Mems Resonator Filters

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MEMS Resonator Filters

Author : Rajendra M. Patrikar
Publisher : Institution of Engineering and Technology
Page : 439 pages
File Size : 45,6 Mb
Release : 2020-06-15
Category : Technology & Engineering
ISBN : 9781785618963

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MEMS Resonator Filters by Rajendra M. Patrikar Pdf

The use of MEMS resonators for signal processing is relatively new and has the potential to change the topology of newer generation circuits. New materials, design and fabrication processes, and integration with conventional circuitry will need to be considered. This book explores the challenges and opportunities of developing circuits with MEMS resonator filters. The replacement of classical electrical components with electromechanical components is explored in this book, and the specific properties of MEMS resonators required in various frequency ranges are discussed. Materials and their selection, CAD tools for system design and the integration of MEMS with CMOS circuitry, and the design, fabrication, testing and packaging of MEMS filters themselves are addressed in detail. Case studies where resonator MEMS have been used as components have been included to encourage readers to consider the practical applications of this technology. MEMS Resonator Filters is essential reading for the analogue circuit designer community, particularly those who are designing circuits for wireless communications, and CMOS technology researchers and engineers who are involved in the fabrication of circuits. Designers of sensors and interfacing circuits will also be interested since resonators are also being used as sensors.

Piezoelectric MEMS Resonators

Author : Harmeet Bhugra,Gianluca Piazza
Publisher : Springer
Page : 424 pages
File Size : 54,6 Mb
Release : 2017-01-09
Category : Technology & Engineering
ISBN : 9783319286884

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Piezoelectric MEMS Resonators by Harmeet Bhugra,Gianluca Piazza Pdf

This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.

Microwave Filters for Communication Systems

Author : Richard J. Cameron,Chandra M. Kudsia,Raafat R. Mansour
Publisher : John Wiley & Sons
Page : 928 pages
File Size : 47,8 Mb
Release : 2018-04-03
Category : Technology & Engineering
ISBN : 9781119292395

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Microwave Filters for Communication Systems by Richard J. Cameron,Chandra M. Kudsia,Raafat R. Mansour Pdf

An in-depth look at the state-of-the-art in microwave filter design, implementation, and optimization Thoroughly revised and expanded, this second edition of the popular reference addresses the many important advances that have taken place in the field since the publication of the first edition and includes new chapters on Multiband Filters, Tunable Filters and a chapter devoted to Practical Considerations and Examples. One of the chief constraints in the evolution of wireless communication systems is the scarcity of the available frequency spectrum, thus making frequency spectrum a primary resource to be judiciously shared and optimally utilized. This fundamental limitation, along with atmospheric conditions and interference have long been drivers of intense research and development in the fields of signal processing and filter networks, the two technologies that govern the information capacity of a given frequency spectrum. Written by distinguished experts with a combined century of industrial and academic experience in the field, Microwave Filters for Communication Systems: Provides a coherent, accessible description of system requirements and constraints for microwave filters Covers fundamental considerations in the theory and design of microwave filters and the use of EM techniques to analyze and optimize filter structures Chapters on Multiband Filters and Tunable Filters address the new markets emerging for wireless communication systems and flexible satellite payloads and A chapter devoted to real-world examples and exercises that allow readers to test and fine-tune their grasp of the material covered in various chapters, in effect it provides the roadmap to develop a software laboratory, to analyze, design, and perform system level tradeoffs including EM based tolerance and sensitivity analysis for microwave filters and multiplexers for practical applications. Microwave Filters for Communication Systems provides students and practitioners alike with a solid grounding in the theoretical underpinnings of practical microwave filter and its physical realization using state-of-the-art EM-based techniques.

Resonant MEMS

Author : Oliver Brand,Isabelle Dufour,Stephen Heinrich,Fabien Josse
Publisher : John Wiley & Sons
Page : 512 pages
File Size : 55,8 Mb
Release : 2015-06-08
Category : Technology & Engineering
ISBN : 9783527335459

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Resonant MEMS by Oliver Brand,Isabelle Dufour,Stephen Heinrich,Fabien Josse Pdf

Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

Acoustic Wave and Electromechanical Resonators

Author : Humberto Campanella
Publisher : Artech House
Page : 364 pages
File Size : 47,7 Mb
Release : 2010
Category : Technology & Engineering
ISBN : 9781607839781

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Acoustic Wave and Electromechanical Resonators by Humberto Campanella Pdf

This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensing and RF systems. Moreover, this one-stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping you to choose the right approaches for your projects. Over 280 illustrations and more than 130 equations support key topics throughout the book.

