Author : C. Colinge
Publisher : The Electrochemical Society
Page : 656 pages
File Size : 49,5 Mb
Release : 2010-10
Category : Science
ISBN : 9781566778237
Semiconductor Wafer Bonding 11: Science, Technology, and Applications - In Honor of Ulrich Gösele by C. Colinge Pdf
Semiconductor wafer bonding continues to evolve as a crucial technology extending new integration schemes and disseminating new product architectures in such diverse areas as high quality silicon-on-insulator (SOI) materials for electronic applications, Si-Ge strained layers, Germanium-on-Insulator (GeOI), 3D device integration, Si on quartz or glass for thin film displays, compound semiconductor-on-Si heterostructures and Micro-Electro-Mechanical Systems.