Understanding Mems

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Understanding MEMS

Author : Luis Castañer
Publisher : John Wiley & Sons
Page : 336 pages
File Size : 43,5 Mb
Release : 2015-10-06
Category : Technology & Engineering
ISBN : 9781119055495

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Understanding MEMS by Luis Castañer Pdf

The continued advancement of MEMS (micro-electro-mechanical systems) complexity, performance, commercial exploitation and market size requires an ever-expanding graduate population with state-of-the-art expertise. Understanding MEMS: Principles and Applications provides a comprehensive introduction to this complex and multidisciplinary technology that is accessible to senior undergraduate and graduate students from a range of engineering and physical sciences backgrounds. Fully self-contained, this textbook is designed to help students grasp the key principles and operation of MEMS devices and to inspire advanced study or a career in this field. Moreover, with the increasing application areas, product categories and functionality of MEMS, industry professionals will also benefit from this consolidated overview, source of relevant equations and extensive solutions to problems. Key features: Details the fundamentals of MEMS, enabling readers to understand the basic governing equations and know how they apply at the micron scale. Strong pedagogical emphasis enabling students to understand the fundamentals of MEMS devices. Self-contained study aid featuring problems and solutions. Book companion website hosts Matlab and PSpice codes and viewgraphs.

An Introduction to Microelectromechanical Systems Engineering

Author : Nadim Maluf,Kirt Williams
Publisher : Artech House
Page : 312 pages
File Size : 46,9 Mb
Release : 2004
Category : Technology & Engineering
ISBN : 1580535917

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An Introduction to Microelectromechanical Systems Engineering by Nadim Maluf,Kirt Williams Pdf

Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of MEMS devices and processes, and helps you communicate the relative merits of MEMS to your company's management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of MEMS packaging, this easy-to-understand book clearly explains the basics of MEMS engineering, making it an invaluable reference for your work in the field.

Understanding MEMS

Author : Luis Castañer
Publisher : John Wiley & Sons
Page : 330 pages
File Size : 45,6 Mb
Release : 2015-12-14
Category : Technology & Engineering
ISBN : 9781119055426

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Understanding MEMS by Luis Castañer Pdf

The continued advancement of MEMS (micro-electro-mechanical systems) complexity, performance, commercial exploitation and market size requires an ever-expanding graduate population with state-of-the-art expertise. Understanding MEMS: Principles and Applications provides a comprehensive introduction to this complex and multidisciplinary technology that is accessible to senior undergraduate and graduate students from a range of engineering and physical sciences backgrounds. Fully self-contained, this textbook is designed to help students grasp the key principles and operation of MEMS devices and to inspire advanced study or a career in this field. Moreover, with the increasing application areas, product categories and functionality of MEMS, industry professionals will also benefit from this consolidated overview, source of relevant equations and extensive solutions to problems. Key features: Details the fundamentals of MEMS, enabling readers to understand the basic governing equations and know how they apply at the micron scale. Strong pedagogical emphasis enabling students to understand the fundamentals of MEMS devices. Self-contained study aid featuring problems and solutions. Book companion website hosts Matlab and PSpice codes and viewgraphs.

MEMS Reliability

Author : Allyson L. Hartzell,Mark G. da Silva,Herbert R. Shea
Publisher : Springer Science & Business Media
Page : 291 pages
File Size : 47,9 Mb
Release : 2010-11-02
Category : Technology & Engineering
ISBN : 9781441960184

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MEMS Reliability by Allyson L. Hartzell,Mark G. da Silva,Herbert R. Shea Pdf

The successful launch of viable MEMs product hinges on MEMS reliability, the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it. MEMs Reliability, focuses on the reliability and manufacturability of MEMS at a fundamental level by addressing process development and characterization, material property characterization, failure mechanisms and physics of failure (POF), design strategies for improving yield, design for reliability (DFR), packaging and testing.

