Development Of High Performance Piezoelectric Alscn For Microelectromechanical Systems Towards A Ferroelectric Wurtzite Structure

Author : Simon Fichtner
Publisher : BoD – Books on Demand
Page : 180 pages
File Size : 52,8 Mb
Release : 2020-02-18
Category : Science
ISBN : 9783750431423

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Development of High Performance Piezoelectric AlScN for Microelectromechanical Systems: Towards a Ferroelectric Wurtzite Structure by Simon Fichtner Pdf

The usage of piezoelectric and ferroelectric thin films is a promising approach to significantly increase the functionality of microelectromechanical systems (MEMS) as well as of microelectronics in general. Since the device performance thus becomes directly connected to the properties of the functional film, new as well as improved piezoelectric and ferroelectric materials can allow substantial technological innovation. This dissertation focused on enhancing the piezoelectric properties of AlN by forming solid solutions with ScN and includes the first experimental observation of ferroelectricity in AlScN, and thus the first discovery of ferroelectricity in a III-V semiconductor based material in general. Compared to AlN, piezoelectric coefficients that are up to 450% higher were realized in AlScN, with d33f reaching a maximum of 17.2 pm/V and e31f reaching 3.2 C/m2. In this context, the identification and subsequent rectification of a major morphological instability in AlScN that becomes more pronounced with increasing Sc content was reported. Thus, films free of morphological inhomogeneities with close to ideal piezoelectric properties could be deposited up to 0.43% ScN. Control of the intrinsic film stress was demonstrated over a wide range from strongly tensile to strongly compressive for all the investigated Sc contents. The improved piezoelectric coefficients together with the possibility of stress control allowed the fabrication of suspended MEMS structures with electromechanical coupling coefficients improved by more than 320% relative to AlN. Ferroelectrictiy in AlScN was observed starting at ScN contents of 27%. Its emergence was connected to the same gradual evolution from the initial wurtzite structure to the layered hexagonal structure that also causes the enhanced piezoelectric coefficients while increasing the Sc content. Ferroelectric AlScN allowed the first experimental observation of the spontaneous polarization of the wurtzite structure and confirms that this polarization is more than one order of magnitude above most previous theoretical predictions. The large, tunable coercive fields and polarization constants together with the broad linear strain intervals, a paraelectric transition temperature above 600°C as well as the technological compatibility of the III-nitrides lead to a combination of exceptional properties that was previously inaccessible in ferroelectric thin films.

Author : Harmeet Bhugra,Gianluca Piazza
Publisher : Springer
Page : 424 pages
File Size : 52,8 Mb
Release : 2017-01-09
Category : Technology & Engineering
ISBN : 9783319286884

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Piezoelectric MEMS Resonators by Harmeet Bhugra,Gianluca Piazza Pdf

This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.

Author : Alper Erturk,Daniel J. Inman
Publisher : John Wiley & Sons
Page : 377 pages
File Size : 50,8 Mb
Release : 2011-04-04
Category : Technology & Engineering
ISBN : 9781119991359

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Piezoelectric Energy Harvesting by Alper Erturk,Daniel J. Inman Pdf

The transformation of vibrations into electric energy through the use of piezoelectric devices is an exciting and rapidly developing area of research with a widening range of applications constantly materialising. With Piezoelectric Energy Harvesting, world-leading researchers provide a timely and comprehensive coverage of the electromechanical modelling and applications of piezoelectric energy harvesters. They present principal modelling approaches, synthesizing fundamental material related to mechanical, aerospace, civil, electrical and materials engineering disciplines for vibration-based energy harvesting using piezoelectric transduction. Piezoelectric Energy Harvesting provides the first comprehensive treatment of distributed-parameter electromechanical modelling for piezoelectric energy harvesting with extensive case studies including experimental validations, and is the first book to address modelling of various forms of excitation in piezoelectric energy harvesting, ranging from airflow excitation to moving loads, thus ensuring its relevance to engineers in fields as disparate as aerospace engineering and civil engineering. Coverage includes: Analytical and approximate analytical distributed-parameter electromechanical models with illustrative theoretical case studies as well as extensive experimental validations Several problems of piezoelectric energy harvesting ranging from simple harmonic excitation to random vibrations Details of introducing and modelling piezoelectric coupling for various problems Modelling and exploiting nonlinear dynamics for performance enhancement, supported with experimental verifications Applications ranging from moving load excitation of slender bridges to airflow excitation of aeroelastic sections A review of standard nonlinear energy harvesting circuits with modelling aspects.

