Handbook Of Semiconductor Technology Processing Of Semiconductors

Author : Kenneth A. Jackson,Wolfgang Schröter
Publisher : Wiley-VCH
Page : 724 pages
File Size : 49,5 Mb
Release : 2000-08-15
Category : Medical
ISBN : UCSD:31822029744489

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Handbook of Semiconductor Technology, Volume 2 by Kenneth A. Jackson,Wolfgang Schröter Pdf

Semiconductor technology is the basis of today's microelectronics industry with its many impacts on our modern life, i.e. computer and communication technology. This two-volume handbook covers the basics of semiconductor processing technology, which are as essential for the design of new microelectronic devices as the fundamental physics. Volume 1 'Electronic Structure and Properties' covers the structure and properties of semiconductors, with particular emphasis on concepts relevant to semiconductor technology. Volume 2 'Processing of Semiconductors' deals with the enabling materials technology for the electronics industry. World-renowned authors have contributed to this unique treatment of the processing of semiconductors and related technologies. Of interest to physicists and engineers in research and in the electronics industry, this is a valuable reference source and state-of-the-art review by the world's top authors.

Author : Anonim
Publisher : Unknown
Page : 726 pages
File Size : 53,9 Mb
Release : 2000
Category : Semiconductors
ISBN : UOM:39015050123200

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Handbook of Semiconductor Technology: Processing of semiconductors by Anonim Pdf

Author : Yoshio Nishi,Robert Doering
Publisher : CRC Press
Page : 1720 pages
File Size : 55,7 Mb
Release : 2017-12-19
Category : Technology & Engineering
ISBN : 9781420017663

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Handbook of Semiconductor Manufacturing Technology by Yoshio Nishi,Robert Doering Pdf

Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on... Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.

Author : Kenneth A. Jackson,Wolfgang Schröter
Publisher : Wiley-VCH
Page : 1556 pages
File Size : 51,7 Mb
Release : 2000-10-10
Category : Technology & Engineering
ISBN : 352729970X

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Handbook of Semiconductor Technology, 2 Volume Set by Kenneth A. Jackson,Wolfgang Schröter Pdf

Semiconductor technology is the basis of today's microelectronics industry with its many impacts on our modern life, i.e. computer and communication technology. This two-volume handbook covers the basics of semiconductor processing technology, which are as essential for the design of new microelectronic devices as the fundamental physics. Volume 1 'Electronic Structure and Properties' covers the structure and properties of semiconductors, with particular emphasis on concepts relevant to semiconductor technology. Volume 2 'Processing of Semiconductors' deals with the enabling materials technology for the electronics industry. World-renowned authors have contributed to this unique treatment of the processing of semiconductors and related technologies. Of interest to physicists and engineers in research and in the electronics industry, this is a valuable reference source and state-of-the-art review by the world's top authors.

Author : William C. O'Mara,Robert B. Herring,Lee Philip Hunt
Publisher : William Andrew
Page : 826 pages
File Size : 51,5 Mb
Release : 1990-12-31
Category : Science
ISBN : UOM:39015018468192

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Handbook of Semiconductor Silicon Technology by William C. O'Mara,Robert B. Herring,Lee Philip Hunt Pdf

A summary of the science, technology, and manufacturing of semiconductor silicon materials. Properties of silicon are detailed, and a set of silicon binary phase diagrams is included. Other aspects such as materials handling, safety, impurity, and defect reduction are also discussed.

Author : Richard A. Blanchard,O. D. Trapp
Publisher : Unknown
Page : 128 pages
File Size : 53,6 Mb
Release : 1992
Category : Semiconductors
ISBN : OCLC:182873541

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Semiconductor Technology Handbook by Richard A. Blanchard,O. D. Trapp Pdf

Author : Gary S. May,Costas J. Spanos
Publisher : John Wiley & Sons
Page : 428 pages
File Size : 41,5 Mb
Release : 2006-05-26
Category : Technology & Engineering
ISBN : 9780471790273

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Fundamentals of Semiconductor Manufacturing and Process Control by Gary S. May,Costas J. Spanos Pdf

A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.

