Piezoelectric Mems Resonators

Author : Harmeet Bhugra,Gianluca Piazza
Publisher : Springer
Page : 424 pages
File Size : 45,6 Mb
Release : 2017-01-09
Category : Technology & Engineering
ISBN : 9783319286884

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Piezoelectric MEMS Resonators by Harmeet Bhugra,Gianluca Piazza Pdf

This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.

Author : Ulrich Schmid,Michael Schneider
Publisher : Unknown
Page : 128 pages
File Size : 51,9 Mb
Release : 2016
Category : Electronic
ISBN : 3038970069

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Piezoelectric MEMS by Ulrich Schmid,Michael Schneider Pdf

Author : Ulrich Schmid,Michael Schneider
Publisher : MDPI
Page : 177 pages
File Size : 49,8 Mb
Release : 2018-07-10
Category : Electronic
ISBN : 9783038970057

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Piezoelectric MEMS by Ulrich Schmid,Michael Schneider Pdf

This book is a printed edition of the Special Issue "Piezoelectric MEMS" that was published in Micromachines

Author : Ulrich Schmid (Ed.)
Publisher : Unknown
Page : 128 pages
File Size : 47,8 Mb
Release : 2024-05-22
Category : Electronic
ISBN : OCLC:1229864199

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Piezoelectric MEMS by Ulrich Schmid (Ed.) Pdf

Author : Rajendra M. Patrikar
Publisher : Institution of Engineering and Technology
Page : 439 pages
File Size : 40,9 Mb
Release : 2020-06-15
Category : Technology & Engineering
ISBN : 9781785618963

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MEMS Resonator Filters by Rajendra M. Patrikar Pdf

The use of MEMS resonators for signal processing is relatively new and has the potential to change the topology of newer generation circuits. New materials, design and fabrication processes, and integration with conventional circuitry will need to be considered. This book explores the challenges and opportunities of developing circuits with MEMS resonator filters. The replacement of classical electrical components with electromechanical components is explored in this book, and the specific properties of MEMS resonators required in various frequency ranges are discussed. Materials and their selection, CAD tools for system design and the integration of MEMS with CMOS circuitry, and the design, fabrication, testing and packaging of MEMS filters themselves are addressed in detail. Case studies where resonator MEMS have been used as components have been included to encourage readers to consider the practical applications of this technology. MEMS Resonator Filters is essential reading for the analogue circuit designer community, particularly those who are designing circuits for wireless communications, and CMOS technology researchers and engineers who are involved in the fabrication of circuits. Designers of sensors and interfacing circuits will also be interested since resonators are also being used as sensors.

Author : Oliver Brand,Isabelle Dufour,Stephen Heinrich,Fabien Josse
Publisher : John Wiley & Sons
Page : 512 pages
File Size : 44,6 Mb
Release : 2015-04-22
Category : Technology & Engineering
ISBN : 9783527676354

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Resonant MEMS by Oliver Brand,Isabelle Dufour,Stephen Heinrich,Fabien Josse Pdf

Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

Author : Philip Jason Stephanou
Publisher : Unknown
Page : 404 pages
File Size : 49,7 Mb
Release : 2006
Category : Electronic
ISBN : UCAL:C3508920

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Piezoelectric Aluminum Nitride MEMS Resonators for RF Signal Processing by Philip Jason Stephanou Pdf

Author : Humberto Campanella
Publisher : Artech House
Page : 364 pages
File Size : 42,5 Mb
Release : 2010
Category : Technology & Engineering
ISBN : 9781607839781

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Acoustic Wave and Electromechanical Resonators by Humberto Campanella Pdf

This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensing and RF systems. Moreover, this one-stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping you to choose the right approaches for your projects. Over 280 illustrations and more than 130 equations support key topics throughout the book.

