Sputtering Materials For Vlsi And Thin Film Devices

Author : Jaydeep Sarkar
Publisher : William Andrew
Page : 614 pages
File Size : 49,6 Mb
Release : 2010-12-13
Category : Technology & Engineering
ISBN : 9780815519874

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Sputtering Materials for VLSI and Thin Film Devices by Jaydeep Sarkar Pdf

An important resource for students, engineers and researchers working in the area of thin film deposition using physical vapor deposition (e.g. sputtering) for semiconductor, liquid crystal displays, high density recording media and photovoltaic device (e.g. thin film solar cell) manufacturing. This book also reviews microelectronics industry topics such as history of inventions and technology trends, recent developments in sputtering technologies, manufacturing steps that require sputtering of thin films, the properties of thin films and the role of sputtering target performance on overall productivity of various processes. Two unique chapters of this book deal with productivity and troubleshooting issues. The content of the book has been divided into two sections: (a) the first section (Chapter 1 to Chapter 3) has been prepared for the readers from a range of disciplines (e.g. electrical, chemical, chemistry, physics) trying to get an insight into use of sputtered films in various devices (e.g. semiconductor, display, photovoltaic, data storage), basic of sputtering and performance of sputtering target in relation to productivity, and (b) the second section (Chapter 4 to Chapter 8) has been prepared for readers who already have background knowledge of sputter deposition of thin films, materials science principles and interested in the details of sputtering target manufacturing methods, sputtering behavior and thin film properties specific to semiconductor, liquid crystal display, photovoltaic and magnetic data storage applications. In Chapters 5 to 8, a general structure has been used, i.e. a description of the applications of sputtered thin films, sputtering target manufacturing methods (including flow charts), sputtering behavior of targets (e.g. current - voltage relationship, deposition rate) and thin film properties (e.g. microstructure, stresses, electrical properties, in-film particles). While discussing these topics, attempts have been made to include examples from the actual commercial processes to highlight the increased complexity of the commercial processes with the growth of advanced technologies. In addition to personnel working in industry setting, university researchers with advanced knowledge of sputtering would also find discussion of such topics (e.g. attributes of target design, chamber design, target microstructure, sputter surface characteristics, various troubleshooting issues) useful. . Unique coverage of sputtering target manufacturing methods in the light of semiconductor, displays, data storage and photovoltaic industry requirements Practical information on technology trends, role of sputtering and major OEMs Discussion on properties of a wide variety of thin films which include silicides, conductors, diffusion barriers, transparent conducting oxides, magnetic films etc. Practical case-studies on target performance and troubleshooting Essential technological information for students, engineers and scientists working in the semiconductor, display, data storage and photovoltaic industry

Author : Kasturi Chopra
Publisher : Springer Science & Business Media
Page : 305 pages
File Size : 40,8 Mb
Release : 2012-12-06
Category : Science
ISBN : 9781461336822

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Thin Film Device Applications by Kasturi Chopra Pdf

Two-dimensional materials created ab initio by the process of condensation of atoms, molecules, or ions, called thin films, have unique properties significantly different from the corresponding bulk materials as a result of their physical dimensions, geometry, nonequilibrium microstructure, and metallurgy. Further, these characteristic features of thin films can be drasti cally modified and tailored to obtain the desired and required physical characteristics. These features form the basis of development of a host of extraordinary active and passive thin film device applications in the last two decades. On the one extreme, these applications are in the submicron dimensions in such areas as very large scale integration (VLSI), Josephson junction quantum interference devices, magnetic bubbles, and integrated optics. On the other extreme, large-area thin films are being used as selective coatings for solar thermal conversion, solar cells for photovoltaic conver sion, and protection and passivating layers. Indeed, one would be hard pressed to find many sophisticated modern optical and electronic devices which do not use thin films in one way or the other. With the impetus provided by industrial applications, the science and technology of thin films have undergone revolutionary development and even today continue to be recognized globally as frontier areas of RID work. Major technical developments in any field of science and technology are invariably accompanied by an explosion of published literature in the form of scientific publications, reviews, and books.