Author : Hwaiyu Geng
Publisher : McGraw Hill Professional
Page : 915 pages
File Size : 46,5 Mb
Release : 2005-05-18
Category : Technology & Engineering
ISBN : 9780071445597

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Semiconductor Manufacturing Handbook by Hwaiyu Geng Pdf

WORLD-CLASS SEMICONDUCTOR MANUFACTURING EXPERTISE AT YOUR FINGERTIPS This is a comprehensive reference to the semiconductor manufacturing process and ancillary facilities -- from raw material preparation to packaging and testing, applying basics to emerging technologies. Readers charged with optimizing the design and performance of manufacturing processes will find all the information necessary to produce the highest quality chips at the lowest price in the shortest time possible. The Semiconductor Manufacturing Handbook provides leading-edge information on semiconductor wafer processes, MEMS, nanotechnology, and FPD, plus the latest manufacturing and automation technologies, including: Yield Management Automated Material Handling System Fab and Cleanroom Design and Operation Gas Abatement and Waste Treatment Management And much more Written by 60 international experts, and peer reviewed by a seasoned advisory board, this handbook covers the fundamentals of relevant technology and its real-life application and operational considerations for planning, implementing, and controlling manufacturing processes. It includes hundreds of detailed illustrations and a list of relevant books, technical papers, and websites for further research. This inclusive, wide-ranging coverage makes the Semiconductor Manufacturing Handbook the most comprehensive single-volume reference ever published in the field. STATE-OF-THE-ART SEMICONDUCTOR TECHNOLOGIES AND MANUFACTURING PROCESSES: SEMICONDUCTOR FUNDAMENTALS How Chips Are Designed and Made * Substrates * Copper and Low-k Dielectrics * Silicide Formation * Plasma * Vacuum * Photomask WAFER PROCESSING TECHNOLOGIES Microlithography * Ion Implantation * Etch * PVD/ALD * CVD * ECD * Epitaxy * CMP * Wet Cleaning FINAL MANUFACTURING Packaging * Grinding, Stress Relief, Dicing * Inspection, Measurement, and Testing NANOTECHNOLOGY, MEMS, AND FPD GAS AND CHEMICALS Specialty Gas System and DCA * Gas Abatement Systems * Chemical and Slurries Delivery System * Ultra Pure Water FAB YIELD, OPERATIONS, AND FACILITIES Yield Management * Automated Materials Handling System * Metrology * Six Sigma * Advanced Process Control * EHS * Fab Design and Construction * Cleanroom * Vibration and Acoustic Control * ESD * Airborne Molecular Control * Particle Monitoring * Wastewater Neutralization Systems

Author : Peter Van Zant
Publisher : McGraw-Hill Companies
Page : 656 pages
File Size : 40,5 Mb
Release : 1997
Category : Technology & Engineering
ISBN : UOM:39015038126200

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Microchip Fabrication by Peter Van Zant Pdf

s an easy-to-follow introduction to semiconductor fabrication that proceeds from basic materials and process chemicals to chip packaging procedures. New methods and data related to packaging, memory circuits, and semiconductor devices are key updates in this new edition.

Author : Badih El-Kareh,Lou N. Hutter
Publisher : Springer Science & Business Media
Page : 605 pages
File Size : 43,5 Mb
Release : 2012-12-06
Category : Technology & Engineering
ISBN : 9781461522096

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Fundamentals of Semiconductor Processing Technology by Badih El-Kareh,Lou N. Hutter Pdf