Author : Mario Birkholz
Publisher : John Wiley & Sons
Page : 378 pages
File Size : 49,7 Mb
Release : 2006-05-12
Category : Technology & Engineering
ISBN : 9783527607044

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Thin Film Analysis by X-Ray Scattering by Mario Birkholz Pdf

With contributions by Paul F. Fewster and Christoph Genzel While X-ray diffraction investigation of powders and polycrystalline matter was at the forefront of materials science in the 1960s and 70s, high-tech applications at the beginning of the 21st century are driven by the materials science of thin films. Very much an interdisciplinary field, chemists, biochemists, materials scientists, physicists and engineers all have a common interest in thin films and their manifold uses and applications. Grain size, porosity, density, preferred orientation and other properties are important to know: whether thin films fulfill their intended function depends crucially on their structure and morphology once a chemical composition has been chosen. Although their backgrounds differ greatly, all the involved specialists a profound understanding of how structural properties may be determined in order to perform their respective tasks in search of new and modern materials, coatings and functions. The author undertakes this in-depth introduction to the field of thin film X-ray characterization in a clear and precise manner.

Author : Kenji Uchino
Publisher : Unknown
Page : 128 pages
File Size : 45,6 Mb
Release : 2010
Category : Electronic
ISBN : 1613443811

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Advanced Piezoelectric Materials by Kenji Uchino Pdf

Author : Masanori Okuyama,Yoshihiro Ishibashi
Publisher : Springer Science & Business Media
Page : 272 pages
File Size : 53,9 Mb
Release : 2005-02-22
Category : Computers
ISBN : 3540241639

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Ferroelectric Thin Films by Masanori Okuyama,Yoshihiro Ishibashi Pdf

Ferroelectric thin films continue to attract much attention due to their developing applications in memory devices, FeRAM, infrared sensors, piezoelectric sensors and actuators. This book, aimed at students, researchers and developers, gives detailed information about the basic properties of these materials and the associated device physics. The contributing authors are acknowledged experts in the field.

Author : Mickaël Lallart
Publisher : BoD – Books on Demand
Page : 266 pages
File Size : 50,8 Mb
Release : 2011-08-23
Category : Science
ISBN : 9789533074566

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Ferroelectrics by Mickaël Lallart Pdf

Ferroelectric materials have been and still are widely used in many applications, that have moved from sonar towards breakthrough technologies such as memories or optical devices. This book is a part of a four volume collection (covering material aspects, physical effects, characterization and modeling, and applications) and focuses on the application of ferroelectric devices to innovative systems. In particular, the use of these materials as varying capacitors, gyroscope, acoustics sensors and actuators, microgenerators and memory devices will be exposed, providing an up-to-date review of recent scientific findings and recent advances in the field of ferroelectric devices.

Author : Marin Alexe,Ulrich Gösele
Publisher : Springer Science & Business Media
Page : 510 pages
File Size : 49,7 Mb
Release : 2013-03-09
Category : Science
ISBN : 9783662108277

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Wafer Bonding by Marin Alexe,Ulrich Gösele Pdf

The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration and laser lift-off. The non-specialist will learn about the basics of wafer bonding and its various application areas, while the researcher in the field will find up-to-date information about this fast-moving area, including relevant patent information.

