Silicon Carbide Microelectromechanical Systems For Harsh Environments

Author : Rebecca Cheung
Publisher : Imperial College Press
Page : 193 pages
File Size : 41,8 Mb
Release : 2006
Category : Technology & Engineering
ISBN : 9781860949098

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Silicon Carbide Micro Electromechanical Systems for Harsh Environments by Rebecca Cheung Pdf

This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product. Sample Chapter(s). Chapter 1: Introduction to Silicon Carbide (SIC) Microelectromechanical Systems (MEMS) (800 KB). Contents: Introduction to Silicon Carbide (SiC) Microelectromechanical Systems (MEMS) (R Cheung); Deposition Techniques for SiC MEMS (C A Zorman et al.); Review of Issues Pertaining to the Development of Contacts to Silicon Carbide: 1996OCo2002 (L M Porter & F A Mohammad); Dry Etching of SiC (S J Pearton); Design, Performance and Applications of SiC MEMS (S Zappe). Readership: Academic researchers in MEMS and industrial engineers engaged in SiC MEMS research."

Author : Muthu Wijesundara,Robert Azevedo
Publisher : Springer Science & Business Media
Page : 247 pages
File Size : 47,5 Mb
Release : 2011-05-17
Category : Technology & Engineering
ISBN : 9781441971210

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Silicon Carbide Microsystems for Harsh Environments by Muthu Wijesundara,Robert Azevedo Pdf

Silicon Carbide Microsystems for Harsh Environments reviews state-of-the-art Silicon Carbide (SiC) technologies that, when combined, create microsystems capable of surviving in harsh environments, technological readiness of the system components, key issues when integrating these components into systems, and other hurdles in harsh environment operation. The authors use the SiC technology platform suite the model platform for developing harsh environment microsystems and then detail the current status of the specific individual technologies (electronics, MEMS, packaging). Additionally, methods towards system level integration of components and key challenges are evaluated and discussed based on the current state of SiC materials processing and device technology. Issues such as temperature mismatch, process compatibility and temperature stability of individual components and how these issues manifest when building the system receive thorough investigation. The material covered not only reviews the state-of-the-art MEMS devices, provides a framework for the joining of electronics and MEMS along with packaging into usable harsh-environment-ready sensor modules.

Author : Anonim
Publisher : Unknown
Page : 181 pages
File Size : 51,7 Mb
Release : 2006
Category : Electronic books
ISBN : OCLC:1063895310

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Silicon Carbide Micro Electromechanical Systems for Harsh Environments by Anonim Pdf

Author : Rebecca Cheung
Publisher : World Scientific
Page : 192 pages
File Size : 49,9 Mb
Release : 2006-06-29
Category : Technology & Engineering
ISBN : 9781783260027

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Silicon Carbide Microelectromechanical Systems for Harsh Environments by Rebecca Cheung Pdf

This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product. Contents:Introduction to Silicon Carbide (SiC) Microelectromechanical Systems (MEMS) (R Cheung)Deposition Techniques for SiC MEMS (C A Zorman et al.)Review of Issues Pertaining to the Development of Contacts to Silicon Carbide: 1996–2002 (L M Porter & F A Mohammad)Dry Etching of SiC (S J Pearton)Design, Performance and Applications of SiC MEMS (S Zappe) Readership: Academic researchers in MEMS and industrial engineers engaged in SiC MEMS research. Key Features:Includes contributions from technical and academic experts in the field of SiCUp-to-date information from scientific papers with relevant referencesIndispensible volume for academic researchers and industrial engineers working in MEMS and particularly SiC MEMSKeywords:Silicon Carbide;Microelectromechanical Systems (MEMS);Harsh Environments;Growth Etching;Microfabrication;Sensors

Author : Andrew Ryan Atwell
Publisher : Unknown
Page : 372 pages
File Size : 46,7 Mb
Release : 2002
Category : Electronic
ISBN : CORNELL:31924096131697

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Silicon Carbide MEMS Devices for Harsh Environments by Andrew Ryan Atwell Pdf

Author : Reza Ghodssi,Pinyen Lin
Publisher : Springer Science & Business Media
Page : 1211 pages
File Size : 53,7 Mb
Release : 2011-03-18
Category : Technology & Engineering
ISBN : 9780387473185

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MEMS Materials and Processes Handbook by Reza Ghodssi,Pinyen Lin Pdf

MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.

