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Author : Arnulf Röseler
Publisher : VCH
Page : 168 pages
File Size : 42,7 Mb
Release : 1990
Category : Ellipsometry
ISBN : UVA:X030143775
Author : Hiroyuki Fujiwara
Publisher : John Wiley & Sons
Page : 388 pages
File Size : 54,6 Mb
Release : 2007-09-27
Category : Technology & Engineering
ISBN : 0470060182
Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.
Author : Tino Hofmann
Publisher : Unknown
Page : 0 pages
File Size : 42,8 Mb
Release : 2004
Category : Electronic
ISBN : OCLC:635292965
Author : Pierre-Richard Dahoo,Azzedine Lakhlifi
Publisher : John Wiley & Sons
Page : 322 pages
File Size : 41,7 Mb
Release : 2021-10-26
Category : Science
ISBN : 9781786306524
This book, Volume 4 in the series, is dedicated to the relationship between laboratory spectroscopy, recording ever-more-complex spectra using increasingly powerful instruments benefiting from the latest technology, and the development of observation using instruments that are embedded in mobile probes or nanosatellites. The theoretical models described in Volumes 1, 2 and 3 are used in this volume, applying the cumulant theorem in the mean-field theory framework to interpret the near and mid-infrared spectra of symmetric top molecules, such as ammonia (NH3) and spherical molecules, such as methane (CH4). These molecules can be isolated in their gaseous form or subjected to the environmental constraints of a nano-cage (a substitution site, clathrate, fullerene or zeolite) or surfaces. These methods are not only valuable in the fields of environmental sciences, planetology and astrophysics, but also fit into the framework of data processing and the concept of Big Data.
Author : Karsten Hinrichs,Klaus-Jochen Eichhorn
Publisher : Springer Science & Business Media
Page : 369 pages
File Size : 46,9 Mb
Release : 2013-10-24
Category : Science
ISBN : 9783642401282
Ellipsometry is the method of choice to determine the properties of surfaces and thin films. It provides comprehensive and sensitive characterization in contactless and non-invasive measurements. This book gives a state-of-the-art survey of ellipsometric investigations of organic films and surfaces, from laboratory to synchrotron applications, with a special focus on in-situ use in processing environments and at solid-liquid interfaces. In conjunction with the development of functional organic, meta- and hybrid materials for new optical, electronic, sensing and biotechnological devices and fabrication advances, the ellipsometric analysis of their optical and material properties has progressed rapidly in the recent years.
Author : Mathias Schubert
Publisher : Springer Science & Business Media
Page : 216 pages
File Size : 52,8 Mb
Release : 2004-11-26
Category : Science
ISBN : 3540232494
The study of semiconductor-layer structures using infrared ellipsometry is a rapidly growing field within optical spectroscopy. This book offers basic insights into the concepts of phonons, plasmons and polaritons, and the infrared dielectric function of semiconductors in layered structures. It describes how strain, composition, and the state of the atomic order within complex layer structures of multinary alloys can be determined from an infrared ellipsometry examination. Special emphasis is given to free-charge-carrier properties, and magneto-optical effects. A broad range of experimental examples are described, including multinary alloys of zincblende and wurtzite structure semiconductor materials, and future applications such as organic layer structures and highly correlated electron systems are proposed.
Author : Andrew T. S. Wee,Xinmao Yin,Chi Sin Tang
Publisher : John Wiley & Sons
Page : 213 pages
File Size : 50,7 Mb
Release : 2022-03-08
Category : Technology & Engineering
ISBN : 9783527833955
A one-of-a-kind text offering an introduction to the use of spectroscopic ellipsometry for novel material characterization In Introduction to Spectroscopic Ellipsometry of Thin Film Materials: Instrumentation, Data Analysis and Applications, a team of eminent researchers delivers an incisive exploration of how the traditional experimental technique of spectroscopic ellipsometry is used to characterize the intrinsic properties of novel materials. The book focuses on the scientifically and technologically important two-dimensional transition metal dichalcogenides (2D-TMDs), magnetic oxides like manganite materials, and unconventional superconductors, including copper oxide systems. The distinguished authors discuss the characterization of properties, like electronic structures, interfacial properties, and the consequent quasiparticle dynamics in novel quantum materials. Along with illustrative and specific case studies on how spectroscopic ellipsometry is used to study the optical and quasiparticle properties of novel systems, the book includes: Thorough introductions to the basic principles of spectroscopic ellipsometry and strongly correlated systems, including copper oxides and manganites Comprehensive explorations of two-dimensional transition metal dichalcogenides Practical discussions of single layer graphene systems and nickelate systems In-depth examinations of potential future developments and applications of spectroscopic ellipsometry Perfect for master’s- and PhD-level students in physics and chemistry, Introduction to Spectroscopic Ellipsometry of Thin Film Materials will also earn a place in the libraries of those studying materials science seeking a one-stop reference for the applications of spectroscopic ellipsometry to novel developed materials.