MEMS

Author : Vikas Choudhary,Krzysztof Iniewski
Publisher : CRC Press
Page : 478 pages
File Size : 53,7 Mb
Release : 2017-12-19
Category : Medical
ISBN : 9781466515826

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MEMS by Vikas Choudhary,Krzysztof Iniewski Pdf

The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world. The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including: Thin-film integrated passives as an alternative to discrete passives The possibility of piezoelectric MEMS Solutions for MEMS gyroscopes Advanced interconnect technologies Ambient energy harvesting Bulk acoustic wave resonators Ultrasonic receiver arrays using MEMS sensors Optical MEMS-based spectrometers The integration of MEMS resonators with conventional circuitry A wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patterns Wireless microactuators to enable implantable MEMS devices for drug delivery MEMS technologies for tactile sensing and actuation in robotics MEMS-based micro hot-plate devices Inertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoring Sensors using passive acousto-electric devices in wired and wireless systems Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.

Electroceramic-Based MEMS

Author : Nava Setter
Publisher : Springer Science & Business Media
Page : 438 pages
File Size : 52,7 Mb
Release : 2005-03-03
Category : Technology & Engineering
ISBN : 0387233105

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Electroceramic-Based MEMS by Nava Setter Pdf

The book is focused on the use of functional oxide and nitride thin films to increase functionality and application range of MEMS (microelectromechanical systems) in the large sense, including micro-sensors, micro-actuators, and electronic components for high frequency communications. The book covers major topics and is divided into two parts (a) applications and emerging applications, and (b) materials, fabrication technologies, and functioning issues.

Microelectronics to Nanoelectronics

Author : Anupama B. Kaul
Publisher : CRC Press
Page : 464 pages
File Size : 40,5 Mb
Release : 2017-12-19
Category : Science
ISBN : 9781466509559

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Microelectronics to Nanoelectronics by Anupama B. Kaul Pdf

Composed of contributions from top experts, Microelectronics to Nanoelectronics: Materials, Devices and Manufacturability offers a detailed overview of important recent scientific and technological developments in the rapidly evolving nanoelectronics arena. Under the editorial guidance and technical expertise of noted materials scientist Anupama B. Kaul of California Institute of Technology’s Jet Propulsion Lab, this book captures the ascent of microelectronics into the nanoscale realm. It addresses a wide variety of important scientific and technological issues in nanoelectronics research and development. The book also showcases some key application areas of micro-electro-mechanical-systems (MEMS) that have reached the commercial realm. Capitalizing on Dr. Kaul’s considerable technical experience with micro- and nanotechnologies and her extensive research in prestigious academic and industrial labs, the book offers a fresh perspective on application-driven research in micro- and nanoelectronics, including MEMS. Chapters explore how rapid developments in this area are transitioning from the lab to the market, where new and exciting materials, devices, and manufacturing technologies are revolutionizing the electronics industry. Although many micro- and nanotechnologies still face major scientific and technological challenges and remain within the realm of academic research labs, rapid advances in this area have led to the recent emergence of new applications and markets. This handbook encapsulates that exciting recent progress by providing high-quality content contributed by international experts from academia, leading industrial institutions—such as Hewlett-Packard—and government laboratories including the U.S. Department of Energy’s Sandia National Laboratory. Offering something for everyone, from students to scientists to entrepreneurs, this book showcases the broad spectrum of cutting-edge technologies that show significant promise for electronics and related applications in which nanotechnology plays a key role.

