Total Pressure Measurements In Vacuum Technology

Author : A. Berman
Publisher : Academic Press
Page : 413 pages
File Size : 41,5 Mb
Release : 2014-06-28
Category : Science
ISBN : 9781483273792

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Total Pressure Measurements in Vacuum Technology by A. Berman Pdf

Total Pressure Measurements in Vacuum Technology focuses on the measurement of low total pressure in hostile environments or in the presence of magnetic fields. This book emphasizes the general processes and problems involved in measurement techniques and physical principles on which vacuum gauges operate, rather than on the detailed description of the gauges. The design and techniques involved in the use of special instruments that determine “pressure or gas density, such as pressure converters or radioactive gauges, are also described. This publication is mainly intended for graduate students and research scientists who have a good general background in physics and engineering.

Author : David M. Hata
Publisher : Prentice Hall
Page : 212 pages
File Size : 50,7 Mb
Release : 2008
Category : Science
ISBN : PSU:000060628435

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Introduction to Vacuum Technology by David M. Hata Pdf

The approach taken in this book is to approach vacuum systems from a pressure regime viewpoint. That is, after covering some basic chemistry, the first pressure regime covered is the rough vacuum regime. Within the study of rough vacuum systems, the following topics are covered: the gas load, the pumping mechanism, pressure measurement and vacuum system construction. The discussion of rough vacuum is then followed by the study of high-vacuum systems. The same topics are revisited, but this time from a high vacuum perspective. Once both rough vacuum and high vacuum systems are covered, then the topics of leak detection and residual gas analysis are introduced. This approach lends itself to laboratory experimentation. During the review of gas laws from chemistry, there are a number of experiments and demonstrations that can be performed to reinforce basic laws and concepts. Then, during the study of rough vacuum systems, pumpdown times can be calculated and pumpdowns performed in the laboratory. Likewise, during the study of high-vacuum systems, pumpdowns as well as other lab exercises, such as outgassing and residual gas analysis, can be conducted. Coverage of vacuum systems from a pressure regime viewpoint, rather than from a topical viewpoint. Focus on the fundamental science behind vacumm system components. This book is written for users of vacuum systems, especially the technicians that are responsible for maintaining them.

Author : John Henry Leck
Publisher : Springer Science & Business Media
Page : 208 pages
File Size : 48,5 Mb
Release : 2012-12-06
Category : Science
ISBN : 9781461308775

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Total and Partial Pressure Measurement in Vacuum Systems by John Henry Leck Pdf

This book deals with the underlying theory and practical aspects of pressure gauges that are at present in general use. Because of the ever-increasing demands to provide a wider range of sophisticated and reliable vacuum equipment a good understanding of these instruments is of vital importance to all workers in the research and industrial sectors. Of the gauges considered only the mechanical types are absolute, in the sense that they measure pressure directly as a force upon a liquid column or a solid surface. Under ideal conditions it is possible to calculate their sensitiv ities, which are the same for all gases and vapours. The recent developments in the viscous or molecular damping gauges indicate that these may also be considered absolute. Other gauges are indirect in that they involve the measurement of some secondary phenomenon which is pressure-dependent and therefore these gauges can only be used for measurement after calibration against an absolute standard. The radiometer or Knudsen type gauge has been excluded from the text since these are now only of historic interest. Also no mention is made of the integration techniques involving surface changes (such as work function) although these could have application under very special circumstances. The McLeod gauge is dealt with in some detail, for even though this gauge has few practical applications, it is the most sensitive absolute gauge available and has value as a reference standard.

Author : David J. Hucknall
Publisher : Elsevier
Page : 328 pages
File Size : 46,5 Mb
Release : 2013-10-22
Category : Technology & Engineering
ISBN : 9781483103334

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Vacuum Technology and Applications by David J. Hucknall Pdf

Vacuum Technology and Applications reviews the most commonly encountered methods for the production, containment, and measurement of subatmospheric pressure. This book also outlines a number of very important applications of this technology. This text is organized into eight chapters and begins with a brief survey of the fundamental principles of vacuum technology. The succeeding chapters deal with the pumps used for the production of rough-medium and high-ultra-high vacua. These chapters specifically cover their principles, performance, and applications. These topics are followed by a discussion of the devices for residual gas analysis and partial pressure measurement. Other chapters consider the aspects of leak detection using He-specific mass spectrometer and the materials, components, and fabrication of vacuum devices. The final chapters explore the application of vacuum technology in critical areas of industrial activity, such as thin-film technology, semiconductor, metallurgy, and chemical industry. This book will prove useful to practicing mechanical, chemical, and design engineers.