Author : Harland G. Tompkins,James N. Hilfiker
Publisher : Momentum Press
Page : 178 pages
File Size : 52,7 Mb
Release : 2015-12-16
Category : Technology & Engineering
ISBN : 9781606507285
Ellipsometry is an experimental technique for determining the thickness and optical properties of thin films. It is ideally suited for films ranging in thickness from sub-nanometer to several microns. Spectroscopic measurements have greatly expanded the capabilities of this technique and introduced its use into all areas where thin films are found: semiconductor devices, flat panel and mobile displays, optical coating stacks, biological and medical coatings, protective layers, and more. While several scholarly books exist on the topic, this book provides a good introduction to the basic theory of the technique and its common applications. The target audience is not the ellipsometry scholar, but process engineers and students of materials science who are experts in their own fields and wish to use ellipsometry to measure thin film properties without becoming an expert in ellipsometry itself.
Author : Maria Losurdo,Kurt Hingerl
Publisher : Springer Science & Business Media
Page : 740 pages
File Size : 46,5 Mb
Release : 2013-03-12
Category : Technology & Engineering
ISBN : 9783642339561
This book presents and introduces ellipsometry in nanoscience and nanotechnology making a bridge between the classical and nanoscale optical behaviour of materials. It delineates the role of the non-destructive and non-invasive optical diagnostics of ellipsometry in improving science and technology of nanomaterials and related processes by illustrating its exploitation, ranging from fundamental studies of the physics and chemistry of nanostructures to the ultimate goal of turnkey manufacturing control. This book is written for a broad readership: materials scientists, researchers, engineers, as well as students and nanotechnology operators who want to deepen their knowledge about both basics and applications of ellipsometry to nanoscale phenomena. It starts as a general introduction for people curious to enter the fields of ellipsometry and polarimetry applied to nanomaterials and progresses to articles by experts on specific fields that span from plasmonics, optics, to semiconductors and flexible electronics. The core belief reflected in this book is that ellipsometry applied at the nanoscale offers new ways of addressing many current needs. The book also explores forward-looking potential applications.
Author : Valeri P. Tolstoy,Irina Chernyshova,Valeri A. Skryshevsky
Publisher : John Wiley & Sons
Page : 710 pages
File Size : 45,9 Mb
Release : 2003-07-21
Category : Technology & Engineering
ISBN : 9780471461838
Because of the rapid increase in commercially available Fouriertransform infrared spectrometers and computers over the past tenyears, it has now become feasible to use IR spectrometry tocharacterize very thin films at extended interfaces. At the sametime, interest in thin films has grown tremendously because ofapplications in microelectronics, sensors, catalysis, andnanotechnology. The Handbook of Infrared Spectroscopy of UltrathinFilms provides a practical guide to experimental methods,up-to-date theory, and considerable reference data, critical forscientists who want to measure and interpret IR spectra ofultrathin films. This authoritative volume also: Offers informationneeded to effectively apply IR spectroscopy to the analysis andevaluation of thin and ultrathin films on flat and rough surfacesand on powders at solid-gaseous, solid-liquid, liquid-gaseous,liquid-liquid, and solid-solid interfaces. Provides full discussion of theory underlying techniques Describes experimental methods in detail, including optimumconditions for recording spectra and the interpretation ofspectra Gives detailed information on equipment, accessories, andtechniques Provides IR spectroscopic data tables as appendixes, includingthe first compilation of published data on longitudinal frequenciesof different substances Covers new approaches, such as Surface Enhanced IR spectroscopy(SEIR), time-resolved FTIR spectroscopy, high-resolutionmicrospectroscopy and using synchotron radiation
Author : Alessio Innocenti,Norlida Kamarulzaman
Publisher : BoD – Books on Demand
Page : 452 pages
File Size : 53,7 Mb
Release : 2012-04-11
Category : Technology & Engineering
ISBN : 9789535105121
The aim of this book is to provide an overview on the importance of stoichiometry in the materials science field. It presents a collection of selected research articles and reviews providing up-to-date information related to stoichiometry at various levels. Being materials science an interdisciplinary area, the book has been divided in multiple sections, each for a specific field of applications. The first two sections introduce the role of stoichiometry in nanotechnology and defect chemistry, providing examples of state-of-the-art technologies. Section three and four are focused on intermetallic compounds and metal oxides. Section five describes the importance of stoichiometry in electrochemical applications. In section six new strategies for solid phase synthesis are reported, while a cross sectional approach to the influence of stoichiometry in energy production is the topic of the last section. Though specifically addressed to readers with a background in physical science, I believe this book will be of interest to researchers working in materials science, engineering and technology.