Micromachined Circuits and Devices

Author : Shiban Kishen Koul,Sukomal Dey
Publisher : Springer Nature
Page : 386 pages
File Size : 55,9 Mb
Release : 2022-02-07
Category : Technology & Engineering
ISBN : 9789811694431

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Micromachined Circuits and Devices by Shiban Kishen Koul,Sukomal Dey Pdf

This book presents the design of different switching and resonant devices using the present state-of-the-art radio frequency (RF) micromachining (MEMS) technology. Different topologies of MEMS switches have been discussed considering optimum performances over microwave to millimeter wave frequency range. Wide varieties of micromachined switching networks starting from single-pole-double-throw (SPDT) to single-pole-fourteen-throw (SP14T) are discussed utilizing vertical and lateral actuation movements of the switch. Different transduction mechanisms of micromachined resonators are highlighted that includes capacitive, piezoelectric, and piezoresistive types. The book provides major design guidelines for the development of MEMS-based digital phase shifters, tunable filters, and antennas with extensive measurement data. Apart from the radio frequency (RF) requirements, an extensive guideline is given for the improvement of the reliability of micromachined switches and digital phase shifters where multiple switches are operating simultaneously. It takes multiple iterations and extensive characterizations to conclude with a reliable MEMS digital phase shifter, and these aspects are given one of the prime attentions in this book. Detailed performance analysis of metamaterial inspired MEMS switches is then discussed for application in millimeter wave frequency bands up to about 170 GHz. The book concludes with future research activities of RF MEMS technology and its potential in space, defense, sensors, and biomedical applications.

Electrochemical Processes in ULSI and MEMS

Author : Hariklia Deligianni
Publisher : The Electrochemical Society
Page : 494 pages
File Size : 52,8 Mb
Release : 2005
Category : Computers
ISBN : 1566774721

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Electrochemical Processes in ULSI and MEMS by Hariklia Deligianni Pdf

RF Bulk Acoustic Wave Filters for Communications

Author : Ken-ya Hashimoto
Publisher : Artech House
Page : 293 pages
File Size : 53,7 Mb
Release : 2009
Category : Technology & Engineering
ISBN : 9781596933224

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RF Bulk Acoustic Wave Filters for Communications by Ken-ya Hashimoto Pdf

This timely book presents a thorough overview of RF BAW filters, covering a vast range of technologies, optimal device design, filter topologies, packaging, fabrication processes, and high quality piezoelectric thin films. Moreover, the book discusses the integration of BAW filters in RF systems.

Nanostructures and Nanotechnology

Author : Douglas Natelson
Publisher : Cambridge University Press
Page : 641 pages
File Size : 42,9 Mb
Release : 2015-06-18
Category : Science
ISBN : 9780521877008

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Nanostructures and Nanotechnology by Douglas Natelson Pdf

A carefully developed textbook focusing on the fundamental principles of nanoscale science and nanotechnology.

Photonic Microresonator Research and Applications

Author : Ioannis Chremmos,Otto Schwelb,Nikolaos Uzunoglu
Publisher : Springer
Page : 515 pages
File Size : 44,9 Mb
Release : 2010-06-09
Category : Technology & Engineering
ISBN : 9781441917447

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Photonic Microresonator Research and Applications by Ioannis Chremmos,Otto Schwelb,Nikolaos Uzunoglu Pdf

The technology surrounding the design and fabrication of optical microresonators has matured to a point where there is a need for commercialization. Consequently, there is a need for device research involving more advanced architectures and more esoteric operating principles. Photonic Microresonator Research and Applications explores advances in the fabrication process that enable nanometer waveguide separations, exceptionally smooth surfaces essential to reach Q factors in the order of 106- 108 and high index contrast materials.

RF MEMS Circuit Design for Wireless Communications

Author : Héctor J. de los Santos
Publisher : Artech House
Page : 298 pages
File Size : 49,9 Mb
Release : 2002
Category : Computers
ISBN : 1580535577

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RF MEMS Circuit Design for Wireless Communications by Héctor J. de los Santos Pdf

This is the first comprehensive book to address the design of RF MEMS-based circuits for use in high performance wireless systems. A groundbreaking research and reference tool, the book enables you to understand the realm of applications of RF MEMS technology; become knowledgeable of the wide variety and performance levels of RF MEMS devices; and partition the architecture of wireless systems to achieve greater levels of performance. This innovative resource also guides you through the design process of RF MEMS-based circuits, and establishes a practical knowledge base for the design of high-yield RF MEMS-based circuits. The book features exercises and detailed case studies on working RF MEMS circuits that help you decide what approaches best fit your design constraints. This unified treatment of RF MEMS-based circuit technology opens up a new world of solutions for meeting the unique challenges of low power/portable wireless products.