Piezoelectric Mems

Author : Harmeet Bhugra,Gianluca Piazza
Publisher : Springer
Page : 424 pages
File Size : 50,9 Mb
Release : 2017-01-09
Category : Technology & Engineering
ISBN : 9783319286884

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Piezoelectric MEMS Resonators by Harmeet Bhugra,Gianluca Piazza Pdf

This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.

Author : Ulrich Schmid,Michael Schneider
Publisher : MDPI
Page : 177 pages
File Size : 50,6 Mb
Release : 2018-07-10
Category : Electronic
ISBN : 9783038970057

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Piezoelectric MEMS by Ulrich Schmid,Michael Schneider Pdf

This book is a printed edition of the Special Issue "Piezoelectric MEMS" that was published in Micromachines

Author : Vikas Choudhary,Krzysztof Iniewski
Publisher : CRC Press
Page : 481 pages
File Size : 48,8 Mb
Release : 2017-12-19
Category : Medical
ISBN : 9781351832281

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MEMS by Vikas Choudhary,Krzysztof Iniewski Pdf

The microelectromechanical systems (MEMS) industry has experienced explosive growth over the last decade. Applications range from accelerometers and gyroscopes used in automotive safety to high-precision on-chip integrated oscillators for reference generation and mobile phones. MEMS: Fundamental Technology and Applications brings together groundbreaking research in MEMS technology and explores an eclectic set of novel applications enabled by the technology. The book features contributions by top experts from industry and academia from around the world. The contributors explain the theoretical background and supply practical insights on applying the technology. From the historical evolution of nano micro systems to recent trends, they delve into topics including: Thin-film integrated passives as an alternative to discrete passives The possibility of piezoelectric MEMS Solutions for MEMS gyroscopes Advanced interconnect technologies Ambient energy harvesting Bulk acoustic wave resonators Ultrasonic receiver arrays using MEMS sensors Optical MEMS-based spectrometers The integration of MEMS resonators with conventional circuitry A wearable inertial and magnetic MEMS sensor assembly to estimate rigid body movement patterns Wireless microactuators to enable implantable MEMS devices for drug delivery MEMS technologies for tactile sensing and actuation in robotics MEMS-based micro hot-plate devices Inertial measurement units with integrated wireless circuitry to enable convenient, continuous monitoring Sensors using passive acousto-electric devices in wired and wireless systems Throughout, the contributors identify challenges and pose questions that need to be resolved, paving the way for new applications. Offering a wide view of the MEMS landscape, this is an invaluable resource for anyone working to develop and commercialize MEMS applications.

Author : Ahmad Safari,E. Koray Akdogan
Publisher : Springer Science & Business Media
Page : 483 pages
File Size : 44,7 Mb
Release : 2008-09-11
Category : Technology & Engineering
ISBN : 9780387765402

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Piezoelectric and Acoustic Materials for Transducer Applications by Ahmad Safari,E. Koray Akdogan Pdf

The book discusses the underlying physical principles of piezoelectric materials, important properties of ferroelectric/piezoelectric materials used in today’s transducer technology, and the principles used in transducer design. It provides examples of a wide range of applications of such materials along with the appertaining rationales. With contributions from distinguished researchers, this is a comprehensive reference on all the pertinent aspects of piezoelectric materials.

Author : Oliver Brand,Isabelle Dufour,Stephen Heinrich,Fabien Josse
Publisher : John Wiley & Sons
Page : 512 pages
File Size : 47,9 Mb
Release : 2015-06-08
Category : Technology & Engineering
ISBN : 9783527335459

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Resonant MEMS by Oliver Brand,Isabelle Dufour,Stephen Heinrich,Fabien Josse Pdf

Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.

Author : Tom Proulx
Publisher : Springer Science & Business Media
Page : 272 pages
File Size : 51,7 Mb
Release : 2011-03-24
Category : Technology & Engineering
ISBN : 9781441988256

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MEMS and Nanotechnology, Volume 2 by Tom Proulx Pdf

This the second volume of six from the Annual Conference of the Society for Experimental Mechanics, 2010, brings together 40 chapters on Microelectromechanical Systems and Nanotechnology. It presents early findings from experimental and computational investigations on MEMS and Nanotechnology including contributions on Nanomechanical Standards, Magneto-mechanical MEMS Sensors, Piezoelectric MEMS for Energy Harvesting, and Linear and Nonlinear Mass Sensing.

