A User S Guide To Ellipsometry

Author : Harland G. Tompkins
Publisher : Courier Corporation
Page : 496 pages
File Size : 50,8 Mb
Release : 2013-03-21
Category : Technology & Engineering
ISBN : 9780486151922

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A User's Guide to Ellipsometry by Harland G. Tompkins Pdf

This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry — particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth. A User's Guide to Ellipsometry will enable readers to move beyond limited turn-key applications of ellipsometers. In addition to its comprehensive discussions of the measurement of film thickness and optical constants in film, it also considers the trajectories of the ellipsometric parameters Del and Psi and how changes in materials affect parameters. This volume also addresses the use of polysilicon, a material commonly employed in the microelectronics industry, and the effects of substrate roughness. Three appendices provide helpful references.

Author : Harland G. Tompkins,William A. McGahan
Publisher : Wiley-Interscience
Page : 0 pages
File Size : 51,7 Mb
Release : 1999-03-18
Category : Science
ISBN : 0471181722

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Spectroscopic Ellipsometry and Reflectometry by Harland G. Tompkins,William A. McGahan Pdf

While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.

Author : Harland G. Tompkins,James N. Hilfiker
Publisher : Momentum Press
Page : 178 pages
File Size : 40,9 Mb
Release : 2015-12-16
Category : Technology & Engineering
ISBN : 9781606507285

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Spectroscopic Ellipsometry by Harland G. Tompkins,James N. Hilfiker Pdf

Ellipsometry is an experimental technique for determining the thickness and optical properties of thin films. It is ideally suited for films ranging in thickness from sub-nanometer to several microns. Spectroscopic measurements have greatly expanded the capabilities of this technique and introduced its use into all areas where thin films are found: semiconductor devices, flat panel and mobile displays, optical coating stacks, biological and medical coatings, protective layers, and more. While several scholarly books exist on the topic, this book provides a good introduction to the basic theory of the technique and its common applications. The target audience is not the ellipsometry scholar, but process engineers and students of materials science who are experts in their own fields and wish to use ellipsometry to measure thin film properties without becoming an expert in ellipsometry itself.

Author : Hiroyuki Fujiwara
Publisher : John Wiley & Sons
Page : 388 pages
File Size : 42,8 Mb
Release : 2007-09-27
Category : Technology & Engineering
ISBN : 0470060182

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Spectroscopic Ellipsometry by Hiroyuki Fujiwara Pdf

Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.

Author : Norbert G. H. Meyendorf,Peter B. Nagy,Stanislav I. Rokhlin
Publisher : Springer Science & Business Media
Page : 435 pages
File Size : 47,7 Mb
Release : 2013-11-21
Category : Science
ISBN : 9783662089880

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Nondestructive Materials Characterization by Norbert G. H. Meyendorf,Peter B. Nagy,Stanislav I. Rokhlin Pdf

With an emphasis on aircraft materials, this book describes techniques for the material characterization to detect and quantify degradation processes such as corrosion and fatigue. It introduces readers to these techniques based on x-ray, ultrasonic, optical and thermal principles and demonstrates the potential of the techniques for a wide variety of applications concerning aircraft materials, especially aluminum and titanium alloys. The advantages and disadvantages of various techniques are evaluated.

Author : Mahmood Aliofkhazraei,Ali Nasar,Mircea Chipara,Nadhira Bensaada Laidani,Jeff Th.M. De Hosson
Publisher : Elsevier
Page : 500 pages
File Size : 50,5 Mb
Release : 2021-03-06
Category : Science
ISBN : 9780444632456

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Handbook of Modern Coating Technologies by Mahmood Aliofkhazraei,Ali Nasar,Mircea Chipara,Nadhira Bensaada Laidani,Jeff Th.M. De Hosson Pdf

Handbook of Modern Coating Technologies: Advanced Characterization Methods reviews advanced characterization methods of modern coating technologies. The topics in this volume consist of scanning vibrating electrode technique, spectroscopic ellipsometry, advances in X-ray diffraction, neutron reflectivity, micro- and nanoprobes, fluorescence technique, stress measurement methods in thin films, micropotentiometry, and localized corrosion studies.

Author : Karsten Hinrichs,Klaus-Jochen Eichhorn
Publisher : Springer
Page : 547 pages
File Size : 51,7 Mb
Release : 2018-05-06
Category : Science
ISBN : 9783319758954

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Ellipsometry of Functional Organic Surfaces and Films by Karsten Hinrichs,Klaus-Jochen Eichhorn Pdf

This new edition provides a state-of-the-art survey of ellipsometric methods used to study organic films and surfaces, from laboratory to synchrotron applications, with a special focus on in-situ use in processing environments and at solid-liquid interfaces. Thanks to the development of functional organic, meta- and hybrid materials for new optical, electronic, sensing and biotechnological devices, the ellipsometric analysis of optical and material properties has made tremendous strides over the past few years. The second edition has been updated to reflect the latest advances in ellipsometric methods. The new content focuses on the study of anisotropic materials, conjugated polymers, polarons, self-assembled monolayers, industrial membranes, adsorption of proteins, enzymes and RGD-peptides, as well as the correlation of ellipsometric spectra to structure and molecular interactions.

Author : Mark Goorsky
Publisher : BoD – Books on Demand
Page : 452 pages
File Size : 53,7 Mb
Release : 2012-05-30
Category : Science
ISBN : 9789535106340

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Ion Implantation by Mark Goorsky Pdf

Ion implantation presents a continuously evolving technology. While the benefits of ion implantation are well recognized for many commercial endeavors, there have been recent developments in this field. Improvements in equipment, understanding of beam-solid interactions, applications to new materials, improved characterization techniques, and more recent developments to use implantation for nanostructure formation point to new directions for ion implantation and are presented in this book.

