Advances In Thin Film Fabrication By Magnetron Sputtering
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Advances in Thin Film Fabrication by Magnetron Sputtering by Rafal Chodun Pdf
Magnetron sputtering technology is one of the most popular PVD methods used in the industry. Its importance is predicted to increase due to the current developments in research centers engaged in that particular domain. Developments are due to the modifications introduced into the sputtering technology itself (e.g., the use of innovative plasma sources, innovative technical means for influencing the state of the magnetron plasma, innovative approaches to the plasma's state and its control) and the production of new coating materials with functional properties that enable them to meet the needs of the modern industry. This reprint aims to present a collection of ideas describing recent advances in thin-film manufacturing technology, focusing on the influence of magnetron sputtering modification on the film synthesis conditions, parameters, and properties of the films that are produced.
Advanced Strategies in Thin Film Engineering by Magnetron Sputtering by Alberto Palmero ,Nicolas Martin Pdf
Recent years have witnessed the flourishing of numerous novel strategies based on the magnetron sputtering technique aimed at the advanced engineering of thin films, such as HiPIMS, combined vacuum processes, the implementation of complex precursor gases or the inclusion of particle guns in the reactor, among others. At the forefront of these approaches, investigations focused on nanostructured coatings appear today as one of the priorities in many scientific and technological communities: The science behind them appears in most of the cases as a "terra incognita", fascinating both the fundamentalist, who imagines new concepts, and the experimenter, who is able to create and study new films with as of yet unprecedented performances. These scientific and technological challenges, along with the existence of numerous scientific issues that have yet to be clarified in classical magnetron sputtering depositions (e.g., process control and stability, nanostructuration mechanisms, connection between film morphology and properties or upscaling procedures from the laboratory to industrial scales) have motivated us to edit a specialized volume containing the state-of-the art that put together these innovative fundamental and applied research topics. These include, but are not limited to: • Nanostructure-related properties; • Atomistic processes during film growth; • Process control, process stability, and in situ diagnostics; • Fundamentals and applications of HiPIMS; • Thin film nanostructuration phenomena; • Tribological, anticorrosion, and mechanical properties; • Combined procedures based on the magnetron sputtering technique; • Industrial applications; • Devices.
Advanced Strategies in Thin Film Engineering by Magnetron Sputtering by Alberto Palmero ,Nicolas Martin Pdf
Recent years have witnessed the flourishing of numerous novel strategies based on the magnetron sputtering technique aimed at the advanced engineering of thin films, such as HiPIMS, combined vacuum processes, the implementation of complex precursor gases or the inclusion of particle guns in the reactor, among others. At the forefront of these approaches, investigations focused on nanostructured coatings appear today as one of the priorities in many scientific and technological communities: The science behind them appears in most of the cases as a "terra incognita", fascinating both the fundamentalist, who imagines new concepts, and the experimenter, who is able to create and study new films with as of yet unprecedented performances. These scientific and technological challenges, along with the existence of numerous scientific issues that have yet to be clarified in classical magnetron sputtering depositions (e.g., process control and stability, nanostructuration mechanisms, connection between film morphology and properties or upscaling procedures from the laboratory to industrial scales) have motivated us to edit a specialized volume containing the state-of-the art that put together these innovative fundamental and applied research topics. These include, but are not limited to: • Nanostructure-related properties; • Atomistic processes during film growth; • Process control, process stability, and in situ diagnostics; • Fundamentals and applications of HiPIMS; • Thin film nanostructuration phenomena; • Tribological, anticorrosion, and mechanical properties; • Combined procedures based on the magnetron sputtering technique; • Industrial applications; • Devices.
Functional Thin Films Technology by Sam Zhang,Jyh-Ming Ting,Wan-Yu Wu Pdf
Functional Thin Films Technology features the functional aspects of thin films, such as their application in solar selective absorbers, fiber lasers, solid oxide fuel cells, piezo-related areas, catalysts, superhydrophobicity, semiconductors, and trace pesticides detection. It highlights developments and advances in the preparation, characterization, and applications of functional micro-/nano-scaled films and coatings. This book Presents technologies aimed at functionality used in nanoelectronics, solar selective absorbers, solid oxide fuel cells, piezo-applications, and sensors Covers absorbers, catalysts, anodic aluminum oxide, superhydrophobics, and semiconductor devices Features a chapter on transport phenomena associated to structures Discusses transport phenomena and material informatics This second volume in the two-volume set, Protective Thin Coatings and Functional Thin Films Technology, will benefit industry professionals and researchers working in areas related to semiconductors, optoelectronics, plasma technology, solid-state energy storages, and 5G, as well as advanced students studying electrical, mechanical, chemical, and materials engineering.