Author : Andrew Thye Shen Wee,Xinmao Yin,Chi Sin Tang
Publisher : John Wiley & Sons
Page : 213 pages
File Size : 49,8 Mb
Release : 2022-04-11
Category : Technology & Engineering
ISBN : 9783527349517
A one-of-a-kind text offering an introduction to the use of spectroscopic ellipsometry for novel material characterization In Introduction to Spectroscopic Ellipsometry of Thin Film Materials: Instrumentation, Data Analysis and Applications, a team of eminent researchers delivers an incisive exploration of how the traditional experimental technique of spectroscopic ellipsometry is used to characterize the intrinsic properties of novel materials. The book focuses on the scientifically and technologically important two-dimensional transition metal dichalcogenides (2D-TMDs), magnetic oxides like manganite materials, and unconventional superconductors, including copper oxide systems. The distinguished authors discuss the characterization of properties, like electronic structures, interfacial properties, and the consequent quasiparticle dynamics in novel quantum materials. Along with illustrative and specific case studies on how spectroscopic ellipsometry is used to study the optical and quasiparticle properties of novel systems, the book includes: Thorough introductions to the basic principles of spectroscopic ellipsometry and strongly correlated systems, including copper oxides and manganites Comprehensive explorations of two-dimensional transition metal dichalcogenides Practical discussions of single layer graphene systems and nickelate systems In-depth examinations of potential future developments and applications of spectroscopic ellipsometry Perfect for master’s- and PhD-level students in physics and chemistry, Introduction to Spectroscopic Ellipsometry of Thin Film Materials will also earn a place in the libraries of those studying materials science seeking a one-stop reference for the applications of spectroscopic ellipsometry to novel developed materials.
Author : Karsten Hinrichs,Klaus-Jochen Eichhorn
Publisher : Springer
Page : 547 pages
File Size : 48,9 Mb
Release : 2018-05-06
Category : Science
ISBN : 9783319758954
This new edition provides a state-of-the-art survey of ellipsometric methods used to study organic films and surfaces, from laboratory to synchrotron applications, with a special focus on in-situ use in processing environments and at solid-liquid interfaces. Thanks to the development of functional organic, meta- and hybrid materials for new optical, electronic, sensing and biotechnological devices, the ellipsometric analysis of optical and material properties has made tremendous strides over the past few years. The second edition has been updated to reflect the latest advances in ellipsometric methods. The new content focuses on the study of anisotropic materials, conjugated polymers, polarons, self-assembled monolayers, industrial membranes, adsorption of proteins, enzymes and RGD-peptides, as well as the correlation of ellipsometric spectra to structure and molecular interactions.
Author : Vladimir G. Bordo,Horst-Günter Rubahn
Publisher : John Wiley & Sons
Page : 281 pages
File Size : 43,8 Mb
Release : 2008-07-11
Category : Science
ISBN : 9783527618705
This book covers linear and nonlinear optics as well as optical spectroscopy at solid surfaces and at interfaces between a solid and a liquid or gas. The authors give a concise introduction to the physics of surfaces and interfaces. They discuss in detail physical properties of solid surfaces and of their interfaces to liquids and gases and provide the theoretical background for understanding various optical techniques. The major part of the book is dedicated to a broad review on optical techniques and topical applications such as infrared and optical spectroscopy or optical microscopy. Discussions of nonlinear optics, but also nano-optics and local spectroscopy complement this self-contained work. Helpful features include about 50 problems with solutions, a glossary and a thoroughly elaborated list of topical references. The book is suited as a text for graduate students but also for scientists working in physics, chemistry, materials or life sciences who look for an expert introduction to surface optical aspects of their studies.
Author : Anonim
Publisher : Cuvillier Verlag
Page : 164 pages
File Size : 52,8 Mb
Release : 2006-02-01
Category : Science
ISBN : 9783736917965
In this dissertation, we investigated ZnSe-based materials, which are interesting for a variety of potential applications in various devices. There was only limited information available in the literature about Zn1-xMnxSe material parameters like the electron effective mass and transport properties. In this work, we explored many new details about this interesting material using Fourier transform infrared spectroscopy and some other experimental techniques. The fundamental aspects related to lattice vibrations in mixed crystal alloys and reststrahlen band were also studied. In summary the following results have been obtained in this thesis: (A) Results from the series of chlorine-doped Zn1-xMnxSe samples: To extract information about the electron effective mass we performed roomtemperature plasma edge measurements on chlorine-doped n-type Zn1-xMnxSe epilayers. Via Drude-Lorentz-type multi-oscillator fits to our data, we extracted the optical electron effective mass (m*) in chlorine doped Zn1-xMnxSe:Cl samples for different Mn contents and free-electron concentrations. The free-electron concentration was determined using room-temperature van-der-Pauw Hall effect measurements. Our results indicate that: (A1) The electron effective mass in Zn1-xMnxSe is lower than that for ZnSe. A distinct reduction of the electron effective mass is observed upon Mn incorporation.