Author : Donald M. Mattox
Publisher : William Andrew
Page : 378 pages
File Size : 42,5 Mb
Release : 2018-08-21
Category : Technology & Engineering
ISBN : 9780128130858

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The Foundations of Vacuum Coating Technology by Donald M. Mattox Pdf

The Foundations of Vacuum Coating Technology, Second Edition, is a revised and expanded version of the first edition, which was published in 2003. The book reviews the histories of the various vacuum coating technologies and expands on the history of the enabling technologies of vacuum technology, plasma technology, power supplies, and low-pressure plasma-enhanced chemical vapor deposition. The melding of these technologies has resulted in new processes and products that have greatly expanded the application of vacuum coatings for use in our everyday lives. The book is unique in that it makes extensive reference to the patent literature (mostly US) and how it relates to the history of vacuum coating. The book includes a Historical Timeline of Vacuum Coating Technology and a Historical Timeline of Vacuum/Plasma Technology, as well as a Glossary of Terms used in the vacuum coating and surface engineering industries. History and detailed descriptions of Vacuum Deposition Technologies Review of Enabling Technologies and their importance to current applications Extensively referenced text Patents are referenced as part of the history Historical Timelines for Vacuum Coating Technology and Vacuum/Plasma Technology Glossary of Terms for vacuum coating

Author : Akarsh Verma,Sushanta K. Sethi,Shigenobu Ogata
Publisher : Springer Nature
Page : 419 pages
File Size : 47,8 Mb
Release : 2023-07-12
Category : Technology & Engineering
ISBN : 9789819935499

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Coating Materials by Akarsh Verma,Sushanta K. Sethi,Shigenobu Ogata Pdf

This book comprehensively reviews assorted types of coatings, their applications, and various strategies employed by several scientists and researchers to fabricate them. Exclusively, the recent progress in computational strategies that are helpful to optimize the best suitable coating formulation before one goes for the real-time fabrication has been discussed in detail. And this book is also intended to shed light on the computational modeling techniques that are used in the characterization of various coating materials. It covers mechanisms, salient features, formulations, important aspects, and case studies of coatings utilized for various applications. The latest research in this area as well as possible avenues of future research is also highlighted to encourage the researchers.

Author : Abdel Salam Hamdy Makhlouf,Nedal Yusuf Abu-Thabit
Publisher : Elsevier
Page : 680 pages
File Size : 47,7 Mb
Release : 2019-10-25
Category : Technology & Engineering
ISBN : 9780128118931

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Advances In Smart Coatings And Thin Films For Future Industrial and Biomedical Engineering Applications by Abdel Salam Hamdy Makhlouf,Nedal Yusuf Abu-Thabit Pdf

Advances In Smart Coatings And Thin Films For Future Industrial and Biomedical Engineering Applications discusses in detail, the recent trends in designing, fabricating and manufacturing of smart coatings and thin films for future high-tech. industrial applications related to transportation, aerospace and biomedical engineering. Chapters cover fundamental aspects and diverse approaches used to fabricate smart self-healing anti-corrosion coatings, shape-memory coatings, polymeric and nano-bio-ceramic cotings, bio-inspired and stimuli-responsive coatings for smart surfaces with antibacterial activkity and controlled wettability, and electrically conductive coatings and their emerging applications. With the emphasis on advanced methodologies and recent emerging applications of smart multifunctional coatings and thin films, this book is essential reading for materials scientists and rsearchers working in chemical sciences, advanced materials, sensors, pharmaceutical and biomedical engineering. Discusses the most recent advances and innovations in smart multifunctional coatings and thin films in the transportation, aerospace and biomedical engineering industries Highlights the synthesis methods, processing, testing and characterization of smart coatings and thin films Reviews the current prospects and future trends within the industry

Author : Jose Luis Clabel Huaman,Victor Anthony Garcia Rivera
Publisher : Elsevier
Page : 626 pages
File Size : 49,6 Mb
Release : 2022-11-11
Category : Technology & Engineering
ISBN : 9780323907101