The drive toward new semiconductor technologies is intricately related to market demands for cheaper, smaller, faster, and more reliable circuits with lower power consumption. The development of new processing tools and technologies is aimed at optimizing one or more of these requirements. This goal can, however, only be achieved by a concerted effort between scientists, engineers, technicians, and operators in research, development, and manufac turing. It is therefore important that experts in specific disciplines, such as device and circuit design, understand the principle, capabil ities, and limitations of tools and processing technologies. It is also important that those working on specific unit processes, such as lithography or hot processes, be familiar with other unit processes used to manufacture the product. Several excellent books have been published on the subject of process technologies. These texts, however, cover subjects in too much detail, or do not cover topics important to modem tech nologies. This book is written with the need for a "bridge" between different disciplines in mind. It is intended to present to engineers and scientists those parts of modem processing technologies that are of greatest importance to the design and manufacture of semi conductor circuits. The material is presented with sufficient detail to understand and analyze interactions between processing and other semiconductor disciplines, such as design of devices and cir cuits, their electrical parameters, reliability, and yield.

Author : Geraldine Cogin Shwartz
Publisher : CRC Press
Page : 598 pages
File Size : 41,9 Mb
Release : 1997-11-24
Category : Technology & Engineering
ISBN : 0849384664

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Handbook of Semiconductor Interconnection Technology by Geraldine Cogin Shwartz Pdf

Covering materials, processes, equipment, methodologies, characterization techniques, clean room practices, and ways to control contamination-related defects, this work offers up-to-date information on the application of interconnection technology to semiconductors. It offers an integration of technical, patent and industry literature.

Author : Jerzy Ruzyllo
Publisher : World Scientific
Page : 298 pages
File Size : 48,8 Mb
Release : 2020-03-10
Category : Technology & Engineering
ISBN : 9789811216015

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Guide To Semiconductor Engineering by Jerzy Ruzyllo Pdf

The Guide to Semiconductor Engineering is concerned with semiconductor materials, devices and process technologies which in combination constitute an enabling force behind the growth of our technical civilization. This book was conceived and written keeping in mind those who need to learn about semiconductors, who are professionally associated with select aspects of this technical domain and want to see it in a broader context, or for those who are simply interested in state-of-the-art semiconductor engineering. In its coverage of semiconductor properties, materials, devices, manufacturing technology, and characterization methods, this Guide departs from textbook-style, monothematic in-depth discussions of each topic. Instead, it considers the entire broad field of semiconductor technology and identifies synergistic interactions within various areas in one concise volume. It is a holistic approach to the coverage of semiconductor engineering which distinguishes this Guide among other books concerned with semiconductors related issues.

Author : Paul H. Holloway,Gary E. McGuire
Publisher : Cambridge University Press
Page : 937 pages
File Size : 48,6 Mb
Release : 2008-10-19
Category : Technology & Engineering
ISBN : 9780080946146

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Handbook of Compound Semiconductors by Paul H. Holloway,Gary E. McGuire Pdf

This book reviews the recent advances and current technologies used to produce microelectronic and optoelectronic devices from compound semiconductors. It provides a complete overview of the technologies necessary to grow bulk single-crystal substrates, grow hetero-or homoepitaxial films, and process advanced devices such as HBT's, QW diode lasers, etc.

Author : Gary F. McGuire
Publisher : William Andrew
Page : 0 pages
File Size : 44,6 Mb
Release : 1988-12-31
Category : Science
ISBN : 0815511507

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Semiconductor Materials and Process Technology Handbook by Gary F. McGuire Pdf

This handbook is a broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). The technology of integrated circuit (IC) processing is expanding so rapidly that it can be difficult for the scientist working in one area to keep abreast of developments in other areas of the field. This handbook solves this problem by bringing together "snapshots" of the various aspects of the technology.

Author : Chue San Yoo
Publisher : World Scientific Publishing Company
Page : 484 pages
File Size : 45,7 Mb
Release : 2008-03-03
Category : Electronic
ISBN : 9789813106710

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Semiconductor Manufacturing Technology by Chue San Yoo Pdf

This textbook contains all the materials that an engineer needs to know to start a career in the semiconductor industry. It also provides readers with essential background information for semiconductor research. It is written by a professional who has been working in the field for over two decades and teaching the material to university students for the past 15 years. It includes process knowledge from raw material preparation to the passivation of chips in a modular format.