Semiconductor Fabrication

Author : Gary S. May,Costas J. Spanos
Publisher : John Wiley & Sons
Page : 428 pages
File Size : 48,9 Mb
Release : 2006-05-26
Category : Technology & Engineering
ISBN : 9780471790273

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Fundamentals of Semiconductor Manufacturing and Process Control by Gary S. May,Costas J. Spanos Pdf

A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.

Author : Peter Van Zant
Publisher : McGraw Hill Professional
Page : 658 pages
File Size : 53,7 Mb
Release : 2004-06-09
Category : Technology & Engineering
ISBN : 9780071501392

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Microchip Fabrication, 5th Ed. by Peter Van Zant Pdf

The #1 book in the industry for more than 15 years! Utilizing a straightforward, math-free pathology, this is a novice-friendly guide to the semiconductor fabrication process from raw materials through shipping the finished, packaged device. Challenging quizzes and review summaries make this the perfect learning guide for technicians in training. * NEW chapter on nanotechnology * NEW sections on 300mm wafer processing * Processes and devices, and Green processing * Every chapter updated to reflect the latest processing techniques

Author : Lars Mönch,John W. Fowler,Scott Mason
Publisher : Springer Science & Business Media
Page : 298 pages
File Size : 42,9 Mb
Release : 2012-09-12
Category : Business & Economics
ISBN : 9781461444718

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Production Planning and Control for Semiconductor Wafer Fabrication Facilities by Lars Mönch,John W. Fowler,Scott Mason Pdf

Over the last fifty-plus years, the increased complexity and speed of integrated circuits have radically changed our world. Today, semiconductor manufacturing is perhaps the most important segment of the global manufacturing sector. As the semiconductor industry has become more competitive, improving planning and control has become a key factor for business success. This book is devoted to production planning and control problems in semiconductor wafer fabrication facilities. It is the first book that takes a comprehensive look at the role of modeling, analysis, and related information systems for such manufacturing systems. The book provides an operations research- and computer science-based introduction into this important field of semiconductor manufacturing-related research.

Author : Gary S. May,S. M. Sze
Publisher : John Wiley & Sons
Page : 0 pages
File Size : 44,5 Mb
Release : 2004
Category : Integrated circuits
ISBN : 0471452386

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Fundamentals of Semiconductor Fabrication by Gary S. May,S. M. Sze Pdf

"This concise introduction to semiconductor fabrication technology covers everything professionals need to know, from crystal growth to integrated devices and circuits. Throughout, the authors address both theory and the practical aspects of each major fabrication step, including crystal growth, silicon oxidation, photolithography, etching, diffusion, ion implantation, and thin film deposition. The book integrates Computer Modeling & Simulation tools throughout. Process simulation is used as a tool for what-if analysis and discussion. Comprehensive coverage of process sequence helps readers connect individual steps into a cohesive whole."--

Author : Peter Van Zant
Publisher : Unknown
Page : 322 pages
File Size : 49,6 Mb
Release : 1984
Category : Integrated circuits
ISBN : UOM:39015035728065

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Microchip Fabrication by Peter Van Zant Pdf

Author : Dinesh C. Gupta
Publisher : ASTM International
Page : 472 pages
File Size : 42,9 Mb
Release : 1989
Category : Metallizing
ISBN : 9780803112735

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Semiconductor Fabrication by Dinesh C. Gupta Pdf

Author : Charles Nehme
Publisher : Charles Nehme
Page : 38 pages
File Size : 42,9 Mb
Release : 2024-06-14
Category : Technology & Engineering
ISBN : 8210379456XXX

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Cleanrooms for Semiconductor Fabrication Plants by Charles Nehme Pdf

In the realm of modern technology, semiconductor fabrication stands as a cornerstone of innovation, enabling the creation of ever-smaller, faster, and more powerful electronic devices. At the heart of this intricate process lies the cleanroom, an ultra-pure environment meticulously controlled to maintain the integrity of microscopic components. This meticulously constructed chamber is a testament to human ingenuity, a sanctuary where dust particles are measured in microns and the slightest disturbance can disrupt the delicate dance of fabrication. This comprehensive guide delves into the fascinating world of cleanrooms, exploring their intricate design, construction, and operation. From the fundamentals of air filtration and laminar flow to the intricacies of personnel access and environmental control, this book unveils the intricate mechanisms that safeguard the purity of these controlled environments. As you embark on this journey into the world of cleanrooms, let us imagine a towering cleanroom facility, its gleaming walls reflecting the precision of its purpose. Within this sterile expanse, delicate semiconductor wafers glide along intricate robotic arms, each movement meticulously choreographed to minimize the risk of contamination. The air is eerily still, devoid of any airborne particles, ensuring that these microscopic masterpieces remain pristine. This book is not merely a collection of technical specifications and procedural guidelines; it is an invitation to appreciate the delicate balance that underpins semiconductor fabrication. We will delve into the impact of contaminants on device performance, exploring the microscopic world that threatens to disrupt the purity of these intricate structures. Along the way, we will encounter real-world examples of cleanroom implementation, showcasing innovative designs and emerging technologies that are pushing the boundaries of cleanliness. We will witness the integration of advanced filtration systems, the application of ultraviolet light for contaminant reduction, and the development of sophisticated monitoring and control systems. As we conclude our exploration, let us reflect on the enduring significance of cleanrooms in semiconductor fabrication. These meticulously controlled environments are the silent guardians of technological progress, ensuring the integrity of the devices that shape our modern world.