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Perovskite Ceramics by Jose Luis Clabel Huaman,Victor Anthony Garcia Rivera Pdf

Perovskite-based ceramics are a significant class of innovative materials with fascinating physical properties, which are now receiving intensive research attention in condensed matter physics and in the area of practical device applications. Perovskite Ceramics provides a state-of-the-art review on the latest advances in perovskite-based ceramic materials, as well as the development of devices from these materials for different applications. Perovskite Ceramics: Recent Advances and Emerging Applications is divided into two main parts. The first part focuses on the basics of perovskite-based ceramic materials and includes chapters on the fundamentals, synthesis and processing, characterization, and properties of these materials. Chapters are also included on bulk and thin materials, phase transitions, polaronic effects and the compensation and screening of ferroelectricity. This section will allow the reader to familiarize themselves with the standard traditional approach, but it will also introduce new concepts that are fast evolving in this field. The second part presents an extensive review of up-to-date research on new and innovative advances in perovskite-based ceramic materials. Chapters cover multiferroic applications, lead-free perovskites, energy storage applications, perovskite-based memories, light manipulation and spectral modifications, and solar cells and fuel cells. All these fields of research are rapidly evolving, so the book acts a platform to showcase latest results on optical strategies and materials for light manipulation, and spectral up- and down-conversion too (mainly rare earth doped oxides and complexes). The book will be an essential reference resource for academic and industrial researchers working in materials research and development particularly in functional and oxide ceramics and perovskites. A comprehensive and systematic review of advanced research in perovskite-based ceramics Covers both oxide and halide perovskites, their synthesis, processing, properties and applications Presents advanced methods of synthesis as well as latest applications Discusses all aspects from theory to production Covers the most important advances both in terms of new materials and application strategies

Author : Nadine Collaert
Publisher : Woodhead Publishing
Page : 384 pages
File Size : 42,9 Mb
Release : 2018-06-29
Category : Technology & Engineering
ISBN : 9780081020623

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High Mobility Materials for CMOS Applications by Nadine Collaert Pdf

High Mobility Materials for CMOS Applications provides a comprehensive overview of recent developments in the field of (Si)Ge and III-V materials and their integration on Si. The book covers material growth and integration on Si, going all the way from device to circuit design. While the book's focus is on digital applications, a number of chapters also address the use of III-V for RF and analog applications, and in optoelectronics. With CMOS technology moving to the 10nm node and beyond, however, severe concerns with power dissipation and performance are arising, hence the need for this timely work on the advantages and challenges of the technology. Addresses each of the challenges of utilizing high mobility materials for CMOS applications, presenting possible solutions and the latest innovations Covers the latest advances in research on heterogeneous integration, gate stack, device design and scalability Provides a broad overview of the topic, from materials integration to circuits

Author : The Minerals, Metals & Materials Society (TMS)
Publisher : John Wiley & Sons
Page : 824 pages
File Size : 48,7 Mb
Release : 2016-02-09
Category : Technology & Engineering
ISBN : 9781119274889

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TMS 2016 Supplemental Proceedings by The Minerals, Metals & Materials Society (TMS) Pdf

The TMS 2016 Annual Meeting Supplemental Proceedings is a collection of papers from the TMS 2016 Annual Meeting & Exhibition, held February 14-18 in Nashville, Tennessee, USA. The papers in this volume represent 21 symposia from the meeting. This volume, along with the other proceedings volumes published for the meeting, and archival journals, such as Metallurgical and Materials Transactions and Journal of Electronic Materials, represents the available written record of the 67 symposia held at TMS2016. This proceedings volume contains both edited and unedited papers; the unedited papers have not necessarily been reviewed by the symposium organizers and are presented “as is.” The opinions and statements expressed within the papers are those of the individual authors only, and no confirmations or endorsements are intended or implied.

