Author : Samares Kar
Publisher : ECS Transactions
Page : 801 pages
File Size : 40,5 Mb
Release : 2006-01-01
Category : Dielectrics
ISBN : 1566774446
Physics and Technology of High-k Gate Dielectrics III by Samares Kar Pdf
This issue is the third in the series with this title and it brings state-of-the-art information on all aspects of the high-K gate stacks, including high mobility substrates, high-K gate dielectric materials and processing, gate electrode materials and processing, high-K gate dielectric interfaces, advanced gate stack reliability, high-K gate dielectric characterization and methodologies, and DRAM and non-volatile memory materials.