Understanding Nanoelectromechanical Quantum Circuits and Systems (NEMX) for the Internet of Things (IoT) Era

Author : Héctor J. De Los Santos
Publisher : CRC Press
Page : 182 pages
File Size : 42,5 Mb
Release : 2022-09-01
Category : Technology & Engineering
ISBN : 9781000796377

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Understanding Nanoelectromechanical Quantum Circuits and Systems (NEMX) for the Internet of Things (IoT) Era by Héctor J. De Los Santos Pdf

The operational theme permeating most definitions of the IoT concept, is the wireless communication of networked objects, in particular, smart sensing devices and machines, exchanging data a la Internet. In this book, a detailed look is taken at the fundamental principles of devices and techniques whose exploitation will facilitate the development of compact, power-efficient, autonomous, smart, networked sensing nodes underlying and encompassing the emerging IoT era.The book provides an understanding of nanoelectromechanical quantum circuits and systems (NEMX), as exemplified by firstly the uncovering of their origins, impetus and motivation, and secondly by developing an understanding of their device physics, including, the topics of actuation, mechanical vibration and sensing. Next the fundamentals of key devices, namely, MEMS/NEMS switches, varactors and resonators are covered, including a wide range of implementations. The book then looks at their energy supply via energy harvesting, as derived from wireless energy and mechanical vibrations. Finally, after an introduction to the fundamentals of IoT networks and nodes, the book concludes with an exploration of how the NEMX components are encroaching in a variety of emerging IoT applications.

Design, Test, and Microfabrication of MEMS and MOEMS

Author : Bernard Courtois
Publisher : Unknown
Page : 694 pages
File Size : 53,8 Mb
Release : 1999
Category : Computer-aided design
ISBN : UOM:39015042993801

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Design, Test, and Microfabrication of MEMS and MOEMS by Bernard Courtois Pdf

Lecture series

Author : Anonim
Publisher : Unknown
Page : 492 pages
File Size : 47,7 Mb
Release : 2002
Category : Fluid dynamic measurements
ISBN : UOM:39015047904423

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Lecture series by Anonim Pdf

Analysis and Design Principles of MEMS Devices

Author : Minhang Bao
Publisher : Elsevier
Page : 328 pages
File Size : 43,7 Mb
Release : 2005-04-12
Category : Technology & Engineering
ISBN : 008045562X

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Analysis and Design Principles of MEMS Devices by Minhang Bao Pdf

Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book.

Toward Prediction of MEMS Performance

Author : Erin E. Flater
Publisher : Unknown
Page : 226 pages
File Size : 55,7 Mb
Release : 2006
Category : Electronic
ISBN : WISC:89095252482

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Toward Prediction of MEMS Performance by Erin E. Flater Pdf

The Europa Year Book

Author : Anonim
Publisher : Unknown
Page : 1606 pages
File Size : 50,7 Mb
Release : 1988
Category : Almanacs
ISBN : 0946653410

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The Europa Year Book by Anonim Pdf

Dissertation Abstracts International

Author : Anonim
Publisher : Unknown
Page : 800 pages
File Size : 40,5 Mb
Release : 2008
Category : Dissertations, Academic
ISBN : STANFORD:36105132702577

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Dissertation Abstracts International by Anonim Pdf

Mechanics of Microelectromechanical Systems

Author : Nicolae Lobontiu,Ephrahim Garcia
Publisher : Springer Science & Business Media
Page : 415 pages
File Size : 54,8 Mb
Release : 2006-01-16
Category : Technology & Engineering
ISBN : 9780387230375

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Mechanics of Microelectromechanical Systems by Nicolae Lobontiu,Ephrahim Garcia Pdf

This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer’s viewpoint as devices that transform an input form of energy, such as thermal, electrostatic, electromagnetic or optical, into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion, into (generally) electric energy. The impetus of this proposal stems from the perception that such an approach might contribute to a more solid understanding of the principles governing the mechanics of MEMS, and would hopefully enhance the efficiency of modeling and designing reliable and desirably-optimized microsystems. The work represents an attempt at both extending and deepening the mechanical-based approach to MEMS in the static domain by providing simple, yet reliable tools that are applicable to micromechanism design through current fabrication technologies. Lumped-parameter stiffness and compliance properties of flexible components are derived both analytically (as closed-form solutions) and as simplified (engineering) formulas. Also studied are the principal means of actuation/sensing and their integration into the overall microsystem. Various examples of MEMS are studied in order to better illustrate the presentation of the different modeling principles and algorithms. Through its objective, approach and scope, this book offers a novel and systematic insight into the MEMS domain and complements existing work in the literature addressing part of the material developed herein.