Author : Yoshio Nishi,Robert Doering
Publisher : CRC Press
Page : 1720 pages
File Size : 43,5 Mb
Release : 2017-12-19
Category : Technology & Engineering
ISBN : 9781420017663

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Handbook of Semiconductor Manufacturing Technology by Yoshio Nishi,Robert Doering Pdf

Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on... Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.

Author : Hwaiyu Geng
Publisher : McGraw Hill Professional
Page : 915 pages
File Size : 43,9 Mb
Release : 2005-05-18
Category : Technology & Engineering
ISBN : 9780071445597

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Semiconductor Manufacturing Handbook by Hwaiyu Geng Pdf

WORLD-CLASS SEMICONDUCTOR MANUFACTURING EXPERTISE AT YOUR FINGERTIPS This is a comprehensive reference to the semiconductor manufacturing process and ancillary facilities -- from raw material preparation to packaging and testing, applying basics to emerging technologies. Readers charged with optimizing the design and performance of manufacturing processes will find all the information necessary to produce the highest quality chips at the lowest price in the shortest time possible. The Semiconductor Manufacturing Handbook provides leading-edge information on semiconductor wafer processes, MEMS, nanotechnology, and FPD, plus the latest manufacturing and automation technologies, including: Yield Management Automated Material Handling System Fab and Cleanroom Design and Operation Gas Abatement and Waste Treatment Management And much more Written by 60 international experts, and peer reviewed by a seasoned advisory board, this handbook covers the fundamentals of relevant technology and its real-life application and operational considerations for planning, implementing, and controlling manufacturing processes. It includes hundreds of detailed illustrations and a list of relevant books, technical papers, and websites for further research. This inclusive, wide-ranging coverage makes the Semiconductor Manufacturing Handbook the most comprehensive single-volume reference ever published in the field. STATE-OF-THE-ART SEMICONDUCTOR TECHNOLOGIES AND MANUFACTURING PROCESSES: SEMICONDUCTOR FUNDAMENTALS How Chips Are Designed and Made * Substrates * Copper and Low-k Dielectrics * Silicide Formation * Plasma * Vacuum * Photomask WAFER PROCESSING TECHNOLOGIES Microlithography * Ion Implantation * Etch * PVD/ALD * CVD * ECD * Epitaxy * CMP * Wet Cleaning FINAL MANUFACTURING Packaging * Grinding, Stress Relief, Dicing * Inspection, Measurement, and Testing NANOTECHNOLOGY, MEMS, AND FPD GAS AND CHEMICALS Specialty Gas System and DCA * Gas Abatement Systems * Chemical and Slurries Delivery System * Ultra Pure Water FAB YIELD, OPERATIONS, AND FACILITIES Yield Management * Automated Materials Handling System * Metrology * Six Sigma * Advanced Process Control * EHS * Fab Design and Construction * Cleanroom * Vibration and Acoustic Control * ESD * Airborne Molecular Control * Particle Monitoring * Wastewater Neutralization Systems

Author : Yaguang Lian
Publisher : John Wiley & Sons
Page : 324 pages
File Size : 50,8 Mb
Release : 2022-10-10
Category : Technology & Engineering
ISBN : 9781119867807

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Semiconductor Microchips and Fabrication by Yaguang Lian Pdf

Semiconductor Microchips and Fabrication Advanced and highly illustrated guide to semiconductor manufacturing from an experienced industry insider Semiconductor Microchips and Fabrication is a practical yet advanced book on the theory, design, and manufacturing of semiconductor microchips that describes the process using the principles of physics and chemistry, fills in the knowledge gaps for professionals and students who need to know how manufacturing equipment works, and provides valuable suggestions and solutions to many problems that students or engineers often encounter in semiconductor processing, including useful experiment results to help in process work. The explanation of the semiconductor manufacturing process, and the equipment needed, is carried out based on the machines that are used in clean rooms over the world so readers understand how they can use the equipment to achieve their design and manufacturing ambitions. Combining theory with practice, all descriptions are carried out around the actual equipment and processes by way of a highly visual text, with illustrations including equipment pictures, manufacturing process schematics, and structures of semiconductor microchips. Sample topics covered in Semiconductor Microchips and Fabrication include: An introduction to basic concepts, such as impedance mismatch from plasma machines and theories, such as energy bands and Clausius-Clapeyron equation Basic knowledge used in semiconductor devices and manufacturing machines, including DC and AC circuits, electric fields, magnetic fields, resonant cavity, and the components used in the devices and machines Transistor and integrated circuits, including bipolar transistors, junction field effect transistors, and metal-semiconductor field effect transistors The main processes used in the manufacturing of microchips, including lithography, metallization, reactive-ion etching (RIE), plasma-enhanced chemical vapor deposition (PECVD), thermal oxidation and implantation, and more The skills in the design and problem solving of processes, such as how to design a dry etching recipe, and how to solve the micro-grass problems in Bosch process Through Semiconductor Microchips and Fabrication, readers can obtain the fundamental knowledge and skills of semiconductor manufacturing, which will help them better understand and use semiconductor technology to improve their product quality or project research. Before approaching this text, readers should have basic knowledge of physics, chemistry, and circuitry.