Author : Rointan Framroze Bunshah
Publisher : William Andrew
Page : 888 pages
File Size : 49,8 Mb
Release : 1994
Category : Science
ISBN : 9780815513377

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Handbook of Deposition Technologies for Films and Coatings by Rointan Framroze Bunshah Pdf

This second edition, edited by the world-renowned Dr. Rointain Bunshah, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. Considerably more material was added in Plasma Assisted Vapor Deposition processes, as well as Metallurgical Coating Applications.

Author : Rointan F. Bunshah
Publisher : William Andrew
Page : 887 pages
File Size : 50,5 Mb
Release : 1994-12-31
Category : Science
ISBN : 9780815517467

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Handbook of Deposition Technologies for Films and Coatings by Rointan F. Bunshah Pdf

This second edition, edited by the world-renowned Dr. Rointain Bunshah, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. Considerably more material was added in Plasma Assisted Vapor Deposition processes, as well as Metallurgical Coating Applications.

Author : Kambiz Vafai
Publisher : CRC Press
Page : 602 pages
File Size : 40,7 Mb
Release : 2010-08-24
Category : Medical
ISBN : 9781420065428

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Porous Media by Kambiz Vafai Pdf

Presenting state-of-the-art research advancements, Porous Media: Applications in Biological Systems and Biotechnology explores innovative approaches to effectively apply existing porous media technologies to biomedical applications. In each peer-reviewed chapter, world-class scientists and engineers collaborate to address significant problems and d

Author : R. M. A. Azzam,N. M. Bashara
Publisher : North Holland
Page : 570 pages
File Size : 54,9 Mb
Release : 1987
Category : Science
ISBN : UOM:39015051240185

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Ellipsometry and Polarized Light by R. M. A. Azzam,N. M. Bashara Pdf

Ellipsometry is a unique optical technique of great sensitivity for in situ non-destructive characterization of surface (inter-facial) phenomena (reactions) utilizing the change in the state of polarization of a light-wave probe. Although known for almost a century, the use of ellipsometry has increased rapidly in the last two decades. Among the most significant recent developments are new applications, novel and automated instrumentation and techniques for error-free data analysis. This book provides the necessary analytical and experimental tools needed for competent understanding and use of these developments. It is directed to those who are already working in the field and, more importantly, to the newcomer who would otherwise have to sift through several hundred published papers. The authors first present a comprehensive study of the different mathematical representations of polarized light and how such light is processed by optical systems, going on to show how these tools are applied to the analysis of ellipsometer systems. To relate ellipsometric measurements to surface properties, use is then made of electromagnetic theory. Experimental techniques and apparatus are described and the many interesting applications of ellipsometry to surface and thin-film phenomena are reviewed. This reference work is addressed to researchers and students with a strong interest in surface and thin-film physics and optics and their applications. It is a must for libraries in the fields of solid state physics, physical chemistry, electro-chemistry, metallurgy and optical engineering.

Author : Michael Bass,Casimer DeCusatis,Jay M. Enoch,Vasudevan Lakshminarayanan,Guifang Li,Carolyn MacDonald,Virendra N. Mahajan,Eric Van Stryland
Publisher : McGraw Hill Professional
Page : 1251 pages
File Size : 49,8 Mb
Release : 2009-10-06
Category : Technology & Engineering
ISBN : 9780071629256

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Handbook of Optics, Third Edition Volume I: Geometrical and Physical Optics, Polarized Light, Components and Instruments(set) by Michael Bass,Casimer DeCusatis,Jay M. Enoch,Vasudevan Lakshminarayanan,Guifang Li,Carolyn MacDonald,Virendra N. Mahajan,Eric Van Stryland Pdf

The most comprehensive and up-to-date optics resource available Prepared under the auspices of the Optical Society of America, the five carefully architected and cross-referenced volumes of the Handbook of Optics, Third Edition, contain everything a student, scientist, or engineer requires to actively work in the field. From the design of complex optical systems to world-class research and development methods, this definitive publication provides unparalleled access to the fundamentals of the discipline and its greatest minds. Individual chapters are written by the world's most renowned experts who explain, illustrate, and solve the entire field of optics. Each volume contains a complete chapter listing for the entire Handbook, extensive chapter glossaries, and a wealth of references. This pioneering work offers unprecedented coverage of optics data, techniques, and applications. Volume I covers geometrical and physical optics, polarized light, components, and instruments.

Author : John H. Moore,Nicholas D. Spencer
Publisher : Taylor & Francis
Page : 1178 pages
File Size : 49,7 Mb
Release : 2001
Category : Chemistry, Physical and theoretical
ISBN : 0750307986

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Encyclopedia of Chemical Physics and Physical Chemistry: Fundamentals by John H. Moore,Nicholas D. Spencer Pdf

Author : Toru Yoshizawa
Publisher : CRC Press
Page : 746 pages
File Size : 55,6 Mb
Release : 2009-02-25
Category : Science
ISBN : 9781420019513

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Handbook of Optical Metrology by Toru Yoshizawa Pdf

The field of optical metrology offers a wealth of both practical and theoretical accomplishments, and can cite any number of academic papers recording such. However, while several books covering specific areas of optical metrology do exist, until the pages herein were researched, written, and compiled, the field lacked for a comprehensive handbook, one providing an overview of optical metrology that covers practical applications as well as fundamentals. Carefully designed to make information accessible to beginners without sacrificing academic rigor, the Handbook of Optical Metrology: Principles and Applications discusses fundamental principles and techniques before exploring practical applications. With contributions from veterans in the field, as well as from up-and-coming researchers, the Handbook offers 30 substantial and well-referenced chapters. In addition to the introductory matter, forward-thinking descriptions are included in every chapter that make this a valuable reference for all those involved with optical metrology.