Author : Shad Roundy,Paul Kenneth Wright,Jan M. Rabaey
Publisher : Springer Science & Business Media
Page : 219 pages
File Size : 52,9 Mb
Release : 2012-12-06
Category : Technology & Engineering
ISBN : 9781461504856

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Energy Scavenging for Wireless Sensor Networks by Shad Roundy,Paul Kenneth Wright,Jan M. Rabaey Pdf

The vast reduction in size and power consumption of CMOS circuitry has led to a large research effort based around the vision of wireless sensor networks. The proposed networks will be comprised of thousands of small wireless nodes that operate in a multi-hop fashion, replacing long transmission distances with many low power, low cost wireless devices. The result will be the creation of an intelligent environment responding to its inhabitants and ambient conditions. Wireless devices currently being designed and built for use in such environments typically run on batteries. However, as the networks increase in number and the devices decrease in size, the replacement of depleted batteries will not be practical. The cost of replacing batteries in a few devices that make up a small network about once per year is modest. However, the cost of replacing thousands of devices in a single building annually, some of which are in areas difficult to access, is simply not practical. Another approach would be to use a battery that is large enough to last the entire lifetime of the wireless sensor device. However, a battery large enough to last the lifetime of the device would dominate the overall system size and cost, and thus is not very attractive. Alternative methods of powering the devices that will make up the wireless networks are desperately needed.

Author : Jing-Feng Li
Publisher : John Wiley & Sons
Page : 240 pages
File Size : 42,6 Mb
Release : 2021-07-06
Category : Technology & Engineering
ISBN : 9783527345120

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Lead-Free Piezoelectric Materials by Jing-Feng Li Pdf

Provides in-depth knowledge on lead-free piezoelectrics - for state-of-the-art, environmentally friendly electrical and electronic devices! Lead zirconate titanate ceramics have been market-dominating due to their excellent properties and flexibility in terms of compositional modifications. Driven by the Restriction of Hazardous Substances Directive, there is a growing concern on the toxicity of lead. Therefore, numerous research efforts were devoted to lead-free piezoelectrics from the beginning of this century. Great progress has been made in the development of high-performance lead-free piezoelectric ceramics which are already used, e.g., for power electronics applications. Lead-Free Piezoelectric Materials provides an in-depth overview of principles, material systems, and applications of lead-free piezoelectric materials. It starts with the fundamentals of piezoelectricity and lead-free piezoelectrics. Then it discusses four representative lead-free piezoelectric material systems from background introduction to crystal structures and properties. Finally, it presents several applications of lead-free piezoelectrics including piezoelectric actuators, and transducers. The challenges for promoting applications will also be discussed. Highly attractive: Lead-free piezoelectrics address the growing concerns on exclusion of hazardous substances used in electrical and electronic devices in order to protect human health and the environment Thorough overview: Covers fundamentals, different classes of materials, processing and applications Unique: discusses fundamentals and recent advancements in the field of lead-free piezoelectrics Lead-Free Piezoelectric Materials is of high interest for material scientists, electrical and chemical engineers, solid state chemists and physicists in academia and industry.

Author : Markys G. Cain
Publisher : Springer
Page : 280 pages
File Size : 43,9 Mb
Release : 2014-06-02
Category : Technology & Engineering
ISBN : 9781402093111

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Characterisation of Ferroelectric Bulk Materials and Thin Films by Markys G. Cain Pdf

This book presents a comprehensive review of the most important methods used in the characterisation of piezoelectric, ferroelectric and pyroelectric materials. It covers techniques for the analysis of bulk materials and thick and thin film materials and devices. There is a growing demand by industry to adapt and integrate piezoelectric materials into ever smaller devices and structures. Such applications development requires the joint development of reliable, robust, accurate and – most importantly – relevant and applicable measurement and characterisation methods and models. In the past few years there has been a rapid development of new techniques to model and measure the variety of properties that are deemed important for applications development engineers and scientists. The book has been written by the leaders in the field and many chapters represent established measurement best practice, with a strong emphasis on application of the methods via worked examples and detailed experimental procedural descriptions. Each chapter contains numerous diagrams, images, and measurement data, all of which are fully referenced and indexed. The book is intended to occupy space in the research or technical lab, and will be a valuable and practical resource for students, materials scientists, engineers, and lab technicians.