Author : Hoang-Phuong Phan
Publisher : Springer
Page : 156 pages
File Size : 42,6 Mb
Release : 2017-04-06
Category : Technology & Engineering
ISBN : 9783319555447

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Piezoresistive Effect of p-Type Single Crystalline 3C-SiC by Hoang-Phuong Phan Pdf

This book addresses the piezoresistance in p-type 3C-SiC, which it investigates using experimental characterization and theoretical analysis. The gauge factor, the piezoresistive coefficients in two-terminal and four-terminal resistors, the comparison between single crystalline and nanocrystalline SiC, along with the temperature dependence of the piezoresistive effect in p-type 3C-SiC are also discussed. Silicon carbide (SiC) is an excellent material for electronic devices operating at high temperatures, thanks to its large energy band gap, superior mechanical properties and extreme chemical inertness. Among the numerous polytypes of SiC, the cubic single crystal, which is also well known as 3C-SiC, is the most promising platform for microelectromechanical (MEMS) applications, as it can be epitaxially grown on an Si substrate with diameters of up to several hundred millimeters. This feature makes 3C-SiC compatible with the conventional Si-based micro/nano processing and also cuts down the cost of SiC wafers. The investigation into the piezoresistive effect in 3C-SiC is of significant interest for the development of mechanical transducers such as pressure sensors and strain sensors used for controlling combustion and deep well drilling. Although a number of studies have focused on the piezoresistive effect in n-type 3C-SiC, 4H-SiC and 6H-SiC, comparatively little attention has been paid to piezoresistance in p-type 3C-SiC. In addition, the book investigates the piezoresistive effect of top-down fabricated SiC nanowires, revealing a high degree of sensitivity in nanowires employing an innovative nano strain-amplifier. The large gauge factors of the p-type 3C-SiC at both room temperature and high temperatures found here indicate that this polytype could be suitable for the development of mechanical sensing devices operating in harsh environments with high temperatures.

Author : Gordon A. Shaw,Barton C. Prorok,LaVern A. Starman
Publisher : Springer Science & Business Media
Page : 156 pages
File Size : 41,8 Mb
Release : 2012-09-06
Category : Technology & Engineering
ISBN : 9781461444367

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MEMS and Nanotechnology, Volume 6 by Gordon A. Shaw,Barton C. Prorok,LaVern A. Starman Pdf

MEMS and Nanotechnology, Volume 6: Proceedings of the 2012 Annual Conference on Experimental and Applied Mechanics represents one of seven volumes of technical papers presented at the Society for Experimental Mechanics SEM 12th International Congress & Exposition on Experimental and Applied Mechanics, held at Costa Mesa, California, June 11-14, 2012. The full set of proceedings also includes volumes on Dynamic Behavior of Materials, Challenges in Mechanics of Time-Dependent Materials and Processes in Conventional and Multifunctional Materials, Imaging Methods for Novel Materials and Challenging Applications, Experimental and Applied Mechanics, Mechanics of Biological Systems and Materials and, Composite Materials and Joining Technologies for Composites.

Author : James J. Allen
Publisher : CRC Press
Page : 492 pages
File Size : 46,5 Mb
Release : 2005-07-08
Category : Technology & Engineering
ISBN : 9781420027754

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Micro Electro Mechanical System Design by James J. Allen Pdf

It is challenging at best to find a resource that provides the breadth of information necessary to develop a successful micro electro mechanical system (MEMS) design. Micro Electro Mechanical System Design is that resource. It is a comprehensive, single-source guide that explains the design process by illustrating the full range of issues involved,

Author : Stephen Saddow,Francesco La Via
Publisher : BoD – Books on Demand
Page : 260 pages
File Size : 41,8 Mb
Release : 2015-09-17
Category : Technology & Engineering
ISBN : 9789535121688

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Advanced Silicon Carbide Devices and Processing by Stephen Saddow,Francesco La Via Pdf

Since the production of the first commercially available blue LED in the late 1980s, silicon carbide technology has grown into a billion-dollar industry world-wide in the area of solid-state lighting and power electronics. With this in mind we organized this book to bring to the attention of those well versed in SiC technology some new developments in the field with a particular emphasis on particularly promising technologies such as SiC-based solar cells and optoelectronics. We have balanced this with the more traditional subjects such as power electronics and some new developments in the improvement of the MOS system for SiC MOSFETS. Given the importance of advanced microsystems and sensors based on SiC, we also included a review on 3C-SiC for both microsystem and electronic applications.