Author : The Minerals, Metals & Materials Society (TMS)
Publisher : Springer
Page : 804 pages
File Size : 50,5 Mb
Release : 2016-12-01
Category : Technology & Engineering
ISBN : 9783319482545

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TMS 2016 145th Annual Meeting & Exhibition, Annual Meeting Supplemental Proceedings by The Minerals, Metals & Materials Society (TMS) Pdf

Author : Ning Xi,King Wai Chiu Lai
Publisher : William Andrew
Page : 273 pages
File Size : 51,9 Mb
Release : 2011-11-29
Category : Technology & Engineering
ISBN : 9781437734713

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Nano Optoelectronic Sensors and Devices by Ning Xi,King Wai Chiu Lai Pdf

Nanophotonics has emerged as a major technology and applications domain, exploiting the interaction of light-emitting and light-sensing nanostructured materials. These devices are lightweight, highly efficient, low on power consumption, and are cost effective to produce. The authors of this book have been involved in pioneering work in manufacturing photonic devices from carbon nanotube (CNT) nanowires and provide a series of practical guidelines for their design and manufacture, using processes such as nano-robotic manipulation and assembly methods. They also introduce the design and operational principles of opto-electrical sensing devices at the nano scale. Thermal annealing and packaging processes are also covered, as key elements in a scalable manufacturing process. Examples of applications of different nanowire based photonic devices are presented. These include applications in the fields of electronics (e.g. FET, CNT Schotty diode) and solar energy. Discusses opto-electronic nanomaterials, characterization and properties from an engineering perspective, enabling the commercialization of key emerging technologies Provides scalable techniques for nanowire structure growth, manipulation and assembly (i.e. synthesis) Explores key application areas such as sensing, electronics and solar energy

Author : Robert A. Dorey
Publisher : William Andrew
Page : 217 pages
File Size : 49,7 Mb
Release : 2011-10-21
Category : Science
ISBN : 9781437778175

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Ceramic Thick Films for MEMS and Microdevices by Robert A. Dorey Pdf

The MEMS (Micro Electro-Mechanical Systems) market returned to growth in 2010. The total MEMS market is worth about $6.5 billion, up more than 11 percent from last year and nearly as high as its historic peak in 2007. MEMS devices are used across sectors as diverse as automotive, aerospace, medical, industrial process control, instrumentation and telecommunications - forming the nerve center of products including airbag crash sensors, pressure sensors, biosensors and ink jet printer heads. Part of the MEMS cluster within the Micro & Nano Technologies Series, this book covers the fabrication techniques and applications of thick film piezoelectric micro electromechanical systems (MEMS). It includes examples of applications where the piezoelectric thick films have been used, illustrating how the fabrication process relates to the properties and performance of the resulting device. Other topics include: top-down and bottom-up fabrication of thick film MEMS, integration of thick films with other materials, effect of microstructure on properties, device performance, etc. Provides detailed guidance on the fabrication techniques and applications of thick film MEMS, for engineers and R&D groups Written by a single author, this book provides a clear, coherently written guide to this important emerging technology Covers materials, fabrication and applications in one book

Author : Karthikeyan Subramani,Waqar Ahmed
Publisher : William Andrew
Page : 412 pages
File Size : 55,7 Mb
Release : 2011-11-15
Category : Technology & Engineering
ISBN : 9781455778577

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Emerging Nanotechnologies in Dentistry by Karthikeyan Subramani,Waqar Ahmed Pdf

New nanomaterials are leading to a range of emerging dental treatments that utilize more biomimetic materials that more closely duplicate natural tooth structure (or bone, in the case of implants). The use of nanostructures that will work in harmony with the body’s own regenerative processes (eg, to restore tooth structure or alveolar bone) are moving into clinical practice. This book brings together an international team of experts from the fields of nanomaterials, biomedical engineering and dentistry, to cover the new materials and techniques with potential for use intra-orally or extra-orally for the restoration, fixation, replacement, or regeneration of hard and soft tissues in and about the oral cavity and craniofacial region. New dental nanotechnologies include the use of advanced inorganic and organic materials, smart and biomimetic materials, tissue engineering and drug delivery strategies. Book prepared by an interdisciplinary and international group of bio-nanomaterial scientists and dental/oral biomedical researchers Comprehensive professional reference for the subject covering materials fabrication and use of materials for all major diagnostic and therapeutic dental applications – repair,restoration, regeneration, implants and prevention Book focuses in depth on the materials manufacturing processes involved with emphasis on pre-clinical and clinical applications, use and biocompatibility