Author : Stefan Johann Rupitsch
Publisher : Springer
Page : 559 pages
File Size : 44,5 Mb
Release : 2018-07-26
Category : Technology & Engineering
ISBN : 9783662575345

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Piezoelectric Sensors and Actuators by Stefan Johann Rupitsch Pdf

This book introduces physical effects and fundamentals of piezoelectric sensors and actuators. It gives a comprehensive overview of piezoelectric materials such as quartz crystals and polycrystalline ceramic materials. Different modeling approaches and methods to precisely predict the behavior of piezoelectric devices are described. Furthermore, a simulation-based approach is detailed which enables the reliable characterization of sensor and actuator materials. One focus of the book lies on piezoelectric ultrasonic transducers. An optical approach is presented that allows the quantitative determination of the resulting sound fields. The book also deals with various applications of piezoelectric sensors and actuators. In particular, the studied application areas are · process measurement technology, · ultrasonic imaging, · piezoelectric positioning systems and · piezoelectric motors. The book addresses students, academic as well as industrial reseachers and development engineers who are concerned with piezoelectric sensors and actuators.

Author : Alexander A. Demkov,Agham B. Posadas
Publisher : Springer Science & Business Media
Page : 278 pages
File Size : 55,5 Mb
Release : 2014-02-20
Category : Technology & Engineering
ISBN : 9781461493204

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Integration of Functional Oxides with Semiconductors by Alexander A. Demkov,Agham B. Posadas Pdf

This book describes the basic physical principles of the oxide/semiconductor epitaxy and offers a view of the current state of the field. It shows how this technology enables large-scale integration of oxide electronic and photonic devices and describes possible hybrid semiconductor/oxide systems. The book incorporates both theoretical and experimental advances to explore the heteroepitaxy of tuned functional oxides and semiconductors to identify material, device and characterization challenges and to present the incredible potential in the realization of multifunctional devices and monolithic integration of materials and devices. Intended for a multidisciplined audience, Integration of Functional Oxides with Semiconductors describes processing techniques that enable atomic-level control of stoichiometry and structure and reviews characterization techniques for films, interfaces and device performance parameters. Fundamental challenges involved in joining covalent and ionic systems, chemical interactions at interfaces, multi-element materials that are sensitive to atomic-level compositional and structural changes are discussed in the context of the latest literature. Magnetic, ferroelectric and piezoelectric materials and the coupling between them will also be discussed. GaN, SiC, Si, GaAs and Ge semiconductors are covered within the context of optimizing next-generation device performance for monolithic device processing.

Author : J. Keith Nelson
Publisher : Springer Science & Business Media
Page : 374 pages
File Size : 51,7 Mb
Release : 2009-12-17
Category : Technology & Engineering
ISBN : 9781441915917

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Dielectric Polymer Nanocomposites by J. Keith Nelson Pdf

Dielectric Polymer Nanocomposites provides the first in-depth discussion of nano-dielectrics, an emerging and fast moving topic in electrical insulation. The text begins with an overview of the background, principles and promise of nanodielectrics, followed by a discussion of the processing of nanocomposites and then proceeds with special considerations of clay based processes, mechanical, thermal and electric properties and surface properties as well as erosion resistance. Carbon nanotubes are discussed as a means of creation of non linear conductivity, the text concludes with a industrial applications perspective.

Author : Gianni Ciofani,Arianna Menciassi
Publisher : Springer Science & Business Media
Page : 250 pages
File Size : 45,8 Mb
Release : 2012-03-31
Category : Technology & Engineering
ISBN : 9783642280443

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Piezoelectric Nanomaterials for Biomedical Applications by Gianni Ciofani,Arianna Menciassi Pdf

Nanoscale structures and materials have been explored in many biological applications because of their novel and impressive physical and chemical properties. Such properties allow remarkable opportunities to study and interact with complex biological processes. This book analyses the state of the art of piezoelectric nanomaterials and introduces their applications in the biomedical field. Despite their impressive potentials, piezoelectric materials have not yet received significant attention for bio-applications. This book shows that the exploitation of piezoelectric nanoparticles in nanomedicine is possible and realistic, and their impressive physical properties can be useful for several applications, ranging from sensors and transducers for the detection of biomolecules to “sensible” substrates for tissue engineering or cell stimulation.