Author : Sophia Keil,Rainer Lasch,Fabian Lindner,Jacob Lohmer
Publisher : Springer Nature
Page : 150 pages
File Size : 45,7 Mb
Release : 2020-05-26
Category : Technology & Engineering
ISBN : 9783030486020

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Digital Transformation in Semiconductor Manufacturing by Sophia Keil,Rainer Lasch,Fabian Lindner,Jacob Lohmer Pdf

This open access book reports on cutting-edge electrical engineering and microelectronics solutions to foster and support digitalization in the semiconductor industry. Based on the outcomes of the European project iDev40, which were presented at the two first conference editions of the European Advances in Digital Transformation Conference (EADCT 2018 and EADTC 2019), the book covers different, multidisciplinary aspects related to digital transformation, including technological and industrial developments, as well as human factors research and applications. Topics include modeling and simulation methods in semiconductor operations, supply chain management issues, employee training methods and workplaces optimization, as well as smart software and hardware solutions for semiconductor manufacturing. By highlighting industrially relevant developments and discussing open issues related to digital transformation, the book offers a timely, practice-oriented guide to graduate students, researchers and professionals interested in the digital transformation of manufacturing domains and work environments.

Author : Donovan
Publisher : Routledge
Page : 439 pages
File Size : 40,6 Mb
Release : 2018-05-04
Category : Science
ISBN : 9781351425742

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Particle Control for Semiconductor Manufacturing by Donovan Pdf

There is something Alice-in-Wonderlandish about powerful and vital computer systems being shut down by a microscopic mote that a hay-feverist wouldn't sneeze at, but as computer chips get smaller, smaller and smaller particles on their surface have a larger and larger effect on their performance. In

Author : Anonim
Publisher : DIANE Publishing
Page : 52 pages
File Size : 50,7 Mb
Release : 2024-06-14
Category : Electronic
ISBN : 9781457818929

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Industry and Trade Summary: Semiconductor Manufacturing Equipment by Anonim Pdf

Author : Tin-Chih Toly Chen
Publisher : Springer Nature
Page : 106 pages
File Size : 54,8 Mb
Release : 2022-09-19
Category : Technology & Engineering
ISBN : 9783031140655

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Production Planning and Control in Semiconductor Manufacturing by Tin-Chih Toly Chen Pdf

This book systematically analyzes the applicability of big data analytics and Industry 4.0 from the perspective of semiconductor manufacturing management. It reports in real examples and presents case studies as supporting evidence. In recent years, technologies of big data analytics and Industry 4.0 have been frequently applied to the management of semiconductor manufacturing. However, related research results are mostly scattered in various journal issues or conference proceedings, and there is an urgent need for a systematic integration of these results. In addition, many related discussions have placed too much emphasis on the theoretical framework of information systems rather than on the needs of semiconductor manufacturing management. This book addresses these issues.

Author : Linda F. Atherton,Robert W. Atherton
Publisher : Springer Science & Business Media
Page : 498 pages
File Size : 52,9 Mb
Release : 1995-11-30
Category : Technology & Engineering
ISBN : 0792396197

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Wafer Fabrication: Factory Performance and Analysis by Linda F. Atherton,Robert W. Atherton Pdf

This book is concerned with wafer fabrication and the factories that manufacture microprocessors and other integrated circuits. With the invention of the transistor in 1947, the world as we knew it changed. The transistor led to the microprocessor, and the microprocessor, the guts of the modern computer, has created an epoch of virtually unlimited information processing. The electronics and computer revolution has brought about, for better or worse, a new way of life. This revolution could not have occurred without wafer fabrication, and its associated processing technologies. A microprocessor is fabricated via a lengthy, highly-complex sequence of chemical processes. The success of modern chip manufacturing is a miracle of technology and a tribute to the hundreds of engineers who have contributed to its development. This book will delineate the magnitude of the accomplishment, and present methods to analyze and predict the performance of the factories that make the chips. The set of topics covered juxtaposes several disciplines of engineering. A primary subject is the chemical engineering aspects of the electronics industry, an industry typically thought to be strictly an electrical engineer's playground. The book also delves into issues of manufacturing, operations performance, economics, and the dynamics of material movement, topics often considered the domain of industrial engineering and operations research. Hopefully, we have provided in this work a comprehensive treatment of both the technology and the factories of wafer fabrication. Novel features of these factories include long process flows and a dominance of processing over operational issues.