researcher Wolfgang Osten, expert contributors from industrial and academic institutions around the world share their expertise and experience with techniques such as image processing, image correlation, light scattering, scanning probe microscopy, confocal microscopy, fringe projection, grid and moire techniques, interference microscopy, laser-Doppler vibrometry, digital holography, speckle metrology, spectroscopy, and sensor fusion technologies. They also examine modern approaches to data acquisition and processing, such as the determination of surface features and the estimation of uncertainty of measurement results. The book emphasizes the evaluation of various system properties and considers encapsulated components to increase quality and reliability. Numerous practical examples and illustrations of optical testing reinforce the concepts. Supplying effective tools for increased quality and reliability, this book Provides a comprehensive, up-to-date overview of optical techniques for the measurement and inspection of microsystems Discusses image correlation, displacement and strain measurement, electro-optic holography, and speckle metrology techniques Offers numerous practical examples and illustrations Includes calibration of optical measurement systems for the inspection of MEMS Presents the characterization of dynamics of MEMS
Fundamental Principles of Engineering Nanometrology by Richard Leach Pdf
Working at the nano-scale demands an understanding of the high-precision measurement techniques that make nanotechnology and advanced manufacturing possible. Richard Leach introduces these techniques to a broad audience of engineers and scientists involved in nanotechnology and manufacturing applications and research. He also provides a routemap and toolkit for metrologists engaging with the rigor of measurement and data analysis at the nano-scale. Starting from the fundamentals of precision measurement, the author progresses into different measurement and characterization techniques. The focus on nanometrology in engineering contexts makes this book an essential guide for the emerging nanomanufacturing / nanofabrication sector, where measurement and standardization requirements are paramount both in product specification and quality assurance. This book provides engineers and scientists with the methods and understanding needed to design and produce high-performance, long-lived products while ensuring that compliance and public health requirements are met. Updated to cover new and emerging technologies, and recent developments in standards and regulatory frameworks, this second edition includes many new sections, e.g. new technologies in scanning probe and e-beam microscopy, recent developments in interferometry and advances in co-ordinate metrology. Demystifies nanometrology for a wide audience of engineers, scientists, and students involved in nanotech and advanced manufacturing applications and research Introduces metrologists to the specific techniques and equipment involved in measuring at the nano-scale or to nano-scale uncertainty Fully updated to cover the latest technological developments, standards, and regulations
Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to stage motions of precision machines. The first half of the book is dedicated to the description of optical sensors for the measurement of angle and displacement, which are fundamental quantities for precision nanometrology. The second half presents a number of scanning-type measuring systems for surface forms and stage motions. The systems discussed include: • error separation algorithms and systems for measurement of straightness and roundness, • the measurement of micro-aspherics, • systems based on scanning probe microscopy, and • scanning image-sensor systems. Precision Nanometrology presents the fundamental and practical technologies of precision nanometrology with a helpful selection of algorithms, instruments and experimental data. It will be beneficial for researchers, engineers and postgraduate students involved in precision engineering, nanotechnology and manufacturing.
Optical Micro- And Nanometrology IV by Christophe Gorecki,Anand K Asundi,Society of Photo-optical Instrumentation Engineers (United States),Wolfgang Osten Pdf
Advances in Near-Field Optics by Reuven Gordon Pdf
This book brings together tutorial-style expository chapters on both foundational material and current research areas in near-field optics. The starting point for the book was the Summer School at the 16th International Conference on Near-Field Optics, Nanophotonics and Related Techniques (2022), with each Summer School short course represented by a chapter, along with an additional specially selected chapter on a complementary topic. Together, the chapters within present a modern perspective of the area of near-field optics, focusing on recent theoretical approaches, but also capturing the evolution of the field. Each chapter is written by an internationally-recognized expert and provides a tutorial on a different aspects of the theory and analytical methods for near-field optics, nanophotonics, and plasmonics. While the material will be accessible at the graduate level, it will also provide a useful reference for established researchers in near-field optics and scientists in nearby fields.