Author : Toan Dinh,Nam-Trung Nguyen,Dzung Viet Dao
Publisher : Springer
Page : 115 pages
File Size : 51,8 Mb
Release : 2018-10-05
Category : Technology & Engineering
ISBN : 9789811325717

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Thermoelectrical Effect in SiC for High-Temperature MEMS Sensors by Toan Dinh,Nam-Trung Nguyen,Dzung Viet Dao Pdf

This book presents the fundamentals of the thermoelectrical effect in silicon carbide (SiC), including the thermoresistive, thermoelectric, thermocapacitive and thermoelectronic effects. It summarizes the growth of SiC, its properties and fabrication processes for SiC devices and introduces the thermoelectrical sensing theories in different SiC morphologies and polytypes. Further, it reviews the recent advances in the characterization of the thermoelectrical effect in SiC at high temperatures. Discussing several desirable features of thermoelectrical SiC sensors and recent developments in these sensors, the book provides useful guidance on developing high sensitivity and linearity, fast-response SiC sensing devices based on thermoelectrical effects.

Author : Nadim Maluf,Kirt Williams
Publisher : Artech House
Page : 312 pages
File Size : 55,6 Mb
Release : 2004
Category : Technology & Engineering
ISBN : 1580535917

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An Introduction to Microelectromechanical Systems Engineering by Nadim Maluf,Kirt Williams Pdf

Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of MEMS devices and processes, and helps you communicate the relative merits of MEMS to your company's management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of MEMS packaging, this easy-to-understand book clearly explains the basics of MEMS engineering, making it an invaluable reference for your work in the field.

Author : Stephen Saddow
Publisher : Elsevier
Page : 378 pages
File Size : 51,6 Mb
Release : 2016-03-07
Category : Technology & Engineering
ISBN : 9780128030059

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Silicon Carbide Biotechnology by Stephen Saddow Pdf

Silicon Carbide Biotechnology: A Biocompatible Semiconductor for Advanced Biomedical Devices and Applications, Second Edition, provides the latest information on this wide-band-gap semiconductor material that the body does not reject as a foreign (i.e., not organic) material and its potential to further advance biomedical applications. SiC devices offer high power densities and low energy losses, enabling lighter, more compact, and higher efficiency products for biocompatible and long-term in vivo applications, including heart stent coatings, bone implant scaffolds, neurological implants and sensors, glucose sensors, brain-machine-interface devices, smart bone implants, and organ implants. This book provides the materials and biomedical engineering communities with a seminal reference book on SiC for developing technology, and is a resource for practitioners eager to identify and implement advanced engineering solutions to their everyday medical problems for which they currently lack long-term, cost-effective solutions. Discusses the properties, processing, characterization, and application of silicon carbide biomedical materials and related technology Assesses literature, patents, and FDA approvals for clinical trials, enabling rapid assimilation of data from current disparate sources and promoting the transition from technology R&D, to clinical trials Includes more on applications and devices, such as SiC nanowires, biofunctionalized devices, micro-electrode arrays, heart stent/cardiovascular coatings, and continuous glucose sensors, in this new edition

Author : Babak Jamshidi
Publisher : Unknown
Page : 322 pages
File Size : 55,6 Mb
Release : 2008
Category : Electronic
ISBN : UCAL:C3489795

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Poly-crystalline Silicon Carbide Passivated Capacitive MEMS Strain Gauge for Harsh Environments by Babak Jamshidi Pdf

Author : Robert Osiander,M. Ann Garrison Darrin,John L. Champion
Publisher : CRC Press
Page : 400 pages
File Size : 44,7 Mb
Release : 2018-10-03
Category : Technology & Engineering
ISBN : 9781420027747

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MEMS and Microstructures in Aerospace Applications by Robert Osiander,M. Ann Garrison Darrin,John L. Champion Pdf

The promise of MEMS for aerospace applications has been germinating for years, and current advances bring the field to the very cusp of fruition. Reliability is chief among the challenges limiting the deployment of MEMS technologies in space, as the requirement of zero failure during the mission is quite stringent for this burgeoning field. MEMS and Microstructures in Aerospace Applications provides all the necessary tools to overcome these obstacles and take MEMS from the lab bench to beyond the exosphere. The book begins with an overview of MEMS development and provides several demonstrations of past and current examples of MEMS in space. From this platform, the discussion builds to fabrication technologies; the effect of space environmental factors on MEMS devices; and micro technologies for space systems, instrumentation, communications, thermal control, guidance navigation and control, and propulsion. Subsequent chapters explore factors common to all of the described systems, such as MEMS packaging, handling and contamination control, material selection for specific applications, reliability practices for design and application, and assurance practices. Edited and contributed by an outstanding team of leading experts from industry, academia, and national laboratories, MEMS and Microstructures in Aerospace Applications illuminates the path toward qualifying and integrating MEMS devices and instruments into future space missions and developing innovative satellite systems.