Mems Silicon Oscillating Accelerometers And Readout Circuits

Author : Xu, Yong Ping
Publisher : River Publishers
Page : 312 pages
File Size : 44,9 Mb
Release : 2019-02-12
Category : Technology & Engineering
ISBN : 9788770220453

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MEMS Silicon Oscillating Accelerometers and Readout Circuits by Xu, Yong Ping Pdf

Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output. MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic.

Author : Yong Ping Xu
Publisher : CRC Press
Page : 312 pages
File Size : 51,8 Mb
Release : 2022-09-01
Category : Technology & Engineering
ISBN : 9781000793734

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MEMS Silicon Oscillating Accelerometers and Readout Circuits by Yong Ping Xu Pdf

Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output. MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic.

Author : Mahmoud Rasras,Ibrahim (Abe) M. Elfadel,Ha Duong Ngo
Publisher : MDPI
Page : 252 pages
File Size : 49,7 Mb
Release : 2019-05-27
Category : Technology & Engineering
ISBN : 9783038974147

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MEMS Accelerometers by Mahmoud Rasras,Ibrahim (Abe) M. Elfadel,Ha Duong Ngo Pdf

Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc. This Special Issue on "MEMS Accelerometers" seeks to highlight research papers, short communications, and review articles that focus on: Novel designs, fabrication platforms, characterization, optimization, and modeling of MEMS accelerometers. Alternative transduction techniques with special emphasis on opto-mechanical sensing. Novel applications employing MEMS accelerometers for consumer electronics, industries, medicine, entertainment, navigation, etc. Multi-physics design tools and methodologies, including MEMS-electronics co-design. Novel accelerometer technologies and 9DoF IMU integration. Multi-accelerometer platforms and their data fusion.

Author : Alice Lanniel
Publisher : Unknown
Page : 0 pages
File Size : 50,7 Mb
Release : 2023
Category : Electronic
ISBN : 3844092757

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Low-Noise Readout Circuit for Automotive MEMS Accelerometers by Alice Lanniel Pdf

Author : Shahhosseini A Mehran
Publisher : World Scientific
Page : 760 pages
File Size : 47,8 Mb
Release : 2016-12-29
Category : Technology & Engineering
ISBN : 9789813208339

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Design, Manufacturing And Mechatronics - Proceedings Of The International Conference On Design, Manufacturing And Mechatronics (Icdmm2016) by Shahhosseini A Mehran Pdf

The 3rd Annual International Conference on Design, Manufacturing and Mechatronics (ICDMM2016) was successfully held in Wuhan, China in 2016. The ICDMM2016 covers a wide range of fundamental studies, technical innovations and industrial applications in industry design, manufacturing and mechatronics. The ICDMM2016 program consists of 4 keynote speeches, 96 oral and poster presentations. We were pleased to have more than 80 participants from China, South Korea, Taiwan, Japan, Malaysia, and Saudi Arabia. However, finally, only 83 articles were selected after peer review to be included in this proceedings.

Author : Mohamed Gad-el-Hak
Publisher : CRC Press
Page : 568 pages
File Size : 48,9 Mb
Release : 2005-11-29
Category : Technology & Engineering
ISBN : 9781420036558

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MEMS by Mohamed Gad-el-Hak Pdf

As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled. The third volume, MEMS: Applications, offers a broad overview of current, emerging, and possible future MEMS applications. It surveys inertial sensors, micromachined pressure sensors, surface micromachined devices, microscale vacuum pumps, reactive control for skin-friction reduction, and microchannel heat sinks, among many others. Two new chapters discuss microactuators and nonlinear electrokinetic devices. This book is vital to understanding the current and possible capabilities of MEMS technologies. MEMS: Applications comprises contributions from the foremost experts in their respective specialties from around the world. Acclaimed author and expert Mohamed Gad-el-Hak has again raised the bar to set a new standard for excellence and authority in the fledgling fields of MEMS and nanotechnology.

Author : Navid Yazdi
Publisher : Unknown
Page : 320 pages
File Size : 45,8 Mb
Release : 1999
Category : Accelerometers
ISBN : UOM:39015043228066

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Micro-g Silicon Accelerometers with High Performance CMOS Interface Circuitry by Navid Yazdi Pdf

Author : Tan Tran Duc
Publisher : GRIN Verlag
Page : 90 pages
File Size : 51,9 Mb
Release : 2009
Category : Electronic
ISBN : 9783640249688

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Modeling and Simulation of the Capacitive Accelerometer by Tan Tran Duc Pdf

Diploma Thesis from the year 2005 in the subject Electrotechnology, grade: Master 9.8/10, 28 entries in the bibliography, language: English, abstract: Microelectromechanical systems (MEMS) are collection of microsensors and actuators that have the ability to sense its environment and react to changes in that environment with the use of a microcircuit control. They also include the conventional microelectronics packaging, integrating antenna structures for command signals into microelectromechanical structures for desired sensing and actuating functions. The system may also need micropower supply, microrelay, and microsignal processing units. Microcomponents make the system faster, more reliable, cheaper, and capable of incorporating more complex functions. In the beginning of 1990s, MEMS appeared with the aid of the development of integrated circuit fabrication processes, in which sensors, actuators, and control functions are co-fabricated in silicon 1]. Since then, remarkable research progresses have been achieved in MEMS under the strong promotions from both government and industries. In addition to the commercialization of some less integrated MEMS devices, such as microaccelerometers, inkjet printer head, micromirrors for projection, etc., the concepts and feasibility of more complex MEMS devices have been proposed and demonstrated for the applications in such varied fields as microfluidics, aerospace, biomedical, chemical analysis, wireless communications, data storage, display, optics, etc. Some branches of MEMS, appearing as microoptoelectromechanical systems (MOEMS), micro total analysis systems, etc., have attracted a great research since their potential applications' market.