Author : John F. O'Hanlon
Publisher : John Wiley & Sons
Page : 536 pages
File Size : 51,5 Mb
Release : 2005-02-18
Category : Science
ISBN : 9780471467151

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A User's Guide to Vacuum Technology by John F. O'Hanlon Pdf

In the decade and a half since the publication of the Second Edition of A User?s Guide to Vacuum Technology there have been many important advances in the field, including spinning rotor gauges, dry mechanical pumps, magnetically levitated turbo pumps, and ultraclean system designs. These, along with improved cleaning and assembly techniques have made contamination-free manufacturing a reality. Designed to bridge the gap in both knowledge and training between designers and end users of vacuum equipment, the Third Edition offers a practical perspective on today?s vacuum technology. With a focus on the operation, understanding, and selection of equipment for industrial processes used in semiconductor, optics, packaging, and related coating technologies, A User?s Guide to Vacuum Technology, Third Edition provides a detailed treatment of this important field. While emphasizing the fundamentals and touching on significant topics not adequately covered elsewhere, the text avoids topics not relevant to the typical user.

Author : A. Chambers
Publisher : CRC Press
Page : 214 pages
File Size : 53,6 Mb
Release : 1998-01-01
Category : Science
ISBN : 0585254915

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Basic Vacuum Technology, 2nd edition by A. Chambers Pdf

Vacuum technology is widely used in many manufacturing and developmental processes and its applications grow in scope and sophistication. It is an inter-disciplinary subject, embracing aspects of mechanical, electrical and chemical engineering, chemistry, and materials science while having a broad foundation in physics. In spite of its technological importance, and perhaps because of its cross-disciplinary nature, substantial teaching and training is not widely available. Basic Vacuum Technology aims to give readers a firm foundation of fundamental knowledge about the subject and the ability to apply it. This book is an introductory text on how to use vacuum techniques. It provides a good grounding in the basic scientific principles and concepts that underlie the production and measurement of vacua. The authors describe how these are applied in representative low, medium, high, and ultra-high vacuum systems and explain the most important practical aspects of the operation of a large variety of pumps, components, and measuring instrumentation. The book introduces numerical methods for analysis and prediction of the behavior of vacuum systems in terms of the properties of their individual elements and enables readers to recognize and resolve problems with malfunctioning systems.

Author : A. Roth
Publisher : Elsevier
Page : 575 pages
File Size : 46,6 Mb
Release : 2012-12-02
Category : Technology & Engineering
ISBN : 9780444598745

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Vacuum Technology by A. Roth Pdf

This third updated and enlarged edition includes about 350 new papers added to the previous list of references. The contents have been revised and updated in the areas of: Thermonuclear pumping; Throughput; Transmission probability; Electronic circuit simulation; Sorption on charcoal; Desorption from porous materials; Desorption from stainless steel, A1 alloys (outgassing rates); Ion bombardment (glow discharge) cleaning; Clay - type pumps; Turbomolecular pumps-improvements; Cryosorption; NEG (Nonevaporable getter) linear pumps; Standards for measurement of pumping speed (Recommended practice, test domes); Spinning rotor gauges; Quartz friction gauges; Increase of sensitivity of thermocouple gauges; Lubrication in vacuum; Calibration of diffusion leaks; Improvements in leak detection. Besides its role in educational activities, the book will also serve as a handbook for those working in this field, or in fields connected to Vacuum Technology.Comments from the press on the second edition:"A valuable reference work for undergraduate libraries...well organized and clearly written and strikes an appropriate balance between completeness and attention to fundamentals. The index and references are unusually complete. Recommended." (Choice) "Roth's new book contains a comprehensive collection of information on rarefied-gas flow, physical and chemical phenomena associated with vacuum technology, the production and measurement of high vacuum and sealing and leak-detection techniques. One finds a wealth of equations, numerical examples, tables, graphs and monographs. The book is more a handbook than a source book of latest developments. It is suitable for teaching, but the wealth of organized data should also make the book highly useful to engineers..." (Physics Today)

Author : William George Brombacher
Publisher : Unknown
Page : 120 pages
File Size : 45,8 Mb
Release : 1967
Category : Pressure
ISBN : SRLF:AA0014217020

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Bibliography and Index on Vacuum and Low Pressure Measurement, January 1960 to December 1965 by William George Brombacher Pdf

Author : Karl Jousten
Publisher : John Wiley & Sons
Page : 1050 pages
File Size : 46,7 Mb
Release : 2008-11-24
Category : Technology & Engineering
ISBN : 3527407235

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Handbook of Vacuum Technology by Karl Jousten Pdf

A comprehensive standard work and important resource for both students and professionals in research and industry who need detailed knowledge of the theory and applications. Many numerical examples and numerous illustrations visualize the theoretical issues, backed by many useful tables and charts, plus over 500 illustrations. The Handbook discusses the latest developments in vacuum measurement techniques and leak detection in vacuum systems, as well as the connection of vacuum systems to computerized control systems.