Author : Oliver Brand,Isabelle Dufour,Stephen Heinrich,Fabien Josse
Publisher : John Wiley & Sons
Page : 512 pages
File Size : 46,7 Mb
Release : 2015-04-28
Category : Technology & Engineering
ISBN : 9783527676361

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Resonant MEMS by Oliver Brand,Isabelle Dufour,Stephen Heinrich,Fabien Josse Pdf

Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

Author : Vikas Choudhary,Krzysztof Iniewski
Publisher : CRC Press
Page : 481 pages
File Size : 55,5 Mb
Release : 2017-12-19
Category : Medical
ISBN : 9781351832281

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MEMS by Vikas Choudhary,Krzysztof Iniewski Pdf

The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world. The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including: Thin-film integrated passives as an alternative to discrete passives The possibility of piezoelectric MEMS Solutions for MEMS gyroscopes Advanced interconnect technologies Ambient energy harvesting Bulk acoustic wave resonators Ultrasonic receiver arrays using MEMS sensors Optical MEMS-based spectrometers The integration of MEMS resonators with conventional circuitry A wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patterns Wireless microactuators to enable implantable MEMS devices for drug delivery MEMS technologies for tactile sensing and actuation in robotics MEMS-based micro hot-plate devices Inertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoring Sensors using passive acousto-electric devices in wired and wireless systems Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.

Author : Ahmad Safari,E. Koray Akdogan
Publisher : Springer Science & Business Media
Page : 483 pages
File Size : 49,7 Mb
Release : 2008-09-11
Category : Technology & Engineering
ISBN : 9780387765402

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Piezoelectric and Acoustic Materials for Transducer Applications by Ahmad Safari,E. Koray Akdogan Pdf

The book discusses the underlying physical principles of piezoelectric materials, important properties of ferroelectric/piezoelectric materials used in today’s transducer technology, and the principles used in transducer design. It provides examples of a wide range of applications of such materials along with the appertaining rationales. With contributions from distinguished researchers, this is a comprehensive reference on all the pertinent aspects of piezoelectric materials.

Author : Masayoshi Esashi
Publisher : John Wiley & Sons
Page : 44 pages
File Size : 55,6 Mb
Release : 2021-07-19
Category : Technology & Engineering
ISBN : 9783527346479

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3D and Circuit Integration of MEMS by Masayoshi Esashi Pdf

3D and Circuit Integration of MEMS Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building blocks for the “More-Than-Moore” paradigm described in the International Technology Roadmap for Semiconductors. And, in 3D and Circuit Integration of MEMS, distinguished editor Dr. Masayoshi Esashi delivers a comprehensive and systematic exploration of the technologies for microsystem packaging and heterogeneous integration. The book focuses on the silicon MEMS that have been used extensively and the technologies surrounding system integration. You’ll learn about topics as varied as bulk micromachining, surface micromachining, CMOS-MEMS, wafer interconnection, wafer bonding, and sealing. Highly relevant for researchers involved in microsystem technologies, the book is also ideal for anyone working in the microsystems industry. It demonstrates the key technologies that will assist researchers and professionals deal with current and future application bottlenecks. Readers will also benefit from the inclusion of: A thorough introduction to enhanced bulk micromachining on MIS process, including pressure sensor fabrication and the extension of MIS process for various advanced MEMS devices An exploration of epitaxial poly Si surface micromachining, including process condition of epi-poly Si, and MEMS devices using epi-poly Si Practical discussions of Poly SiGe surface micromachining, including SiGe deposition and LP CVD polycrystalline SiGe A concise treatment of heterogeneously integrated aluminum nitride MEMS resonators and filters Perfect for materials scientists, electronics engineers, and electrical and mechanical engineers, 3D and Circuit Integration of MEMS will also earn a place in the libraries of semiconductor physicists seeking a one-stop reference for circuit integration and the practical application of microsystems.