Thin Film Coatings by Fredrick Madaraka Mwema,Tien-Chien Jen,Lin Zhu Pdf
Thin Film Coatings: Properties, Deposition, and Applications discusses the holistic subject of conventional and emerging thin film technologies without bias to a specific technology based on the existing literature. It covers properties and delves into the various methods of thin film deposition, including the most recent techniques and a direction for future developments. It also discusses the cutting-edge applications of thin film coatings such as self-healing and smart coatings, biomedical, hybrid, and scalable thin films. Finally, the concept of Industry 4.0 in thin film coating technology is examined. This book: Explores a wide range and is not specific to material and method of deposition Demonstrates the application of thin film coatings in nearly all sectors, such as energy and anti-microbial applications Details the preparation and properties of hybrid and scalable (ultra) thin materials for advanced applications Provides detailed bibliometric analyses on applications of thin film coatings Discusses Industry 4.0 and 3D printing in thin film technology With its broad coverage, this comprehensive reference will appeal to a wide audience of materials scientists and engineers and others studying and developing advanced thin film technologies.
Advanced Strategies in Thin Film Engineering by Magnetron Sputtering by Alberto Palmero,Nicolas Martin Pdf
Recent years have witnessed the flourishing of numerous novel strategies based on the magnetron sputtering technique aimed at the advanced engineering of thin films, such as HiPIMS, combined vacuum processes, the implementation of complex precursor gases or the inclusion of particle guns in the reactor, among others. At the forefront of these approaches, investigations focused on nanostructured coatings appear today as one of the priorities in many scientific and technological communities: The science behind them appears in most of the cases as a "terra incognita", fascinating both the fundamentalist, who imagines new concepts, and the experimenter, who is able to create and study new films with as of yet unprecedented performances. These scientific and technological challenges, along with the existence of numerous scientific issues that have yet to be clarified in classical magnetron sputtering depositions (e.g., process control and stability, nanostructuration mechanisms, connection between film morphology and properties or upscaling procedures from the laboratory to industrial scales) have motivated us to edit a specialized volume containing the state-of-the art that put together these innovative fundamental and applied research topics. These include, but are not limited to: • Nanostructure-related properties; • Atomistic processes during film growth; • Process control, process stability, and in situ diagnostics; • Fundamentals and applications of HiPIMS; • Thin film nanostructuration phenomena; • Tribological, anticorrosion, and mechanical properties; • Combined procedures based on the magnetron sputtering technique; • Industrial applications; • Devices.
Advances in Thin Films, Nanostructured Materials, and Coatings by Alexander D. Pogrebnjak,Valentine Novosad Pdf
This book highlights the latest advances in chemical and physical methods for thin-film deposition and surface engineering, including ion- and plasma-assisted processes, focusing on explaining the synthesis/processing–structure–properties relationship for a variety of thin-film systems. It covers topics such as advances in thin-film synthesis; new thin-film materials: diamond-like films, granular alloys, high-entropy alloys, oxynitrides, and intermetallic compounds; ultra-hard, wear- and oxidation-resistant and multifunctional coatings; superconducting, magnetic, semiconducting, and dielectric films; electrochemical and electroless depositions; thin-film characterization and instrumentation; and industrial applications.
Sputtering Materials for VLSI and Thin Film Devices by Jaydeep Sarkar Pdf
An important resource for students, engineers and researchers working in the area of thin film deposition using physical vapor deposition (e.g. sputtering) for semiconductor, liquid crystal displays, high density recording media and photovoltaic device (e.g. thin film solar cell) manufacturing. This book also reviews microelectronics industry topics such as history of inventions and technology trends, recent developments in sputtering technologies, manufacturing steps that require sputtering of thin films, the properties of thin films and the role of sputtering target performance on overall productivity of various processes. Two unique chapters of this book deal with productivity and troubleshooting issues. The content of the book has been divided into two sections: (a) the first section (Chapter 1 to Chapter 3) has been prepared for the readers from a range of disciplines (e.g. electrical, chemical, chemistry, physics) trying to get an insight into use of sputtered films in various devices (e.g. semiconductor, display, photovoltaic, data storage), basic of sputtering and performance of sputtering target in relation to productivity, and (b) the second section (Chapter 4 to Chapter 8) has been prepared for readers who already have background knowledge of sputter deposition of thin films, materials science principles and interested in the details of sputtering target manufacturing methods, sputtering behavior and thin film properties specific to semiconductor, liquid crystal display, photovoltaic and magnetic data storage applications. In Chapters 5 to 8, a general structure has been used, i.e. a description of the applications of sputtered thin films, sputtering target manufacturing methods (including flow charts), sputtering behavior of targets (e.g. current - voltage relationship, deposition rate) and thin film properties (e.g. microstructure, stresses, electrical properties, in-film particles). While discussing these topics, attempts have been made to include examples from the actual commercial processes to highlight the increased complexity of the commercial processes with the growth of advanced technologies. In addition to personnel working in industry setting, university researchers with advanced knowledge of sputtering would also find discussion of such topics (e.g. attributes of target design, chamber design, target microstructure, sputter surface characteristics, various troubleshooting issues) useful. . Unique coverage of sputtering target manufacturing methods in the light of semiconductor, displays, data storage and photovoltaic industry requirements Practical information on technology trends, role of sputtering and major OEMs Discussion on properties of a wide variety of thin films which include silicides, conductors, diffusion barriers, transparent conducting oxides, magnetic films etc. Practical case-studies on target performance and troubleshooting Essential technological information for students, engineers and scientists working in the semiconductor, display, data storage and photovoltaic industry
Thin Film Materials Technology by Kiyotaka Wasa,Makoto Kitabatake,Hideaki Adachi Pdf
An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering.
