Scanning Probe Lithography

Author : Hyongsok T. Soh,Kathryn Wilder Guarini,Calvin F. Quate
Publisher : Springer Science & Business Media
Page : 212 pages
File Size : 44,9 Mb
Release : 2013-03-14
Category : Technology & Engineering
ISBN : 9781475733310

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Scanning Probe Lithography by Hyongsok T. Soh,Kathryn Wilder Guarini,Calvin F. Quate Pdf

Scanning Probe Lithography (SPL) describes recent advances in the field of scanning probe lithography, a high resolution patterning technique that uses a sharp tip in close proximity to a sample to pattern nanometer-scale features on the sample. SPL is capable of patterning sub-30nm features with nanometer-scale alignment registration. It is a relatively simple, inexpensive, reliable method for patterning nanometer-scale features on various substrates. It has potential applications for nanometer-scale research, for maskless semiconductor lithography, and for photomask patterning. The authors of this book have been key players in this exciting new field. Calvin Quate has been involved since the beginning in the early 1980s and leads the research time that is regarded as the foremost group in this field. Hyongsok Tom Soh and Kathryn Wilder Guarini have been the members of this group who, in the last few years, have brought about remarkable series of advances in SPM lithography. Some of these advances have been in the control of the tip which has allowed the scanning speed to be increased from mum/second to mm/second. Both non-contact and in-contact writing have been demonstrated as has controlled writing of sub-100 nm lines over large steps on the substrate surface. The engineering of a custom-designed MOSFET built into each microcantilever for individual current control is another notable achievement. Micromachined arrays of probes each with individual control have been demonstrated. One of the most intriguing new aspects is the use of directly-grown carbon nanotubes as robust, high-resolution emitters. In this book the authors concisely and authoritatively describe the historical context, the relevant inventions, and the prospects for eventual manufacturing use of this exciting new technology.

Author : Yu Kyoung Ryu,Javier Martinez Rodrigo
Publisher : CRC Press
Page : 145 pages
File Size : 41,8 Mb
Release : 2022-12-22
Category : Technology & Engineering
ISBN : 9781000804867

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Scanning Probe Lithography by Yu Kyoung Ryu,Javier Martinez Rodrigo Pdf

The most complete book available on scanning probe lithography (SPL), this work details the modalities, mechanisms, and current technologies, applications, and materials on which SPL can be performed. It provides a comprehensive overview of this simple and cost-effective technique, which does not require clean room conditions and can be performed in any lab or industry facility to achieve high-resolution and high-quality patterns on a wide range of materials: biological, semiconducting, polymers, and 2D materials. • Introduces historical background of SPL, including evolution of the technique and tools • Explains the mechanism of sample modification/manipulation, types of AFM tips, technical parts of the experimental setup, and materials on which the technique can be applied • Shows the different types of devices and structures fabricated by SPL, together with the processing steps • Contains a complete and state-of-the art package of examples and different approaches, performed by different international research groups • Summarizes strengths, limitations, and potential of SPL This book is aimed at advanced students, technicians, and researchers in materials science, microelectronics, and others working with lithographic techniques and fabrication processes.

Author : Bharat Bhushan,Harald Fuchs
Publisher : Springer Science & Business Media
Page : 318 pages
File Size : 52,7 Mb
Release : 2006-04-28
Category : Technology & Engineering
ISBN : 9783540269144

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Applied Scanning Probe Methods IV by Bharat Bhushan,Harald Fuchs Pdf

Author : Nikodem Tomczak,Kuan Eng Johnson Goh
Publisher : World Scientific
Page : 277 pages
File Size : 44,5 Mb
Release : 2011
Category : Science
ISBN : 9789814324762

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Scanning Probe Microscopy by Nikodem Tomczak,Kuan Eng Johnson Goh Pdf

