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Chemistry of the Semiconductor Industry by S.J. Moss,A. Ledwith Pdf
This book covers the chemistry of the major processes involved in the manufacture of integrated circuits. The authors describe all the major processes in use, together with some interesting processes which are currently being developed and hold future promise. Each chapter covers the current state of knowledge of the underlying chemistry of a particular process, and identifies areas of uncertainty requiring further research.
Physical Chemistry of Semiconductor Materials and Processes by Anonim Pdf
The development of solid state devices began a little more than a century ago, with the discovery of the electrical conductivity of ionic solids. Today, solid state technologies form the background of the society in which we live. The aim of this book is threefold: to present the background physical chemistry on which the technology of semiconductor devices is based; secondly, to describe specific issues such as the role of defects on the properties of solids, and the crucial influence of surface properties; and ultimately, to look at the physics and chemistry of semiconductor growth processes, both at the bulk and thin-film level, together with some issues relating to the properties of nano-devices. Divided into five chapters, it covers: Thermodynamics of solids, including phases and their properties and structural order Point defects in semiconductors Extended defects in semiconductors and their interactions with point defects and impurities Growth of semiconductor materials Physical chemistry of semiconductor materials processing With applications across all solid state technologies,the book is useful for advanced students and researchers in materials science, physics, chemistry, electrical and electronic engineering. It is also useful for those in the semiconductor industry.
Handbook of Chemicals and Gases for the Semiconductor Industry by Ashutosh Misra,Jeremiah D. Hogan,Russell A. Chorush Pdf
The first comprehensive guide to the chemicals and gases used in semiconductor manufacturing The fabrication of semiconductor devices involves a series of complex chemical processes such as photolithography, etching, cleaning, thin film deposition, and polishing. Until now, there has been no convenient source of information on the properties, applications, and health and safety considerations of the chemicals used in these processes. The Handbook of Chemicals and Gases for the Semiconductor Industry meets this need. Each of the Handbook's eight chapters is related to a specific area of semiconductor processing. The authors provide a brief overview of each step in the process, followed by tables containing physical properties, handling, safety, and other pertinent information on chemicals and gases typically used in these processes. The 270 chemical and gas entries include data on physical properties, emergency treatment procedures, waste disposal, and incompatible materials, as well as descriptions of applications, chemical mechanisms involved, and references to the literature. Appendices cross-reference entries by process, chemical name, and CAS number. The Handbook's eight chapters are: Thin Film Deposition Materials Wafer Cleaning Materials Photolithography Materials Wet and Dry Etching Materials Chemical Mechanical Planarizing Methods Carrier Gases Uncategorized Materials Semiconductor Chemicals Analysis No other single source brings together these useful and important data on chemicals and gases used in the manufacture of semiconductor devices. The Handbook of Chemicals and Gases for the Semiconductor Industry will be a valuable reference for process engineers, scientists, suppliers to the semiconductor industry, microelectronics researchers, and students.
Semiconductor Manufacturing Technology by Chue San Yoo Pdf
This textbook contains all the materials that an engineer needs to know to start a career in the semiconductor industry. It also provides readers with essential background information for semiconductor research. It is written by a professional who has been working in the field for over two decades and teaching the material to university students for the past 15 years. It includes process knowledge from raw material preparation to the passivation of chips in a modular format.
Handbook for Cleaning for Semiconductor Manufacturing by Karen A. Reinhardt,Richard F. Reidy Pdf
Provides an In-depth discussion of surface conditioning for semiconductor applications The Handbook of Cleaning for Semiconductor Manufacturing: Fundamentals and Applications provides an in-depth discussion of surface conditioning for semiconductor applications. The fundamental physics and chemistry associated with wet processing is reviewed as well as surface and colloidal aspects of cleaning and etching. Topics covered in this new reference include: Front end line (FEOL) and back end of line (BEOL) cleaning applications such as high-k/metal gate post-etch cleaning and pore sealing, high-dose implant stripping and cleaning, and germanium, and silicon passivation Formulation development practices, methodology and a new directions are presented including chemicals used for preventing corrosion of copper lines, cleaning aluminium lines, reclaiming wafers, and water bonding, as well as the filtering and recirculating of chemicals including reuse and recycling Wetting, cleaning, and drying of features, such as high aspect ratio features and hydrophilic surface states, especially how to dry without watermarks, the abilities to wet hydrophobic surfaces and to remove liquid from deep features The chemical reactions and mechanisms of silicon dioxide etching with hydrofluoric acid, particle removal with ammonium hydroxide/hydrogen peroxide mixture, and metal removal with hydrochloric acid The Handbook of Cleaning for Semiconductor Manufacturing: Fundamentals and Applications is a valuable resource for any engineer or manager associated with using or supplying cleaning and contamination free technologies for semiconductor manufacturing. Engineers working for semiconductor manufacturing, capital equipment, chemicals, or other industries that assures cleanliness of chemicals, material, and equipment in the manufacturing area will also find this handbook an indispensible reference.