Author : William George Brombacher
Publisher : Unknown
Page : 112 pages
File Size : 49,7 Mb
Release : 1961
Category : Pressure
ISBN : UIUC:30112000085685

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Bibliography and Index on Vacuum and Low Pressure Measurement by William George Brombacher Pdf

Author : John Henry Leck
Publisher : Unknown
Page : 254 pages
File Size : 45,9 Mb
Release : 1967
Category : Manometers
ISBN : UOM:39015002910241

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Pressure Measurement in Vacuum Systems by John Henry Leck Pdf

Author : Nagamitsu Yoshimura
Publisher : Academic Press
Page : 575 pages
File Size : 49,9 Mb
Release : 2020-02-15
Category : Technology & Engineering
ISBN : 9780128197035

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A Review: Ultrahigh-Vacuum Technology for Electron Microscopes by Nagamitsu Yoshimura Pdf

A Review: Ultrahigh-Vacuum Technology for Electron Microscopes provides information on the fundamentals of ultra-high vacuum systems. It covers the very subtle process that can help increase pressure inside the microscope (or inside any other ultra-high vacuum system) and the different behavior of the molecules contributing to this kind of process. Prof Yoshimura’s book offers detailed information on electron microscope components, as well as UHV technology. This book is an ideal resource for industrial microscopists, engineers and scientists responsible for the design, operation and maintenance of electron microscopes. In addition, engineering students or engineers working with electron microscopes will find it useful. Teaches how to incorporate diffusion pumps for UHV electron microscopy Presents the work of an author who brings a lifetime of experience working on vacuum technology and electron microscopes

Author : John F. O'Hanlon
Publisher : John Wiley & Sons
Page : 424 pages
File Size : 42,5 Mb
Release : 1980
Category : Science
ISBN : UOM:39015000966286

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A User's Guide to Vacuum Technology by John F. O'Hanlon Pdf

Author : Franco Pavese,Gianfranco Molinar Min Beciet
Publisher : Springer Science & Business Media
Page : 667 pages
File Size : 41,5 Mb
Release : 2012-09-28
Category : Technology & Engineering
ISBN : 9781441982827

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Modern Gas-Based Temperature and Pressure Measurements by Franco Pavese,Gianfranco Molinar Min Beciet Pdf

This 2nd edition volume of Modern Gas-Based Temperature and Pressure Measurements follows the first publication in 1992. It collects a much larger set of information, reference data, and bibliography in temperature and pressure metrology of gaseous substances, including the physical-chemical issues related to gaseous substances. The book provides solutions to practical applications where gases are used in different thermodynamic conditions. Modern Gas-Based Temperature and Pressure Measurements, 2nd edition is the only comprehensive survey of methods for pressure measurement in gaseous media used in the medium-to-low pressure range closely connected with thermometry. It assembles current information on thermometry and manometry that involve the use of gaseous substances which are likely to be valid methods for the future. As such, it is an important resource for the researcher. This edition is updated through the very latest scientific and technical developments of gas-based temperature and pressure measurements using thermometry and manometry, and brings all of the techniques together under one cover. This book fills the gap in international literature, as no other recently published book provides a comprehensive survey for gaseous media closely connected with thermometry. Updates in this new edition include revised appendices and new chapters on Mutual Recognition Agreement of the Comité International des Poids et Mesures and its main applications, and developments in the European Metrology Society.

Author : Nagamitsu Yoshimura
Publisher : Springer Science & Business Media
Page : 359 pages
File Size : 46,9 Mb
Release : 2007-12-04
Category : Technology & Engineering
ISBN : 9783540744337

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Vacuum Technology by Nagamitsu Yoshimura Pdf

In this book, Yoshimura provides a review of the UHV related development during the last decades. His very broad experience in the design enables him to present us this detailed reference. After a general description how to design UHV systems, he covers all important issue in detail, like pumps, outgasing, Gauges, and Electrodes for high voltages. Thus, this book serves as reference for everybody using UVH in scientific equipment.