Scanning Probe Microscopy (SPM) is the enabling tool for nano(bio)technology, which has opened new vistas in many interdisciplinary research areas. Concomitant with the developments in SPM instrumentation and techniques are new and previously unthought-of opportunities in materials nanofabrication and characterisation. In particular, the developments in addressing and manipulating matter at the level of single atoms or molecules, and studies of biological materials (e.g. live cells, or cell membranes) result in new and exciting discoveries. The rising importance of SPM demands a concise treatment in the form of a book which is accessible to interdisciplinary practitioners. This book highlights recent advances in the field of SPM with sufficient depth and breadth to provide an intellectually stimulating overview of the current state of the art. The book is based on a set of carefully selected original works from renowned contributors on topics that range from atom technology, scanning tunneling spectroscopy of self-assembled nanostructures, SPM probe fabrication, scanning force microscopy applications in biology and materials science down to the single molecule level, novel scanning probe techniques, and nanolithography. The variety of topics underlines the strong interdisciplinary character of SPM related research and the combined expertise of the contributors gives us a unique opportunity to discuss possible future trends in SPM related research. This makes the book not merely a collection of already published material but an enlightening insight into cutting edge research and global SPM research trends.

Author : Anonim
Publisher : Unknown
Page : 128 pages
File Size : 54,5 Mb
Release : 2024-07-01
Category : Electronic
ISBN : 9789814462808

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Scanning Probe Microscopy by Anonim Pdf

Author : Christie R. K. Marrian
Publisher : SPIE-International Society for Optical Engineering
Page : 440 pages
File Size : 46,5 Mb
Release : 1993
Category : Technology & Engineering
ISBN : STANFORD:36105003445736

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Technology of Proximal Probe Lithography by Christie R. K. Marrian Pdf

Author : Lydia Anggraini
Publisher : Independently Published
Page : 82 pages
File Size : 41,8 Mb
Release : 2019-03-13
Category : Reference
ISBN : 1090363265

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Micromachining: Scanning Probe Lithography by Lydia Anggraini Pdf

This book describe how nanoscale resist patterns technology were machined or fabricated on a silicon substrate using a scanning probe microscope (SPM) based on nanolithography (SPNL). The advantage by using this technology is the low cost of nanopatterning device technology can be created, where an atomic force microscope (AFM) is used. Conventional SPNL directly writes nanopatterns using a single probe cantilever.

Author : Douglas C. Hansen,Hugh Solomon Isaacs
Publisher : The Electrochemical Society
Page : 224 pages
File Size : 51,8 Mb
Release : 2001
Category : Science
ISBN : 1566773024

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Scanning Probe Techniques for Materials Characterization at Nanometer Scale by Douglas C. Hansen,Hugh Solomon Isaacs Pdf

Author : Vladimir V. Tsukruk,Srikanth Singamaneni
Publisher : John Wiley & Sons
Page : 663 pages
File Size : 48,6 Mb
Release : 2012-01-09
Category : Technology & Engineering
ISBN : 9783527639960

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Scanning Probe Microscopy of Soft Matter by Vladimir V. Tsukruk,Srikanth Singamaneni Pdf

Well-structured and adopting a pedagogical approach, this self-contained monograph covers the fundamentals of scanning probe microscopy, showing how to use the techniques for investigating physical and chemical properties on the nanoscale and how they can be used for a wide range of soft materials. It concludes with a section on the latest techniques in nanomanipulation and patterning. This first book to focus on the applications is a must-have for both newcomers and established researchers using scanning probe microscopy in soft matter research. From the contents: * Atomic Force Microscopy and Other Advanced Imaging Modes * Probing of Mechanical, Thermal Chemical and Electrical Properties * Amorphous, Poorly Ordered and Organized Polymeric Materials * Langmuir-Blodgett and Layer-by-Layer Structures * Multi-Component Polymer Systems and Fibers * Colloids and Microcapsules * Biomaterials and Biological Structures * Nanolithography with Intrusive AFM Tipand Dip-Pen Nanolithography * Microcantilever-Based Sensors

Author : Umberto Celano
Publisher : Springer
Page : 408 pages
File Size : 45,9 Mb
Release : 2019-08-01
Category : Science
ISBN : 9783030156121

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Electrical Atomic Force Microscopy for Nanoelectronics by Umberto Celano Pdf

The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). However, ultra-scaled semiconductor devices require nanometer control of the many parameters essential for their fabrication. Through the years, this created a strong alliance between microscopy techniques and IC manufacturing. This book reviews the latest progress in IC devices, with emphasis on the impact of electrical atomic force microscopy (AFM) techniques for their development. The operation principles of many techniques are introduced, and the associated metrology challenges described. Blending the expertise of industrial specialists and academic researchers, the chapters are dedicated to various AFM methods and their impact on the development of emerging nanoelectronic devices. The goal is to introduce the major electrical AFM methods, following the journey that has seen our lives changed by the advent of ubiquitous nanoelectronics devices, and has extended our capability to sense matter on a scale previously inaccessible.