Author : Vikas Choudhary,Krzysztof Iniewski
Publisher : CRC Press
Page : 481 pages
File Size : 45,6 Mb
Release : 2013-06-05
Category : Medical
ISBN : 9781466515819

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MEMS by Vikas Choudhary,Krzysztof Iniewski Pdf

The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world. The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including: Thin-film integrated passives as an alternative to discrete passives The possibility of piezoelectric MEMS Solutions for MEMS gyroscopes Advanced interconnect technologies Ambient energy harvesting Bulk acoustic wave resonators Ultrasonic receiver arrays using MEMS sensors Optical MEMS-based spectrometers The integration of MEMS resonators with conventional circuitry A wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patterns Wireless microactuators to enable implantable MEMS devices for drug delivery MEMS technologies for tactile sensing and actuation in robotics MEMS-based micro hot-plate devices Inertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoring Sensors using passive acousto-electric devices in wired and wireless systems Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.

Author : Ibrahim (Abe) M. Elfadel,Ha Duong Ngo,Mahmoud Rasras
Publisher : Unknown
Page : 1 pages
File Size : 40,6 Mb
Release : 2019
Category : Electronic books
ISBN : 3038974153

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MEMS Accelerometers by Ibrahim (Abe) M. Elfadel,Ha Duong Ngo,Mahmoud Rasras Pdf

Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc. This Special Issue on "MEMS Accelerometers" seeks to highlight research papers, short communications, and review articles that focus on: Novel designs, fabrication platforms, characterization, optimization, and modeling of MEMS accelerometers. Alternative transduction techniques with special emphasis on opto-mechanical sensing. Novel applications employing MEMS accelerometers for consumer electronics, industries, medicine, entertainment, navigation, etc. Multi-physics design tools and methodologies, including MEMS-electronics co-design. Novel accelerometer technologies and 9DoF IMU integration. Multi-accelerometer platforms and their data fusion.

Author : S Nihtianov,A. Luque
Publisher : Woodhead Publishing
Page : 604 pages
File Size : 50,8 Mb
Release : 2018-03-09
Category : Technology & Engineering
ISBN : 9780081020562

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Smart Sensors and MEMS by S Nihtianov,A. Luque Pdf

Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information. Contains new chapters that address key applications, such as magnetic sensors, microreaction chambers and temperature sensors Provides an in-depth information on a wide array of industrial applications for smart sensors and smart MEMS Presents the only book to discuss both smart sensors and MEMS for industrial applications

Author : Anonim
Publisher : Unknown
Page : 1044 pages
File Size : 52,6 Mb
Release : 1999
Category : Aeronautics
ISBN : STANFORD:36105021812214

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International Aerospace Abstracts by Anonim Pdf

Author : Cesare Buffa
Publisher : Springer
Page : 128 pages
File Size : 54,7 Mb
Release : 2017-07-04
Category : Technology & Engineering
ISBN : 9783319594125

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MEMS Lorentz Force Magnetometers by Cesare Buffa Pdf

This book deals with compasses for consumer applications realized in MEMS technology, to support location-based and orientation-based services in addition to ‘traditional’ functionalities based on navigation. Navigation is becoming a must-have feature in portable devices and the presence of a compass also makes location-based augmented reality emerge, where a street map or a camera image could be overlaid with highly detailed information about what is in front of the user. To make these features possible both industries and scientific research focus on three axis magnetometers. The author describes a full path from specifications (driven by customers’ needs/desires) to prototype and preparing the way to industrialization and commercialization. The presentation includes an overview of all the major steps of this research and development process, highlighting critical points and potential pitfalls, as well as how to forecast or mitigate them. Coverage includes system design, specifications fulfillment, design strategy and project development methodology, in addition to traditional topics such as microelectronics design, sensor design, development of an experimental setup and characterization. The author uses a practical approach, including pragmatic guidelines and design choices, while maintaining focus on the final target, prototyping in the direction of industrialization and mass production.

Author : Anonim
Publisher : Unknown
Page : 460 pages
File Size : 45,5 Mb
Release : 1998
Category : Micromechanics
ISBN : UOM:39015047343465

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Micromachined Devices and Components by Anonim Pdf

Author : Minhang Bao
Publisher : Elsevier
Page : 328 pages
File Size : 46,9 Mb
Release : 2005-04-12
Category : Technology & Engineering
ISBN : 008045562X

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Analysis and Design Principles of MEMS Devices by Minhang Bao Pdf

Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book.