Series on Emission Scenario Documents Chemicals Vapour Deposition in the Semiconductor Industry by OECD Pdf
This OECD Emission Scenario Document (ESD) provides information on the sources, use patterns, and potential release pathways of chemicals used as chemical vapour deposition (CVD) precursors in the semiconductor industry. The document presents standard approaches for estimating environmental releases and occupational exposures, and discusses the typical engineering controls used to mitigate exposure to CVD precursors.
Environmental Issues in the Electronics and Semiconductor Industries by Electrochemical Society. Dielectric Science and Technology Division,Electrochemical Society. Meeting Pdf
Environmental Issues in the Electronics/semiconductor Industries and by Electrochemical Society. Dielectric Science and Technology Division,Electrochemical Society. Meeting Pdf
Contamination-Free Manufacturing for Semiconductors and Other Precision Products by Robert P. Donovan Pdf
Recognizing the need for improved control measures in the manufacturing process of highly sensitized semiconductor technology, this practical reference provides in-depth and advanced treatment on the origins, procedures, and disposal of a variety of contaminants. It uses contemporary examples based on the latest hardware and processing apparatus to illustrate previously unavailable results and insights along with experimental and theoretical developments. Ensures the proper methods necessary to meet the standards established in the 1997 National Technology Roadmap for Semiconductors (NTRS)! Summarizing up-to-date control practices in the industry, Contamination-Free Manufacturing for Semiconductors and Other Precision Products: Details the physics and chemistry behind the mechanisms leading to contamination-induced failures Considers particles and molecular contaminants, including the entire spectrum of mass-based contaminants Outlines primary contamination problems and target control levels Reveals and offers solutions to inadequate areas of measurement capability and control technology Clarifies significant problems and decisions facing the industry by analyzing NTRS standards and contamination mechanisms Containing over 700 literature references, drawings, photographs, equations, and tables, Contamination-Free Manufacturing for Semiconductors and Other Precision Products is an essential reference for electrical and electronics, instrumentation, process, manufacturing, development, contamination control and quality engineers; physicists; and upper-level undergraduate and graduate students in these disciplines.
Two-Dimensional Semiconductors by Jingbo Li,Zhongming Wei,Jun Kang Pdf
In-depth overview of two-dimensional semiconductors from theoretical studies, properties to emerging applications! Two-dimensional (2D) materials have attracted enormous attention due to their exotic properties deriving from their ultrathin dimensions. 2D materials, such as graphene, transition metal dichalcogenides, transition metal oxides, black phosphorus and boron nitride, exhibit versatile optical, electronic, catalytic and mechanical properties, thus can be used in a wide range of applications, including electronics, optoelectronics and optical applications. Two-Dimensional Semiconductors: Synthesis, Physical Properties and Applications provides an in-depth view of 2D semiconductors from theoretical studies, properties to applications, taking into account the current state of research and development. It introduces various preparation methods and describes in detail the physical properties of 2D semiconductors including 2D alloys and heterostructures. The covered applications include, but are not limited to, field-effect transistors, spintronics, solar cells, photodetectors, light-emitting diode, sensors and bioelectronics. * Highly topical: 2D materials are a rapidly advancing field that attracts increasing attention * Concise overview: covers theoretical studies, preparation methods, physical properties, potential applications, the challenges and opportunities * Application oriented: focuses on 2D semiconductors that can be used in various applications such as field-effect transistors, solar cells, sensors and bioelectronics * Highly relevant: newcomers as well as experienced researchers in the field of 2D materials will benefit from this book Two-Dimensional Semiconductors: Synthesis, Physical Properties and Applications is written for materials scientists, semiconductor and solid state physicists, electrical engineers, and readers working in the semiconductor industry.
Introduction to Semiconductor Technology by Hong Xiao Pdf
IC chip manufacturing processes, such as photolithography, etch, CVD, PVD, CMP, ion implantation, RTP, inspection, and metrology, are complex methods that draw upon many disciplines. Introduction to Semiconductor Manufacturing Technologies, Second Edition thoroughly describes the complicated processes with minimal mathematics, chemistry, and physics; it covers advanced concepts while keeping the contents accessible to readers without advanced degrees. Designed as a textbook for college students, this book provides a realistic picture of the semiconductor industry and an in-depth discussion of IC chip fabrication technology. The text focuses on current fabrication technologies, but older technologies are discussed for historical context.
The Potential of the Semiconductor Industry in Russia in the Context of Great Power Competition by Shakhboz Akbarovich Juraev Pdf
The geopolitical realities are influenced and changed by technological and technical advancement. As we stand on the brink of the Fourth Industrial Revolution, the emergence of new opportunities and challenges is inevitable. However, nearly all modern innovations are based on semiconductors. This research analyses the potential of the Russian semiconductor industry to assess the technological and technical capacity of an actor in international relations. Methods of SWOT analysis and questionnaires among experts are used to get clearer estimations about the industrial environment of semiconductors in Russia.