Author : Krishna Seshan
Publisher : CRC Press
Page : 72 pages
File Size : 49,6 Mb
Release : 2002-02-01
Category : Science
ISBN : 9781482269680

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Handbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon by Krishna Seshan Pdf

The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition tec

Author : Nam-Trung Nguyen
Publisher : William Andrew
Page : 368 pages
File Size : 51,7 Mb
Release : 2011-09-17
Category : Technology & Engineering
ISBN : 9781437735215

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Micromixers by Nam-Trung Nguyen Pdf

The ability to mix minute quantities of fluids is critical in a range of recent and emerging techniques in engineering, chemistry and life sciences, with applications as diverse as inkjet printing, pharmaceutical manufacturing, specialty and hazardous chemical manufacturing, DNA analysis and disease diagnosis. The multidisciplinary nature of this field – intersecting engineering, physics, chemistry, biology, microtechnology and biotechnology – means that the community of engineers and scientists now engaged in developing microfluidic devices has entered the field from a variety of different backgrounds. Micromixers is uniquely comprehensive, in that it deals not only with the problems that are directly related to fluidics as a discipline (aspects such as mass transport, molecular diffusion, electrokinetic phenomena, flow instabilities, etc.) but also with the practical issues of fabricating micomixers and building them into microsystems and lab-on-chip assemblies.With practical applications to the design of systems vital in modern communications, medicine and industry this book has already established itself as a key reference in an emerging and important field. The 2e includes coverage of a broader range of fabrication techniques, additional examples of fully realized devices for each type of micromixer and a substantially extended section on industrial applications, including recent and emerging applications. Introduces the design and applications of micromixers for a broad audience across chemical engineering, electronics and the life sciences, and applications as diverse as lab-on-a-chip, ink jet printing, pharmaceutical manufacturing and DNA analysis Helps engineers and scientists to unlock the potential of micromixers by explaining both the scientific (microfluidics) aspects and the engineering involved in building and using successful microscale systems and devices with micromixers The author's applied approach combines experience-based discussion of the challenges and pitfalls of using micromixers, with proposals for how to overcome them

Author : Henry Radamson,Eddy Simoen,Jun Luo,Chao Zhao
Publisher : Woodhead Publishing
Page : 278 pages
File Size : 54,9 Mb
Release : 2018-04-03
Category : Technology & Engineering
ISBN : 9780081021408

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CMOS Past, Present and Future by Henry Radamson,Eddy Simoen,Jun Luo,Chao Zhao Pdf

CMOS Past, Present and Future provides insight from the basics, to the state-of-the-art of CMOS processing and electrical characterization, including the integration of Group IV semiconductors-based photonics. The book goes into the pitfalls and opportunities associated with the use of hetero-epitaxy on silicon with strain engineering and the integration of photonics and high-mobility channels on a silicon platform. It begins with the basic definitions and equations, but extends to present technologies and challenges, creating a roadmap on the origins of the technology and its evolution to the present, along with a vision for future trends. The book examines the challenges and opportunities that materials beyond silicon provide, including a close look at high-k materials and metal gate, strain engineering, channel material and mobility, and contacts. The book's key approach is on characterizations, device processing and electrical measurements. Addresses challenges and opportunities for the use of CMOS Covers the latest methods of strain engineering, materials integration to increase mobility, nano-scaled transistor processing, and integration of CMOS with photonic components Provides a look at the evolution of CMOS technology, including the origins of the technology, current status and future possibilities