Author : Girolamo Di Francia,Corrado Di Natale
Publisher : Springer Nature
Page : 411 pages
File Size : 52,7 Mb
Release : 2022-06-28
Category : Technology & Engineering
ISBN : 9783031081361

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Sensors and Microsystems by Girolamo Di Francia,Corrado Di Natale Pdf

This book showcases the state of the art in the field of sensors and microsystems, revealing the impressive potential of novel methodologies and technologies. It covers a broad range of aspects, including: bio-, physical and chemical sensors, actuators, micro- and nano-structured materials, mechanisms of interaction and signal transduction, polymers and biomaterials, sensor electronics and instrumentation, analytical microsystems, recognition systems and signal analysis and sensor networks as well as manufacturing technologies, environmental, food, energy and biomedical applications. The contents reflect the outcomes of the activities of AISEM (Italian Association of Sensors and Microsystems) in 2021. Co-Edited by B. Andò, F. Baldini, G. Betta, D. Compagnone, S. Conoci, E. Comini, V. Ferrari, E. La Salandra, L. Lorenzelli, A.G. Mignani, G. Marrazza, G. Neri, P. Siciliano.

Author : Masayoshi Esashi
Publisher : John Wiley & Sons
Page : 528 pages
File Size : 44,5 Mb
Release : 2021-03-16
Category : Technology & Engineering
ISBN : 9783527823253

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3D and Circuit Integration of MEMS by Masayoshi Esashi Pdf

Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building blocks for the “More-Than-Moore” paradigm described in the International Technology Roadmap for Semiconductors. And, in 3D and Circuit Integration of MEMS, distinguished editor Dr. Masayoshi Esashi delivers a comprehensive and systematic exploration of the technologies for microsystem packaging and heterogeneous integration. The book focuses on the silicon MEMS that have been used extensively and the technologies surrounding system integration. You’ll learn about topics as varied as bulk micromachining, surface micromachining, CMOS-MEMS, wafer interconnection, wafer bonding, and sealing. Highly relevant for researchers involved in microsystem technologies, the book is also ideal for anyone working in the microsystems industry. It demonstrates the key technologies that will assist researchers and professionals deal with current and future application bottlenecks. Readers will also benefit from the inclusion of: A thorough introduction to enhanced bulk micromachining on MIS process, including pressure sensor fabrication and the extension of MIS process for various advanced MEMS devices An exploration of epitaxial poly Si surface micromachining, including process condition of epi-poly Si, and MEMS devices using epi-poly Si Practical discussions of Poly SiGe surface micromachining, including SiGe deposition and LP CVD polycrystalline SiGe A concise treatment of heterogeneously integrated aluminum nitride MEMS resonators and filters Perfect for materials scientists, electronics engineers, and electrical and mechanical engineers, 3D and Circuit Integration of MEMS will also earn a place in the libraries of semiconductor physicists seeking a one-stop reference for circuit integration and the practical application of microsystems.

Author : Toshio Ogawa
Publisher : BoD – Books on Demand
Page : 240 pages
File Size : 47,6 Mb
Release : 2016-08-24
Category : Technology & Engineering
ISBN : 9789535125587

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Piezoelectric Materials by Toshio Ogawa Pdf

The science and technology in the area of piezoelectric ceramics are extremely progressing, especially the materials research, measurement technique, theory and applications, and furthermore, demanded to fit social technical requests such as environmental problems. While they had been concentrated on piezoelectric ceramics composed of lead-containing compositions, such as lead zirconate titanate (PZT) and lead titanate, at the beginning because of the high piezoelectricity, recently lead water pollution by soluble PZT of our environment must be considered. Therefore, different new compositions of lead-free ceramics in order to replace PZT are needed. Until now, there have been many studies on lead-free ceramics looking for new morphotropic phase boundaries, ceramic microstructure control to realize high ceramic density, including composites and texture developments, and applications to new evaluation techniques to search for high piezoelectricity. The purpose of this book is focused on the latest reports in piezoelectric materials such as lead-free ceramics, single crystals, and thin films from viewpoints of piezoelectric materials, piezoelectric science, and piezoelectric applications.