Nanotechnology in the Security Systems by Janez Bonča,Sergei Kruchinin Pdf
The topics discussed at the NATO Advanced Research Workshop “Nanotechnology in the Security Systems" included nanophysics, nanotechnology, nanomaterials, sensors, biosensors security systems, explosive detection. There have been many significant advances in the past two years and some entirely new directions of research are just opening up. Recent advances in nano science have demonstrated that fundamentally new physical phenomena are found when systems are reduced in size with dimensions, comparable to the fundamental microscopic length scales of the investigated material. Recent developments in nanotechnology and measurement techniques now allow experimental investigation of transport properties of nano devices. This work will be of interest to researchers working in spintronics, molecular electronics and quantum information processing.
Experimental Analysis of Nano and Engineering Materials and Structures by E.E. Gdoutos Pdf
This volume contains two-page abstracts of the 482 papers presented at the latest conference on the subject, in Alexandroupolis, Greece. The accompanying CD contains the full length papers. The abstracts of the fifteen plenary lectures are included at the beginning of the book. The remaining 467 abstracts are arranged in 23 tracks and 28 special symposia/sessions with 225 and 242 abstracts, respectively. The papers of the tracks have been contributed from open call, while the papers of the symposia/sessions have been solicited by the respective organizers.
Handbook of Metrology and Applications by Dinesh K. Aswal,Sanjay Yadav,Toshiyuki Takatsuji,Prem Rachakonda,Harish Kumar Pdf
This handbook provides comprehensive and up-to-date information on the topic of scientific, industrial and legal metrology. It discusses the state-of-art review of various metrological aspects pertaining to redefinition of SI Units and their implications, applications of time and frequency metrology, certified reference materials, industrial metrology, industry 4.0, metrology in additive manufacturing, digital transformations in metrology, soft metrology and cyber security, optics in metrology, nano-metrology, metrology for advanced communication, environmental metrology, metrology in biomedical engineering, legal metrology and global trade, ionizing radiation metrology, advanced techniques in evaluation of measurement uncertainty, etc. The book has contributed chapters from world’s leading metrologists and experts on the diversified metrological theme. The internationally recognized team of editors adopt a consistent and systematic approach and writing style, including ample cross reference among topics, offering readers a user-friendly knowledgebase greater than the sum of its parts, perfect for frequent consultation. Moreover, the content of this volume is highly interdisciplinary in nature, with insights from not only metrology but also mechanical/material science, optics, physics, chemistry, biomedical and more. This handbook is ideal for academic and professional readers in the traditional and emerging areas of metrology and related fields.
Micromanufacturing Engineering and Technology by Yi Qin Pdf
Micromanufacturing Engineering and Technology presents applicable knowledge of technology, equipment and applications, and the core economic issues of micromanufacturing for anyone with a basic understanding of manufacturing, material, or product engineering. It explains micro-engineering issues (design, systems, materials, market and industrial development), technologies, facilities, organization, competitiveness, and innovation with an analysis of future potential. The machining, forming, and joining of miniature / micro-products are all covered in depth, covering: grinding/milling, laser applications, and photo chemical etching; embossing (hot & UV), injection molding and forming (bulk, sheet, hydro, laser); mechanical assembly, laser joining, soldering, and packaging. Presents case studies, material and design considerations, working principles, process configurations, and information on tools, equipment, parameters and control Explains the many facets of recently emerging additive / hybrid technologies and systems, incl: photo-electric-forming, liga, surface treatment, and thin film fabrication Outlines system engineering issues pertaining to handling, metrology, testing, integration and software Explains widely used micro parts in bio / medical industry, information technology and automotive engineering Covers technologies in high demand, such as: micro-mechanical-cutting, lasermachining, micro-forming, micro-EDM, micro-joining, photo-chemical-etching, photo-electro-forming, and micro-packaging
Fundamental Principles of Engineering Nanometrology by Richard Leach Pdf
Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study. Provides a basic introduction to measurement and instruments Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal , variable focus, and scattering instruments) Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties) Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge
Surface Metrology for Micro- and Nanofabrication by Wei Gao Pdf
Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication. Provides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology Helps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and components Assesses the best techniques for repairing micro-defects
Nanofinishing Science and Technology by Vijay Kumar Jain Pdf
Finishing is the final operation after a part is sized and shaped. Currently in high tech industries, there is a demand for nano level surface finishing of components. This process is done to improve the surface finish, to remove the recast layer, or to remove surface and sub-surface defects. The result is low friction, longer product life, and low power requirements. Equally important is the aesthetic aspect of the product. This subject is growing very fast from the technology as well as a science point of view. Books on this subject are very limited, particularly those ones that deal with both the science as well as the technology aspects.