Author : Stephen C. Minne,Scott R. Manalis,Calvin F. Quate
Publisher : Springer Science & Business Media
Page : 169 pages
File Size : 48,5 Mb
Release : 2012-12-06
Category : Technology & Engineering
ISBN : 9781461551676

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Bringing Scanning Probe Microscopy up to Speed by Stephen C. Minne,Scott R. Manalis,Calvin F. Quate Pdf

Bringing Scanning Probe Microscopy Up to Speed introduces the principles of scanning probe systems with particular emphasis on techniques for increasing speed. The authors include useful information on the characteristics and limitations of current state-of-the-art machines as well as the properties of the systems that will follow in the future. The basic approach is two-fold. First, fast scanning systems for single probes are treated and, second, systems with multiple probes operating in parallel are presented. The key components of the SPM are the mechanical microcantilever with integrated tip and the systems used to measure its deflection. In essence, the entire apparatus is devoted to moving the tip over a surface with a well-controlled force. The mechanical response of the actuator that governs the force is of the utmost importance since it determines the scanning speed. The mechanical response relates directly to the size of the actuator; smaller is faster. Traditional scanning probe microscopes rely on piezoelectric tubes of centimeter size to move the probe. In future scanning probe systems, the large actuators will be replaced with cantilevers where the actuators are integrated on the beam. These will be combined in arrays of multiple cantilevers with MEMS as the key technology for the fabrication process.

Author : Anonim
Publisher : Unknown
Page : 128 pages
File Size : 46,7 Mb
Release : 2024-07-01
Category : Electronic
ISBN : 9789814476775

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Nanofabrication by Anonim Pdf

Author : Bharat Bhushan,Harald Fuchs,Masahiko Tomitori
Publisher : Springer Science & Business Media
Page : 475 pages
File Size : 51,6 Mb
Release : 2007-12-20
Category : Technology & Engineering
ISBN : 9783540740858

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Applied Scanning Probe Methods X by Bharat Bhushan,Harald Fuchs,Masahiko Tomitori Pdf

The volumes VIII, IX and X examine the physical and technical foundation for recent progress in applied scanning probe techniques. This is the first book to summarize the state-of-the-art of this technique. The field is progressing so fast that there is a need for a set of volumes every 12 to 18 months to capture latest developments. These volumes constitute a timely comprehensive overview of SPM applications.

Author : Zheng Cui
Publisher : Springer Science & Business Media
Page : 350 pages
File Size : 41,8 Mb
Release : 2009-01-01
Category : Technology & Engineering
ISBN : 9780387755779

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Nanofabrication by Zheng Cui Pdf

This book provides the reader with the most up-to-date information and development in the Nanofabrication area. It presents a one-stop description at the introduction level on most of the technologies that have been developed which are capable of making structures below 100nm. Principles of each technology are introduced and illustrated with minimum mathematics involved. The book serves as a practical guide and first hand reference for those working in nanostructure fabrication.

Author : Sergei V. Kalinin,Alexei Gruverman
Publisher : Springer Science & Business Media
Page : 1002 pages
File Size : 45,7 Mb
Release : 2007-04-03
Category : Technology & Engineering
ISBN : 9780387286686

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Scanning Probe Microscopy by Sergei V. Kalinin,Alexei Gruverman Pdf

This volume will be devoted to the technical aspects of electrical and electromechanical SPM probes and SPM imaging on the limits of resolution, thus providing technical introduction into the field. This volume will also address the fundamental physical phenomena underpinning the imaging mechanism of SPMs.