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Author : Howard R. Huff,U. Gösele,H. Tsuya
Publisher : Unknown
Page : 894 pages
File Size : 42,9 Mb
Release : 1998
Category : Semiconductors
ISBN : STANFORD:36105023559771
Author : Anonim
Publisher : Unknown
Page : 800 pages
File Size : 55,8 Mb
Release : 1998
Category : Semiconductors
ISBN : UIUC:30112033173342
Author : Howard R. Huff,H. Iwai,H. Richter
Publisher : The Electrochemical Society
Page : 599 pages
File Size : 52,8 Mb
Release : 2006
Category : Semiconductors
ISBN : 9781566774390
This was the tenth symposium of the International Symposium on Silcon Material Science and Technology, going back to 1969. This issue provides a unique historical record of the program and will aid in the understanding of silicon materials over the last 35 years.
Author : Howard R. Huff,H. Tsuya,U. Gösele
Publisher : Unknown
Page : 1638 pages
File Size : 43,5 Mb
Release : 1998
Category : Semiconductors
ISBN : 1566771951
Author : Anonim
Publisher : Unknown
Page : 800 pages
File Size : 50,6 Mb
Release : 1998
Category : Semiconductors
ISBN : STANFORD:36105023559763
Author : Howard R. Huff,U. Gösele,H. Tsuya
Publisher : The Electrochemical Society
Page : 894 pages
File Size : 49,9 Mb
Release : 1998
Category : Technology & Engineering
ISBN : 1566771935
Author : G. Harbeke,M. J. Schulz
Publisher : Unknown
Page : 345 pages
File Size : 46,7 Mb
Release : 1989
Category : Electronic
ISBN : OCLC:66122513
Author : Howard R. Huff,Edward L. Kern
Publisher : Unknown
Page : 128 pages
File Size : 45,6 Mb
Release : 1988
Category : Electronic
ISBN : OCLC:1124045952
Author : Markku Tilli,Mervi Paulasto-Kröckel,Matthias Petzold,Horst Theuss,Teruaki Motooka,Veikko Lindroos
Publisher : Elsevier
Page : 1028 pages
File Size : 40,8 Mb
Release : 2020-04-17
Category : Technology & Engineering
ISBN : 9780128177877
Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors
Author : Günther Harbeke,Max J. Schulz
Publisher : Springer
Page : 0 pages
File Size : 46,6 Mb
Release : 1989
Category : Science
ISBN : 364274723X
The summer school on "Silicon: Materials Science and Technology" was held at the Ettore Majorana Centre for Scientific Culture in Erice, Sicily. It was the 16th course of a series in the International School of Materials Science and Technology. The course attracted participants from all over the world. 30 lectures were presented by internationally reputed experts in the field. The proceedings include all the lecture topics of the course. Short notes on the scientific work of the attendees are integrated with the main papers. The semiconductor material silicon is of paramount importance in micro electronics. The various aspects of the silicon materials science and its technol ogy were critically reviewed and the forseeable future developments of devices and integrated circuits were discussed during the two weeks of the course. The topics ranged from the fundamental physics to the applied science of processing technology and device fabrication covering crystal growth, processing technol ogy, defects, measurement methods, thin films, and device problems. The course brought together theoretical and experimental physicists and engineers from universities, research institutes and industry. The unique setting of the Ettore Majorana Centre in the ancient town of Erice created a friendly atmosphere for fruitful scientific exchange. Long dis cussions continued over lunch and only ended late at night in the wine cellar of the school.