Author : Jun Ouyang
Publisher : Elsevier
Page : 386 pages
File Size : 40,9 Mb
Release : 2019-06-06
Category : Technology & Engineering
ISBN : 9780128138571

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Nanostructures in Ferroelectric Films for Energy Applications by Jun Ouyang Pdf

Nanostructures in Ferroelectric Films for Energy Applications: Grains, Domains, Interfaces and Engineering Methods presents methods of engineering nanostructures in ferroelectric films to improve their performance in energy harvesting and conversion and storage. Ferroelectric films, which have broad applications, including the emerging energy technology, usually consist of nanoscale inhomogeneities. For polycrystalline films, the size and distribution of nano-grains determines the macroscopic properties, especially the field-induced polarization response. For epitaxial films, the energy of internal long-range electric and elastic fields during their growth are minimized by formation of self-assembled nano-domains. This book is an accessible reference for both instructors in academia and R&D professionals. Provides the necessary components for the systematic study of the structure-property relationship in ferroelectric thin film materials using case studies in energy applications Written by leading experts in the research areas of piezoelectrics, electrocalorics, ferroelectric dielectrics (especially in capacitive energy storage), ferroelectric domains, and ferroelectric-Si technology Includes a well balanced mix of theoretical design and simulation, materials processing and integration, and dedicated characterization methods of the involved nanostructures

Author : Bin Yang,Zhiran Yi,Chengkuo Lee
Publisher : John Wiley & Sons
Page : 292 pages
File Size : 50,5 Mb
Release : 2022-10-04
Category : Technology & Engineering
ISBN : 9783527349340

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Flexible Piezoelectric Energy Harvesters and Sensors by Bin Yang,Zhiran Yi,Chengkuo Lee Pdf

Flexible Piezoelectric Energy Harvesters and Sensors A systematic and complete discussion of the latest progress in flexible piezoelectric energy harvesting and sensing technologies In Flexible Piezoelectric Energy Harvesters and Sensors, a team of distinguished researchers delivers a comprehensive exploration of the design methods, working mechanisms, microfabrication processes, and applications of flexible energy harvesters for wearable and implantable devices. The book discusses the monitoring of normal force, shear force, strain, and displacement in flexible sensors, as well as relevant artificial intelligence algorithms. Readers will also find an overview of design and research challenges facing professionals in the field, as well as a variety of perspectives on flexible energy harvesters and sensors. With an extensive focus on the use of flexible piezoelectric material technologies for medical applications, Flexible Piezoelectric Energy Harvesters and Sensors also includes: A thorough introduction to the working principles of piezoelectric devices, including discussions of flexible PEH and piezoelectric sensors Comprehensive treatments of the design of flexible piezoelectric energy harvesters, including the challenges associated with their structural design Fulsome explanations of the fabrication of flexible piezoelectric energy harvesters, including piezoelectric ceramic thin and think films In-depth treatments of cantilever piezoelectric energy harvesters, including optimized cantilever, bimorph, and optimized bimorph PEH Perfect for materials scientists, electronics engineers, and solid-state physicists, Flexible Piezoelectric Energy Harvesters and Sensors will also earn a place in the libraries of sensor developers, and surface physicists.

Author : Nava Setter
Publisher : Springer Science & Business Media
Page : 416 pages
File Size : 40,9 Mb
Release : 2006-03-30
Category : Technology & Engineering
ISBN : 9780387233192

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Electroceramic-Based MEMS by Nava Setter Pdf

The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging applications, fabrication technology and functioning issues are presented and discussed. The book covers the following topics: Part A: Applications and devices with electroceramic-based MEMS: Chemical microsensors Microactuators based on thin films Micromachined ultrasonic transducers Thick-film piezoelectric and magnetostrictive devices Pyroelectric microsystems RF bulk acoustic wave resonators and filters High frequency tunable devices MEMS for optical functionality Part B: Materials, fabrication technology, and functionality: Ceramic thick films for MEMS Piezoelectric thin films for MEMS Materials and technology in thin films for tunable high frequency devices Permittivity, tunability and loss in ferroelectrics for reconfigurable high frequency electronics Microfabrication of piezoelectric MEMS Nano patterning methods for electroceramics Soft lithography emerging techniques The book is addressed to engineers, scientists and researchers of various disciplines, device engineers, materials engineers, chemists, physicists and microtechnologists who are working and/or interested in this fast growing and highly promising field. The publication of this book follows a Special Issue on electroceramic-based MEMS that was published in the Journal of Electroceramics at the beginning of 2004. The ten invited papers of that special issue were adapted by the authors into chapters of the present book and five additional chapters were added.