Coatings and Thin-Film Technologies by Jaime Andres Perez Taborda,Alba Avila Pdf
The field of coatings and thin-film technologies is rapidly advancing to keep up with new uses for semiconductor, optical, tribological, thermoelectric, solar, security, and smart sensing applications, among others. In this sense, thin-film coatings and structures are increasingly sophisticated with more specific properties, new geometries, large areas, the use of heterogeneous materials and flexible and rigid coating substrates to produce thin-film structures with improved performance and properties in response to new challenges that the industry presents. This book aims to provide the reader with a complete overview of the current state of applications and developments in thin-film technology, discussing applications, health and safety in thin films, and presenting reviews and experimental results of recognized experts in the area of coatings and thin-film technologies.
Author : Peter M. Martin Publisher : William Andrew Page : 932 pages File Size : 48,8 Mb Release : 2009-12-01 Category : Technology & Engineering ISBN : 9780815520320
Handbook of Deposition Technologies for Films and Coatings by Peter M. Martin Pdf
This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thin films, polymer thin films and emerging technologies. Extensive material was added throughout the book, especially in the areas concerned with plasma-assisted vapor deposition processes and metallurgical coating applications.
Recent Advances in Thin Films by Sushil Kumar,D. K. Aswal Pdf
This volume comprises the expert contributions from the invited speakers at the 17th International Conference on Thin Films (ICTF 2017), held at CSIR-NPL, New Delhi, India. Thin film research has become increasingly important over the last few decades owing to the applications in latest technologies and devices. The book focuses on current advances in thin film deposition processes and characterization including thin film measurements. The chapters cover different types of thin films like metal, dielectric, organic and inorganic, and their diverse applications across transistors, resistors, capacitors, memory elements for computers, optical filters and mirrors, sensors, solar cells, LED's, transparent conducting coatings for liquid crystal display, printed circuit board, and automobile headlamp covers. This book can be a useful reference for students, researchers as well as industry professionals by providing an up-to-date knowledge on thin films and coatings.
Recent Advances in Thin Film Photovoltaics by Udai P. Singh,Nandu B. Chaure Pdf
This book provides recent development in thin-film solar cells (TFSC). TFSC have proven the promising approach for terrestrial and space photovoltaics. TFSC have the potential to change the device design and produce high efficiency devices on rigid/flexible substrates with significantly low manufacturing cost. TFSC have several advantages in manufacturing compared to traditional crystalline Si-solar cells like less requirement of materials, can be prepared with earth’s abundant materials, less processing steps, easy to dispose, etc. Several universities/research institutes/industry in India and abroad are involved in the research area of thin-film solar cells. The book helps the readers to find the details about different thin-film technologies and its advancement at one place. Each chapter covers properties of materials, its suitability for PV applications, simple manufacturing processes and recent and past literature survey. The issues related to the development of high efficiency TFSC devices over large area and its commercial and future prospects are discussed.
Advanced Material Science and Technology by Yi Tan,Dong Ying Ju Pdf
Selected, peer reviewed papers from the 7th International Forum on Advanced Material Science and Technology (IFAMST-7), June 26-28, 2010, Dalian, China
Wavelength Filters in Fibre Optics by Herbert Venghaus Pdf
This is the first book dedicated to wavelength filters for fibre optics. It provides a comprehensive account of the principles and applications of such filters, including their technological realizations. It explains the relevant performance parameters, the particular advantages and shortcomings of the various concepts and components, and the preferred applications. There is also in-depth information on the characteristics of commercially available devices.