Author : Markku Tilli,Mervi Paulasto-Krockel,Veli-Matti Airaksinen,Sami Franssila,Veikko Lindroos,Ari Lehto,Teruaki Motooka
Publisher : Elsevier
Page : 668 pages
File Size : 45,5 Mb
Release : 2009-12-08
Category : Technology & Engineering
ISBN : 0815519885
A comprehensive guide to MEMS materials, technologies and manufacturing, examining the state of the art with a particular emphasis on current and future applications. Key topics covered include: Silicon as MEMS material Material properties and measurement techniques Analytical methods used in materials characterization Modeling in MEMS Measuring MEMS Micromachining technologies in MEMS Encapsulation of MEMS components Emerging process technologies, including ALD and porous silicon Written by 73 world class MEMS contributors from around the globe, this volume covers materials selection as well as the most important process steps in bulk micromachining, fulfilling the needs of device design engineers and process or development engineers working in manufacturing processes. It also provides a comprehensive reference for the industrial R&D and academic communities. Veikko Lindroos is Professor of Physical Metallurgy and Materials Science at Helsinki University of Technology, Finland. Markku Tilli is Senior Vice President of Research at Okmetic, Vantaa, Finland. Ari Lehto is Professor of Silicon Technology at Helsinki University of Technology, Finland. Teruaki Motooka is Professor at the Department of Materials Science and Engineering, Kyushu University, Japan. Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques Shows how to protect devices from the environment and decrease package size for dramatic reduction of packaging costs Discusses properties, preparation, and growth of silicon crystals and wafers Explains the many properties (mechanical, electrostatic, optical, etc), manufacturing, processing, measuring (incl. focused beam techniques), and multiscale modeling methods of MEMS structures
Author : Golla Eranna
Publisher : CRC Press
Page : 432 pages
File Size : 46,5 Mb
Release : 2014-12-08
Category : Science
ISBN : 9781482232813
Silicon, as a single-crystal semiconductor, has sparked a revolution in the field of electronics and touched nearly every field of science and technology. Though available abundantly as silica and in various other forms in nature, silicon is difficult to separate from its chemical compounds because of its reactivity. As a solid, silicon is chemically inert and stable, but growing it as a single crystal creates many technological challenges. Crystal Growth and Evaluation of Silicon for VLSI and ULSI is one of the first books to cover the systematic growth of silicon single crystals and the complete evaluation of silicon, from sand to useful wafers for device fabrication. Written for engineers and researchers working in semiconductor fabrication industries, this practical text: Describes different techniques used to grow silicon single crystals Explains how grown single-crystal ingots become a complete silicon wafer for integrated-circuit fabrication Reviews different methods to evaluate silicon wafers to determine suitability for device applications Analyzes silicon wafers in terms of resistivity and impurity concentration mapping Examines the effect of intentional and unintentional impurities Explores the defects found in regular silicon-crystal lattice Discusses silicon wafer preparation for VLSI and ULSI processing Crystal Growth and Evaluation of Silicon for VLSI and ULSI is an essential reference for different approaches to the selection of the basic silicon-containing compound, separation of silicon as metallurgical-grade pure silicon, subsequent purification, single-crystal growth, and defects and evaluation of the deviations within the grown crystals.
Author : Howard R. Huff,László Fábry,Seigo Kishino
Publisher : The Electrochemical Society
Page : 650 pages
File Size : 47,8 Mb
Release : 2002
Category : Science
ISBN : 1566773741
Author : Chunhai Fan,Zhentang Zhao
Publisher : John Wiley & Sons
Page : 846 pages
File Size : 49,9 Mb
Release : 2018-05-29
Category : Technology & Engineering
ISBN : 9783527339860
Meeting the long-felt need for in-depth information on one of the most advanced material characterization methods, a top team of editors and authors from highly prestigious facilities and institutions covers a range of synchrotron techniques that have proven useful for materials research. Following an introduction to synchrotron radiation and its sources, the second part goes on to describe the various techniques that benefit from this especially bright light, including X-ray absorption, diffraction, scattering, imaging, and lithography. The thrid and final part provides an overview of the applications of synchrotron radiation in materials science. bridging the gap between specialists in synchrotron research and material scientists, this is a unique and indispensable resource for academic and industrial researchers alike.
Author : Robert A. Street
Publisher : Springer Science & Business Media
Page : 429 pages
File Size : 51,7 Mb
Release : 2013-06-29
Category : Technology & Engineering
ISBN : 9783662041413
This book gives the first systematic and complete survey of technology and application of amorphous silicon, a material with a huge potential in electronic applications. The book features contributions by world-wide leading researchers in this field.