Author : Ulrich Schmid,Michael Schneider
Publisher : Unknown
Page : 128 pages
File Size : 41,5 Mb
Release : 2016
Category : Electronic
ISBN : 3038970069

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Piezoelectric MEMS by Ulrich Schmid,Michael Schneider Pdf

Author : Madhu Bhaskaran,Sharath Sriram,Krzysztof Iniewski
Publisher : CRC Press
Page : 289 pages
File Size : 50,7 Mb
Release : 2017-12-19
Category : Science
ISBN : 9781466587250

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Energy Harvesting with Functional Materials and Microsystems by Madhu Bhaskaran,Sharath Sriram,Krzysztof Iniewski Pdf

For decades, people have searched for ways to harvest energy from natural sources. Lately, a desire to address the issue of global warming and climate change has popularized solar or photovoltaic technology, while piezoelectric technology is being developed to power handheld devices without batteries, and thermoelectric technology is being explored to convert wasted heat, such as in automobile engine combustion, into electricity. Featuring contributions from international researchers in both academics and industry, Energy Harvesting with Functional Materials and Microsystems explains the growing field of energy harvesting from a materials and device perspective, with resulting technologies capable of enabling low-power implantable sensors or a large-scale electrical grid. In addition to the design, implementation, and components of energy-efficient electronics, the book covers current advances in energy-harvesting materials and technology, including: High-efficiency solar technologies with lower cost than existing silicon-based photovoltaics Novel piezoelectric technologies utilizing mechanical energy from vibrations and pressure The ability to harness thermal energy and temperature profiles with thermoelectric materials Whether you’re a practicing engineer, academician, graduate student, or entrepreneur looking to invest in energy-harvesting devices, this book is your complete guide to fundamental materials and applied microsystems for energy harvesting.

Author : Mickaël Lallart
Publisher : BoD – Books on Demand
Page : 362 pages
File Size : 45,9 Mb
Release : 2012-10-31
Category : Technology & Engineering
ISBN : 9789535108269

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Small-Scale Energy Harvesting by Mickaël Lallart Pdf

The purpose of this book is to provide an up-to-date view of latest research advances in the design of efficient small-scale energy harvesters through contributions of internationally recognized researchers. The book covers the physics of the energy conversion, the elaboration of electroactive materials and their application to the conception of a complete microgenerator, and is organized according to the input energy source. I sincerely hope you will find this book as enjoyable to read as it was to edit, and that it will help your research and/or give new ideas in the wide field of energy harvesting.

Author : Markku Tilli,Mervi Paulasto-Krockel,Teruaki Motooka,Veikko Lindroos
Publisher : William Andrew
Page : 826 pages
File Size : 49,7 Mb
Release : 2015-09-02
Category : Technology & Engineering
ISBN : 9780323312233

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Handbook of Silicon Based MEMS Materials and Technologies by Markku Tilli,Mervi Paulasto-Krockel,Teruaki Motooka,Veikko Lindroos Pdf

The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components. Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs. Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques Shows how to protect devices from the environment and decrease package size for a dramatic reduction in packaging costs Discusses properties, preparation, and growth of silicon crystals and wafers Explains the many properties (mechanical, electrostatic, optical, etc.), manufacturing, processing, measuring (including focused beam techniques), and multiscale modeling methods of MEMS structures Geared towards practical applications rather than theory

Author : Simona Vlad,Nicolae Marius Roman
Publisher : Springer
Page : 353 pages
File Size : 46,5 Mb
Release : 2019-05-16
Category : Technology & Engineering
ISBN : 9789811362071

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6th International Conference on Advancements of Medicine and Health Care through Technology; 17–20 October 2018, Cluj-Napoca, Romania by Simona Vlad,Nicolae Marius Roman Pdf

This volume presents the contributions of the 6th International Conference on Advancements of Medicine and Health Care through Technology – MediTech 2018, held between 17 – 20 October 2018 in Cluj-Napoca, Romania. The papers of this Proceedings volume present new developments in : - Health Care Technology - Medical Devices, Measurement and Instrumentation - Medical Imaging, Image and Signal Processing - Modeling and Simulation - Molecular Bioengineering - Biomechanics

Author : Reza Ghodssi,Pinyen Lin
Publisher : Springer Science & Business Media
Page : 1211 pages
File Size : 40,9 Mb
Release : 2011-03-18
Category : Technology & Engineering
ISBN : 9780387473185

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MEMS Materials and Processes Handbook by Reza Ghodssi,Pinyen Lin Pdf

MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.